Track assembly and curing oven with same

Abstract

The utility model relates to the technical field of curing equipment, in particular to a track assembly and a curing oven with the track assembly, and the track assembly comprises at least two sets of track bodies arranged in parallel and turning wheels installed at the outer ends of one sides of the track bodies. The turning wheel is installed on the tensioning structure and is driven by tensioning to achieve displacement adjustment in the direction parallel to the length direction of the track body. The tensioning structure comprises a fixed sliding rail, a sliding block and a traction structure. The sliding block is matched with the fixed sliding rail and is used for fixedly mounting the turning wheel; the traction structure comprises a transition wheel, a counterweight and a traction piece; the traction piece is wound on the transition wheel, and the two ends of the traction piece are connected with the sliding block and the balance weight respectively. The turning wheel is installed on the tensioning structure, real-time dynamic adjustment of the turning wheel is achieved, the materials distributed along the track assembly always keep proper tension based on reasonable counterweight selection, the situation that the curing effect of a chip is affected due to the fact that a material belt is too loose or too tight is avoided, and the curing quality is improved.

Description

Technical Field

[0001] This utility model relates to the field of curing equipment technology, and in particular to a track assembly and a curing oven having the track assembly. Background Technology

[0002] In semiconductor chip manufacturing, chips are arranged on a ribbon. As the ribbon moves, adhesive is applied to the semiconductor chips sequentially. After dispensing, the semiconductor chips need to be baked to cure the adhesive, requiring a curing oven. To increase the ribbon's travel distance in the curing oven, deflector rollers are often used to make the ribbon move in an S-shape. However, traditional deflector rollers are fixed and cannot be tensioned, making it difficult to dynamically adjust the ribbon tension. This leads to unstable ribbon tension; too loose, and the ribbon will collapse and become uneven; too tight, and it may stretch or break, affecting production efficiency and product quality. Furthermore, frequent manual stops to adjust tension increase costs and labor intensity. Simultaneously, traditional curing oven heating devices suffer from uneven heat distribution. For example, heat is concentrated when using resistance wire heating, or inadequate airflow design or uneven fan delivery during hot air circulation heating, causing heat to concentrate in certain areas while other areas receive insufficient heat. This can cause inconsistent curing of the adhesive on the chip. In areas with high temperatures, the adhesive may become over-cured and brittle, reducing the bond strength. In areas with low temperatures, the adhesive may not cure completely, making the chip prone to detachment. Additionally, the chip may suffer performance damage due to uneven thermal stress, increasing the defect rate. Utility Model Content

[0003] The purpose of this invention is to provide a track assembly and a curing oven having the track assembly, so as to solve the problem that the tension of the chip-carrying tape cannot be dynamically adjusted during the curing and conveying process in the prior art, and to further solve the problem of uneven temperature in the curing oven.

[0004] The technical solution of this utility model is: a track assembly, including at least two sets of parallel track bodies and a turning wheel installed on the outer end of one side of the track body; the turning wheel is installed on a tensioning structure and is driven by tension to realize displacement adjustment along the length direction parallel to the track body.

[0005] The tensioning structure includes a fixed slide rail, a slider, and a traction structure; the slider cooperates with the fixed slide rail and is used for the fixed installation of the turning wheel; the traction structure includes a transition wheel, a counterweight, and a traction component; the traction component is wound around the transition wheel, and its two ends are respectively connected to the slider and the counterweight.

[0006] Preferably, the counterweight includes a pole, a support bracket, and several weights; the top of the pole is fixedly connected to the traction member, and the support bracket is fixed to the bottom of the pole; each weight has an open slot for the pole to insert and accommodate, and several weights are stacked on the support bracket.

[0007] Preferably, three track bodies are provided, and a turning wheel is provided at the outer end of each pair of adjacent track bodies, including a first turning wheel and a second turning wheel; the first turning wheel and the second turning wheel are respectively located on different sides of the track body in the length direction; at least one of the turning wheels is installed on the tensioning structure.

[0008] Preferably, each of the track bodies includes a pair of horizontally distributed inserts for the material ends to be inserted into, and the middle of the material to be suspended.

[0009] The material has a first end face to be dried and a second end face opposite to the first end face; the second end face faces outward when the material passes through the first turning wheel, and the first end face faces outward when the material passes through the second turning wheel.

[0010] Preferably, the first turning wheel includes a pair of first discs, each first disc having a limiting ridge on its inner end face for the material end to abut against; the pair of first discs are left empty so that the first end faces do not contact each other;

[0011] The second turning wheel includes a pair of second discs, configured with the same structure as the first turning wheel, or the pair of second discs are connected by a cylindrical column and contact the second end face.

[0012] Preferably, the insert has a groove for receiving the end of the material, and the upper and lower end faces of the groove are wavy or have protrusions distributed at intervals.

[0013] This application also discloses a curing oven, including the aforementioned track assembly, and further including heating components distributed sequentially along the track assembly.

[0014] Preferably, the heating assembly includes a plurality of heaters facing the track body, and a heat spreader installed between the heaters and the track body.

[0015] Preferably, the heater and temperature equalization plate corresponding to each of the track bodies face the first end face of the material to be dried on the track body.

[0016] Compared with the prior art, the advantages of this utility model are:

[0017] (1) By installing the turning wheel on the tensioning structure, the turning wheel can be dynamically adjusted in real time. Based on the reasonable selection of counterweight, the material distributed along the track component can always maintain appropriate tension, avoiding the material belt being too loose or too tight, which would affect the curing effect of the chip and improve the curing quality.

[0018] (2) Both the first turning wheel and the second turning wheel are used to realize the reversal of the material belt. However, since they are in contact with different end faces of the material belt, in order to avoid the first end face to be dried from touching the external structure and affecting the curing, an empty structure is formed between a pair of first material trays, and the material is limited by the limiting edge.

[0019] (3) The heating device in the curing oven includes a heater and a heat spreader. Since the heat of the heater is relatively concentrated, if it is placed directly towards the material, there will be uneven temperature. The heat spreader can make the temperature of the material's surrounding area more uniform and the curing effect better. Attached Figure Description

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0021] Figure 1 This is a front view of the curing oven described in this utility model;

[0022] Figure 2 This is a front view of the tensioning structure described in this utility model;

[0023] Figure 3 This is a schematic diagram of the tensioning structure described in this utility model;

[0024] Figure 4 This is a schematic diagram of the structure of the first turning wheel of this utility model;

[0025] Figure 5 This is a schematic diagram of the structure of the second turning wheel of this utility model;

[0026] Figure 6 This is a partial structural diagram of the track body described in this utility model.

[0027] Among them: 1. Track body;

[0028] 11. Inlay strip; 111. Inlay groove;

[0029] 2. Turning wheel;

[0030] 21. First turning wheel; 211. First wheel; 212. Limiting edge;

[0031] 22. The second turning wheel; 221. The second roulette wheel;

[0032] 3. Tensioning structure;

[0033] 31. Fixed slide rail; 32. Slider; 33. Traction structure; 330. Counterweight; 331. Transition wheel; 332. Upright pole; 333. Support bracket; 334. Weight; 335. Traction component.

[0034] 4. Heating components;

[0035] 41. Heater; 42. Heat spreader plate. Detailed Implementation

[0036] The present invention will be further described in detail below with reference to specific embodiments:

[0037] To facilitate understanding, the application scenario of this application is first explained. In the semiconductor chip processing, chips are arranged at equal intervals on a strip. As the strip moves, the semiconductor chips are sequentially dispensed with adhesive. After dispensing, the semiconductor chips need to be baked. The strip (i.e., the material) has a first end face to be dried and a second end face opposite to the first end face; that is, the chip being dispensed is located on the first end face. This application discloses a track assembly and a curing oven having the track assembly. The track assembly and the curing oven are described separately below.

[0038] like Figure 1 As shown, a track assembly includes at least two sets of parallel track bodies 1 and a turning wheel 2 installed on the outer end of one side of the track body 1; the turning wheel 2 is installed on a tensioning structure 3 and is driven by tension to achieve displacement adjustment along the length direction parallel to the track body 1.

[0039] In practical scenarios, due to limited space, the straight length of the curing oven is limited, and the material needs to meet a specific curing time in the curing oven to ensure the curing effect. Therefore, the flow path of the material in the curing oven can be increased. Thus, in this embodiment, three track bodies 1 are provided, and a turning wheel 2 is provided at the outer end of each pair of adjacent track bodies 1, including a first turning wheel 21 and a second turning wheel 22. The first turning wheel 21 and the second turning wheel 22 are respectively located on different sides of the length direction of the track body 1; at least one turning wheel 2 is installed on the tensioning structure 3.

[0040] like Figure 2 , Figure 3As shown, the tensioning structure 3 includes a fixed slide rail 31, a slider 32, and a traction structure 33. The slider 32 cooperates with the fixed slide rail 31 and is used for the fixed installation of the turning wheel 2. The traction structure 33 includes a transition wheel 331, a counterweight 330, and a traction member 335. The traction member 335 is wound around the transition wheel 331, and its two ends are respectively connected to the slider 32 and the counterweight 330. The counterweight 330 includes a vertical rod 332, a support bracket 333, and several weights 334. The top of the vertical rod 332 is fixedly connected to the traction member 335, and the support bracket 333 is fixed to the bottom of the vertical rod 332. Each weight 334 has an open slot for the vertical rod 332 to be inserted and accommodated, and several weights 334 are stacked on the support bracket 333. Based on the reasonable selection of counterweight 330, that is, placing a certain number of weights 334, combined with the traction action of traction component 335, the tension force is dynamically adjusted so that the material distributed along the track component always maintains appropriate tension, avoiding the material strip being too loose or too tight, which would affect the curing effect of the chip and improve the curing quality.

[0041] In this application, the fixed slide rail 31 and the transition wheel 331 are both mounted on a fixed plate. The fixed plate has slots to achieve a fixed connection between the slide rail 31 and the turning wheel 2, thereby enabling the turning wheel 2 and the traction structure 33 to be set on different sides of the fixed plate, which facilitates the structural layout and also makes it easier to adjust the counterweight 330.

[0042] Combination Figure 1 As shown, the material enters from the lower left and flows out from the upper right. When the conveyor belt enters, the first end face faces upward. After flowing to the second track body 1, the first end face faces downward. After reaching the uppermost track body 1, the first end face faces upward again. Correspondingly, when the material passes through the first turning wheel 21, the second end face faces outward, and when the material passes through the second turning wheel 22, the first end face faces outward.

[0043] like Figure 4 As shown, the first turning wheel 21 includes a pair of first discs 211, each of which has a limiting ridge 212 on its inner end face for the material end to abut against; furthermore, the pair of first discs 211 are left empty so that the first end face does not contact each other, thus avoiding contact between the first end face to be dried and the external structure, which would affect the curing.

[0044] like Figure 5 As shown, in one embodiment, the second turning wheel 22 includes a pair of second discs 221 and is constructed with the same structure as the first turning wheel 21. In other embodiments, the pair of second discs 221 are connected by a cylindrical column and contact a second end face, which can make direct contact since there is no chip on the second end face.

[0045] Combination Figure 6As shown, each track body 1 includes a pair of horizontally distributed inserts 11 for the material end to be inserted and the middle of the material to be suspended; the inserts 11 have grooves 111 for the material end to be received, and the upper and lower end faces of the grooves 111 are wavy or have protrusions distributed in sequence to prevent the material strip from arching as much as possible through limiting.

[0046] This application also discloses a curing oven, including the above-mentioned track assembly, a heating assembly 4 distributed sequentially along the track assembly, and a shell that places the track assembly and the heating assembly 4 in a relatively enclosed space.

[0047] Combination Figures 1-2 , Figures 4-5 As shown, the heating assembly 4 includes several heaters 41 facing the track body 1, and a heat spreader 42 installed between the heaters 41 and the track body 1. Each track body 1 has a corresponding heater 41 and heat spreader 42 facing the first end face of the material to be dried on the track body 1. Since the heat from the heaters 41 is relatively concentrated, directly facing the material would result in uneven temperature distribution. The heat spreader 42 ensures a more uniform temperature around the material, leading to better curing results.

[0048] When working, combine Figure 1 As shown, the material enters from the left side of the bottom track body 1 and flows out from the right side of the top track body 1. The chip has a long flow path and a long curing time. Combined with the temperature equalization effect of the heat equalization plate 42, the curing effect is good. During the material movement, the counterweight 330 can keep the material in a certain tension state, preventing the material from arching during operation and affecting the curing effect.

[0049] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and therefore, all changes falling within the meaning and scope of the equivalents of the claims are intended to be included within this utility model.

Claims

1. A track assembly, characterized by, It includes at least two sets of parallel track bodies (1) and a turning wheel (2) installed on the outer end of one side of the track body (1); the turning wheel (2) is installed on the tensioning structure (3) and is driven by tension to realize displacement adjustment along the length direction parallel to the track body (1); The tensioning structure (3) includes a fixed slide rail (31), a slider (32), and a traction structure (33); the slider (32) cooperates with the fixed slide rail (31) and is used for the fixed installation of the turning wheel (2); the traction structure (33) includes a transition wheel (331), a counterweight (330), and a traction component (335); the traction component (335) is wound around the transition wheel (331), and its two ends are respectively connected to the slider (32) and the counterweight (330).

2. The track assembly of claim 1, wherein: The counterweight (330) includes a pole (332), a support bracket (333), and several weights (334); the top of the pole (332) is fixedly connected to the traction member (335), and the support bracket (333) is fixed to the bottom of the pole (332); each weight (334) has an open slot for the pole (332) to be inserted into and accommodated, and several weights (334) are stacked on the support bracket (333).

3. The track assembly of claim 1, wherein: The track body (1) is provided in three parts, and each pair of adjacent track bodies (1) is provided with a turning wheel (2) at the outer end, including a first turning wheel (21) and a second turning wheel (22); the first turning wheel (21) and the second turning wheel (22) are respectively located on different sides of the track body (1) in the length direction; at least one of the turning wheels (2) is installed on the tensioning structure (3).

4. The track assembly of claim 3, wherein: Each of the track bodies (1) includes a pair of horizontally distributed inserts (11) for the material ends to be inserted into and the material middle to be suspended. The material has a first end face to be dried and a second end face opposite to the first end face; the second end face faces outward when the material passes through the first turning wheel (21), and the first end face faces outward when the material passes through the second turning wheel (22).

5. The track assembly of claim 4, wherein: The first turning wheel (21) includes a pair of first discs (211), each of the first discs (211) having a limiting edge (212) on its inner end face for the material end to abut against; the pair of first discs (211) are left empty so that the first end faces do not contact each other; The second turning wheel (22) includes a pair of second discs (221) configured with the same structure as the first turning wheel (21), or the pair of second discs (221) are connected by a cylindrical tube and in contact with the second end face.

6. The track assembly of claim 4, wherein: The insert (11) has a groove (111) for receiving the end of the material. The upper and lower end faces of the groove (111) are wavy or have protrusions distributed at intervals.

7. A curing oven characterized by: The system includes the track assembly as described in any one of claims 1-6, and further includes heating components (4) distributed sequentially along the track assembly.

8. A curing oven according to claim 7, wherein: The heating assembly (4) includes a plurality of heaters (41) facing the track body (1) and a heat exchange plate (42) installed between the heaters (41) and the track body (1).

9. A curing oven according to claim 8, wherein: The heater (41) and the uniform temperature plate (42) corresponding to each track body (1) are arranged towards the first end face of the track body (1) where the material to be dried.

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