Pneumatic valve and fluid supply equipment

Abstract

The utility model discloses a pneumatic valve and a fluid supply device, and the pneumatic valve comprises a fluid channel which comprises a first channel and a second channel, and in a one-way circulation mode, fluid flows forwards from the outlet end of the first channel to the inlet end of the second channel; the circulation mode control device is arranged at the communication position of the first channel and the second channel, and the circulation mode control device comprises a one-way check valve and a two-way channel controller; the one-way check valve at least comprises a valve element arranged at the inlet end of the second channel, and the valve element is used for blocking the first channel and the second channel when fluid reversely flows back in a one-way circulation mode. The two-way channel controller is used for controlling the valve element to be in a normally-open state in a two-way circulation mode so that the first channel and the second channel can be communicated. Through the one-way check valve and the two-way channel controller, the pneumatic valve has a one-way circulation mode and a two-way circulation mode, and the functionality of the pneumatic valve is improved.

Description

Technical Field

[0001] This utility model relates to the field of pneumatic valves, and more particularly to a pneumatic valve and fluid supply equipment. Background Technology

[0002] Pneumatic valves, as core actuators in fluid control systems, are widely used in semiconductor manufacturing, industrial automation, engineering machinery, aerospace, and other technological fields. As industrial equipment becomes more multifunctional and integrated, the traditional unidirectional or bidirectional flow patterns of pneumatic valves are no longer sufficient to meet the demands of complex operating conditions.

[0003] In the current market, one-way pneumatic valves have a reverse shut-off function but cannot achieve bidirectional flow; two-way flow valves have the function of forward and reverse flow of fluid, but lack a reverse shut-off protection mechanism.

[0004] Therefore, how to enable pneumatic valves to simultaneously possess the functions of reverse shut-off and bidirectional flow has become an urgent problem to be solved. Utility Model Content

[0005] The problem solved by this utility model embodiment is to provide a pneumatic valve and fluid supply device to improve the functionality of the pneumatic valve.

[0006] To address the aforementioned problems, this utility model provides a pneumatic valve, comprising: a fluid channel including a first channel and a second channel, wherein in the unidirectional flow mode, fluid flows forward from the outlet end of the first channel to the inlet end of the second channel; a flow mode control device disposed at the connection position of the first channel and the second channel, the flow mode control device including a one-way check valve and a two-way flow controller; the one-way check valve includes at least a valve core disposed at the inlet end of the second channel, the valve core being used to block the first channel and the second channel when the fluid flows back in the reverse direction in the unidirectional flow mode; the two-way flow controller being used to control the valve core to be in a normally open state in the two-way flow mode, so as to connect the first channel and the second channel.

[0007] Optionally, the fluid channel further includes a connecting channel, wherein the outlet end of the first channel and the inlet end of the second channel are connected through the connecting channel, wherein the connecting channel includes adjacent first connecting sections and second connecting sections, the outlet end of the first channel is connected to the first connecting section, and the inlet end of the second channel is connected to the second connecting section; the valve core is slidably disposed in the second connecting section, and the valve core is used to move away from the first connecting section in the unidirectional flow mode when the fluid flows in the forward direction to connect the outlet end of the first channel and the inlet end of the second channel, and to block the second channel and the first connecting section when the fluid flows back in the reverse direction; the bidirectional flow controller includes at least a pushing part, the pushing part is slidably disposed in the first connecting section, and the pushing part is used to push the valve core to move away from the first connecting section in the bidirectional flow mode and control the valve core to be normally open, so that the first channel, the connecting channel and the second channel are connected.

[0008] Optionally, the one-way check valve further includes a spring, the first end of which is fixed to the end of the second connection section away from the first connection section, and the second end of which is fixed to the valve core.

[0009] Optionally, the pneumatic valve further includes: a structural body having the fluid channel; a first through hole penetrating the side wall of the structural body and communicating with the end of the second connecting section away from the first connecting section; a first sealing cover disposed in the first through hole and sealing the first through hole; and a first end of the spring fixed to the first sealing cover.

[0010] Optionally, the diameter of the first through hole is larger than the diameter of the second connecting section; the pneumatic valve further includes: a first sealing gasket, disposed between the end face of the second connecting section exposed by the first through hole and the first sealing cover.

[0011] Optionally, the valve core has a blind hole at the end facing away from the first connecting section, and the second end of the spring is located in the blind hole.

[0012] Optionally, the aperture of the first connecting section is smaller than that of the second connecting section, and the end face of the first connecting section exposed by the second connecting section serves as the limiting portion of the valve core; the valve core is used to abut against the limiting portion when the fluid flows back, so as to block the fluid passage.

[0013] Optionally, the pneumatic valve further includes a pneumatic control unit movement channel, and the bidirectional path controller further includes a first pneumatic control unit connected to one end of the pusher; the pneumatic control unit movement channel is connected to the end of the first connecting section away from the second connecting section, the aperture of the pneumatic control unit movement channel is larger than the aperture of the first connecting section, and the end face of the first connecting section exposed by the pneumatic control unit movement channel serves as a limiting part of the first pneumatic control unit; the first pneumatic control unit is disposed in the pneumatic control unit movement channel and is used to drive the pusher to move toward the second connecting section under the pressure of the driving gas.

[0014] Optionally, the pneumatic valve further includes: a structural body having the fluid input channel and a fluid channel; a second through hole penetrating the side wall of the structural body and communicating with the end of the pneumatic control unit's movement channel away from the first connecting section; and a second sealing cover disposed in the second through hole, wherein the second sealing cover seals the second through hole.

[0015] Optionally, the diameter of the second through hole is larger than the diameter of the movement channel of the pneumatic control unit; the pneumatic valve further includes: a second sealing gasket, disposed between the end face of the movement channel of the pneumatic control unit exposed by the second through hole and the second sealing cover.

[0016] Optionally, the pneumatic valve further includes: an instrument air passage, which is connected to the movement passage of the pneumatic control unit and located on the side of the first pneumatic control unit away from the first connection section, for providing the driving gas to the movement passage of the pneumatic control unit.

[0017] Optionally, a gap is provided between the sidewall of the pusher and the outlet end of the first channel for the fluid to pass through.

[0018] Optionally, the pushing part satisfies at least one of the following conditions: the diameter of the pushing part is smaller than the aperture of the first connecting section; the sidewall of the pushing part abuts against the outlet end of the first channel, and the sidewall of the pushing part has a groove, the outlet end of the first channel is connected to the first connecting section through the groove, and the groove is used for the fluid to pass through.

[0019] Optionally, the fluid channel further includes a third channel, and the third channel, the first channel, and the second channel constitute a fluid passage; the pneumatic valve further includes a second pneumatic control unit; the second pneumatic control unit is disposed at the connection position between the third channel and the first channel, and is used to control the on / off connection between the third channel and the first channel to conduct or block the fluid passage.

[0020] Accordingly, this utility model embodiment also provides a fluid supply device, including the pneumatic valve described in any embodiment of this utility model.

[0021] Optionally, the fluid supply device includes a gas holder.

[0022] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:

[0023] The pneumatic valve provided in this embodiment of the invention has a unidirectional flow mode and a bidirectional flow mode. The pneumatic valve includes: a fluid channel, comprising a first channel and a second channel; in the unidirectional flow mode, fluid flows forward from the outlet end of the first channel to the inlet end of the second channel; a flow mode control device is disposed at the connection point of the first channel and the second channel, the flow mode control device including a one-way check valve and a bidirectional flow controller; the one-way check valve includes at least a valve core disposed at the inlet end of the second channel, the valve core being used to block the first channel and the second channel when the fluid flows back in the reverse direction in the unidirectional flow mode; the bidirectional flow controller is used to control the valve core to be in a normally open state in the bidirectional flow mode. This allows the first and second channels to be connected. A one-way check valve allows the first and second channels to be connected if fluid flows from the outlet of the first channel to the inlet of the second channel. If fluid flows from the second channel (i.e., backflow occurs), the check valve blocks the flow, thus achieving the one-way check function of the pneumatic valve. Furthermore, a bidirectional flow controller is used to control the valve core to be normally open in bidirectional flow mode, allowing the first and second channels to be connected, which facilitates the bidirectional flow function of the pneumatic valve. In summary, by setting a one-way check valve and a bidirectional flow controller at the connection point of the first and second channels, the pneumatic valve has both one-way and bidirectional flow modes, improving its functionality.

[0024] In an optional embodiment, the fluid channel further includes a connecting channel, wherein the outlet end of the first channel and the inlet end of the second channel are connected through the connecting channel. The connecting channel includes adjacent first and second connecting sections, with the outlet end of the first channel connected to the first connecting section and the inlet end of the second channel connected to the second connecting section. The valve core is slidably disposed in the second connecting section. The valve core is used in the unidirectional flow mode to move away from the first connecting section when the fluid flows in the forward direction, thereby connecting the outlet end of the first channel and the inlet end of the second channel, and to block the second channel and the first connecting section when the fluid flows in the reverse direction. The bidirectional flow controller includes at least a pushing part, which is slidably disposed in the... In the first connecting section, the pushing part is used to push the valve core to move away from the first connecting section in the bidirectional flow mode and control the valve core to be normally open, so that the first channel, the connecting channel and the second channel are connected; wherein, if fluid flows in from the second channel (that is, fluid backflow occurs), the valve core cannot be moved because the fluid flowing in the opposite direction, thereby blocking the second channel and the first connecting section when the fluid backflows, which is beneficial to realizing the one-way check function of the pneumatic valve; in addition, the pushing part is used to push the valve core to move away from the first connecting section in the bidirectional flow mode, so that the first channel, the connecting channel and the second channel are connected, thereby making it easy to realize the bidirectional fluid flow function of the pneumatic valve.

[0025] In an optional embodiment, the pneumatic valve further includes an instrument air passage, connected to the movement channel of the pneumatic control unit, and located on the side of the first pneumatic control unit away from the first connecting section, for introducing the driving gas into the movement channel of the pneumatic control unit. The driving gas provided by the instrument air passage pushes the first pneumatic control unit toward the first connecting section, causing the pushing part to contact and push the valve core, thereby connecting the second channel and the control channel, thus enabling the fluid channel to be open and facilitating the bidirectional fluid flow function of the pneumatic valve.

[0026] Accordingly, this utility model embodiment provides a fluid supply device, which includes the pneumatic valve described in this utility model embodiment. Since the pneumatic valve has a one-way backflow prevention function, it effectively suppresses the problem that the fluid supply device cannot maintain negative pressure after internal leakage of the pneumatic valve. Since the pneumatic valve has a two-way flow function, it is beneficial to realize the function of fluid circulation in the fluid supply device, thereby enhancing the performance of the fluid supply device. Attached Figure Description

[0027] Figure 1This is a cross-sectional schematic diagram of an exploded view of a pneumatic valve according to an embodiment of the present invention;

[0028] Figure 2 yes Figure 1 A cross-sectional view of an embodiment of the pneumatic valve in the forward flow state;

[0029] Figure 3 yes Figure 1 A cross-sectional view of an embodiment of the pneumatic valve in the reverse shut-off state.

[0030] Figure 4 yes Figure 1 A cross-sectional view of an embodiment of the pneumatic valve in a bidirectional flow state. Detailed Implementation

[0031] As can be seen from the background technology, how to enable pneumatic valves to have reverse shut-off and bidirectional flow functions has become an urgent problem to be solved.

[0032] To address the aforementioned technical problems, this utility model provides a pneumatic valve, comprising: a fluid channel including a first channel and a second channel, wherein in the unidirectional flow mode, fluid flows forward from the outlet end of the first channel to the inlet end of the second channel; a flow mode control device disposed at the connection position of the first channel and the second channel, the flow mode control device including a one-way check valve and a two-way flow controller; the one-way check valve includes at least a valve core disposed at the inlet end of the second channel, the valve core being used to block the first channel and the second channel when the fluid flows back in the reverse direction in the unidirectional flow mode; the two-way flow controller being used to control the valve core to be in a normally open state in the two-way flow mode, so as to connect the first channel and the second channel.

[0033] By using a one-way check valve, if fluid flows from the outlet end of the first channel to the inlet end of the second channel, the first and second channels are connected. If fluid flows from the second channel (i.e., backflow occurs), the one-way check valve blocks the first and second channels, thus realizing the one-way check function of the pneumatic valve. In addition, a two-way flow controller is used to control the valve core to be in the normally open state in the two-way flow mode, so that the first and second channels are connected, which is beneficial to realizing the two-way fluid flow function of the pneumatic valve. In summary, by setting a one-way check valve and a two-way flow controller at the connection position of the first and second channels, the pneumatic valve has both one-way and two-way flow modes, improving the functionality of the pneumatic valve.

[0034] To make the above-mentioned objectives, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0035] Figure 1 This is a cross-sectional view of a pneumatic valve according to an embodiment of the present invention. Figure 2 yes Figure 1 The diagram shows a cross-sectional view of an embodiment of the pneumatic valve in the forward flow state. Figure 3 yes Figure 1 A cross-sectional view of one embodiment of the pneumatic valve in the reverse shut-off state. Figure 4 yes Figure 1 A cross-sectional view of an embodiment of the pneumatic valve in a bidirectional flow state.

[0036] It should be noted that, Figure 2 , Figure 3 and Figure 4 The direction of fluid flow is indicated by dashed arrows.

[0037] The pneumatic valve of this utility model embodiment has a unidirectional flow mode and a bidirectional flow mode.

[0038] In this embodiment, the pneumatic valve includes: a fluid channel 10, including a first channel 11 and a second channel 12, wherein in the unidirectional flow mode, fluid flows forward from the outlet end 112 of the first channel 11 to the inlet end 121 of the second channel 12; a flow mode control device (not shown), disposed at the connection position of the first channel 11 and the second channel 12, the flow mode control device including a one-way check valve 20 and a two-way flow controller 30; the one-way check valve 20 includes at least a valve core 21 disposed at the inlet end 121 of the second channel 12, the valve core 21 being used to block the first channel 11 and the second channel 12 when the fluid flows back in the reverse direction in the unidirectional flow mode; the two-way flow controller 30 being used to control the valve core 21 to be in a normally open state in the two-way flow mode, so that the first channel 11 and the second channel 12 are connected.

[0039] It should be noted that if the fluid flows from the outlet 112 of the first channel 11 to the inlet 121 of the second channel 12, the flow direction is forward flow. If the fluid flows from the second channel 12 into the pneumatic valve, the flow direction is reverse flow (that is, the fluid flows back).

[0040] In this embodiment, the fluid channel 10 further includes a third channel 100, and the third channel 100, the first channel 11 and the second channel 12 constitute a fluid passage.

[0041] The third channel 100 is used to provide a passage for fluid to enter the pneumatic valve.

[0042] In this embodiment, the fluid channel includes a fluid input channel (not shown) and a fluid output channel (not shown). The fluid input channel includes the third channel 100, and the fluid output channel includes the first channel 11 and the second channel 12.

[0043] In the forward flow state, the fluid enters the pneumatic valve through the fluid input channel and flows out of the pneumatic valve through the fluid output channel.

[0044] In this embodiment, the fluid is a gas. In other embodiments, the fluid may also be a liquid.

[0045] In this embodiment, the fluid channel 10 further includes a connecting channel 13, wherein the outlet end 112 of the first channel 11 and the inlet end 121 of the second channel 12 are connected through the connecting channel 13; wherein the connecting channel 13 includes an adjacent first connecting section 14 and a second connecting section 15, the outlet end 112 of the first channel 11 is connected to the first connecting section 14, and the inlet end 121 of the second channel 12 is connected to the second connecting section 15.

[0046] The connection channel 13 is used to provide space for the setting of the flow mode control device.

[0047] The flow mode control device includes a one-way check valve 20 and a two-way flow controller 30, which enables the pneumatic valve to have a one-way flow mode and a two-way flow mode. Accordingly, the pneumatic valve can realize the control function of one-way flow or two-way flow according to functional needs, thereby improving the functionality of the pneumatic valve.

[0048] Specifically, through the one-way check valve 20, if fluid flows in from the fluid input channel, the first channel 11 and the second channel 12 are connected; if fluid flows in from the second channel 12 (i.e., fluid backflow occurs), the one-way check valve 20 blocks the fluid channel 10, thereby realizing the one-way check function of the pneumatic valve. In addition, the bidirectional flow controller 30 is used to control the one-way check valve 20 to be in the normally open state in the bidirectional flow mode, so that the first channel 11 and the second channel 12 are connected, thereby enabling the fluid channel 10 to be connected, which is beneficial to realizing the bidirectional flow function of the pneumatic valve. In summary, by setting the one-way check valve 20 and the bidirectional flow controller 30 at the connection position of the first channel 11 and the second channel 12, the pneumatic valve has both one-way flow mode and bidirectional flow mode, improving the functionality of the pneumatic valve.

[0049] Correspondingly, in the one-way flow mode, the pneumatic valve can achieve the one-way backflow prevention function through the one-way check valve 20. Therefore, even if the pneumatic valve has an internal leakage problem, it can prevent gas from leaking back slightly.

[0050] In this embodiment, the one-way check valve 20 can control the opening and closing between the second channel 12 and the connecting channel 13 in the one-way flow mode, and in the one-way flow mode, it blocks the second channel 12 and the connecting channel 13 when the fluid is flowing back, and opens the second channel 12 and the connecting channel 13 when the fluid is flowing forward.

[0051] In this embodiment, the one-way check valve 20 includes at least a valve core 21 disposed at the inlet end 121 of the second channel 12, and the valve core 21 is slidably disposed in the second connecting section 15. The valve core 21 is used to move away from the first connecting section 14 in the one-way flow mode when the fluid is flowing in the forward direction, so as to connect the outlet end 112 of the first channel 11 and the inlet end 121 of the second channel 12, and to block the second channel 12 and the first connecting section 14 when the fluid is flowing back.

[0052] In this embodiment, the bidirectional flow controller 30 includes at least a pushing part 31 slidably disposed in the first connecting section 14. The pushing part 31 is used to push the valve core 21 to move in a direction away from the first connecting section 14 in the bidirectional flow mode and control the valve core 21 to be normally open, so that the first connecting section 14, the connecting channel 13 and the second channel 12 are connected, thereby obtaining a through fluid passage.

[0053] If fluid flows in from the second channel 12, the valve core 21 cannot be moved due to the reverse flow of fluid, thus blocking the second channel 12 and the connecting channel 13 during fluid recirculation, which is beneficial to realizing the one-way check function of the pneumatic valve. In addition, the pushing part 31 is used to push the valve core 21 to move in the bidirectional flow mode so that the second channel 12 and the connecting channel 13 are connected, thereby making the fluid channel 10 connected, which is beneficial to realizing the bidirectional flow function of the pneumatic valve.

[0054] It should be noted that by using valve core 21 and pusher 31, the complexity of controlling the flow pattern of the pneumatic valve is reduced.

[0055] In this embodiment, the one-way check valve 20 further includes a spring 22. The first end 221 of the spring 22 is fixed to the end of the second connecting section 15 away from the first connecting section 14, and the second end 222 of the spring 22 is fixed to the valve core 21.

[0056] The spring 22 is used to control the movement of the valve core 21.

[0057] refer to Figure 2When the pneumatic valve is in the forward flow state of the one-way flow mode, the fluid enters the first connecting section 14 through the first channel 11, forming air pressure on the end face of the valve core 21. The pressure compresses the spring 22 to contract. The spring 22 drives the valve core 21 to move away from the first connecting section 14 through the second end 222 fixed on the valve core 21, thereby making the first connecting section 14 connected to the second channel 12, which is beneficial to realizing the one-way flow function of the pneumatic valve.

[0058] refer to Figure 3 When the pneumatic valve is in the reverse flow state of the one-way flow mode, the fluid enters the second connection section 15 through the second channel 12. The flow direction of the fluid is towards the side wall of the valve core 21. Therefore, the reverse flow of fluid cannot exert pressure on the surface of the valve core 21 in the direction of the elastic deformation of the spring 22, and cannot push the spring 22 to contract. This blocks the first connection section 14 and the second channel 12 when the fluid flows back, which is beneficial to realizing the one-way check function of the pneumatic valve.

[0059] In this embodiment, the valve core 21 has a blind hole (not shown) at the end facing away from the first connecting section 14, and the second end 222 of the spring 22 is located in the blind hole.

[0060] The spring 22 is disposed in the blind hole, and the spring 22 is in direct contact with the inner wall of the blind hole of the valve core 21. This avoids the existence of a buffer area between the inner wall of the blind hole of the valve core 21 and the second end 222 of the spring 22, which is beneficial to improving the force-bearing effect of the spring 22. Thus, when the surface of the valve core 21 is subjected to pressure, it is beneficial to improve the sensitivity of the spring 22 to elastic deformation.

[0061] In other embodiments, the end of the valve core facing away from the first connecting section may not have a blind hole, and the second end of the spring is fixed to the end of the valve core facing away from the first connecting section.

[0062] In other embodiments, the spring may also be located at other positions on the valve core.

[0063] In this embodiment, the aperture of the first connecting section 14 is smaller than the aperture of the second connecting section 15, and the end face of the first connecting section 14 exposed by the second connecting section 15 serves as the limiting part 24 of the valve core 21.

[0064] The valve core 21 is used to abut against the limiting part 24 when the fluid flows back, so as to block the fluid passage.

[0065] In this embodiment, the outer diameter of the valve core 21 at the end facing the first connecting section 14 decreases along the direction from the second connecting section 15 to the first connecting section 14, thereby giving the end of the valve core 21 facing the first connecting section 14 an inclined sidewall 211. The minimum outer diameter of the valve core 21 at the position of the inclined sidewall 211 is smaller than the inner diameter of the first connecting section 14, and the maximum outer diameter of the valve core 21 at the position of the inclined sidewall 211 is greater than the inner diameter of the first connecting section 14. This allows the inclined sidewall 211 to abut against the limiting part 24 during fluid backflow, thereby blocking the second channel 12 and the connecting channel 13.

[0066] It should be noted that the end of the valve core 21 facing the first connecting section 14 can be conical or frustum-shaped.

[0067] It should also be noted that in this embodiment, the valve core 21 abuts against the limiting part 24 when the fluid flows back, which can refer to abutting against the edge of the limiting part 24.

[0068] refer to Figure 2 When the pneumatic valve is in the reverse flow state of the one-way flow mode, the inclined sidewall 211 of the valve core 21 abuts against the limiting part 24. A portion of the end of the valve core 21 facing the first connecting section 14 is located in the first connecting section 14, which helps to improve the sealing between the valve core 21 and the limiting part 24, thereby improving the blocking effect of the valve core 21 on the second channel 12 and the connecting channel 13, and further improving the one-way check function of the pneumatic valve.

[0069] In other embodiments, the end of the valve core facing the first connection section may also employ other structural features to abut against the limiting portion.

[0070] In this embodiment, the pneumatic valve further includes: a structural body 101 having the fluid channel 10; a first through hole 41 penetrating the side wall of the structural body 101 and communicating with the end of the second connecting section 15 away from the first connecting section 14; and a first sealing cover 42 disposed in the first through hole 41, sealing the first through hole 41. Correspondingly, the first end 221 of the spring 22 is fixed to the first sealing cover 42.

[0071] The first sealing cap 42 provides fixed support for the first end 221 of the spring 22, preventing the first end 221 from moving simultaneously when the second end 222 of the spring 22, which is located on the valve core 21, is subjected to pressure and moves toward the side away from the first connecting section 14. This facilitates the directional movement of the valve core 21.

[0072] The first sealing cap 41 is used to seal the first through hole 41, effectively suppressing the air leakage problem of the pneumatic valve, which helps to improve the airtightness and safety of the pneumatic valve.

[0073] Furthermore, fixing the one-way check valve to the first sealing cover 42 reduces the complexity of assembling the one-way check valve.

[0074] As an example, the first sealing cap 42 and the first through hole 41 are fixedly connected by a threaded structure (not shown in the figure), which improves the sealing effect of the first sealing cap 42 on the first through hole 41. In other embodiments, the first sealing cap and the first through hole can also adopt other sealing connection methods.

[0075] In other embodiments, the first end of the spring may also be fixed in other locations. For example, the pneumatic valve may not have a first through hole, and the second connecting section may be a blind hole, in which case the first end of the spring may also be fixed to the bottom of the second connecting section.

[0076] In this embodiment, the diameter of the first through hole 41 is larger than the diameter of the second connecting section 15; the pneumatic valve further includes: a first sealing gasket 43, disposed between the end face of the second connecting section 15 exposed by the first through hole 41 and the first sealing cover 42.

[0077] The first sealing gasket 43 is used to seal the end face of the second connection section 15 exposed by the first through hole 41, effectively suppressing the air leakage problem of the pneumatic valve, which is conducive to further improving the airtightness and safety of the pneumatic valve.

[0078] As an example, the first sealing gasket 43 is made of nickel as the main material. Nickel-based gaskets have good ductility, which effectively suppresses the problem of gaps at the edges of the first sealing gasket 43, thereby improving the sealing effect of the first sealing gasket 43 and improving the airtightness and safety of the pneumatic valve. The nickel-based gasket also has good corrosion resistance, which helps to extend the service life of the first sealing gasket 43, thereby improving the reliability of the first sealing gasket 43.

[0079] In other embodiments, the first sealing gasket may be made of other materials. In other embodiments, the pneumatic valve may not include a first sealing gasket.

[0080] In this embodiment, the pneumatic valve further includes: a pneumatic control unit motion channel 16; the bidirectional path controller 30 further includes a first pneumatic control unit 32 connected to one end of the push unit 31 facing away from the second connection section 15.

[0081] The pneumatic control unit movement channel 16 is connected to the end of the first connecting section 14 away from the second connecting section 15. The aperture of the pneumatic control unit movement channel 16 is larger than the aperture of the first connecting section 14. The end face of the first connecting section 14 exposed by the pneumatic control unit movement channel 16 serves as the limiting part 33 of the first pneumatic control unit 32.

[0082] The first pneumatic control unit 32 is disposed in the pneumatic control unit motion channel 16 and is used to drive the push unit 31 to move toward the second connecting section 15 under the pressure of the driving gas.

[0083] The pneumatic control unit motion channel 16 is used to provide movement space for the first pneumatic control unit 32.

[0084] In this embodiment, the aperture of the pneumatic control unit movement channel 16 is larger than the aperture of the first connecting section 14, which is beneficial for the first connecting section 14 to have an end face exposed by the pneumatic control unit movement channel 16, thereby facilitating the formation of the limiting part 33 of the first pneumatic control unit 32.

[0085] In other embodiments, the aperture of the pneumatic control motion channel may be equal to the aperture of the first connecting section. For example, the first pneumatic control unit may have a preset maximum moving distance.

[0086] The first pneumatic control unit 32 moves toward the second connection section 15 under the pressure of the driving gas, thereby driving the push unit 31 to move, and then pushes the valve core toward the second connection section 15 through the push unit 31.

[0087] In this embodiment, the pneumatic valve further includes: a second through hole 44, which penetrates the side wall of the main structure 101 and is connected to the end of the pneumatic control unit movement channel 16 on the side away from the first connecting section 14; and a second sealing cover 45, which is disposed in the second through hole 44 and seals the second through hole 44.

[0088] The second sealing cap 45 is used to seal the second through hole 44, effectively suppressing the air leakage problem of the pneumatic valve, which helps to improve the airtightness and safety of the pneumatic valve.

[0089] Furthermore, the second through hole 44 facilitates the assembly of the bidirectional path controller 30.

[0090] As an example, the second sealing cap 45 and the second through hole 44 are fixedly connected by a threaded structure (not shown in the figure), which improves the sealing effect of the second sealing cap 45 on the second through hole 44. In other embodiments, the second sealing cap and the second through hole can also adopt other sealing connection methods.

[0091] In this embodiment, the diameter of the second through hole 44 is larger than the diameter of the pneumatic control unit movement channel 16; the pneumatic valve further includes a second sealing gasket 46, which is disposed between the end face of the pneumatic control unit movement channel 16 exposed by the second through hole 44 and the second sealing cover 45.

[0092] The second sealing gasket 46 is used to seal the end face of the pneumatic control unit movement channel 16 exposed by the second through hole 44, effectively suppressing the air leakage problem of the pneumatic valve, which is conducive to further improving the airtightness and safety of the pneumatic valve.

[0093] As an example, the second sealing gasket 46 is made of nickel as the main material. Nickel-based gaskets have good ductility, which effectively suppresses the problem of gaps at the edges of the second sealing gasket 46, thereby improving the sealing effect of the second sealing gasket 46 and improving the airtightness and safety of the pneumatic valve. The nickel-based gasket also has good corrosion resistance, which helps to extend the service life of the second sealing gasket 46, thereby improving the reliability of the second sealing gasket 46.

[0094] In other embodiments, the second sealing gasket may also be made of other materials. In other embodiments, the pneumatic valve may not include a second sealing gasket.

[0095] refer to Figure 4 In this embodiment, when the pneumatic valve is in bidirectional flow mode, the first pneumatic control unit 32 drives the pusher 31 to move toward the second connecting section 15, and makes the pusher 31 contact the end face of the valve core 21, so that the valve core 21 moves toward the side away from the first section channel 14, so that the one-way check valve is in the normally open state, thereby making the connecting channel 13 and the second channel 12 connected, which is beneficial to realizing the bidirectional flow function of the pneumatic valve.

[0096] It should be noted that when the valve core is in the closed state, it means that the valve core blocks the connection channel 13 and the second channel 12. Conversely, when the valve core is in the open state, it means that the valve core does not block the connection channel 13 and the second channel 12, that is, the connection channel 13 and the second channel 12 are connected. Accordingly, when the valve core is in the normally open state, the first connection section 14 of the connection channel 13 is always connected.

[0097] In this embodiment, the first pneumatic control unit 32 is disposed in the pneumatic control unit movement channel 16. The diameter of the first pneumatic control unit 32 is equal to the inner diameter of the pneumatic control unit movement channel 16, which helps to improve the sealing between the first pneumatic control unit 32 and the pneumatic control unit movement channel 16 and effectively suppresses the problem of air leakage inside the pneumatic valve.

[0098] In this embodiment, the first pneumatic control unit 32 and the actuating unit 32 can be an integral structure, which is beneficial to improving the structural stability of the bidirectional path controller 30, thereby improving the reliability of the pneumatic valve. In other embodiments, the first pneumatic control unit and the actuating unit can also be fixedly connected, for example, by welding, snap-fitting, etc.

[0099] The limiting part 33 of the first pneumatic control unit 32 is used to control the movement of the first pneumatic control unit 32 within a reasonable distance range, preventing the pushing part 31 from moving too far toward the second connecting section 15, effectively suppressing excessive contraction of the valve core 21 that could cause structural damage to the spring 22, thereby improving the reliability and safety of the pneumatic valve. In other embodiments, the movement distance of the first pneumatic control unit can also be limited by other methods or structures.

[0100] In this embodiment, there is a gap 113 between the side wall of the pushing part 31 and the outlet end 112 of the first channel 11, and the gap 113 is used for the fluid to pass through.

[0101] The pushing part 31 is used to push the valve core 21 through the second gap 113 in the bidirectional flow mode so that the second channel 12 and the connecting channel 13 are connected.

[0102] refer to Figure 2When the pneumatic valve is in the forward flow state of the one-way flow mode, the push part 31 and the valve core 21 are not in contact. The fluid enters the first connection section 14 through the second gap 113 via the first fluid output pipe 11. The fluid flows to the end face of the valve core 21 through the second gap 113 and provides pressure, causing the valve core 21 to move toward the side away from the first connection section 14. The valve core 21 does not block the second fluid output pipe 12, thereby connecting the connection channel 13 and the second fluid output pipe 12, which is beneficial to realizing the one-way flow function of the pneumatic valve.

[0103] refer to Figure 4 When the pneumatic valve is in bidirectional flow mode, the pushing part 31 and the valve core 21 abut against each other and push the valve core 21 to move toward the side away from the first connecting section 14, and the valve core 21 does not block the second fluid output pipe 12, so that the connecting channel 13 and the second channel 12 are connected, and the second gap 113 allows the fluid to pass through, which is beneficial to realizing the bidirectional flow function of the pneumatic valve.

[0104] In this embodiment, the pushing part 31 satisfies at least one of the following conditions: the diameter of the pushing part 31 is smaller than the aperture of the first connecting section 11 (i.e., the inner diameter of the first connecting section 11); the sidewall of the pushing part 31 abuts against the outlet end 112 of the first channel 11, and the sidewall of the pushing part 31 has a groove (not shown), the outlet end 112 of the first channel 11 is connected to the first connecting section 14 through the groove, and the groove is used for the fluid to pass through.

[0105] As an example, the diameter of the pushing part 31 is smaller than the aperture of the first connecting section 14, which helps to increase the distance between the pushing part 31 and the inner wall of the first connecting section 14. This, in turn, helps to increase the fluid flow space between the pushing part 31 and the inner wall of the first connecting section 14, thereby improving the smoothness of fluid flow in the first connecting section 14 and further improving the reliability of the pneumatic valve.

[0106] In other embodiments, the sidewall of the pusher may also abut against the outlet end of the first channel, and the sidewall of the pusher has a groove, the outlet end of the first channel being connected to the first connecting section through the groove, the groove being used for the fluid to pass through.

[0107] In this embodiment, the pneumatic valve further includes an instrument air passage 50, which is connected to the movement passage 16 of the pneumatic control unit and is located on the side of the first pneumatic control unit 32 away from the first connection section 14.

[0108] The instrument air passage 50 is used to provide the driving gas to the pneumatic control unit motion passage 16.

[0109] Furthermore, the connection point between the instrument air passage 50 and the pneumatic control unit movement passage 16 is located on the side of the first pneumatic control unit 32 away from the first connection section 14, thereby enabling the driving gas provided by the instrument air passage 50 to provide unidirectional pressure to the first pneumatic control unit 32, which is beneficial for the driving gas to drive the first pneumatic control unit 32 to move in one direction.

[0110] As an example, the instrument air passage 50 is disposed in the inner wall of the pneumatic control unit movement passage 16 between the second sealing cover 45 and the first pneumatic control unit 32.

[0111] In this embodiment, the pneumatic valve may further include: an air supply pipe 51 connected to the instrument air passage 50, used to provide the driving gas to the instrument air passage 50, which is beneficial to enable the instrument air passage 50 to provide the driving gas to the pneumatic control unit motion passage 16.

[0112] As an example, the gas supply pipe 51 is a quick-connect gas pipe, which is easy to install and simple to operate. This reduces the complexity of connecting the quick-connect gas pipe to the instrument gas channel 50, and consequently improves the ease of connection. In other embodiments, the gas supply pipe 51 can also be other types of devices.

[0113] In other embodiments, the pneumatic valve may not include the air supply line. For example, the instrument air passage can be used to communicate with the air supply line.

[0114] In this embodiment, the inlet end 111 of the first channel 11 is connected to the outlet end 102 of the third channel 100. Therefore, the fluid input channel and the fluid output channel can form a fluid passage. When the fluid passage is blocked at any position, the fluid cannot be transmitted through the pneumatic valve. When the fluid passage is open, the fluid can be transmitted through the pneumatic valve.

[0115] In this embodiment, a flow mode control device is provided on the fluid output channel to promptly suppress the backflow of fluid.

[0116] In this embodiment, the pneumatic valve further includes a second pneumatic control unit 60; the second pneumatic control unit 60 is disposed at the connection position between the third channel 100 and the first channel 11.

[0117] The second pneumatic control unit 60 serves as the main switch of the pneumatic valve. The second pneumatic control unit 60 is used to control the connection and disconnection between the third channel 100 and the fluid channel 10, so as to open or close the fluid passage.

[0118] Furthermore, when the pneumatic valve experiences internal leakage or other accidents, the second pneumatic control unit 60 can block the third channel 100 and the first channel 11, thereby blocking the fluid passage. This simplifies the blocking process, improves the timeliness of accident handling, reduces the impact of accidents, and enhances the safety of the pneumatic valve.

[0119] In other embodiments, other structures may be used to control the connection and disconnection between the third channel and the first channel.

[0120] In this embodiment, the pneumatic valve further includes a bottom through-hole 70 that penetrates the bottom of the pneumatic valve and the second connection section 15. Along the extension direction of the second fluid output pipe 12, the opening of the bottom through-hole 70 is aligned with the inlet of the second fluid output pipe 12.

[0121] During the machining process of the pneumatic valve, the bottom through-hole 70 serves as a channel for forming the second fluid output pipe 12.

[0122] It should be noted that the pneumatic valve also includes a bottom through-sealing cover 71 for sealing the bottom through-port 70, thereby improving the airtightness of the pneumatic valve.

[0123] In other embodiments, the pneumatic valve may not include a bottom through-hole, and correspondingly, the pneumatic valve may not include the third sealing cap.

[0124] Accordingly, this utility model embodiment also provides a fluid supply device, which includes the pneumatic valve described in any of the foregoing embodiments.

[0125] Because the pneumatic valve has a one-way backflow prevention function, it effectively suppresses the problem of the fluid supply equipment being unable to maintain negative pressure after internal leakage of the pneumatic valve; moreover, because the pneumatic valve has a two-way flow function, it is conducive to realizing the function of fluid circulation in the fluid supply equipment, thereby improving the performance of the fluid supply equipment.

[0126] As an example, the fluid supply equipment includes a gas holder.

[0127] It should be noted that negative pressure is maintained when changing gas cylinders in the special gas holder. Therefore, by setting the pneumatic valve provided in this embodiment in the gas holder, the effect of negative pressure maintenance is improved.

[0128] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A pneumatic valve, characterized in that, The pneumatic valve has a unidirectional flow mode and a bidirectional flow mode, and the pneumatic valve includes: The fluid channel includes a first channel and a second channel. In the unidirectional flow mode, the fluid flows forward from the outlet end of the first channel to the inlet end of the second channel. A flow mode control device is installed at the connection point of the first channel and the second channel. The flow mode control device includes a one-way check valve and a two-way flow controller. The one-way check valve includes at least a valve core disposed at the inlet end of the second channel, the valve core being used to block the first channel and the second channel when the fluid flows back in the reverse direction in the one-way flow mode; The bidirectional flow controller is used to control the valve core to be in a normally open state in the bidirectional flow mode, so as to connect the first channel and the second channel.

2. The pneumatic valve of claim 1, wherein, The fluid channel further includes a connecting channel, wherein the outlet end of the first channel and the inlet end of the second channel are connected through the connecting channel, wherein the connecting channel includes an adjacent first connecting section and a second connecting section, the outlet end of the first channel is connected to the first connecting section, and the inlet end of the second channel is connected to the second connecting section; The valve core is slidably disposed in the second connection section. The valve core is used to move away from the first connection section when the fluid flows in the forward direction in the unidirectional flow mode, so as to connect the outlet end of the first channel and the inlet end of the second channel, and to block the second channel and the first connection section when the fluid flows back in the reverse direction. The bidirectional flow controller includes at least a pushing part, which is slidably disposed in the first connection section. The pushing part is used to push the valve core to move away from the first connection section in the bidirectional flow mode and control the valve core to be normally open, so that the first channel, the connection channel and the second channel are connected.

3. The pneumatic valve of claim 2, wherein, The one-way check valve also includes a spring, the first end of which is fixed to the end of the second connection section away from the first connection section, and the second end of which is fixed to the valve core.

4. The pneumatic valve of claim 3, wherein The pneumatic valve further includes: a structural body, wherein the structural body has the fluid passage; The first through hole penetrates the side wall of the main structure and connects to the end of the second connecting section on the side away from the first connecting section; A first sealing cap is disposed in the first through hole, and the first sealing cap seals the first through hole; The first end of the spring is fixed to the first sealing cover.

5. The pneumatic valve of claim 4, wherein, The diameter of the first through hole is larger than the diameter of the second connecting section; The pneumatic valve further includes a first sealing gasket disposed between the end face of the second connection section exposed by the first through hole and the first sealing cover.

6. The pneumatic valve of claim 3, wherein, The valve core has a blind hole at the end facing away from the first connection section, and the second end of the spring is located in the blind hole.

7. The pneumatic valve of claim 2, wherein The aperture of the first connecting section is smaller than that of the second connecting section, and the end face of the first connecting section exposed by the second connecting section serves as the limiting part of the valve core. The valve core is used to abut against the limiting part when the fluid flows back, so as to block the fluid passage.

8. The pneumatic valve of claim 2, wherein, The pneumatic valve further includes a pneumatic control unit motion channel, and the bidirectional path controller further includes a first pneumatic control unit connected to one end of the push unit opposite to the second connection section; The pneumatic control unit's movement channel is connected to the end of the first connecting section away from the second connecting section. The aperture of the pneumatic control unit's movement channel is larger than the aperture of the first connecting section. The end face of the first connecting section exposed by the pneumatic control unit's movement channel serves as the limiting part of the first pneumatic control unit. The first pneumatic control unit is disposed in the movement channel of the pneumatic control unit and is used to drive the push unit to move toward the second connecting section under the pressure of the driving gas.

9. The pneumatic valve of claim 8, wherein, The pneumatic valve further includes: a structural body, wherein the structural body has the fluid passage; The second through hole penetrates the side wall of the main structure and connects to the end of the pneumatic control unit's movement channel away from the first connecting section. A second sealing cap is disposed in the second through hole, and the second sealing cap seals the second through hole.

10. The pneumatic valve of claim 9, wherein, The diameter of the second through hole is larger than the diameter of the movement channel of the pneumatic control unit; The pneumatic valve further includes a second sealing gasket, disposed between the end face of the pneumatic control unit's movement channel exposed by the second through hole and the second sealing cover.

11. The pneumatic valve of claim 8, wherein, The pneumatic valve further includes an instrument air passage, which is connected to the movement passage of the pneumatic control unit and located on the side of the first pneumatic control unit away from the first connection section, for introducing the driving gas into the movement passage of the pneumatic control unit.

12. The pneumatic valve as described in claim 2, characterized in that, There is a gap between the sidewall of the pusher and the outlet end of the first channel, the gap being used for the fluid to pass through.

13. The pneumatic valve of claim 12, wherein, The propulsion unit satisfies at least one of the following conditions: The diameter of the pushing part is smaller than the aperture of the first connecting section; The sidewall of the pusher abuts against the outlet end of the first channel, and the sidewall of the pusher has a groove. The outlet end of the first channel is connected to the first connecting section through the groove, and the groove is used to allow the fluid to pass through.

14. The pneumatic valve of claim 1, wherein, The fluid channel further includes a third channel, and the third channel, the first channel, and the second channel constitute a fluid passage; the pneumatic valve further includes a second pneumatic control unit; The second pneumatic control unit is located at the connection point between the third channel and the first channel, and is used to control the connection and disconnection between the third channel and the first channel to open or close the fluid passage.

15. A fluid supply apparatus characterized by comprising: Includes the pneumatic valve as described in any one of claims 1 to 14.

16. The fluid supply apparatus according to claim 15, wherein The fluid supply equipment includes a gas holder.

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