Adjusting device and semiconductor detection equipment
By combining linear and rotational adjustment structures, multi-degree-of-freedom, high-precision adjustment of optical elements is achieved, solving the problems of low adjustment accuracy and large space occupation of traditional adjustment structures in optical detection, and making it suitable for height-restricted areas.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- BEIJING OPTOKO MICROELECTRONICS TECH CO LTD
- Filing Date
- 2025-06-16
- Publication Date
- 2026-04-17
AI Technical Summary
Traditional adjustment structures cannot achieve multi-degree-of-freedom adjustment of optical components in optical inspection, resulting in low adjustment accuracy. They are also complex, space-consuming, and difficult to assemble and adjust optical components vertically in confined height areas.
The system employs a combination of linear and rotary adjustment structures. The linear adjustment structure drives the rotary adjustment structure to move in both horizontal and vertical directions. The rotary adjustment structure enables multi-degree-of-freedom adjustment of the optical elements through the bearing surface. The rotary adjustment structure is integrated inside the linear adjustment structure, thus reducing the vertical dimension of the adjustment device.
It achieves multi-degree-of-freedom and high-precision adjustment of optical components, is suitable for height-restricted installation areas, reduces the vertical dimensions of the adjustment device, and simplifies operation requirements.
Smart Images
Figure CN224137513U_ABST
Abstract
Description
Technical Field
[0001] This application belongs to the field of semiconductor testing technology, and in particular relates to an adjustment device and semiconductor testing equipment. Background Technology
[0002] Optical inspection is a common step in semiconductor processing.
[0003] During optical inspection, it is necessary to adjust the position of the optical elements so that they remain in the optical design position, so that the light emitted by the light source can form a light spot at the specified position after being reflected or refracted by the optical elements.
[0004] The position of optical elements is usually adjusted by an adjustment mechanism. To achieve multi-degree-of-freedom adjustment of optical elements, the adjustment mechanism has a large number of components, a complex structure, high operational requirements, and occupies a large space. Especially in the vertical direction, it is difficult to assemble and adjust the position of optical elements in the vertical direction in some installation areas with height restrictions. Summary of the Invention
[0005] This application provides an adjustment device and a semiconductor testing equipment that are applicable to height-restricted installation areas and also take into account the adjustment requirements of optical components.
[0006] In a first aspect, this application provides an adjustment device, wherein the adjustment device includes:
[0007] The linear adjustment structure has a receiving recess at the top;
[0008] A rotary adjustment structure is provided in the receiving recess, and the linear adjustment structure can drive the rotary adjustment structure to reciprocate along a first horizontal direction, a second horizontal direction and / or a vertical direction;
[0009] The rotation adjustment structure has a bearing surface for supporting optical elements, and the bearing surface can rotate about the first horizontal direction as the axis of rotation, about the second horizontal direction as the axis of rotation and / or about the vertical direction as the axis of rotation;
[0010] The first horizontal direction, the second horizontal direction, and the vertical direction intersect each other.
[0011] As described above, the linear adjustment structure includes a lifting mechanism, which includes a first component and a second component. The first component has a first recess, and the second component is disposed inside the first recess. The second component and the first component are slidably connected in the vertical direction. The second component can be raised and lowered relative to the first component, and the receiving recess is formed in the second component.
[0012] As described above, the first component includes a first base plate and two first vertical plates. The first base plate is horizontally arranged, and the two first vertical plates are arranged parallel to each other along the first horizontal direction. The first vertical plates are parallel to the vertical direction. The lower ends of the two first vertical plates are fixedly connected to the two ends of the first base plate along the first horizontal direction. The two first vertical plates and the first base plate together form the first recess.
[0013] The second component includes a second base plate and two second vertical plates. The second base plate is horizontally arranged, and the two second vertical plates are arranged parallel to each other along the first horizontal direction. The second vertical plates are parallel to the vertical direction. The lower ends of the two second vertical plates are fixedly connected to the two ends of the second base plate along the first horizontal direction. The two second vertical plates and the second base plate together form the receiving recess.
[0014] Each of the first vertical plates is slidably connected to a second vertical plate along the vertical direction.
[0015] In the adjustment device described above, one of the first vertical plate and the corresponding second vertical plate is provided with a guide groove, and the other of the first vertical plate and the corresponding second vertical plate is provided with a guide bar. The guide bar is embedded in the guide groove, and the guide bar and the guide groove slide in a vertical direction.
[0016] As described above, the linear adjustment structure further includes a first translation member and a second translation member, wherein the second translation member is stacked above the first translation member along the vertical direction, and the second translation member and the first translation member are slidably connected along one of the first horizontal direction and the second horizontal direction;
[0017] The lifting mechanism is located above the second translation member, and the lifting mechanism and the second translation member are slidably connected along the other direction of the first horizontal direction and the second horizontal direction.
[0018] As described above, in the adjustment device, a first guide plate is provided between the first translation member and the second translation member, a portion of the first guide plate is embedded in the first translation member, and another portion of the first guide plate is embedded in the second translation member, and the first guide plate and the first translation member, as well as the first guide plate and the second translation member, slide in a sliding engagement along the first horizontal direction or the second horizontal direction;
[0019] A second guide plate is provided between the second translation member and the lifting mechanism. A portion of the second guide plate is embedded in the second translation member, and another portion of the second guide plate is embedded in the lifting mechanism. The second guide plate and the second translation member, as well as the second guide plate and the lifting mechanism, slide in a second horizontal direction or the first horizontal direction.
[0020] The adjustment device described above, wherein the rotation adjustment structure includes a first rotating component, a second rotating component, and a third rotating component stacked vertically from bottom to top;
[0021] The first rotating component is rotatably connected to the second base plate with the vertical direction as the axial direction;
[0022] The second rotating component is in rotational sliding engagement with the first rotating component with one of the first horizontal direction and the second horizontal direction as its axial direction;
[0023] The third rotating component is rotatably slidably engaged with the second rotating component with the first horizontal direction and the other direction of the second horizontal direction as the axial direction, and the upper surface of the third rotating component forms the bearing surface.
[0024] In the adjustment device described above, one of the second base plate and the first rotating member is provided with a guide shaft, the axial direction of the guide shaft being parallel to the vertical direction, and the other of the second base plate and the first rotating member is provided with a guide hole. The guide shaft and the guide hole are rotatably engaged so that the rotation adjustment structure can rotate relative to the linear adjustment structure.
[0025] In the adjustment device described above, the second rotating member and the first rotating member slide in contact via an arc-shaped surface;
[0026] The third rotating component and the second rotating component are slidably engaged by an arc-shaped surface;
[0027] The axial direction of the arcuate surface that slides between the first rotating member and the second rotating member is perpendicular to the axial direction of the arcuate surface that slides between the third rotating member and the second rotating member.
[0028] Secondly, this application also provides a semiconductor testing device, wherein the semiconductor testing device includes:
[0029] Optical components;
[0030] The adjustment device as described in the first aspect;
[0031] The optical element is mounted on the adjustment device, which is used to translate along a first horizontal direction, a second horizontal direction, and / or a vertical direction to adjust the position of the optical element, and the adjustment device is used to rotate about the first horizontal direction as a rotation axis, about the second horizontal direction as a rotation axis, and / or about the vertical direction as a rotation axis to adjust the angle of the optical element. Housing;
[0032] The adjustment device and semiconductor testing equipment provided in this application, by setting a receiving recess on the top of the linear adjustment structure and placing the rotary adjustment structure in the receiving recess, are equivalent to integrating the rotary adjustment structure inside the linear adjustment structure. While realizing the linear displacement adjustment of the optical element through the linear adjustment structure and the rotation angle adjustment of the optical element through the rotary adjustment structure, the overall size of the adjustment device in the vertical direction is effectively reduced, and it can be applied to height-restricted installation areas while taking into account the adjustment requirements of the optical element. Attached Figure Description
[0033] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0034] Figure 1 This is a schematic diagram of the structure of the adjustment device according to an embodiment of this application;
[0035] Figure 2 This is a cross-sectional view of the adjustment device according to an embodiment of this application;
[0036] Figure 3 This is another schematic diagram of the adjustment device according to an embodiment of this application.
[0037] Explanation of icon numbers:
[0038] 1. Linear adjustment structure; 11. Lifting mechanism; 111. First component; 1111. First recess; 1112. First base plate; 1113. First vertical plate; 112. Second component; 1121. Receiving recess; 1122. Second base plate; 1123. Second vertical plate; 113. Guide groove; 114. Guide bar; 12. First translation component; 13. Second translation component; 14. First guide plate; 15. Second guide plate;
[0039] 2. Rotational adjustment structure; 21. First rotating component; 22. Second rotating component; 23. Third rotating component;
[0040] 3. Guide shaft;
[0041] 4. Guide hole;
[0042] X, vertical direction; Y, first horizontal direction; Z, second horizontal direction. Detailed Implementation
[0043] The features and exemplary embodiments of various aspects of this application will be described in detail below. To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are intended only to explain this application and not to limit it. For those skilled in the art, this application can be implemented without some of these specific details. The following description of the embodiments is merely to provide a better understanding of this application by illustrating examples.
[0044] It should be noted that the terms "vertical direction X," "first horizontal direction Y," and "second horizontal direction Z" used in this application are merely for the purpose of more clearly illustrating the specific structure of this application in conjunction with the accompanying drawings, and this application is not limited thereto. The vertical direction X, the first horizontal direction Y, and the second horizontal direction Z intersect each other. Optionally, the vertical direction X, the first horizontal direction Y, and the second horizontal direction Z are perpendicular to each other.
[0045] As a core component of modern high-tech fields, the semiconductor industry's manufacturing processes encompass numerous sophisticated techniques and technologies. Optical inspection is a common step in semiconductor processing.
[0046] During optical inspection, it is necessary to adjust the position of the optical elements so that they remain in the optical design position, so that the light emitted by the light source can form a light spot at the specified position after being reflected or refracted by the optical elements.
[0047] The position of optical elements is usually adjusted by an adjustment mechanism. Traditional adjustment mechanisms have relatively simple functions and cannot achieve multi-degree-of-freedom adjustment of optical elements, resulting in low adjustment accuracy.
[0048] To achieve multi-degree-of-freedom adjustment of optical elements, the inventors improved the traditional adjustment structure. However, with the increase in the adjustment function of the adjustment structure, the number of components of the adjustment mechanism has increased significantly, the structure is complex, the operation requirements are high, and it occupies a large space. In particular, along the vertical direction X, it is difficult to assemble and adjust the position of the optical elements along the vertical direction X in some height-restricted installation areas.
[0049] In view of the problems existing in the above-mentioned related technologies, the present application provides an adjustment device that can realize multi-degree-of-freedom adjustment of optical elements to meet the adjustment requirements of optical elements, while reducing the size of the adjustment device along the vertical direction X, so as to be suitable for installation areas with height restrictions.
[0050] In a first aspect, embodiments of this application provide an adjustment device, wherein the adjustment device includes a linear adjustment structure 1 and a rotary adjustment structure 2, the rotary adjustment structure 2 having a bearing surface for bearing optical elements.
[0051] The top of the linear adjustment structure 1 is provided with a receiving recess 1121; the rotary adjustment structure 2 is provided in the receiving recess 1121, which is equivalent to integrating the rotary adjustment structure 2 into the interior of the linear adjustment structure 1. Compared with the scheme of providing the rotary adjustment structure 2 at the top of the linear adjustment structure 1, the overall size of the adjustment device along the vertical direction X can be effectively reduced.
[0052] The linear adjustment structure 1 can drive the rotary adjustment structure 2 to reciprocate along the first horizontal direction Y, the second horizontal direction Z and / or the vertical direction X; so as to realize the position adjustment of the optical element in three-dimensional space.
[0053] The bearing surface can rotate and swing about the first horizontal direction Y as the axis of rotation, the second horizontal direction Z as the axis of rotation, and / or the vertical direction X as the axis of rotation; so as to realize the angle adjustment of the optical element.
[0054] For example, the bearing surface can be rotated and oscillated independently about the first horizontal direction Y or about the second horizontal direction Z to adjust the angle between the bearing surface and the horizontal plane.
[0055] For example, the bearing surface can be rotated independently about the vertical direction X as the axis of rotation to drive the optical element to rotate, so as to calibrate and adjust the position of its center.
[0056] For example, the bearing surface can rotate and swing about the first horizontal direction Y or the second horizontal direction Z, either alone or simultaneously, to adjust the angle between the bearing surface and the horizontal plane, while simultaneously rotating about the vertical direction X, so as to drive the optical element to rotate, so as to calibrate and adjust the position of its center.
[0057] By combining linear adjustment structure 1 and rotary adjustment structure 2, the optical element can be adjusted with multiple degrees of freedom and high precision, which can meet the adjustment requirements of the optical element and be applicable to installation areas with height restrictions.
[0058] like Figures 1 to 3 As shown in the embodiment of this application, the adjustment device includes a linear adjustment structure 1 comprising a lifting mechanism 11 for adjusting the position of the optical element along the vertical X direction.
[0059] The lifting mechanism 11 includes a first component 111 and a second component 112 that are movably connected. Specifically, the first component 111 has a first recess 1111 for accommodating the second component 112. The second component 112 is disposed inside the first recess 1111 and is slidably connected to the first component 111 in the vertical direction X. The second component 112 can slide relative to the first component 111 and drive the optical element to rise and fall. The accommodating recess 1121 is formed in the second component 112.
[0060] Optionally, the depth of the receiving recess 1121 along the vertical direction X is greater than or equal to the height of the rotary adjustment structure 2 along the vertical direction X, so as to ensure that when the rotary adjustment structure 2 is placed in the receiving recess 1121, the top of the rotary adjustment structure 2 will not protrude from the top of the linear adjustment structure 1, so that the height of the linear adjustment structure 1 along the vertical direction X is the height of the adjustment device along the vertical direction X, which is beneficial to minimizing the height of the adjustment device along the vertical direction X.
[0061] like Figures 1 to 3 As shown in the embodiment of this application, the adjustment device includes a first component 111 comprising a first base plate 1112 and two first vertical plates 1113. The first base plate 1112 is horizontally arranged, and the two first vertical plates 1113 are arranged parallel to each other along the first horizontal direction Y. The first vertical plates 1113 are parallel to the vertical direction X. The lower ends of the two first vertical plates 1113 are fixedly connected to the two ends of the first base plate 1112 along the first horizontal direction Y to ensure the structural strength of the first component 111. The two first vertical plates 1113 and the first base plate 1112 enclose a first recess 1111.
[0062] The second component 112 includes a second base plate 1122 and two second vertical plates 1123. The second base plate 1122 is horizontally arranged, and the two second vertical plates 1123 are arranged parallel to each other along the first horizontal direction Y and are parallel to the vertical direction X. The lower ends of the two second vertical plates 1123 are fixedly connected to the two ends of the second base plate 1122 along the first horizontal direction Y to ensure the structural strength of the second component 112. The two second vertical plates 1123 and the second base plate 1122 enclose and form a receiving recess 1121.
[0063] That is, both the first component 111 and the second component 112 are roughly U-shaped.
[0064] Each first vertical plate 1113 is slidably connected to a second vertical plate 1123 along the vertical direction X. The two second vertical plates 1123 slide synchronously relative to the corresponding first vertical plate 1113 in the vertical direction X. During the lifting and lowering process of the second component 112, the force on the second component 112 can be effectively ensured to be uniform, the lifting and lowering of the second component 112 can be ensured to be smooth, and the jamming situation can be reduced.
[0065] like Figures 1 to 3 As shown in the embodiment of this application, the adjustment device is provided in which one of the first vertical plate 1113 and the corresponding second vertical plate 1123 is provided with a guide groove 113, and the other of the first vertical plate 1113 and the corresponding second vertical plate 1123 is provided with a guide bar 114. The guide bar 114 is embedded in the guide groove 113, and the guide bar 114 and the guide groove 113 slide in a vertical direction X.
[0066] The first vertical plate 1113 and the second vertical plate 1123 are connected by a guide bar 114 and a guide groove 113 that slide along the vertical direction X. Both the guide groove 113 and the guide bar 114 extend along the vertical direction X.
[0067] The upper end of the guide groove 113 is open and the lower end is closed. During the sliding process of the guide bar 114 along the guide groove 113, a part of the guide bar 114 can extend out from the upper end of the guide groove 113 to facilitate the assembly and disassembly of the first component 111 and the second component 112.
[0068] Optionally, along the width direction of the guide groove 113, the size of the groove opening is smaller than the maximum size inside the groove, so as to ensure that the guide bar 114 will not fall off from the groove opening after being placed inside the guide groove.
[0069] Optionally, such as Figure 1 The cross-section of the guide groove 113 shown is arc-shaped, or as... Figure 3 As shown, the cross-section of the guide groove 113 is trapezoidal, and the guide bar is adapted to the shape of the guide groove.
[0070] Optionally, such as Figure 3 As shown, at least one set of guide grooves 113 and guide bars 114 are provided between the first vertical plate 1113 and the second vertical plate 1123 respectively.
[0071] like Figures 1 to 3 As shown in the embodiment of this application, the adjustment device includes a linear adjustment structure 1 that further includes a first translation member 12 and a second translation member 13. The second translation member 13 is stacked above the first translation member 12 along the vertical direction X. The second translation member 13 and the first translation member 12 are slidably connected along one of the first horizontal direction Y and the second horizontal direction Z.
[0072] The lifting mechanism 11 is located above the second translation member 13, and the lifting mechanism 11 and the second translation member 13 are slidably connected along the other direction of the first horizontal direction Y and the second horizontal direction Z.
[0073] Both the first translation component 12 and the second translation component 13 are flat plate structures, which have the advantages of simple structure, easy processing and manufacturing and low cost. The plate structure has a flat surface, which can provide good support from bottom to top after being stacked to ensure the overall structural stability of the adjustment device.
[0074] For example, such as Figure 1 As shown, the second translation member 13 is slidably connected to the first translation member 12 along the second horizontal direction Z, and the lifting mechanism 11 is slidably connected to the second translation member 13 along the first horizontal direction Y.
[0075] For example, such as Figure 3 As shown, the second translation member 13 is slidably connected to the first translation member 12 along the first horizontal direction Y, and the lifting mechanism 11 is slidably connected to the second translation member 13 along the second horizontal direction Z.
[0076] like Figures 1 to 3 As shown in the embodiment of this application, the adjustment device includes a first guide plate 14 between the first translation member 12 and the second translation member 13. A portion of the first guide plate 14 is embedded in the first translation member 12, and another portion of the first guide plate 14 is embedded in the second translation member 13, so as to ensure that the first guide plate 14 is hidden between the first translation member 12 and the second translation member 13, and to ensure that the setting of the first guide plate 14 will not increase the overall height of the first translation member 12 and the second translation member 13 in the vertical direction X after assembly.
[0077] The first guide plate 14 and the first translation member 12, as well as the first guide plate 14 and the second translation member 13, slide in a first horizontal direction Y or a second horizontal direction Z.
[0078] For example, such as Figure 1 As shown, the first guide plate 14 and the first translation member 12, as well as the first guide plate 14 and the second translation member 13, slide in a Z-direction along the second horizontal direction.
[0079] For example, such as Figure 3 As shown, the first guide plate 14 and the first translation member 12, as well as the first guide plate 14 and the second translation member 13, slide in a first horizontal direction Y.
[0080] The sliding direction between the first translation member 12 and the second translation member 13 is defined by the first guide plate 14.
[0081] A second guide plate 15 is provided between the second translation member 13 and the lifting mechanism 11. A part of the second guide plate 15 is embedded in the second translation member 13, and the other part of the second guide plate 15 is embedded in the lifting mechanism 11, so as to ensure that the second guide plate 15 is hidden between the second translation member 13 and the lifting mechanism 11, and to ensure that the setting of the second guide plate 15 will not increase the overall height of the second translation member 13 and the lifting mechanism 11 in the vertical direction X after assembly.
[0082] The second guide plate 15 and the second translation member 13, as well as the second guide plate 15 and the lifting mechanism 11, slide in the second horizontal direction Z or the first horizontal direction Y.
[0083] For example, such as Figure 1 As shown, the second guide plate 15 and the second translation member 13, as well as the second guide plate 15 and the lifting mechanism 11, slide in a first horizontal direction Y.
[0084] For example, such as Figure 3 As shown, the second guide plate 15 and the second translation member 13, as well as the second guide plate 15 and the lifting mechanism 11, slide in a sliding fit along the second horizontal direction Z.
[0085] The sliding direction between the second translation member 13 and the lifting mechanism 11 is defined by the second guide plate 15.
[0086] like Figures 1 to 3 As shown in the embodiment of this application, the adjustment device includes a first rotating component 21, a second rotating component 22 and a third rotating component 23 stacked from bottom to top along the vertical direction X.
[0087] The first rotating component 21 is rotatably connected to the second base plate 1122 with the vertical direction X as the axis; through the rotatable connection between the first rotating component 21 and the second base plate 1122, the optical element can be rotated and adjusted with the vertical direction X as the axis of rotation.
[0088] The second rotating component 22 rotates and slides with the first rotating component 21 with one of the first horizontal direction Y and the second horizontal direction Z as its axial direction.
[0089] For example, such as Figure 1 As shown, the second rotating component 22 is in a sliding engagement with the first rotating component 21 with the first horizontal direction Y as the axis, which can realize the rotation adjustment of the optical element with the first horizontal direction Y as the axis of rotation.
[0090] For example, such as Figure 3 As shown, the second rotating component 22 is in a sliding engagement with the first rotating component 21 with the second horizontal direction Z as the axis, which enables the optical element to be rotated and adjusted with the second horizontal direction Z as the axis of rotation.
[0091] The third rotating component 23 rotates and slides with the second rotating component 22 with the first horizontal direction Y and the second horizontal direction Z as the axial direction.
[0092] For example, such as Figure 1As shown, the third rotating component 23 is rotatably and slidingly engaged with the second rotating component 22 with the second horizontal direction Z as the axis, which can realize the rotational adjustment of the optical element with the second horizontal direction Z as the axis of rotation.
[0093] For example, such as Figure 3 As shown, the third rotating component 23 is in a sliding engagement with the second rotating component 22 with the first horizontal direction Y as the axis, which can realize the rotation adjustment of the optical element with the first horizontal direction Y as the axis of rotation.
[0094] The upper surface of the third rotating member 23 forms a bearing surface for supporting optical elements.
[0095] like Figure 2 As shown in the embodiment of this application, the adjustment device is provided in which one of the second base plate 1122 and the first rotating member 21 is provided with a guide shaft 3, the axial direction of the guide shaft 3 is parallel to the vertical direction X, and the other of the second base plate 1122 and the first rotating member 21 is provided with a guide hole 4. The guide shaft 3 and the guide hole 4 are rotatably engaged so that the rotation adjustment structure 2 can rotate relative to the linear adjustment structure 1, which can be used to adjust the center of the optical element.
[0096] Optionally, the bottom of the first rotating member 21 is recessed upward to form a guide hole 4, which is a blind hole. The second base plate 1122 is protruded to form a guide shaft 3, which is rotatably inserted into the guide hole 4. The outer peripheral surface of the guide shaft 3 is slidably attached to the hole wall of the guide hole 4.
[0097] Optionally, a bearing is provided between the guide shaft 3 and the guide hole 4 to improve the smoothness of the rotation of the first rotating component 21.
[0098] like Figures 1 to 3 As shown in the embodiment of this application, the adjustment device includes a second rotating member 22 and a first rotating member 21 that slide in a curved surface; that is, the upper surface of the first rotating member 21 and the lower surface of the second rotating member 22 are both curved surfaces that are in close contact with each other. When the first rotating member 21 and the second rotating member 22 move relative to each other, the curved surface guides the second rotating member 22 to swing, thereby adjusting the angle of the optical element.
[0099] The third rotating component 23 and the second rotating component 22 are in sliding engagement through an arc-shaped surface; that is, the lower surface of the third rotating component 23 and the upper surface of the second rotating component 22 are both arc-shaped surfaces, which are in close contact with each other. When the third rotating component 23 and the second rotating component 22 move relative to each other, the arc-shaped surface guides the third rotating component 23 to swing, thereby adjusting the angle of the optical element.
[0100] The axial direction of the arcuate surface of the sliding fit between the first rotating member 21 and the second rotating member 22 is perpendicular to the axial direction of the arcuate surface of the sliding fit between the third rotating member 23 and the second rotating member 22.
[0101] The axial direction of the arcuate surface of the sliding fit between the first rotating member 21 and the second rotating member 22 is parallel to the first horizontal direction Y, and the axial direction of the arcuate surface of the sliding fit between the third rotating member 23 and the second rotating member 22 is parallel to the second horizontal direction Z.
[0102] The axial direction of the arcuate surface of the sliding fit between the first rotating member 21 and the second rotating member 22 is parallel to the second horizontal direction Z, and the axial direction of the arcuate surface of the sliding fit between the third rotating member 23 and the second rotating member 22 is parallel to the first horizontal direction Y.
[0103] This application also provides a semiconductor inspection device, which is an electron beam inspection device. By controlling the focusing state of charged particles, the charged particles interact with the sample, and imaging is performed by capturing particle signals such as secondary particles and transmitted particles. This allows for the characterization of information such as the morphology, structure, and composition of the sample. Electron beam inspection devices are commonly used to inspect surface defects or critical dimensions of wafers.
[0104] Optionally, the electron beam inspection equipment may include semiconductor defect inspection equipment, semiconductor critical dimension measurement equipment, or semiconductor defect re-inspection equipment. The wafer dimension measurement equipment is used to measure the dimensional data of the wafer, while the wafer defect inspection equipment and wafer defect re-inspection equipment are used to detect defects on the wafer surface, such as surface particles, scratches, and unevenness. These can be applied to defect detection in semiconductor masks, substrates, epitaxial wafers, and other products. Specifically, the wafer dimension measurement equipment, wafer defect inspection equipment, or wafer defect re-inspection equipment may employ electron beam imaging equipment.
[0105] Semiconductor testing equipment includes optical components and adjustment devices as described above;
[0106] The optical element is mounted on an adjustment device, which is used to translate along a first horizontal direction Y, a second horizontal direction Z and / or a vertical direction X to adjust the position of the optical element, and the adjustment device is used to rotate about the first horizontal direction Y as the axis of rotation, about the second horizontal direction Z as the axis of rotation and / or about the vertical direction X as the axis of rotation to adjust the angle of the optical element.
[0107] The adjustment device and semiconductor testing equipment provided in this application, by providing a receiving recess 1121 on the top of the linear adjustment structure 1 and placing the rotary adjustment structure 2 in the receiving recess 1121, are equivalent to integrating the rotary adjustment structure 2 inside the linear adjustment structure 1. While realizing the linear displacement adjustment of the optical element through the linear adjustment structure 1 and the rotation angle adjustment of the optical element through the rotary adjustment structure 2, the overall size of the adjustment device along the vertical direction X is effectively reduced, taking into account the adjustment requirements of the optical element and being applicable to installation areas with height restrictions.
[0108] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes said element.
[0109] The above description is merely a specific implementation of this application. Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, modules, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here. It should be understood that the protection scope of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the protection scope of this application.
Claims
1. An adjusting device, characterized in that The regulating device includes: A linear adjustment structure (1) is provided with a receiving recess (1121) at the top; A rotary adjustment structure (2) is provided in the receiving recess (1121), and the linear adjustment structure (1) can drive the rotary adjustment structure (2) to reciprocate along the first horizontal direction (Y), the second horizontal direction (Z) and / or the vertical direction (X); The rotation adjustment structure (2) has a bearing surface for carrying optical elements, which can rotate about the first horizontal direction (Y), the second horizontal direction (Z) and / or the vertical direction (X) as the axis of rotation; The first horizontal direction (Y), the second horizontal direction (Z), and the vertical direction (X) intersect each other.
2. The adjustment device of claim 1, wherein The linear adjustment structure (1) includes a lifting mechanism (11), which includes a first component (111) and a second component (112). The first component (111) has a first recess (1111), and the second component (112) is disposed inside the first recess (1111). The second component (112) and the first component (111) are slidably connected in the vertical direction (X). The second component (112) can be raised and lowered relative to the first component (111), and the receiving recess (1121) is formed in the second component (112).
3. The adjustment device of claim 2, wherein, The first component (111) includes a first base plate (1112) and two first vertical plates (1113). The first base plate (1112) is horizontally arranged, and the two first vertical plates (1113) are arranged parallel to each other along the first horizontal direction (Y). The first vertical plates (1113) are parallel to the vertical direction (X). The lower ends of the two first vertical plates (1113) are fixedly connected to the two ends of the first base plate (1112) along the first horizontal direction (Y). The two first vertical plates (1113) and the first base plate (1112) enclose the first recess (1111). The second component (112) includes a second base plate (1122) and two second vertical plates (1123). The second base plate (1122) is horizontally arranged, and the two second vertical plates (1123) are arranged parallel to each other along the first horizontal direction (Y) and are parallel to the vertical direction (X). The lower ends of the two second vertical plates (1123) are respectively fixedly connected to the two ends of the second base plate (1122) along the first horizontal direction (Y). The two second vertical plates (1123) and the second base plate (1122) enclose the receiving recess (1121). Each of the first vertical plates (1113) and a second vertical plate (1123) are slidably connected along the vertical direction (X).
4. The adjustment device of claim 3, wherein One of the first vertical plate (1113) and the corresponding second vertical plate (1123) is provided with a guide groove (113), and the other of the first vertical plate (1113) and the corresponding second vertical plate (1123) is provided with a guide strip (114). The guide strip (114) is embedded in the guide groove (113), and the guide strip (114) and the guide groove (113) slide in cooperation along the vertical direction (X).
5. Adjusting device according to any one of claims 2 to 4, characterized in that The linear adjustment structure (1) further includes a first translation component (12) and a second translation component (13). The second translation component (13) is stacked above the first translation component (12) along the vertical direction (X). The second translation component (13) and the first translation component (12) are slidably connected along one of the first horizontal direction (Y) and the second horizontal direction (Z). The lifting mechanism (11) is located above the second translation member (13), and the lifting mechanism (11) and the second translation member (13) are slidably connected along the other direction of the first horizontal direction (Y) and the second horizontal direction (Z).
6. The adjustment device of claim 5, wherein, A first guide plate (14) is provided between the first translation member (12) and the second translation member (13). A portion of the first guide plate (14) is embedded in the first translation member (12), and another portion of the first guide plate (14) is embedded in the second translation member (13). The first guide plate (14) and the first translation member (12), as well as the first guide plate (14) and the second translation member (13), slide in a sliding engagement along the first horizontal direction (Y) or the second horizontal direction (Z). A second guide plate (15) is provided between the second translation member (13) and the lifting mechanism (11). A part of the second guide plate (15) is embedded in the second translation member (13), and another part of the second guide plate (15) is embedded in the lifting mechanism (11). The second guide plate (15) and the second translation member (13), as well as the second guide plate (15) and the lifting mechanism (11), slide in cooperation along the second horizontal direction (Z) or the first horizontal direction (Y).
7. The adjustment device of claim 3, wherein The rotation adjustment structure (2) includes a first rotating component (21), a second rotating component (22) and a third rotating component (23) stacked from bottom to top along the vertical direction (X); The first rotating component (21) is rotatably connected to the second base plate (1122) with the vertical direction (X) as the axis; The second rotating member (22) rotates and slides with the first rotating member (21) with one of the first horizontal direction (Y) and the second horizontal direction (Z) as its axial direction; The third rotating member (23) is rotatably slidably engaged with the second rotating member (22) with the other of the first horizontal direction (Y) and the second horizontal direction (Z) as the axial direction, and the upper surface of the third rotating member (23) forms the bearing surface.
8. The adjustment device of claim 7, wherein, One of the second base plate (1122) and the first rotating member (21) is provided with a guide shaft (3), the axial direction of the guide shaft (3) is parallel to the vertical direction (X), and the other of the second base plate (1122) and the first rotating member (21) is provided with a guide hole (4). The guide shaft (3) and the guide hole (4) are rotatably engaged so that the rotation adjustment structure (2) can rotate relative to the linear adjustment structure (1).
9. The adjustment device of claim 7, wherein, The second rotating component (22) and the first rotating component (21) are in sliding engagement via an arc-shaped surface; The third rotating component (23) and the second rotating component (22) are slidably engaged by an arc-shaped surface; The axial direction of the arcuate surface of the sliding fit between the first rotating member (21) and the second rotating member (22) is perpendicular to the axial direction of the arcuate surface of the sliding fit between the third rotating member (23) and the second rotating member (22).
10. A semiconductor inspection apparatus characterized by comprising: The semiconductor testing equipment includes: Optical components; The adjusting device as described in any one of claims 1 to 9; The optical element is mounted on the adjustment device, which is used to translate along a first horizontal direction (Y), a second horizontal direction (Z) and / or a vertical direction (X) to adjust the position of the optical element, and the adjustment device is used to rotate about the first horizontal direction (Y) as the axis of rotation, about the second horizontal direction (Z) as the axis of rotation and / or about the vertical direction (X) as the axis of rotation to adjust the angle of the optical element.