High-pressure dynamic sealing device for furnace door of air pressure sintering furnace

Abstract

The utility model relates to the field of air pressure sintering furnaces, in particular to a high-pressure dynamic sealing device for an air pressure sintering furnace door, which comprises a furnace door insulation felt, a soaking barrel end door, a first telescopic assembly and a second telescopic assembly. Even under the condition that the furnace door is closed, the furnace door heat preservation felt can achieve the front-back telescopic function, under the high-temperature working condition, the first telescopic assembly is driven, the first telescopic assembly pushes the furnace door heat preservation felt forwards, the furnace door heat preservation felt and the furnace body heat preservation felt can form a space with better sealing performance together, and therefore the temperature uniformity of a thermal field is improved; and meanwhile, the end door of the soaking barrel can be dynamically stretched out and drawn back, the problem that the heat preservation barrel is broken due to graphite expansion is solved, the product safety is improved, the end opening sealing performance can be constantly kept through dynamic self-adjustment of the end door of the soaking barrel, the temperature uniformity of a thermal field is improved, and therefore the problem that the temperature uniformity of an air pressure sintering furnace is poor is solved.

Description

Technical Field

[0001] This application relates to the field of gas pressure sintering furnaces, and in particular to a high-pressure dynamic sealing device for the furnace door of a gas pressure sintering furnace. Background Technology

[0002] Silicon nitride possesses an extremely high melting point (approximately 1900℃) and density (3.44 g / cm³), along with high thermal conductivity. Due to its unique properties, it has wide applications in various high-tech fields, commonly used in bearing balls for new energy vehicles, packaging for high-performance electronic devices, and heat dissipation substrates. Gas pressure sintering is an indispensable and irreplaceable step in the preparation of superior silicon nitride materials. A gas pressure sintering furnace is a specialized piece of equipment used for sintering silicon nitride.

[0003] Upgrading gas pressure sintering furnaces to domestic production is key to solving bottlenecks in the semiconductor industry and is also an urgent need for the entire market. The working principle of a gas pressure sintering furnace is based on the phase transformation characteristics of silicon nitride, employing a two-step sintering method: First, in the pre-sintering stage, the pre-sintering temperature is set according to different sintering aids. Under low temperature and low nitrogen pressure, the transformation rate of grains from the α phase to the β phase is reduced, prolonging the particle rearrangement time. The resulting β-Si3N4 grains interweave to form a framework, creating closed pores. Second, after pre-sintering, the temperature continues to rise. Under high temperature and high nitrogen pressure, liquid phase flow and filling are promoted, which helps eliminate closed pores and further increases the density of Si3N4 ceramics.

[0004] Compared to the gas pressure sintering process in powder metallurgy, the gas pressure sintering of advanced ceramics requires higher temperature uniformity. Currently, similar products in the industry suffer from poor temperature uniformity during sintering due to the unreliability of cylinder telescopic seals. To address the issue of poor temperature uniformity in gas pressure sintering furnaces, a high-pressure dynamic sealing device for the furnace door is urgently needed. Utility Model Content

[0005] To address the problem of poor temperature uniformity in gas pressure sintering furnaces in related technologies, this application provides a high-pressure dynamic sealing device for the furnace door of a gas pressure sintering furnace.

[0006] The high-pressure dynamic sealing device for the furnace door of a gas pressure sintering furnace provided in this application adopts the following technical solution:

[0007] A high-pressure dynamic sealing device for the door of a gas pressure sintering furnace, comprising:

[0008] The furnace door insulation felt is movably connected to the inner wall of the furnace door;

[0009] The heat-spreading barrel end door is movably connected to the inner wall of the furnace door, and the furnace door insulation felt is located between the heat-spreading barrel end door and the furnace door;

[0010] The first telescopic component has one end fixedly connected to the furnace door insulation felt and the other end fixedly connected to the furnace door; and

[0011] The second telescopic component is fixedly connected at one end to the end door of the heat exchange tank, and movably connected at the other end to the furnace door.

[0012] By adopting the above technical solution, the high-pressure dynamic sealing device of this application is configured as a combination of furnace door insulation felt, heat spreader end door, first telescopic component, and second telescopic component. This allows the furnace door insulation felt to extend and retract when the furnace door is closed. When maintaining high temperatures, the first telescopic component drives the furnace door insulation felt forward, ensuring the seal between the furnace body insulation felt and the furnace door insulation felt, effectively reducing heat conduction and radiation loss, and improving temperature uniformity in the hot zone. When cooling is required, the first telescopic component drives the furnace door insulation felt backward, separating the furnace body insulation felt from the furnace door insulation felt, thus making cooling faster, significantly reducing cooling time, and improving work efficiency. Simultaneously, the heat spreader end door and the second telescopic component ensure temperature uniformity when adjusting the furnace door insulation felt. The heat spreader end door, under the action of the second telescopic component, can extend and retract, effectively solving the sealing problem and improving equipment safety. This application, to a certain extent, solves the problem of poor temperature uniformity in gas pressure sintering furnaces in related technologies.

[0013] Optionally, the first telescopic component includes a cylinder and a connecting rod. The cylinder is located outside the furnace door, and the drive shaft of the cylinder is coaxially arranged with the connecting rod. A metal frame is provided on the furnace door insulation felt. One end of the connecting rod is connected to the drive shaft of the cylinder, and the other end is connected to the metal frame.

[0014] By adopting the above technical solution, when the furnace door insulation felt needs to be driven, the cylinder is activated, and the cylinder's drive shaft causes the connecting rod to move axially. The other end of the connecting rod is connected to the furnace door insulation felt, thus realizing the lateral movement of the furnace door insulation felt.

[0015] Optionally, the cross-sectional area of ​​the end of the connecting rod near the furnace door insulation felt is larger than the cross-sectional area of ​​the end near the cylinder.

[0016] By adopting the above technical solution, the variable diameter design of the connecting rod can balance the pressure of the cylinder itself and the pressure inside the furnace cavity, preventing the cylinder from opening due to exceeding the pressure threshold.

[0017] Optionally, the first telescopic assembly further includes a guide rail platform and a pulley. The guide rail platform is fixedly connected to the furnace door, and the pulley is rotatably connected to the connecting rod, allowing the pulley to slide on the guide rail platform.

[0018] By adopting the above technical solution, the design of the guide rail platform and pulleys makes the extension and retraction of the first telescopic component smoother.

[0019] Optionally, the second telescopic assembly includes a spring, a guide connecting rod, and a carbon-carbon connecting rod. The inner side wall of the furnace door is provided with a receiving groove, and a fixed seat is provided in the receiving groove. One end of the spring is fixedly connected to the fixed seat, and the other end is connected to the guide connecting rod. One end of the carbon-carbon connecting rod passes through the furnace door insulation felt and is connected to the end door of the heat-spreading barrel, and the other end is connected to the guide connecting rod.

[0020] By adopting the above technical solution, the second telescopic component is configured as a combination of a spring, a guide connecting rod, and a carbon-carbon connecting rod. This allows the heat-equalizing barrel end door to move together with the first telescopic component when the furnace door insulation felt is adjusted, further improving the temperature uniformity within the hot zone.

[0021] Optionally, the heat exchange tank end door is connected to the carbon-carbon connecting rod by a nut, and a flange seat is also provided at the end of the fixing seat near the heat exchange tank end door.

[0022] By adopting the above technical solution, the connection of the nut facilitates the disassembly and replacement of the heat exchange tank end door, and the flange seat can effectively ensure the stability of the second telescopic component.

[0023] Optionally, multiple sets of the second telescopic component are provided, and the multiple sets of the second telescopic component are arranged in parallel and connected together to the end door of the heat exchange tank.

[0024] By adopting the above technical solution, the stability of the heat spreader end door has been further improved.

[0025] Optionally, the furnace door insulation felt is made of graphite material.

[0026] By adopting the above technical solutions, the thermal insulation performance of the furnace door insulation felt has been further improved.

[0027] Optionally, a high-pressure dynamic sealing assembly is also provided, which includes a guide PTFE ring, a toothed sealing ring, and a pressure-bearing flange. The pressure-bearing flange is located between the cylinder and the furnace door. The guide PTFE ring is located on the side of the pressure-bearing flange closer to the cylinder, and the toothed sealing ring is located on the side of the pressure-bearing flange closer to the furnace door.

[0028] By adopting the above technical solution, a toothed sealing ring is used to achieve sealing in the radial direction. At the same time, a guide PTFE ring is provided near the low-pressure side to reduce the wear of the sealing ring and improve its service life. This structure reliably ensures a good sealing effect while realizing the reciprocating motion of the first telescopic component under high pressure, and the pressure-bearing flange can also better bear pressure.

[0029] Optionally, a gap is reserved between the furnace door insulation felt and the end door of the heat spreader.

[0030] By adopting the above technical solution, the possibility of the heat-spreading barrel end door being squeezed by thermal expansion and the furnace door insulation felt, thus reducing the possibility of breakage, is effectively reduced.

[0031] In summary, this application includes at least one of the following beneficial technical effects:

[0032] 1. By setting the high-pressure dynamic sealing device of this application as a combination of furnace door insulation felt, heat soaking barrel end door, first telescopic component, and second telescopic component, both the furnace door insulation felt and the heat soaking barrel end door can be moved. This allows the loss of heat conduction and heat radiation in the furnace hot zone to be effectively slowed down when heating is required, and the furnace body insulation felt and furnace door insulation felt to be separated when cooling is required, thus making cooling faster, greatly reducing the time required for cooling, and improving work efficiency. This application solves to some extent the problem of poor temperature uniformity in gas pressure sintering furnaces in related technologies.

[0033] 2. The variable diameter design of the connecting rod can balance the pressure of the cylinder itself and the pressure inside the furnace cavity, preventing the cylinder from opening due to exceeding the pressure threshold;

[0034] 3. The design of the high-pressure sealing component reliably ensures a good sealing effect while enabling the reciprocating motion of the first telescopic component under high pressure, thereby guaranteeing the sealing performance. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the overall structure of a high-pressure dynamic sealing device for the furnace door of a gas pressure sintering furnace according to an embodiment of this application.

[0036] Figure 2 This is a front cross-sectional view of a high-pressure dynamic sealing device for the furnace door of a gas pressure sintering furnace according to an embodiment of this application.

[0037] Figure 3 yes Figure 2 A magnified view of region A in the middle.

[0038] Explanation of reference numerals in the attached figures:

[0039] 1. Furnace door insulation felt; 2. Heat spreader end door; 3. First telescopic assembly; 31. Cylinder; 32. Connecting rod; 33. Guide rail platform; 34. Pulley; 4. Second telescopic assembly; 41. Spring; 42. Guide connecting rod; 43. Carbon-carbon connecting rod; 5. Metal frame; 6. Receiving groove; 7. Fixing seat; 8. Flange seat; 9. High-pressure dynamic sealing assembly; 91. Guide PTFE ring; 92. Toothed sealing ring; 93. Pressure bearing flange; 10. Spacing space. Detailed Implementation

[0040] The following is in conjunction with the appendix Figure 1-3 This application will be described in further detail.

[0041] This application discloses a high-pressure dynamic sealing device for the furnace door of a gas pressure sintering furnace.

[0042] It should be noted that, in the description of this invention, the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0043] Reference Figure 1 A high-pressure dynamic sealing device for the furnace door of a gas pressure sintering furnace includes a furnace door insulation felt 1, a heat spreader end door 2, a first telescopic component 3, and a second telescopic component 4. Through the arrangement of the first telescopic component 3 and the second telescopic component 4, the furnace door insulation felt 1 can extend and retract even when the furnace door is closed during the use of the gas pressure sintering furnace. Under high-temperature conditions, driving the first telescopic component 3 pushes the furnace door insulation felt 1 forward, allowing it to form a better-sealed space together with the furnace body insulation felt, thus effectively maintaining the temperature of the hot zone inside the furnace. Under cooling conditions, driving the first telescopic component 3 pulls the furnace door insulation felt 1 backward, separating it from the furnace body insulation felt, effectively reducing the temperature of the hot zone inside the furnace. Furthermore, the performance of the sealing device is further enhanced by the second telescopic component and the heat spreader end door 2. This application, to a certain extent, solves the problem of poor temperature uniformity in gas pressure sintering furnaces in related technologies.

[0044] It should be noted that the furnace body of the gas pressure sintering furnace in this application is not specifically shown in the accompanying drawings, nor is the furnace body insulation felt specifically shown. However, these are easily understood by those skilled in the art and should not be construed as limiting the present invention.

[0045] Specifically, refer to Figure 2 and Figure 3 In this embodiment of the application, the furnace door insulation felt 1 is movably connected to the inner wall of the furnace door. Furthermore, the furnace door insulation felt 1 is connected to the furnace door via a first telescopic assembly 3, with one end of the first telescopic assembly 3 fixedly connected to the furnace door insulation felt 1 and the other end fixedly connected to the furnace door.

[0046] Furthermore, the first telescopic component 3 includes a cylinder 31 and a connecting rod 32. The cylinder 31 is located outside the furnace door, and its drive shaft is coaxially arranged with the connecting rod 32. A metal frame 5 is provided on the furnace door insulation felt 1. One end of the connecting rod 32 is connected to the drive shaft of the cylinder 31, and the other end is connected to the metal frame 5. The cylinder 31 is also connected to the outside of the furnace door via a connecting frame, but it should be understood that the drive shaft of the cylinder 31 cannot be fixed or interfered with.

[0047] When the furnace door insulation felt 1 is to be driven, the cylinder 31 is activated. The drive shaft of the cylinder 31 causes the connecting rod 32 to move axially. The other end of the connecting rod 32 is connected to the furnace door insulation felt 1, thus realizing the lateral movement of the furnace door insulation felt 1.

[0048] Furthermore, in order to ensure that the first telescopic component 3 can stably push and pull the furnace door insulation felt 1, the first telescopic component 3 also includes a guide rail platform 33 and a pulley 34. The guide rail platform 33 is fixedly connected to the furnace door, and the pulley 34 is rotatably connected to the connecting rod 32. The pulley 34 can slide on the guide rail platform 33.

[0049] The above-mentioned mechanism effectively allows the pulley 34 to slide on the guide rail platform 33. In other words, when the cylinder 31 is driven, its drive shaft moves the connecting rod 32, and the pulley 34 is rotatably connected to the connecting rod 32. Thus, the lateral movement of the connecting rod 32 causes the pulley 34 to rotate on the guide rail platform 33. This has two advantages: firstly, it provides some support for the connecting rod 32; secondly, it reduces the friction between the connecting rod 32 and the furnace door, ensuring that the connecting rod 32 smoothly moves the furnace door insulation felt 1. It is important to note that both the guide rail platform 33 and the pulley 34 are made of high-temperature resistant materials to further enhance the stability of the first telescopic component 3.

[0050] Furthermore, in order to further ensure the stability of the sealing device of this application, the cross-sectional area of ​​the end of the connecting rod 32 near the furnace door insulation felt 1 is larger than the cross-sectional area of ​​the end near the cylinder 31. In other words, the connecting rod 32 of this application is a variable diameter design.

[0051] The variable diameter design of the connecting rod 32 in this application is designed after pressure calculation. The variable diameter design can effectively offset the pressure borne by the cross section of the connecting rod 32. The variable diameter design of the connecting rod 32 can balance the pressure of the cylinder 31 itself and the pressure inside the furnace cavity, preventing the cylinder 31 from opening due to exceeding the pressure threshold.

[0052] Meanwhile, in this embodiment, the furnace door insulation felt 1 is made of graphite material. Graphite material has the properties of high temperature and high pressure resistance, and its chemical inertness makes it difficult to react chemically with the materials inside the furnace. At the same time, graphite material has a low impurity content, making it suitable for sintering processes of materials with extremely high purity requirements, such as ceramics or superhard materials.

[0053] Specifically, in order to further improve the overall performance of the high-pressure dynamic sealing device of this application, a second telescopic component 4 and a heat-spreading barrel end door 2 are provided to cooperate with the first telescopic component 3 and the furnace door insulation felt 1. The second telescopic component 4 includes a spring 41, a guide connecting rod 42, and a carbon-carbon connecting rod 43. A receiving groove 6 is provided on the inner side wall of the furnace door. A fixing seat 7 is provided in the receiving groove 6. One end of the spring 41 is fixedly connected to the fixing seat 7, and the other end is connected to the guide connecting rod 42. One end of the carbon-carbon connecting rod 43 passes through the furnace door insulation felt 1 and is connected to the heat-spreading barrel end door 2, and the other end is connected to the guide connecting rod 42.

[0054] Furthermore, the heat spreader end door 2 of this application is movably connected to the inner wall of the furnace door, and the furnace door insulation felt 1 is located between the heat spreader end door 2 and the furnace door. Additionally, the heat spreader end door 2 of this application is also made of graphite material.

[0055] The second telescopic component 4 is configured as a combination of a spring 41, a guide connecting rod 42, and a carbon-carbon connecting rod 43. This allows the heat exchanger end door 2 to move together with the first telescopic component 3 when adjusting the furnace door insulation felt 1, further improving the temperature uniformity within the hot zone. Furthermore, the carbon-carbon connecting rod 43 provides strong stability under high-temperature conditions, further enhancing the stability of the second telescopic component 4.

[0056] Furthermore, multiple sets of the second telescopic assembly 4 are provided, arranged in parallel and connected together to the end door 2 of the heat spreader. The specific number needs to be determined based on the size of the furnace body; the larger the furnace body, the more second telescopic assemblies 4 are required. The arrangement of multiple sets of second telescopic assemblies 4 further improves the stability of the end door 2 of the heat spreader.

[0057] Meanwhile, the heat exchange tank end door 2 is connected to the carbon-carbon connecting rod 43 by a nut, and a flange seat 8 is also provided at the end of the fixing seat 7 near the heat exchange tank end door 2.

[0058] The nut connection makes it easy to remove the nut when the heat exchange tank end door 2 needs to be repaired or replaced, and the flange seat 8 effectively ensures the stable operation of the second telescopic component 4.

[0059] Furthermore, in this embodiment, a space 10 is provided between the furnace door insulation felt 1 and the heat spreader end door 2. This effectively reduces the possibility of the heat spreader end door 2 being squeezed by thermal expansion and the furnace door insulation felt 1, thus preventing breakage.

[0060] Specifically, the high-pressure dynamic sealing device of this application also includes a high-pressure dynamic sealing assembly 9, which includes a guide PTFE ring 91, a toothed sealing ring 92, and a pressure-bearing flange 93. The pressure-bearing flange 93 is disposed between the cylinder 31 and the furnace door, the guide PTFE ring 91 is disposed on the side of the pressure-bearing flange 93 near the cylinder 31, and the toothed sealing ring 92 is disposed on the side of the pressure-bearing flange 93 near the furnace door.

[0061] The radial sealing is achieved by a toothed sealing ring 92, while a guide PTFE ring 91 is provided near the low-pressure side to reduce the wear of the sealing ring and improve its service life. This structure reliably ensures a good sealing effect and realizes the reciprocating motion of the first telescopic component 3 under high pressure, and the pressure-bearing flange 93 can also better bear pressure.

[0062] The implementation principle of a high-pressure dynamic sealing device for a gas pressure sintering furnace door according to an embodiment of this application is as follows: The high-pressure dynamic sealing device of this application is configured as a combination of furnace door insulation felt 1, heat soaking tank end door 2, first telescopic component 3, and second telescopic component 4. This allows the furnace door insulation felt 1 to extend and retract forward and backward when the furnace door is closed. When maintaining a high temperature is required, the first telescopic component 3 drives the furnace door insulation felt 1 forward, ensuring the sealing between the furnace body insulation felt and the furnace door insulation felt 1, effectively reducing heat conduction and heat radiation loss, and improving the temperature uniformity of the hot zone. When cooling is required... The first telescopic component 3 is used to drive the furnace door insulation felt 1 to push backward, so that the furnace body insulation felt and the furnace door insulation felt 1 are separated, thereby making the cooling more rapid, greatly reducing the cooling time and improving work efficiency. At the same time, the setting of the heat spreader end door 2 and the second telescopic component 4 can ensure the temperature uniformity when adjusting the furnace door insulation felt 1. The heat spreader end door 2 can be extended and retracted under the action of the second telescopic component 4, which effectively solves the sealing problem and improves the safety of the equipment. This application solves to a certain extent the problem of poor temperature uniformity of gas pressure sintering furnaces in related technologies.

[0063] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A high pressure dynamic seal for a furnace door of a gas pressure sintering furnace, characterized in that include: Furnace door insulation felt (1) is movably connected to the inner wall of the furnace door; The heat-spreading barrel end door (2) is movably connected to the inner wall of the furnace door, and the furnace door insulation felt (1) is located between the heat-spreading barrel end door (2) and the furnace door; The first telescopic component (3) is fixedly connected at one end to the furnace door insulation felt (1) and at the other end to the furnace door; and The second telescopic component (4) is fixedly connected at one end to the end door (2) of the heat exchange tank, and movably connected at the other end to the furnace door.

2. The high-pressure dynamic sealing device for the furnace door of a gas pressure sintering furnace according to claim 1, characterized in that, The first telescopic component (3) includes a cylinder (31) and a connecting rod (32). The cylinder (31) is located outside the furnace door. The drive shaft of the cylinder (31) is coaxially arranged with the connecting rod (32). A metal frame (5) is provided on the furnace door insulation felt (1). One end of the connecting rod (32) is connected to the drive shaft of the cylinder (31), and the other end is connected to the metal frame (5).

3. A high pressure dynamic seal for a furnace door of a gas pressure sintering furnace according to claim 2, characterized in that The cross-sectional area of ​​the end of the connecting rod (32) near the furnace door insulation felt (1) is greater than the cross-sectional area of ​​the end near the cylinder (31).

4. A high pressure dynamic seal for a furnace door of a gas pressure sintering furnace according to claim 2, wherein The first telescopic component (3) also includes a guide rail platform (33) and a pulley (34). The guide rail platform (33) is fixedly connected to the furnace door, and the pulley (34) is rotatably connected to the connecting rod (32). The pulley (34) can slide on the guide rail platform (33).

5. A high pressure dynamic seal for a furnace door of a gas pressure sintering furnace according to claim 1, wherein The second telescopic component (4) includes a spring (41), a guide connecting rod (42), and a carbon-carbon connecting rod (43). The inner side wall of the furnace door is provided with a receiving groove (6), and a fixed seat (7) is provided in the receiving groove (6). One end of the spring (41) is fixedly connected to the fixed seat (7), and the other end is connected to the guide connecting rod (42). One end of the carbon-carbon connecting rod (43) passes through the furnace door insulation felt (1) and is connected to the end door (2) of the heat-spreading barrel, and the other end is connected to the guide connecting rod (42).

6. A high pressure dynamic seal for a furnace door of a gas pressure sintering furnace according to claim 5, characterized in that The heat exchange tank end door (2) is connected to the carbon-carbon connecting rod (43) by a nut, and the fixed seat (7) is also provided with a flange seat (8) at one end near the heat exchange tank end door (2).

7. A high pressure dynamic seal for a furnace door of a gas pressure sintering furnace according to claim 6, characterized in that The second telescopic component (4) is provided in multiple sets, and the multiple sets of the second telescopic component (4) are arranged in parallel and are connected to the heat exchanger end door (2).

8. A high pressure dynamic seal for a furnace door of a gas pressure sintering furnace according to claim 1, wherein The furnace door insulation felt (1) is made of graphite material.

9. A high pressure dynamic seal for a furnace door of a gas pressure sintering furnace according to claim 2, wherein A high-pressure dynamic sealing assembly (9) is also provided. The high-pressure dynamic sealing assembly (9) includes a guide PTFE ring (91), a toothed sealing ring (92), and a pressure-bearing flange (93). The pressure-bearing flange (93) is located between the cylinder (31) and the furnace door. The guide PTFE ring (91) is located on the side of the pressure-bearing flange (93) near the cylinder (31), and the toothed sealing ring (92) is located on the side of the pressure-bearing flange (93) near the furnace door.

10. A high pressure dynamic seal for a furnace door of a gas pressure sintering furnace according to claim 1, wherein A gap (10) is reserved between the furnace door insulation felt (1) and the heat-equalizing barrel end door (2).

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