Reaction device and multi-source evaporation equipment

Abstract

The utility model relates to a reaction device and multi-source evaporation equipment, the reaction device comprises a shell, a sensor and a light-transmitting assembly, a reaction cavity is formed in the shell, a light-transmitting hole is formed in the side wall of the shell, the sensor is arranged in the light-transmitting hole, the sensor is used for transmitting or receiving detection light, and the light-transmitting assembly is arranged in the shell. The light-transmitting assembly comprises a fixed light-transmitting part, a plurality of movable light-transmitting parts and a protective part, the fixed light-transmitting part is arranged in the light-transmitting hole, the movable light-transmitting parts are movably arranged on the inner surface of the side wall, the movable light-transmitting parts can move between the shielding station and the storage station, and when the movable light-transmitting parts are located at the shielding station, the movable light-transmitting parts are located at the storage station. The movable light-transmitting parts are located on a transmission path of the detection light, when the movable light-transmitting parts are located at the storage station, the movable light-transmitting parts avoid the transmission path of the detection light, and the protection part is arranged on the inner surface of the side wall and can cover the multiple movable light-transmitting parts located at the storage station.

Description

Technical Field

[0001] This application relates to the field of battery production equipment technology, and in particular to a reaction apparatus and a multi-source vapor deposition apparatus. Background Technology

[0002] In the perovskite route of the photovoltaic cell industry, multi-source evaporation equipment is a key piece of equipment for coating the core functional layer of perovskite cells. Multi-source evaporation equipment is a flat-panel horizontal physical vapor deposition (PVD) system, consisting of multiple vacuum chambers connected in series. The cell, carried by a carrier plate, enters from the feed chamber, passes through the transition chamber to the process chamber for coating, and then exits through the transition chamber and the discharge chamber. Through-beam photoelectric sensors are installed on both sides of each vacuum chamber to detect the presence or absence of the carrier plate by determining whether the light path is blocked.

[0003] In existing solutions, byproducts from the reaction chamber adhere to the glass window through the cavity wall, reducing light transmittance and leading to sensor misjudgments. When byproduct accumulation causes light transmittance to fall below 50%, the receiver may mistakenly identify a carrier plate in the chamber when it is actually empty. This necessitates shutdown and maintenance of the multi-source evaporation equipment, disrupting production continuity, causing the evaporation source material to deteriorate and become unusable, and ultimately resulting in defective battery semi-finished products. Utility Model Content

[0004] This application discloses a reaction device and a multi-source vapor deposition equipment, which can prevent the byproducts accumulated in the reaction chamber from affecting the sensor's judgment results, ensuring the reliability of the sensor's detection of the presence or absence of the carrier plate, thereby avoiding the problem of raw material scrapping caused by downtime maintenance.

[0005] To achieve the above objectives, embodiments of this application disclose a reaction apparatus, comprising:

[0006] A housing, wherein a reaction chamber is formed inside the housing, and light-transmitting holes are provided on the side wall of the housing;

[0007] A sensor is disposed in the light-transmitting hole, and the sensor is used to emit or receive detection light;

[0008] A light-transmitting component includes a fixed light-transmitting element, multiple movable light-transmitting elements, and a protective element. The fixed light-transmitting element is disposed at the light-transmitting hole. The movable light-transmitting elements are movably disposed on the inner surface of the side wall and can move between a shielding station and a storage station. When the movable light-transmitting element is located at the shielding station, it is positioned on the transmission path of the detection light. When the movable light-transmitting element is located at the storage station, it avoids the transmission path of the detection light. The protective element is disposed on the inner surface of the side wall and can cover the multiple movable light-transmitting elements located at the storage station.

[0009] As an optional implementation, the housing includes a first sidewall and a second sidewall disposed opposite to each other; the light-transmitting hole includes a first light-transmitting hole and a second light-transmitting hole, the first light-transmitting hole being disposed on the first sidewall and the second light-transmitting hole being disposed on the second sidewall; the sensor includes a transmitting end and a receiving end, the transmitting end being disposed on the first light-transmitting hole and the receiving end being disposed on the second light-transmitting hole, and the detection light emitted by the transmitting end can be received by the receiving end; the light-transmitting component includes a first light-transmitting component and a second light-transmitting component, the first light-transmitting component including a first fixed light-transmitting element, a plurality of first movable light-transmitting elements and a first protective element, the first fixed light-transmitting element being disposed on the first light-transmitting hole, and so on. The first movable light-transmitting element is movably disposed on the inner surface of the first sidewall, and the first protective element is disposed on the inner surface of the first sidewall. The first protective element can cover the plurality of first movable light-transmitting elements located at the storage station. The second light-transmitting component includes a second fixed light-transmitting element, a plurality of second movable light-transmitting elements, and a second protective element. The second fixed light-transmitting element is disposed at the second light-transmitting hole and is located between the transmitting end and the receiving end. The second movable light-transmitting element is movably disposed on the inner surface of the second sidewall, and the second protective element is disposed on the inner surface of the second sidewall. The second protective element can cover the plurality of second movable light-transmitting elements located at the storage station.

[0010] As an optional implementation, the first light-transmitting component further includes: a first rotating shaft, which is rotatably disposed through the housing; a plurality of first movable light-transmitting elements are connected to the first rotating shaft; along the radial direction of the rotating shaft, the distance between each first movable light-transmitting element and the first rotating shaft is equal to the distance between the first rotating shaft and the first light-transmitting hole; the first rotating shaft is capable of driving the first movable light-transmitting elements to rotate between the shielding station and the storage station.

[0011] As an optional implementation, the first light-transmitting component further includes: a first rotating frame, the first rotating frame being sleeved on the first rotating shaft and capable of rotating with the first rotating shaft, the first rotating frame being provided with a plurality of first mounting holes, the plurality of first mounting holes being arranged at intervals along the circumference of the first rotating shaft, and along the radial direction of the rotating shaft, the distance between each first mounting hole and the first rotating shaft is equal to the distance between the first rotating shaft and the first light-transmitting hole, and each of the first movable light-transmitting elements is respectively disposed in each of the first mounting holes.

[0012] As an optional implementation, the spacing between two adjacent first mounting holes is equal along the circumferential direction of the first rotation axis.

[0013] As an optional implementation, the first protective component is disposed on the side of the first rotating frame away from the first sidewall, and the first protective component is provided with a first clearance hole, which corresponds to the first light-transmitting hole on the transmission path of the detection light.

[0014] As an optional implementation, the first protective member is detachably connected to the inner surface of the first sidewall.

[0015] As an optional implementation, the first light-transmitting component further includes: a first sealing member disposed between the first protective member and the inner surface of the first sidewall to seal the gap between the first protective member and the inner surface of the first sidewall.

[0016] As an optional implementation, the first light-transmitting component further includes: a first rotating handle disposed on the outer surface of the first sidewall, and the first rotating handle being connected to the first rotating shaft, the first rotating handle being capable of driving the first rotating shaft to rotate; a first positioning block disposed on the outer surface of the first sidewall, and the first positioning block being disposed close to the first rotating handle; a first positioning magnetic element disposed on the side of the first positioning block facing the first rotating handle; and a plurality of first movable magnetic elements, the plurality of first movable magnetic elements being disposed circumferentially spaced on the first rotating handle, the first movable magnetic elements being disposed one-to-one with the first movable light-transmitting element, and when the first movable magnetic element rotates to a position facing the first positioning magnetic element, the first movable magnetic element being able to attract the first positioning magnetic element to each other, so that the first movable light-transmitting element corresponding to the first movable magnetic element is located at the blocking position.

[0017] As an optional implementation, the reaction apparatus further includes: a first rotary seal disposed between the first rotating shaft and the first sidewall to seal the gap between the first rotating shaft and the first sidewall.

[0018] A second aspect of this application provides a multi-source vapor deposition apparatus, comprising: a plurality of the aforementioned reaction devices; a carrier plate, the carrier plate being movable within the plurality of reaction devices, the carrier plate being used to carry the battery to be processed.

[0019] Compared with the prior art, the beneficial effects of this application are:

[0020] The reaction apparatus provided in this application solves the problems of reduced light transmittance and sensor misjudgment caused by byproducts adhering to the glass window of the cavity wall in existing solutions through the synergistic effect of the housing, sensor, and light-transmitting component. By flexibly adjusting the position of the movable light-transmitting component, the transmission path of the detection light can be dynamically kept unobstructed and clean, improving the accuracy and reliability of sensor detection, reducing the number of times the reaction apparatus needs to be shut down for maintenance, ensuring the continuity of production, reducing the waste of evaporation source materials and the risk of defective battery semi-finished products, and improving the overall efficiency and quality of perovskite battery coating production. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of a through-beam photoelectric sensor in the prior art;

[0023] Figure 2 This is one of the structural schematic diagrams of the reaction apparatus provided in the embodiments of this application;

[0024] Figure 3 This is a second schematic diagram of the reaction apparatus provided in the embodiments of this application, and a partially enlarged view thereof;

[0025] Figure 4 This is a third schematic diagram of the reaction apparatus provided in the embodiments of this application, and a partially enlarged view thereof;

[0026] Figure 5 Fourth schematic diagram of the reaction apparatus provided in the embodiments of this application;

[0027] Figure 6 Fifth schematic diagram of the reaction device provided in the embodiments of this application and its partial enlarged view;

[0028] Figure 7 This is a schematic diagram of the structure of the first rotating handle provided in an embodiment of this application;

[0029] Figure 8 This is a schematic diagram of the structure of the multi-source vapor deposition equipment provided in the embodiments of this application.

[0030] Explanation of reference numerals in the attached figures:

[0031] a- Through-cavity wall glass window; 100- Reaction device; 1- Housing; 11- First side wall; 12- Second side wall; 13- Door; 2- Sensor; 21- Transmitter; 22- Receiver; A- Light-transmitting component; 3- First light-transmitting component; 31- First fixed light-transmitting component; 32- First movable light-transmitting component; 33- First protective component; 331- First clearance hole; 34- First rotating shaft; 35- First rotating frame; 36- First rotating handle; 37- First positioning block; 38- First positioning magnetic component; 39- First movable magnetic component; 4- Second light-transmitting component; 41- Second fixed light-transmitting component; 42- Second movable light-transmitting component; 43- Second protective component; 200- Multi-source evaporation equipment; 201- Carrier plate. Detailed Implementation

[0032] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0033] In this application, the terms "upper," "lower," "top," "bottom," "inner," "vertical," and "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0034] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0035] Furthermore, the terms "set up," "equipped with," and "connected" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0036] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0037] In the perovskite technology route of the photovoltaic cell industry, multi-source evaporation equipment is crucial for achieving the coating of the core functional layer of perovskite cells. Multi-source evaporation equipment employs flat-panel horizontal physical vapor deposition technology and consists of multiple vacuum chambers connected in series. The carrier plate, carrying the cell, enters from the feed chamber, first passing through a transition chamber, and then reaching the process chamber for coating. Within the process chamber, the multi-source evaporation equipment pre-treats the carrier plate and cell, such as through heating and cleaning, to ensure coating quality. Simultaneously, the equipment checks the vacuum level within the process chamber to ensure it meets the high vacuum environment required for coating. Next, the equipment simultaneously evaporates different materials through multiple evaporation sources. These materials are deposited in gaseous form on the carrier plate surface under vacuum, forming the core functional layer of the perovskite cell. During the coating process, the equipment controls the temperature, evaporation rate, and deposition time of the evaporation sources to ensure the uniformity and thickness of the coating meet design requirements. After coating, the carrier plate passes from the process chamber through the transition chamber to the discharge chamber. In the discharge chamber, the multi-source vapor deposition equipment cools and performs preliminary testing on the coated batteries. Finally, the cooled and tested batteries are carried out of the discharge chamber by a carrier plate, completing the entire coating process.

[0038] Please see Figure 1 , Figure 1 This is a schematic diagram of the structure of the through-beam photoelectric sensor in the prior art. During the entire processing, the through-beam photoelectric sensor of the detection chamber is installed on both sides of each vacuum chamber. It detects the presence or absence of the carrier plate by judging whether the light path is blocked, thus ensuring the accurate transmission of the carrier plate between each chamber and the smooth progress of the coating process.

[0039] However, in existing solutions, the glass windows penetrating the cavity walls are prone to adhesion of byproducts generated within the reaction chamber, leading to decreased light transmittance and subsequent sensor misjudgment. When byproduct accumulation reduces light transmittance to below 50%, the receiver may misjudge the presence of a carrier plate in the chamber, when in fact there is no carrier plate present. In this case, the multi-source evaporation equipment must be shut down for maintenance, disrupting production continuity, causing the evaporation source material to deteriorate and become unusable, further resulting in defective battery semi-finished products.

[0040] Based on this, embodiments of this application disclose a reaction apparatus and a multi-source vapor deposition equipment, which can prevent byproducts accumulated in the reaction chamber from affecting the sensor's judgment results, ensuring the reliability of the sensor's detection of the presence or absence of the carrier plate, thereby avoiding the problem of raw material scrapping caused by downtime maintenance.

[0041] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0042] This application discloses a reaction apparatus 100, comprising:

[0043] The housing 1 has a reaction chamber inside, and a light-transmitting hole is provided on the side wall of the housing 1.

[0044] Sensor 2 is disposed in the light-transmitting hole, and sensor 2 is used to emit or receive detection light;

[0045] A light-transmitting component A includes a fixed light-transmitting element, multiple movable light-transmitting elements, and a protective element. The fixed light-transmitting element is disposed at the light-transmitting hole. The movable light-transmitting elements are movably disposed on the inner surface of the side wall and can move between a shielding station and a storage station. When the movable light-transmitting element is located at the shielding station, it is positioned on the transmission path of the detection light. When the movable light-transmitting element is located at the storage station, it avoids the transmission path of the detection light. The protective element is disposed on the inner surface of the side wall and can cover the multiple movable light-transmitting elements located at the storage station.

[0046] The reaction apparatus 100 includes a housing 1, which is the basic structure of the entire reaction apparatus 100. The reaction chamber formed inside the housing 1 provides the necessary physical space and a closed environment for the perovskite solar cell coating reaction. This closedness helps to maintain the specific conditions required for the reaction, such as air pressure and temperature, and reduces the interference of external factors such as oxygen and moisture in the air on the reaction process, thereby improving the quality and stability of the coating.

[0047] Furthermore, sensor 2 employs a non-contact detection method. This avoids physical contact between the carrier plate 201 and the battery, preventing damage to the battery structure. Sensor 2 also offers fast and accurate detection, providing results quickly and improving production efficiency. Moreover, due to the transmission characteristics of the detection light, sensor 2 can operate stably in relatively harsh reaction environments, unaffected by chemical substances within the reaction chamber, further enhancing detection reliability and the automation level of the entire production process.

[0048] Optionally, sensor 2 can be a through-beam photoelectric sensor, including a transmitter and a receiver. The transmitter emits light, and the receiver receives the light. When the carrier plate blocks the light, the receiver detects a change in light intensity, thereby determining the presence of the carrier plate. Sensor 2 can also be a reflective photoelectric sensor, where the transmitter emits light, and the light is received by the receiver after being reflected from the surface of the target object.

[0049] The light-transmitting component A includes a fixed light-transmitting element, multiple movable light-transmitting elements, and a protective element. The fixed light-transmitting element is located at the light-transmitting hole to ensure the stability of the basic transmission path of the detection light.

[0050] Multiple movable light-transmitting components are movably mounted on the inner surface of the side wall and can move between the shielding station and the storage station. When the movable light-transmitting component is in the shielding station, it is located in the transmission path of the detection light; when the movable light-transmitting component is in the storage station, it avoids the transmission path of the detection light, and the detection light cannot pass through the movable light-transmitting component located in the storage station.

[0051] It is understandable that when the movable light-transmitting component is located in the shielding position, it may be contaminated by byproducts within the reaction chamber. When the byproducts on the movable light-transmitting component accumulate to a level that affects the sensor's detection results, the component needs to be cleaned or replaced. In this case, the used movable light-transmitting component can be moved to the storage position to avoid obstructing the transmission path of the detection light. At the same time, unused movable light-transmitting components can be moved to the shielding position so that clean components can be used for detection light transmission, thereby reducing the impact of byproducts on the transmission of detection light.

[0052] Optionally, the fixed light-transmitting element and the movable light-transmitting element can be materials such as glass sheets or acrylic sheets that allow detection light to pass through; this application embodiment does not limit this.

[0053] The protective components can cover multiple movable light-transmitting components located at the storage station, protecting unused movable light-transmitting components from contamination and damage by byproducts in the reaction chamber. This ensures that clean movable light-transmitting components can replace those located at the shielding station, thereby ensuring that movable light-transmitting components on the transmission path of the detection light do not affect the sensor's detection results and extending the service life of the movable light-transmitting components.

[0054] Thus, the reaction apparatus 100 provided in this application, through the synergistic effect of the housing 1, sensor 2, and light-transmitting component A, solves the problems of reduced light transmittance and misjudgment by sensor 2 caused by byproducts adhering to the glass window of the cavity wall in existing solutions. By flexibly adjusting the position of the movable light-transmitting component, the unobstructed and clean transmission path of the detection light can be dynamically maintained, improving the accuracy and reliability of sensor 2 detection, reducing the number of downtime maintenance of the reaction apparatus 100, ensuring production continuity, reducing the waste of evaporation source materials and the risk of defective battery semi-finished products, and improving the overall efficiency and quality of perovskite battery coating production.

[0055] Please see Figures 2 to 5 , Figure 2 This is one of the structural schematic diagrams of the reaction apparatus 100 provided in the embodiments of this application. Figure 3 This is a second schematic diagram of the structure of the reaction device 100 provided in the embodiments of this application, and a partial enlarged view thereof. Figure 4 This is a third schematic diagram of the structure of the reaction device 100 provided in the embodiments of this application, and a partial enlarged view thereof. Figure 5 Fourth schematic diagram of the structure of the reaction apparatus 100 provided in the embodiments of this application. This application discloses a reaction apparatus 100, including:

[0056] The housing 1 has a reaction chamber formed inside it. The housing 1 includes a first sidewall 11 and a second sidewall 12 that are disposed opposite to each other. The first sidewall 11 includes a first light-transmitting hole and the second sidewall 12 includes a second light-transmitting hole.

[0057] Sensor 2 includes a transmitter 21 and a receiver 22. The transmitter 21 is disposed in the first light-transmitting hole, and the receiver 22 is disposed in the second light-transmitting hole. The detection light emitted by the transmitter 21 can be received by the receiver 22.

[0058] The first light-transmitting component 3 includes a first fixed light-transmitting element 31, a plurality of first movable light-transmitting elements 32, and a first protective element 33. The first fixed light-transmitting element 31 is disposed in the first light-transmitting hole and is located between the transmitting end 21 and the receiving end 22. The first movable light-transmitting elements 32 are movably disposed on the inner surface of the first sidewall 11. The first movable light-transmitting elements 32 can move between the shielding station and the storage station. When the first movable light-transmitting element 32 is located in the shielding station, it is located on the transmission path of the detection light. When the first movable light-transmitting element 32 is located in the storage station, it avoids the transmission path of the detection light. The first protective element 33 is disposed on the inner surface of the first sidewall 11 and can cover the plurality of first movable light-transmitting elements 32 located in the storage station.

[0059] The second light-transmitting component 4 includes a second fixed light-transmitting element 41, multiple second movable light-transmitting elements 42, and a second protective element 43. The second fixed light-transmitting element 41 is disposed in the second light-transmitting hole and is located between the transmitting end 21 and the receiving end 22. The second movable light-transmitting elements 42 are movably disposed on the inner surface of the second side wall 12 and can move between the shielding station and the storage station. When the second movable light-transmitting element 42 is located in the shielding station, it is located on the transmission path of the detection light. When the second movable light-transmitting element 42 is located in the storage station, it avoids the transmission path of the detection light. The second protective element 43 is disposed on the inner surface of the second side wall 12 and can cover the multiple second movable light-transmitting elements 42 located in the storage station.

[0060] The housing 1 includes a first sidewall 11 and a second sidewall 12 arranged opposite to each other, and is provided with a first light-transmitting hole and a second light-transmitting hole respectively. The first light-transmitting hole and the second light-transmitting hole provide a channel for the transmission of detection light from the sensor 2, ensuring that the detection light can accurately pass through the reaction chamber and realize non-contact detection of the presence or absence of the carrier plate 201.

[0061] Furthermore, the housing 1 may include two doors 13 arranged opposite to each other. The arrangement direction of the two doors 13 is perpendicular to the arrangement direction of the first sidewall 11 and the second sidewall 12. The two doors 13 include an open state and a closed state. Since neither the first light-transmitting hole nor the second light-transmitting hole is provided on the two doors 13, the switching of the state of the doors 13 does not affect the transmission of the detection light, nor does it affect the detection result of the sensor 2.

[0062] As a key component for detecting the presence or absence of the carrier plate 201, the sensor 2 has its transmitter 21 and receiver 22 respectively located in the first and second light-transmitting holes of the housing 1. The detection light emitted by the transmitter 21 can be received by the receiver 22, and the presence or absence of the carrier plate 201 is detected by determining whether the light path is blocked.

[0063] Specifically, receiver 22 can detect the light transmittance within the reaction chamber. When the light transmittance is less than 50%, receiver 22 outputs a signal indicating the presence of carrier plate 201 within the reaction chamber. When the light transmittance is greater than 50%, receiver 22 outputs a signal indicating the absence of carrier plate 201 within the reaction chamber. Optionally, the presence or absence of carrier plate 201 can be configured to control the opening and closing states of door 13, thereby achieving automated opening and closing of door 13.

[0064] The first light-transmitting component 3 includes a first fixed light-transmitting element 31, a plurality of first movable light-transmitting elements 32, and a first protective element 33. The first fixed light-transmitting element 31 is disposed in the first light-transmitting hole, located between the transmitting end 21 and the receiving end 22, ensuring the stability of the basic transmission path of the detection light.

[0065] Multiple first movable light-transmitting elements 32 are movably disposed on the inner surface of the first sidewall 11 and can move between the shielding station and the storage station. When the first movable light-transmitting element 32 is located in the shielding station, it is positioned on the transmission path of the detection light, thereby enabling the detection light emitted by the transmitting end 21 to pass through the first movable light-transmitting element 32 and be transmitted to the receiving end 22. When the first movable light-transmitting element 32 is located in the storage station, it avoids the transmission path of the detection light, and the detection light cannot pass through the first movable light-transmitting element 32 located in the storage station.

[0066] It is understandable that when the first movable light-transmitting element 32 is located in the shielding position, it may be contaminated by byproducts in the reaction chamber. When the byproducts on the first movable light-transmitting element 32 accumulate to a level that affects the detection results of the sensor 2, the first movable light-transmitting element 32 needs to be cleaned or replaced. At this time, the used first movable light-transmitting element 32 can be moved to the storage position to avoid the transmission path of the detection light, and the unused first movable light-transmitting element 32 can be moved to the shielding position so that the detection light can be transmitted using a clean first movable light-transmitting element 32, thereby reducing the impact of byproducts on the transmission of the detection light.

[0067] The first protective component 33 can cover multiple first movable light-transmitting components 32 located at the storage station, protect the unused first movable light-transmitting components 32, prevent the unused first movable light-transmitting components 32 from being contaminated and damaged by by-products in the reaction chamber, ensure that a clean first movable light-transmitting component 32 can replace the first movable light-transmitting component 32 located at the shielding station, thereby ensuring that the first movable light-transmitting component 32 on the transmission path of the detection light will not affect the detection result of the sensor 2, and also extend the service life of the first movable light-transmitting component 32.

[0068] It is understood that the first light-transmitting component 3 and the second light-transmitting component 4 have similar beneficial effects. The second light-transmitting component 4 includes a second fixed light-transmitting element 41, a plurality of second movable light-transmitting elements 42, and a second protective element 43. The second fixed light-transmitting element 41 is disposed in the second light-transmitting hole, located between the transmitting end 21 and the receiving end 22, ensuring the stability of the basic transmission path of the detection light.

[0069] Multiple second movable light-transmitting elements 42 are movably disposed on the inner surface of the second sidewall 12 and can move between the shielding station and the storage station. When the second movable light-transmitting element 42 is located in the shielding station, it is positioned on the transmission path of the detection light, thereby enabling the detection light emitted by the transmitting end 21 to pass through the second movable light-transmitting element 42 and be transmitted to the receiving end 22. When the second movable light-transmitting element 42 is located in the storage station, it avoids the transmission path of the detection light, and the detection light cannot pass through the second movable light-transmitting element 42 located in the storage station.

[0070] It is understandable that when the second movable light-transmitting element 42 is located in the shielding position, it may be contaminated by byproducts in the reaction chamber. When the byproducts on the second movable light-transmitting element 42 accumulate to a level that affects the detection results of the sensor 2, the second movable light-transmitting element 42 needs to be cleaned or replaced. At this time, the used second movable light-transmitting element 42 can be moved to the storage position to avoid the transmission path of the detection light, and the unused second movable light-transmitting element 42 can be moved to the shielding position so that a clean second movable light-transmitting element 42 can be used for the transmission of detection light, thereby reducing the impact of byproducts on the transmission of detection light.

[0071] The second protective component 43 can cover multiple second movable light-transmitting components 42 located at the storage station, protecting the unused second movable light-transmitting components 42 from contamination and damage by byproducts in the reaction chamber. This ensures that clean second movable light-transmitting components 42 can replace the second movable light-transmitting components 42 located at the shielding station, thereby ensuring that the second movable light-transmitting components 42 on the transmission path of the detection light will not affect the detection results of the sensor 2, and also extending the service life of the second movable light-transmitting components 42.

[0072] Optionally, the movement of the plurality of first movable light-transmitting elements 32 and the plurality of second movable light-transmitting elements 42 between the blocking station and the storage station can be horizontal movement, such as the movement of the movable light-transmitting elements driven by a slide rail slider; or the movement between the blocking station and the storage station can be rotational movement, such as the movement of the movable light-transmitting elements around a rotation axis. Optionally, the movement of the first movable light-transmitting elements 32 and the second movable light-transmitting elements 42 can be controlled manually or by a drive mechanism.

[0073] Furthermore, when the movement of the first movable light-transmitting element 32 and the second movable light-transmitting element 42 is controlled manually, the reaction device 100 may also include an alarm. The alarm is electrically connected to the sensor 2. When the light transmittance is less than 80% and greater than 50%, the receiver 22 outputs a signal indicating that by-products have accumulated on the surface of the first movable light-transmitting element 32. When the light transmittance is greater than 80%, the receiver 22 outputs a signal indicating that no by-products have accumulated on the surface of the first movable light-transmitting element 32. The signal indicating by-product accumulation can be set to trigger the alarm to remind the operator to control the movement of the first movable light-transmitting element 32 and the second movable light-transmitting element 42, and to switch between blocking the first movable light-transmitting element 32 and the second movable light-transmitting element 42 at the work station.

[0074] When the movement of the first movable light-transmitting element 32 and the second movable light-transmitting element 42 is controlled by a drive unit, the drive unit is electrically connected to the sensor 2. A signal indicating the accumulation of by-products can be set to control the drive unit to start, thereby moving the first movable light-transmitting element 32 and the second movable light-transmitting element 42 to switch and block the first movable light-transmitting element 32 and the second movable light-transmitting element 42 at the work station.

[0075] Please see Figure 6 , Figure 6The fifth schematic diagram of the structure of the reaction device 100 provided in the embodiments of this application and its partial enlarged view are shown. In some embodiments, the first light-transmitting component 3 further includes: a first rotating shaft 34, which is rotatably disposed in the housing 1. A plurality of first movable light-transmitting elements 32 are connected to the first rotating shaft 34. Along the radial direction of the rotating shaft, the distance between each first movable light-transmitting element 32 and the first rotating shaft 34 is equal to the distance between the first rotating shaft 34 and the first light-transmitting hole. The first rotating shaft 34 can drive the first movable light-transmitting element 32 to rotate between the shielding station and the storage station.

[0076] Specifically, the first rotating shaft 34 is rotatably mounted through the housing 1, serving as a connection and driving component for the plurality of first movable light-transmitting elements 32. The rotatable design of the first rotating shaft 34 simplifies and simplifies the switching of the first movable light-transmitting elements 32. The plurality of first movable light-transmitting elements 32 are connected to the first rotating shaft 34 and arranged radially along the shaft. The distance between each first movable light-transmitting element 32 and the first rotating shaft 34 is equal to the distance from the first rotating shaft 34 to the first light-transmitting hole, ensuring that the plurality of first movable light-transmitting elements 32 can accurately switch between the shielding position and the storage position during rotation, avoiding problems with the transmission of detection light due to positional deviations.

[0077] Furthermore, when it is necessary to replace the contaminated first movable light-transmitting element 32, the first rotating shaft 34 can quickly drive a new, clean first movable light-transmitting element 32 into the shielding position, ensuring the cleanliness and unobstructedness of the detection light transmission path, thereby improving the accuracy and reliability of the sensor 2. In addition, the stability and precision of the first rotating shaft 34 also extend the service life of the entire first light-transmitting assembly 3, reduce the maintenance cost and downtime of the reaction device 100, and further improve the overall efficiency and quality of perovskite battery coating production.

[0078] Furthermore, the rotary movement rotates around a first rotation axis 34, eliminating the need for additional linear guides or sliding mechanisms. This allows for the switching of multiple movable light-transmitting elements within a smaller space, making it easier to implement in limited spaces.

[0079] Similarly, the second light-transmitting component 4 is also provided with a second rotating axis. The setting of the second rotating axis in the second light-transmitting component 4 is the same as that of the first rotating axis 34, and will not be described again here.

[0080] Please see Figures 3 to 6In some embodiments, the first light-transmitting component 3 further includes: a first rotating frame 35, which is sleeved on the first rotating shaft 34 and can rotate with the first rotating shaft 34. The first rotating frame 35 is provided with a plurality of first mounting holes, which are arranged at intervals along the circumference of the first rotating shaft 34. Along the radial direction of the rotating shaft, the distance between each first mounting hole and the first rotating shaft 34 is equal to the distance between the first rotating shaft 34 and the first light-transmitting hole. Each first movable light-transmitting element 32 is respectively disposed in each first mounting hole.

[0081] The first rotating frame 35 is fitted onto the first rotating shaft 34 and can rotate with the first rotating shaft 34. Multiple first mounting holes are arranged circumferentially. Along the radial direction of the rotating shaft, the distance between each first mounting hole and the first rotating shaft 34 is equal to the distance between the first rotating shaft 34 and the first light-transmitting hole. This ensures that when the first movable light-transmitting component 32 is installed in the first mounting hole and is located in the blocking position, it can accurately align with the detection light path emitted by the transmitting end 21, thereby improving the detection accuracy of the sensor 2.

[0082] Meanwhile, the first rotating frame 35 is designed to facilitate quick switching of the first movable light-transmitting element 32. The first rotating frame 35 drives the first movable light-transmitting element 32 to rotate, realizing the switching between different work positions and improving the switching efficiency of the first movable light-transmitting element 32. Multiple first mounting holes are evenly arranged circumferentially, so that the first movable light-transmitting element 32 is subjected to uniform force during rotation, preventing the first movable light-transmitting element 32 from falling off or shaking during rotation, and extending the service life of the first rotating frame 35 and the first movable light-transmitting element 32.

[0083] Similarly, the second light-transmitting component 4 is also provided with a second rotating frame. The configuration of the second rotating frame in the second light-transmitting component 4 is the same as that of the first rotating frame 35, and will not be described again here.

[0084] Please see Figures 3 to 6 In some embodiments, the spacing between two adjacent first mounting holes is equal along the circumference of the first rotation axis 34.

[0085] Specifically, the equidistant first mounting holes ensure that the first rotating frame 35 experiences more uniform force during rotation, avoiding localized stress concentration caused by uneven spacing of the first mounting holes, thereby extending the service life of the first rotating frame 35. Simultaneously, the equidistant first mounting holes help achieve dynamic balance of the first rotating frame 35, reducing vibration and swaying during rotation, and improving the stability and operational accuracy of the first light-transmitting component 3. The equidistant first mounting holes also ensure that each first movable light-transmitting element 32 switches at the same angle during rotation, achieving more precise station switching and guaranteeing that each first movable light-transmitting element 32 accurately reaches the shielding or storage station.

[0086] Optionally, the number of first mounting holes can be four, so that the angle between the line connecting two adjacent first mounting holes to the first rotating shaft 34 is ninety degrees, thereby improving the operating accuracy of the first light-transmitting component 3. The switching angle of each first movable light-transmitting component 32 during rotation is ninety degrees, ensuring more precise station switching.

[0087] Similarly, the second rotating frame is also provided with a second mounting hole, which is set in the same way as the first mounting hole, and will not be described again here.

[0088] Please see Figures 3 to 6 In some embodiments, the first protective member 33 is provided on the side of the first rotating frame 35 away from the first side wall 11, and the first protective member 33 is provided with a first clearance hole 331, which corresponds to the first light-transmitting hole on the transmission path of the detection light.

[0089] The first protective component 33 is installed on the side of the first rotating frame 35 away from the first sidewall 11, effectively protecting the multiple first movable light-transmitting components 32 located in the storage position. This prevents the first movable light-transmitting components 32 from being contaminated and damaged by byproducts in the reaction chamber, extending their service life. The first protective component 33 is provided with a first clearance hole 331, which corresponds to the first light-transmitting hole in the transmission path of the detection light, ensuring that the detection light can pass smoothly without affecting the normal detection function of the sensor 2. While protecting the first movable light-transmitting components 32, it also ensures the stability and reliability of the detection light transmission.

[0090] Meanwhile, the precise correspondence between the first clearance hole 331 and the first light-transmitting hole avoids interference from the first protective component 33 on the transmission of the detection light, ensuring the purity of the detection light transmission and improving the accuracy and reliability of the sensor 2. Without adding complex mechanical structures, effective protection of the first movable light-transmitting component 32 is achieved, providing a clearance position that allows the detection light to pass through, maintaining the overall simplicity and compactness of the reaction device 100.

[0091] Similarly, the second protective component 43 is configured the same as the first protective component 33, and will not be described again here.

[0092] Please see Figures 3 to 6In some embodiments, the first protective member 33 is detachably connected to the inner surface of the first sidewall 11. This detachable connection allows the first protective member 33 to be quickly disassembled when cleaning or maintenance is required, facilitating cleaning or replacement of the movable light-transmitting components inside the first protective member 33, and also aiding in the maintenance of the first protective member 33 itself. If the first protective member 33 is damaged or requires upgrading, the detachable design allows for rapid replacement with a new first protective member 33, reducing maintenance time for the reaction apparatus 100 and improving production efficiency. Simultaneously, the detachable connection facilitates individual replacement of the first protective member 33, avoiding the need to replace the entire first light-transmitting assembly 3 due to damage to the first protective member 33, thereby reducing maintenance costs.

[0093] Optionally, the first protective member 33 may be provided with bolt holes, and the first sidewall 11 may also be provided with bolt holes, and the first protective member 33 and the first sidewall 11 may be detachably connected by bolts. The first protective member 33 may also be detachably connected to the first sidewall 11 by providing a connecting bracket, that is, the first protective member 33 and the connecting bracket may be detachably connected by bolts, and the connecting bracket and the first sidewall 11 may be detachably connected by bolts.

[0094] Similarly, the second protective component 43 is configured the same as the first protective component 33, and will not be described again here.

[0095] In some embodiments, the first light-transmitting component 3 further includes a first sealing member disposed between the first protective member 33 and the inner surface of the first sidewall 11 to seal the gap between the first protective member 33 and the inner surface of the first sidewall 11.

[0096] It is understood that the first sealing element is disposed between the inner surface of the first protective element 33 and the first side wall 11, which can effectively seal the gap between the first protective element 33 and the first side wall 11, prevent gas or by-products in the reaction chamber from leaking into the interior of the first protective element 33, and prevent gas in the reaction chamber from contacting the first fixed light-transmitting element 31, thereby ensuring the light transmittance of the first fixed light-transmitting element 31 and preventing by-products from blocking the first fixed light-transmitting element 31 and affecting the detection results of the sensor 2.

[0097] Similarly, the second light-transmitting component 4 is also provided with a second seal, which is the same as the first seal, and will not be described again here.

[0098] Please see Figure 7 , Figure 7The diagram below shows the structure of the first rotating handle 36 provided in the embodiments of this application. In some embodiments, the first light-transmitting component 3 further includes: a first rotating handle 36, disposed on the outer surface of the first sidewall 11, and connected to the first rotating shaft 34, the first rotating handle 36 being able to drive the first rotating shaft 34 to rotate; a first positioning block 37, disposed on the outer surface of the first sidewall 11, and the first positioning block 37 being disposed close to the first rotating handle 36; a first positioning magnetic element 38, disposed on the side of the first positioning block 37 facing the first rotating handle 36; and a plurality of first movable magnetic elements 39, the plurality of first movable magnetic elements 39 being circumferentially spaced on the first rotating handle 36, the first movable magnetic elements 39 being disposed one-to-one with the first movable light-transmitting element 32, when the first movable magnetic element 39 rotates to a position facing the first positioning magnetic element 38, the first movable magnetic element 39 being able to attract the first positioning magnetic element 38 to each other, so that the first movable light-transmitting element 32 corresponding to the first movable magnetic element 39 is located in the blocking position.

[0099] The first rotary handle 36 serves as a manual or mechanical drive interface, enabling the first rotary shaft 34 to rotate. Through the first rotary handle 36, the operator can easily control the rotation of the first rotary shaft 34, thereby switching the first movable light-transmitting element 32 between the shielding and storage positions. This makes the operation of the equipment more intuitive and convenient, allowing the replacement of the first movable light-transmitting element 32 to be completed without a complex control system.

[0100] Meanwhile, the first positioning block 37 provides a reference position for the positioning of the first rotating handle 36. The first positioning magnetic element 38 provided on the first positioning block 37 interacts with the first movable magnetic element 39 through magnetic attraction, achieving precise positioning of the first rotating handle 36. When the first movable magnetic element 39 rotates to a position facing the first positioning magnetic element 38, the two attract each other, fixing the first rotating handle 36 in a specific position, thereby ensuring that the first movable light-transmitting element 32 corresponding to that position is accurately located at the blocking position. This magnetic positioning method not only improves the positioning accuracy and stability but also reduces mechanical wear and extends the service life of the first light-transmitting component 3. Each first movable magnetic element 39 corresponds to one first movable light-transmitting element 32. When the first rotating handle 36 rotates, the first movable magnetic element 39 rotates accordingly. When a certain first movable magnetic element 39 rotates to a position facing the first positioning magnetic element 38, the two attract each other, stopping the first rotating handle 36 from rotating and fixing it in that position. At this time, the first movable light-transmitting element 32 corresponding to the first movable magnetic element 39 is precisely positioned at the blocking position to ensure the accuracy and stability of the detection light transmission path.

[0101] Optionally, the first rotary handle 36 may be equipped with numerical markings corresponding to the positions of different first positioning magnetic elements 38, so that each first movable light-transmitting element 32 corresponds to a number, and relevant operators can identify the first movable light-transmitting element 32 located at the shielding position based on the numerical markings on the first rotary handle 36.

[0102] Similarly, the second light-transmitting component 4 is also provided with a second rotating handle, a second positioning block and multiple second movable magnetic components. The configuration of the second light-transmitting component 4 is the same as that of the first light-transmitting component 3, and will not be described again here.

[0103] In some embodiments, the reaction apparatus 100 further includes a first rotary seal disposed between the first rotating shaft 34 and the first sidewall 11 to seal the gap between the first rotating shaft 34 and the first sidewall 11.

[0104] The first rotary seal effectively prevents gas or byproducts from leaking into the external environment from the reaction chamber, while also preventing moisture and oxygen from the outside air from entering the reaction chamber, ensuring that the coating reaction takes place in a stable environment. By preventing external contaminants from entering, the first rotary seal further protects internal components such as the first rotating frame 35 and the first movable light-transmitting element 32, reducing malfunctions and maintenance work caused by contamination.

[0105] Optionally, the first rotary seal can be a magnetic fluid seal. The magnetic fluid seal is fitted onto the first rotating shaft 34, with one end abutting against the outer surface of the first sidewall 11 to seal the gap between the first rotating shaft 34 and the first sidewall 11, preventing gas from leaking out of the reaction chamber when the first rotating shaft 34 rotates. The rotation of the first rotating shaft 34 does not affect the performance of the magnetic fluid seal; the magnetic fluid can automatically adjust its shape to maintain a good sealing effect. Furthermore, even if the first protective member 33 experiences slight displacement due to disassembly, assembly, or equipment vibration, the magnetic fluid seal remains stable and leak-free.

[0106] Please see Figure 8 , Figure 8 This is a schematic diagram of the structure of a multi-source vapor deposition apparatus 200 provided in an embodiment of this application. The second aspect of this application discloses a multi-source vapor deposition apparatus 200, comprising: multiple reaction devices 100; and a carrier plate 201, which is movable within the multiple reaction devices 100 and is used to support the battery to be processed. Since the multi-source vapor deposition apparatus 200 provided in this application includes the reaction device 100 provided in the first aspect embodiment of this application, the multi-source vapor deposition apparatus 200 has the beneficial effects of any of the aforementioned reaction devices 100, which will not be elaborated further here.

[0107] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A reaction apparatus, characterized in that, The reaction apparatus includes: A housing, wherein a reaction chamber is formed inside the housing, and light-transmitting holes are provided on the side wall of the housing; A sensor is disposed in the light-transmitting hole, and the sensor is used to emit or receive detection light; A light-transmitting component includes a fixed light-transmitting element, multiple movable light-transmitting elements, and a protective element. The fixed light-transmitting element is disposed at the light-transmitting hole. The movable light-transmitting elements are movably disposed on the inner surface of the side wall and can move between a shielding station and a storage station. When the movable light-transmitting element is located at the shielding station, it is positioned on the transmission path of the detection light. When the movable light-transmitting element is located at the storage station, it avoids the transmission path of the detection light. The protective element is disposed on the inner surface of the side wall and can cover the multiple movable light-transmitting elements located at the storage station.

2. The reaction apparatus according to claim 1, characterized in that, The housing includes a first sidewall and a second sidewall disposed opposite to each other, and the light-transmitting hole includes a first light-transmitting hole and a second light-transmitting hole, wherein the first light-transmitting hole is disposed on the first sidewall and the second light-transmitting hole is disposed on the second sidewall; The sensor includes a transmitter and a receiver. The transmitter is disposed in the first light-transmitting hole, and the receiver is disposed in the second light-transmitting hole. The detection light emitted by the transmitter can be received by the receiver. The light-transmitting component includes a first light-transmitting component and a second light-transmitting component. The first light-transmitting component includes a first fixed light-transmitting element, a plurality of first movable light-transmitting elements, and a first protective element. The first fixed light-transmitting element is disposed at the first light-transmitting hole. The first movable light-transmitting element is movably disposed on the inner surface of the first sidewall. The first protective element is disposed on the inner surface of the first sidewall and can cover the plurality of first movable light-transmitting elements located at the storage station. The second light-transmitting component includes a second fixed light-transmitting element, a plurality of second movable light-transmitting elements, and a second protective element. The second fixed light-transmitting element is disposed at the second light-transmitting hole and is located between the transmitting end and the receiving end. The second movable light-transmitting element is movably disposed on the inner surface of the second sidewall. The second protective element is disposed on the inner surface of the second sidewall and can cover the plurality of second movable light-transmitting elements located at the storage station.

3. The reaction apparatus of claim 2, wherein The first light-transmitting component further includes: A first rotating shaft is rotatably disposed within the housing. A plurality of first movable light-transmitting elements are connected to the first rotating shaft. Along the radial direction of the rotating shaft, the distance between each first movable light-transmitting element and the first rotating shaft is equal to the distance between the first rotating shaft and the first light-transmitting hole. The first rotating shaft is capable of driving the first movable light-transmitting elements to rotate between the shielding station and the storage station.

4. The reaction apparatus of claim 3, wherein The first light-transmitting component further includes: A first rotating frame is sleeved on the first rotating shaft and can rotate with the first rotating shaft. The first rotating frame is provided with a plurality of first mounting holes, which are arranged at intervals along the circumference of the first rotating shaft. Along the radial direction of the rotating shaft, the distance between each first mounting hole and the first rotating shaft is equal to the distance between the first rotating shaft and the first light-transmitting hole. Each first movable light-transmitting element is respectively disposed in each of the first mounting holes.

5. The reaction apparatus according to claim 4, characterized in that, Along the circumference of the first rotation axis, the spacing between two adjacent first mounting holes is equal.

6. The reaction apparatus according to claim 4, characterized in that, The first protective component is disposed on the side of the first rotating frame away from the first side wall. The first protective component is provided with a first clearance hole, which corresponds to the first light-transmitting hole on the transmission path of the detection light.

7. The reaction apparatus according to claim 2, characterized in that, The first protective component is detachably connected to the inner surface of the first sidewall.

8. The reaction apparatus of claim 3, wherein The first light-transmitting component further includes: A first rotating handle is disposed on the outer surface of the first sidewall, and the first rotating handle is connected to the first rotating shaft, and the first rotating handle can drive the first rotating shaft to rotate; The first positioning block is disposed on the outer surface of the first sidewall and is located close to the first rotating handle; A first positioning magnetic element is disposed on the side of the first positioning block facing the first rotating handle; Multiple first movable magnetic components are arranged circumferentially at intervals on the first rotating handle. Each first movable magnetic component corresponds to a first movable light-transmitting component. When the first movable magnetic component rotates to a position facing the first positioning magnetic component, the first movable magnetic component can attract the first positioning magnetic component, so that the first movable light-transmitting component corresponding to the first movable magnetic component is located at the blocking position.

9. The reaction apparatus of claim 3, wherein The reaction apparatus further includes: A first rotary seal is disposed between the first rotating shaft and the first sidewall to seal the gap between the first rotating shaft and the first sidewall.

10. A multi-source evaporation apparatus, characterized by comprising: include: Multiple reaction devices as described in any one of claims 1 to 9; A carrier plate, which is movable within the plurality of said reaction devices, is used to carry the battery to be processed.

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