Production workshop air treatment system

Abstract

The utility model discloses an air treatment system for a production workshop. The air treatment system comprises a shell, an air inlet, an air treatment module, an air outlet and a control module, an accommodating space is formed in the shell, and two opposite sides are respectively provided with a window; the air inlet is formed in a window of the shell; the air processing module is connected to the lower end of the air inlet, three layers of filtering elements and a steam heating and cooling element are sequentially arranged in the air processing module, and a liquid outlet is formed below the steam heating and cooling element; the air outlet is connected with the air processing module and the other window of the shell; the control module is arranged on one side of the air inlet. According to the system, the steam heating element is used for heating and humidifying air, then excessive water vapor is removed through condensation of the cooling element, and accurate control over the temperature and humidity of the air in the workshop can be achieved without an additional humidifier or dehumidifier.

Description

Technical Field

[0001] This invention relates to the field of dry film photoresist production, and more particularly to an air handling system for a production workshop. Background Technology

[0002] In dry film photoresist production workshops, there are stringent and multi-dimensional requirements for air handling. First, air cleanliness is paramount. During production, the concentration of particulate contaminants such as dust must be controlled to extremely low levels. Cleanrooms typically need to reach a certain cleanliness level, as dust and other particles, once mixed into the photoresist, will form defects on the substrate after exposure and development, affecting the accuracy and integrity of the circuit patterns, thereby reducing product quality and yield. Second, temperature and humidity control is also extremely critical. Temperature and humidity need to be controlled within a specific range with minimal fluctuations, as dry film photoresist is sensitive to temperature and humidity. If the temperature and humidity are mismatched or fluctuate significantly, it will alter the photoresist's photosensitivity, flowability, and other properties, affecting coating uniformity and exposure and development effects. Furthermore, the workshop must strictly control airborne chemical pollutants, such as alkaline substances like ammonia and amines, and acidic substances like sulfides and nitrides. These airborne molecular pollutants can react chemically with components in the photoresist, causing phenomena such as T-top formation and salt crystallization, damaging the chemical structure and properties of the photoresist. They can also deposit on the surface of optical components, leading to transmittance loss and affecting the precision of the photolithography process and the stability of the equipment. In addition, the workshop must maintain a certain positive pressure environment to prevent untreated external air from entering through various gaps and compromising the internal clean environment. The positive pressure value generally needs to be maintained at a high level to ensure reasonable airflow organization, avoid eddies and dead zones, and allow airborne particles and pollutants to be quickly discharged, providing a stable, clean, and suitable air environment for the production of dry film photoresist.

[0003] In photolithography dry film adhesive production workshops, air handling units are indispensable. For temperature control, refrigeration systems and heating devices, such as steam heaters, rapidly respond to changes in indoor and outdoor temperature differences, maintaining a stable indoor temperature. For humidity control, humidifiers and dehumidification systems work together to maintain indoor humidity within an ideal range, avoiding the adverse effects of excessively high or low humidity. Air purification functions effectively remove dust, bacteria, harmful gases, and other pollutants from the air through multi-stage filtration and electrostatic dust removal technologies, ensuring air cleanliness meets the requirements of high-precision production environments in medical and electronics industries. Simultaneously, air handling units must possess excellent airflow organization capabilities. By optimizing fan design and duct layout, they achieve uniform air distribution indoors, improving overall energy efficiency and comfort, adapting to different building structures and spatial layouts, and meeting people's pursuit of a healthy and comfortable indoor environment.

[0004] However, in the process of implementing the inventive technical solution in the embodiments of this application, the inventors of this application discovered that the above-mentioned technology has at least the following technical problems:

[0005] Traditional air handling equipment requires the use of dehumidifiers or humidifiers to control the temperature and humidity of the air, which greatly increases energy consumption and the difficulty of control. Summary of the Invention

[0006] This invention addresses the problem that traditional air handling equipment relies on humidifiers or dehumidifiers for temperature and humidity regulation, resulting in high energy consumption and complex control. It proposes a production workshop air handling system that uses a "steam heating and cooling section" to work in tandem, achieving precise control of air temperature and humidity without the use of humidifiers or dehumidifiers.

[0007] This application provides an air handling system for a production workshop, including: a housing, an air inlet, an air handling module, an air outlet, and a control device.

[0008] Furthermore, an accommodating space is formed inside the outer shell, with two windows positioned opposite each other;

[0009] Furthermore, the air inlet is located at a window on the outer casing;

[0010] Furthermore, the air handling module is connected and positioned at the lower end of the air inlet;

[0011] Furthermore, the air outlet connects to the air handling module and another window on the casing;

[0012] Furthermore, a control module is located on one side of the air inlet.

[0013] Furthermore, four L-shaped buckles are symmetrically arranged on one outer side wall of the outer shell.

[0014] Furthermore, a primary filter plate is installed at one end of the air inlet near the window, which is fixed by a spring clip, and an air intake fan is installed at the other end.

[0015] Furthermore, the air handling module includes:

[0016] Furthermore, the filter elements are connected and installed at one end of the air inlet, consisting of three layers: the first layer, the middle layer, and the last layer, followed by a baffle plate.

[0017] Furthermore, the steam heating and cooling elements are connected and installed at one end of the air outlet, which combines the steam heating element and the cooling element. The first end is connected to the guide plate. The steam heating provides temperature and humidity to the air, and then the air is cooled by the cooling element to reach the required temperature and remove excess humidity through condensation.

[0018] Furthermore, the drain outlet is connected below the steam heating and cooling elements.

[0019] Furthermore, an air outlet fan is installed at one end of the air outlet, and the connection between the fan and the outer casing protrudes slightly outward to form a guide shroud.

[0020] Furthermore, the control module includes: a remote control module, a carrier board, and an internal control module.

[0021] Furthermore, a remote control module;

[0022] Furthermore, the carrier board is positioned below the remote control module;

[0023] Furthermore, the internal control module is located beneath the carrier board.

[0024] One or more technical solutions provided in the embodiments of this application have at least the following technical effects or advantages:

[0025] By employing a combination of steam heating and cooling elements, the system provides temperature and humidity to the air through steam heating, followed by cooling to reach the required temperature and removing excess humidity through condensation. This effectively solves the technical problems of existing technologies that require the use of dehumidifiers or humidifiers for humidity and temperature control, resulting in high energy consumption and difficult control. It achieves precise and coordinated temperature and humidity control by using steam heating elements to provide heat and humidity to the air, combined with the natural removal of excess moisture through condensation by cooling elements. This avoids the need for additional humidifiers and dehumidifiers, reduces system energy consumption, and simplifies equipment control. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the overall structure of an air handling system for a production workshop according to an embodiment of this application;

[0027] Figure 2 This is a cross-sectional view of a production workshop air handling system according to an embodiment of this application;

[0028] Figure 3 This is a schematic diagram of the outer wall of the outer casing in an embodiment of this application;

[0029] Figure 4 This is a detailed structural diagram of the air handling module according to an embodiment of this application;

[0030] Figure 5 Examples of this application Figure 2 Enlarged diagram of the part;

[0031] Figure 6 This is an enlarged schematic diagram of the air inlet structure in an embodiment of this application;

[0032] Figure 7 This is an enlarged schematic diagram of the air outlet structure in an embodiment of this application;

[0033] Figure 8 This is a schematic diagram of the filter element structure in an embodiment of this application;

[0034] Figure 9 This is a schematic diagram of the control module in an embodiment of this application;

[0035] Figure 10 This is a detailed structural diagram of the control module in an embodiment of this application. Detailed Implementation

[0036] This application embodiment employs a combination of steam heating and cooling elements. Steam heating provides temperature and humidity to the air, which is then cooled by the cooling element to reach the required temperature. Excess humidity is removed by condensation. Therefore, it effectively solves the technical problems of high energy consumption and difficulty in controlling humidity and temperature in the prior art, which require the use of dehumidifiers or humidifiers. Thus, it achieves the technical effect of controlling the temperature and humidity of the air without the need for dehumidifiers or humidifiers.

[0037] To address the technical problems of high energy consumption and difficulty in controlling humidity and temperature using dehumidifiers or humidifiers in the existing technologies, the overall approach is as follows:

[0038] Traditional air handling units typically include built-in humidifiers and dehumidifiers to control air humidity, but this increases energy consumption and the complexity of the device control. The embodiments of this application utilize steam heating, which simultaneously increases air humidity while treating harmful substances and some dust particles. Subsequently, the air passes through cooling elements, lowering the temperature, and the moisture inside the steam-heated air condenses to further reduce humidity, achieving the technical effect of simultaneously controlling air temperature and humidity, and treating the air.

[0039] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0040] like Figure 1-10 The embodiment of this application is shown below:

[0041] This embodiment includes a housing 1, an air inlet 2, an air handling module 3, an air outlet 4, and a control module 5. All components are mechanically connected and integrated with piping to form a complete air handling cycle. The housing 1 is a rectangular box with an internal accommodating space. Circular windows are provided on opposite sides for installing the air inlet 2 and the air outlet 4. Four L-shaped clips 11 are symmetrically arranged on the outer wall of the housing 1. These clips are fixed to the edge of the housing 1 with countersunk screws and can be engaged with fixed brackets on the workshop wall for quick installation and disassembly. The air inlet 2 is welded to the left window of the housing 1. A primary filter plate 21 is installed on its inner side, fixed by spring clips 22, which can intercept dust particles larger than 10μm. An air inlet fan 23 is connected to the outer flange of the air inlet 2. The air outlet of the air inlet fan 23 is coaxial with the air inlet 2. When its impeller rotates, it draws external air into the housing 1. The fan speed is adjusted by the control module 5 to ensure stable air intake pressure. The air handling module 3 is columnar, with its top sealed to the lower end of the air inlet 2 via a flange. Inside, along the airflow direction, are sequentially arranged filter elements 31 and steam heating and cooling elements 32. The filter elements 31 have a three-layer drawer-type structure: the first layer 311 is a G4-grade pre-filter, fixed with a metal frame, capable of removing particles larger than 5μm; the middle layer 312 is an F8-grade medium-efficiency filter bag, suspended within the frame by elastic clamps, filtering 1-5μm particles; the final layer 313 is an H13-grade HEPA filter element, its edges sealed to the inner wall of the outer casing 1 with a sealing strip. The three filter layers can be independently removed and replaced, eliminating the need to disassemble the entire module for maintenance. The steam heating and cooling elements 32 are located immediately below the filter elements 31, with their front end connected to the filter elements 31 via a guide plate 314, and their rear end connected to the air outlet 4 duct. The steam heating element uses a finned heat exchanger, with internal copper tubes connected to the workshop's steam network. Steam enters the heat exchanger through pipes and exchanges heat with filtered air via aluminum fins, raising the air temperature. Simultaneously, some of the steam-generated water vapor is evenly mixed into the air, increasing relative humidity. The cooling element is a shell-and-tube condenser. Refrigerant flows through the shell side. As hot, humid air flows through the tubes, the refrigerant absorbs heat, lowering the air temperature. Supersaturated water vapor in the air condenses into liquid water, dripping down the tube walls into a collection tank below. The collection tank is connected to a pipe via a drain port 33 to periodically drain the condensate. The air outlet 4 is welded to the right-side window of the outer casing 1. The outer wall of the outer casing 1 has an outwardly protruding arc-shaped guide shroud 42, which expands the airflow diffusion angle and prevents eddies caused by concentrated airflow. The inner flange of the air outlet 4 connects to the outlet fan 41, which operates in conjunction with the inlet fan 23 to maintain a positive pressure environment in the workshop and prevent external pollutants from entering.

[0042] The control module 5 is bolted to the surface of the outer casing 1 on the right side of the air inlet 2, and includes a remote control module 51, a carrier plate 52, and an internal control module 53 arranged from top to bottom. The remote control module 51 is a microprocessor capable of interacting with the outside world. Through interaction with external sensors, it can obtain information on the air temperature, humidity, and cleanliness within the production workshop. Through interaction with external mobile devices, such as a user's mobile phone or computer, it can exchange remote commands. The internal control module 53 is used to monitor the internal air conditions of the production workshop air handling system according to this embodiment, including temperature, humidity, and cleanliness.

[0043] The remote control module 51 and the internal control module 53 are connected via a carrier board 52 for information exchange. For example, the remote control module 51 transmits information acquired by sensors to the internal control module 53 and performs automatic control. When the detected air temperature is lower than a predetermined value, the steam flow is increased to raise the temperature; when it is higher than the predetermined value, the compressor power is increased to lower the temperature. Simultaneously, excess water vapor is naturally removed through condensation during the cooling process, eliminating the need for an additional dehumidifier and achieving coordinated control of temperature and humidity. In addition, the remote control module 51 can remotely control the on / off state of the equipment and set target temperature and humidity values ​​by receiving user commands.

[0044] When the system is working, outside air is drawn in by the inlet fan, pre-filtered by the primary filter plate 21, and then enters the filter element 31. After passing through three stages of filtration, the clean air then enters the steam heating element, where steam heat exchange raises the temperature and increases the humidity. The air then flows through the cooling element to cool and condense, and excess water vapor is discharged through the drain port 33. Finally, the air is evenly distributed into the workshop by the outlet fan through the guide shroud. The control module 5 collects data in real time and adjusts the operating parameters of each component to ensure stable output air temperature and humidity.

[0045] The workflow of this application embodiment is as follows:

[0046] Air enters the equipment through inlet 2 and then flows into air handling module 3. It first passes through filter element 31, a multi-layered filter structure that adsorbs most solid impurities. The pre-filtered air then enters steam heating and condensation section 32, where steam heating introduces moisture, causing unfiltered suspended solid particles to settle and further filter solid impurities. Simultaneously, the high temperature decomposes toxic and odorous substances in the air, removing odors and other chemicals, while also increasing humidity. The air is then cooled to the target temperature by condensation equipment. Excess moisture condenses, carrying the settled solids out of the device via drain outlet 33. Finally, the filtered air is discharged from outlet 4 by a fan. Control module 5 controls the temperature and humidity of the final filtered air by controlling the steam heating and condensation processes. Remote control module 51 allows the system to interact with a cloud server or user mobile devices such as smartphones and computers for remote control and adjustment.

[0047] The technical solutions described in the embodiments of this application have at least the following technical effects or advantages:

[0048] Since the embodiments of this application provide an air handling system for a production workshop, they solve the technical problem that traditional air handling equipment in the prior art needs to use dehumidifiers or humidifiers to control the temperature and humidity of the air, which greatly increases energy consumption and control difficulty. The system achieves the technical effect of controlling the temperature and humidity of the air without using dehumidifiers or humidifiers.

[0049] Although preferred embodiments of the invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the invention.

[0050] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. A manufacturing plant air handling system characterized by, include: The outer shell (1) has an internal accommodating space with two windows arranged opposite each other. mouth; Air inlet (2), the air inlet (2) is located at a window of the outer shell (1); Air handling module (3), the air handling module (3) is connected to the air inlet. (2) Lower end; Air outlet (4), the air outlet (4) is connected to the air handling module (3) and another window of the housing (1); The control module (5) is located on one side of the air inlet (2).

2. The production workshop air handling system as described in claim 1, characterized in that: Four L-shaped buckles (11) are symmetrically arranged on one outer side wall of the outer shell (1).

3. A manufacturing plant air handling system as claimed in claim 1, characterised in that: An air inlet (2) is provided with a primary filter plate (21) near the window and fixed by a spring clip (22), and an air intake fan (23) is provided at the other end.

4. The air handling module of the production workshop air handling system as described in claim 1. (3) Includes: The filter element (31) is connected to one end of the air inlet (2) and is configured as a first layer (311), a middle layer (312) and a last layer (313), and a guide plate (314) is provided thereafter. Steam heating and cooling element (32) is connected to one end of the air outlet (4), which is a combination of steam heating element and cooling element, and the first end is connected to the guide plate (314). Drainage port (33) is connected below the steam heating and cooling element (32).

5. A manufacturing plant air handling system as defined in claim 1, wherein: An air outlet (4) is provided with an air outlet fan (41) at one end, which is connected to the outer shell (1) and protrudes outward to form a guide shroud (42).

6. The production workshop air handling system as described in claim 1, wherein the control module (5) comprises: Remote control module (51); The carrier board (52) is located below the remote control module (51); The internal control module (53) is located below the carrier board (52).

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