Developing solution filtering device and gluing developing equipment

Abstract

The utility model discloses a developing solution filtering device and gluing and developing equipment, and relates to the technical field of semiconductor equipment. The developing solution filtering device comprises a filter body as well as a solution inlet pipe, a solution outlet pipe and a solution discharge pipe which are arranged on the filter body and communicated with the filter body, a conveying pump and a first valve are arranged on the solution inlet pipe, a one-way check valve is arranged on the solution outlet pipe, and a second valve is arranged on the solution discharge pipe; when the delivery pump, the first valve and the one-way check valve are all opened and the second valve is closed, the delivery pump can pump a developing solution into the filter body through the solution inlet pipe, and the developing solution is output through the solution outlet pipe after being filtered by the filter body; when the conveying pump, the first valve and the one-way check valve are all closed and the second valve is opened, the developing liquid in the filter body can be discharged through the liquid discharging pipe. The developing solution filtering device can solve the liquid backflow phenomenon existing in a pipeline between the outlet end and the connecting end when an existing filter is replaced.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, and more specifically, to a developer filtration device and a coating and developing device. Background Technology

[0002] In the operation of the coating and developing equipment, the developer filter needs to be replaced regularly. When replacing it, first close the inlet valve of the filter and ensure that the delivery pump is stopped. Then, manually open the drain valve of the filter to release the pressure inside the filter and drain the liquid.

[0003] Due to gravity, during filter purging, liquid backflow may occur in the long pipeline from the liquid outlet to the connection point due to system depressurization. This phenomenon can easily cause the following problems: First, liquid backflow creates a large air segment in the outlet pipeline, requiring a lengthy purging process when replenishing developer, which not only prolongs equipment restart time but also causes excessive developer loss; Second, if the backflowing liquid is not completely drained, residual liquid may spray out due to pressure imbalance during subsequent filter disassembly, posing a certain safety hazard. Utility Model Content

[0004] The purpose of this application is to provide a developer filtration device and a coating developing equipment that can solve the problem of liquid backflow in the pipeline between the outlet end and the connection end when replacing existing filters.

[0005] The embodiments of this application are implemented as follows:

[0006] A first aspect of this application provides a developer filtration device, including a filter body and an inlet pipe, an outlet pipe, and a drain pipe disposed on and communicating with the filter body. The inlet pipe is equipped with a delivery pump and a first valve, the outlet pipe is equipped with a one-way check valve, and the drain pipe is equipped with a second valve. When the delivery pump, the first valve, and the one-way check valve are all open and the second valve is closed, the delivery pump can pump the developer into the filter body through the inlet pipe, filter it through the filter body, and then output it through the outlet pipe. When the delivery pump, the first valve, and the one-way check valve are all closed and the second valve is open, the developer in the filter body can be discharged through the drain pipe. This developer filtration device can solve the liquid backflow phenomenon in the pipeline between the outlet end and the connection end during existing filter replacements.

[0007] In one possible implementation, the outlet pipe includes a connection end connected to the filter body and an outlet end away from the filter body, and the one-way check valve is located between the connection end and the outlet end.

[0008] In one possible implementation, the liquid outlet pipe extends vertically, and the outlet end is located above the connection end.

[0009] In one possible implementation, the one-way check valve is located on the side near the connection end.

[0010] As one possible implementation, it also includes a circulation pipeline, the first end of which is connected to the outlet pipe and located at the rear end of the one-way check valve, and the second end of which is connected to the inlet pipe and located at the front end of the first valve. When the one-way check valve is closed, the developer in the outlet pipe located at the rear end of the one-way check valve can flow into the inlet pipe through the circulation pipeline.

[0011] As one possible implementation, a third valve is provided at the first end near the circulation pipeline. When the one-way check valve is open and the third valve is closed, the developer in the filter body can be output through the outlet pipe.

[0012] As one possible implementation, a fourth valve is provided at the second end near the circulation pipeline. When the first valve is open and the fourth valve is closed, the developer can be pumped into the filter body through the inlet pipe.

[0013] As one possible implementation, it also includes a controller, wherein the first valve, the one-way check valve and the second valve are all solenoid valves, and the controller is electrically connected to the first valve, the one-way check valve and the second valve, and is used to control the opening and closing of the first valve, the one-way check valve and the second valve.

[0014] As one possible implementation, the first valve, the one-way check valve, and the second valve are all manual valves.

[0015] A second aspect of this application provides a coating and developing apparatus, including the aforementioned developer filtration device. This developer filtration device can solve the problem of liquid backflow in the pipeline between the outlet end and the connection end when replacing existing filters.

[0016] The beneficial effects of the embodiments of this application include:

[0017] The developer filtration device includes a filter body and an inlet pipe, an outlet pipe, and a drain pipe installed on and connected to the filter body. The inlet pipe is equipped with a delivery pump and a first valve, the outlet pipe with a one-way check valve, and the drain pipe with a second valve. When the delivery pump, the first valve, and the one-way check valve are all open, and the second valve is closed, the delivery pump pumps the developer into the filter body through the inlet pipe, where it is filtered and then output through the outlet pipe. When the delivery pump, the first valve, and the one-way check valve are all closed, and the second valve is open, the developer inside the filter body is discharged through the drain pipe. When developer filtration is required, the delivery pump, the first valve, and the one-way check valve are opened, and the second valve is closed. At this time, the delivery pump starts working, pumping the developer into the filter body from the outside through the inlet pipe. Under the action of the filter body, impurities in the developer are intercepted and filtered. The filtered clean developer, under pressure, flows smoothly to the outlet end through the one-way check valve on the outlet pipe. When the filter needs to be replaced, the delivery pump, the first valve, and the one-way check valve are shut off, and the second valve is opened. At this time, any developer remaining in the filter body can be discharged through the drain pipe under gravity or residual pressure, preventing developer residue from remaining in the developer filtration device. The developer filtration device provided in this application adds a one-way check valve to the outlet pipe, allowing only the filtered developer to flow out in one direction. When replacing the filter, it ensures that the liquid in the pipe located at the outlet end will not flow back into the filter body and the inlet pipe, ensuring the stability and safety of the entire developer processing system. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is one of the structural schematic diagrams of the developer filtration device provided in the embodiments of this application;

[0020] Figure 2 This is a schematic diagram of the structure of the outlet pipe provided in an embodiment of this application;

[0021] Figure 3 This is a second schematic diagram of the developer filtration device provided in the embodiments of this application.

[0022] Icons: 100-Developer filter device; 10-Filter body; 20-Inlet pipe; 21-Transfer pump; 22-First valve; 30-Outlet pipe; 301-Connection end; 302-Outlet end; 31-One-way check valve; 40-Drain pipe; 41-Second valve; 50-Circulation pipeline. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0024] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. These terms are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "horizontal," "vertical," etc., do not indicate that the component must be absolutely horizontal or suspended, but can be slightly tilted. The terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0025] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0026] Please refer to the reference. Figures 1 to 3This application provides a developer filtration device 100, including a filter body 10 and an inlet pipe 20, an outlet pipe 30, and a drain pipe 40 disposed on and connected to the filter body 10. The inlet pipe 20 is equipped with a delivery pump 21 and a first valve 22; the outlet pipe 30 is equipped with a one-way check valve 31; and the drain pipe 40 is equipped with a second valve 41. When the delivery pump 21, the first valve 22, and the one-way check valve 31 are all open and the second valve 41 is closed, the delivery pump 21 can pump the developer into the filter body 10 through the inlet pipe 20, and after filtration by the filter body 10, it is output through the outlet pipe 30. When the delivery pump 21, the first valve 22, and the one-way check valve 31 are all closed and the second valve 41 is open, the developer in the filter body 10 can be discharged through the drain pipe 40. This developer filtration device 100 can solve the liquid backflow phenomenon in the pipeline between the outlet end 302 and the connection end 301 during existing filter replacements.

[0027] It should be noted that, as Figure 1 As shown, the developer filtration device 100 includes a filter body 10, on which an inlet pipe 20, an outlet pipe 30, and a drain pipe 40 are respectively provided. The inlet pipe 20, the outlet pipe 30, and the drain pipe 40 are all interconnected with the filter body 10 to remove impurities from the developer. In addition, the inlet pipe 20, the outlet pipe 30, and the drain pipe 40 are respectively responsible for the input of the developer, the output of the filtered developer, and the emptying of the developer in the filter body 10.

[0028] A delivery pump 21 and a first valve 22 are installed on the inlet pipe 20. The delivery pump 21 can provide sufficient pressure to deliver the developer from the outside to the filter body 10, and the first valve 22 is used to control whether the developer can enter the inlet pipe 20. A one-way check valve 31 is installed on the outlet pipe 30. The one-way check valve 31 has a one-way conduction characteristic, allowing only the filtered developer to flow from the filter body 10 to the workpiece to be developed (i.e., the liquid flows from the connection end 301 to the outlet end 302), while preventing the liquid from flowing in the opposite direction (i.e., the liquid flows from the outlet end 302 to the connection end 301). A second valve 41 is installed on the drain pipe 40. The second valve 41 is used to control the discharge of the developer in the filter body 10, so as to realize the emptying operation of the developer in the filter body 10.

[0029] When developer filtration is required, the delivery pump 21, the first valve 22, and the one-way check valve 31 are turned on, and the second valve 41 is closed. At this time, the delivery pump 21 starts working, pumping the developer from the outside into the filter body 10 through the inlet pipe 20. Under the action of the filter body 10, impurities in the developer are intercepted and filtered. The filtered clean developer, under pressure, flows smoothly to the outlet end 302 through the one-way check valve 31 on the outlet pipe 30. When the filter needs to be replaced, the delivery pump 21, the first valve 22, and the one-way check valve 31 are turned off, and the second valve 41 is turned on. At this time, the developer remaining in the filter body 10 can be discharged through the drain pipe 40 under the action of gravity or residual pressure, preventing developer residue from remaining in the developer filtration device 100.

[0030] In traditional filter replacement processes, backflow can easily occur due to pressure imbalances in the pipeline, potentially leading to developer contamination and equipment damage. The developer filtration device 100 provided in this application incorporates a one-way check valve 31 on the outlet pipe 30, allowing only unidirectional flow of the filtered developer. During filter replacement, this ensures that liquid in the pipeline at the outlet end 302 does not flow back into the filter body 10 and the inlet pipe 20, guaranteeing the stability and safety of the entire developer processing system. Therefore, the developer filtration device 100 provided in this application, by adding the one-way check valve 31, fundamentally eliminates liquid backflow in the pipeline between the outlet end 302 and the connection end 301 during filter replacement.

[0031] By controlling the on / off states of each valve and the delivery pump 21, the filtration and emptying of the developer solution can be easily achieved. When the filter needs to be replaced, simply close the delivery pump 21, the first valve 22, and the one-way check valve 31, and open the second valve 41 to empty the developer solution inside the filter body 10. This prevents operators from being contaminated by residual developer solution during filter replacement, reduces the risk of developer solution leakage, and makes filter replacement and maintenance more convenient and safer, thus improving work efficiency.

[0032] Furthermore, the developer filtration device 100 provided in this application has a relatively simple structure, mainly consisting of a filter body 10, an inlet pipe 20, an outlet pipe 30, a drain pipe 40, and corresponding valves and a delivery pump 21. It lacks complex structures and precision components; only a one-way check valve 31 needs to be added to the outlet pipe 30 of a traditional filter. This simple structural design not only reduces the manufacturing cost of the device but also facilitates installation and debugging, demonstrating high feasibility and applicability in practical applications, making it suitable for widespread use in various scenarios.

[0033] As one possible implementation method, such as Figure 2As shown, the outlet pipe 30 includes a connection end 301 connected to the filter body 10 and an outlet end 302 away from the filter body 10. The one-way check valve 31 is located between the connection end 301 and the outlet end 302.

[0034] It should be noted that in the structure of the outlet pipe 30 of the developer filter device 100, the connecting end 301 of the outlet pipe 30 is connected to the filter body 10 and is the inlet of the filtered developer entering the outlet pipe 30, while the outlet end 302 of the outlet pipe 30 is the outlet from which the developer flows out and is transported to the user side. A one-way check valve 31 is provided between the connecting end 301 and the outlet end 302 to control the liquid flow direction of the outlet pipe 30.

[0035] After the filter body 10 completes the filtration of the developer, the filtered developer, under the pressure provided by the delivery pump 21, flows from the filter body 10 through the connection end 301 into the outlet pipe 30. The one-way check valve 31 allows the developer to flow from the connection end 301 to the outlet end 302. When the developer reaches the one-way check valve 31, the one-way check valve 31 opens due to the pressure generated by the liquid flow, allowing the developer to pass smoothly and flow to the outlet end 302, and finally be delivered to the user side.

[0036] When the filter needs to be replaced, after the delivery pump 21 and the first valve 22 are closed, the pressure inside the filter body 10 decreases, and the liquid in the outlet pipe 30 located on the outlet end 302 side is prone to backflow under the action of gravity. At this time, the one-way check valve 31 can prevent the liquid in the outlet pipe 30 located on the outlet end 302 side from backflowing. Due to the one-way conduction characteristic of the one-way check valve 31, the developer cannot flow back from the outlet end 302 to the connection end 301 to the filter body 10, thereby effectively avoiding the backflow of the developer.

[0037] As one possible implementation method, such as Figure 1 and Figure 2 As shown, the liquid outlet pipe 30 extends vertically, and the outlet end 302 is located above the connection end 301.

[0038] It should be noted that the outlet pipe 30 extends vertically, so the flow of the developer within the outlet pipe 30 is mainly influenced by gravity and the pressure of the transfer pump 21. When the transfer pump 21 is operating, the developer flows upward against gravity under pressure, passing through the one-way check valve 31 from the connection end 301 to the upper outlet end 302. Since the outlet end 302 is higher than the connection end 301, after the transfer pump 21 stops operating, the developer tends to flow downward under gravity, but the one-way check valve 31 prevents the developer from flowing back to the filter body 10.

[0039] Furthermore, the vertical outlet pipe 30 has a more regular spatial layout, facilitating connection and arrangement with other components. The outlet end 302 is located at the top, allowing for better connection of the developer solution with subsequent equipment during flow, conforming to the operational procedures for developer solution delivery and use. During the operation of the developer solution filtration device 100, the vertical outlet pipe 30 ensures smoother flow of the developer solution, reducing liquid stagnation and air bubble formation within the pipe.

[0040] As one possible implementation, the one-way check valve 31 is located on the side near the connection end 301.

[0041] It should be noted that when the filtered developer enters the outlet pipe 30 from the filter body 10 through the connection end 301, the one-way check valve 31 is close to the connection end 301, so the developer can quickly pass through the one-way check valve 31 after leaving the filter body 10 and enter the protected pipeline area.

[0042] When the delivery pump 21 stops working, the one-way check valve 31, located near the connection end 301, can respond to pressure changes immediately, preventing liquid from the user side from flowing back into the filter body 10. Because the valve is very close to the connection end 301, the backflow path is shortened to the maximum extent, reducing the amount of liquid remaining between the outlet end 302 and the valve, further reducing the risk of backflow. Furthermore, this arrangement allows the valve to more directly sense pressure changes on the filter body 10 side, improving the valve's response speed and the reliability of its closure.

[0043] As one possible implementation method, such as Figure 3 As shown, the developer filtration device 100 also includes a circulation pipe 50. The first end of the circulation pipe 50 is connected to the outlet pipe 30 and is located at the rear end of the one-way check valve 31. The second end of the circulation pipe 50 is connected to the inlet pipe 20 and is located at the front end of the first valve 22. When the one-way check valve 31 is closed, the developer in the outlet pipe 30 located at the rear end of the one-way check valve 31 can flow into the inlet pipe 20 through the circulation pipe 50.

[0044] It should be noted that the first end of the circulation pipeline 50 is connected to the rear end of the one-way check valve 31 on the outlet pipe 30, and the second end of the circulation pipeline 50 is connected to the front end of the first valve 22 on the inlet pipe 20, forming a bypass channel from the outlet pipe 30 to the inlet pipe 20.

[0045] When the transfer pump 21 is operating normally, the one-way check valve 31 is open, and the developer mainly flows to the user side through the outlet pipe 30. At this time, the liquid flow in the circulation pipe 50 is relatively small because most of the developer preferentially flows to the user end under pressure. When the transfer pump 21 stops operating, the one-way check valve 31 closes, preventing liquid from flowing back to the filter body 10. At this time, the developer in the outlet pipe 30 located at the rear end of the one-way check valve 31 (i.e., the outlet end 302 side) can flow back to the inlet pipe 20 through the circulation pipe 50 due to the presence of the circulation pipe 50, instead of stagnating in the outlet pipe 30.

[0046] Before replacing the filter, after shutting off the delivery pump 21 and the first valve 22, the residual developer in the outlet pipe 30 can flow back to the inlet pipe 20 through the circulation pipe 50, and then be discharged from the system through the drain pipe 40, thereby minimizing the residual liquid in the outlet pipe 30. Furthermore, during the initial system startup, the developer can be pre-circulated through the circulation pipe 50 to ensure thorough mixing within the system and improve filtration efficiency.

[0047] As one possible implementation, a third valve is provided at the first end near the circulation pipeline 50. When the one-way check valve 31 is open and the third valve is closed, the developer in the filter body 10 can be output through the outlet pipe 30.

[0048] It should be noted that when the one-way check valve 31 is open and the third valve is closed, the delivery pump 21 operates, and the developer is pumped out from the filter body 10. Because the third valve is closed, the developer cannot enter the circulation pipeline 50 and can only be output through the outlet pipe 30. The opening of the one-way check valve 31 ensures that the developer can flow smoothly to the usage side, preventing liquid backflow into the filter body 10. For example, in a normal developing process, the developer, under the action of the delivery pump 21, is filtered through the filter body 10 and flows to the usage side from the outlet pipe 30. The closure of the third valve ensures that all the developer flows out from the outlet pipe 30, meeting the developing process's requirements for developer supply.

[0049] By cooperating with the third valve and the one-way check valve 31, the flow direction of the developer can be precisely controlled. Under normal operating conditions, when the third valve is closed, all the developer is output from the outlet pipe 30, ensuring the stability and consistency of the developing process, avoiding unnecessary backflow or leakage of the developer in the circulation pipeline 50, and reducing the risk of malfunctions that may occur during system operation.

[0050] As one possible implementation, a fourth valve is provided at the second end near the circulation pipe 50. When the first valve 22 is open and the fourth valve is closed, the developer can be pumped into the filter body 10 through the inlet pipe 20.

[0051] It should be noted that when the first valve 22 is open and the fourth valve is closed, the delivery pump 21 operates, and the pressure generated pumps the developer out of the supply device. Because the fourth valve is closed, the developer cannot enter the circulation pipeline 50 and can only enter the filter body 10 for filtration. This operating mode ensures the unidirectional and stable transport of the developer, allowing the filter to fully perform its filtration function. For example, during normal developer filtration, the operator opens the first valve 22 and closes the fourth valve. At this time, the delivery pump 21 draws the developer from the supply device and delivers it to the filter body 10 through the inlet pipe 20. After filtration, it is output from the outlet pipe 30 to the user side.

[0052] In one possible implementation, the developer filtration device 100 also includes a controller. The first valve 22, the one-way check valve 31, and the second valve 41 are all solenoid valves. The controller is electrically connected to the first valve 22, the one-way check valve 31, and the second valve 41 and is used to control the opening and closing of the first valve 22, the one-way check valve 31, and the second valve 41.

[0053] It should be noted that the developer filtration device 100 also includes a controller to precisely control the opening and closing states of the first valve 22, the one-way check valve 31, and the second valve 41 via electrical signals, thereby achieving intelligent management of the developer flow path. When the system needs to enter filtration mode, the controller sends an opening signal to the first valve 22 and the one-way check valve 31, while simultaneously closing the second valve 41. At this time, the delivery pump 21 starts, and the developer flows from the inlet pipe 20 into the filter body 10, and after filtration, it is output to the user side through the outlet pipe 30. During this process, the opening state of the one-way check valve 31 is automatically adjusted by the controller according to the system pressure and flow rate to ensure unidirectional flow of the developer. When the filter needs to be replaced or the system needs maintenance, the controller issues the opposite command, closing the first valve 22 and the one-way check valve 31, while simultaneously opening the second valve 41. In this way, the developer in the filter body 10 is discharged through the drain pipe 40, avoiding the cumbersome process of manually operating the valves and reducing the risk of operators coming into contact with the developer.

[0054] As one possible implementation, the first valve 22, the one-way check valve 31, and the second valve 41 are all manual valves. Operators can manually operate these valves to control the flow path of the developer and the operating status of the system. The manual valves allow operators to intuitively operate and control the developer filtration device 100, flexibly adjust the flow direction of the developer according to the actual working conditions, and facilitate the inspection and adjustment of the status of each valve during system maintenance and troubleshooting.

[0055] This application also provides a coating and developing apparatus, including the developer filtration device 100 described above. Since the structure and beneficial effects of the developer filtration device 100 have been described in detail in the foregoing embodiments, they will not be repeated here.

[0056] The above description is merely an optional embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

[0057] It should also be noted that the various specific technical features described in the above embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, this application will not describe the various possible combinations separately.

Claims

1. A developer liquid filtering device characterized by comprising: The filter includes a filter body and an inlet pipe, an outlet pipe, and a drain pipe disposed on and connected to the filter body. The inlet pipe is equipped with a delivery pump and a first valve, the outlet pipe is equipped with a one-way check valve, and the drain pipe is equipped with a second valve. When the delivery pump, the first valve, and the one-way check valve are all open and the second valve is closed, the delivery pump can pump the developer into the filter body through the inlet pipe, filter it through the filter body, and then output it through the outlet pipe. When the delivery pump, the first valve, and the one-way check valve are all closed and the second valve is open, the developer in the filter body can be discharged through the drain pipe.

2. The developer filtering apparatus according to claim 1, wherein The outlet pipe includes a connection end connected to the filter body and an outlet end away from the filter body, and the one-way check valve is located between the connection end and the outlet end.

3. The developer filtering apparatus according to claim 2, wherein The liquid outlet pipe extends vertically, and the outlet end is located above the connection end.

4. The developer filtering apparatus according to claim 2, wherein The one-way check valve is located on the side near the connection end.

5. The developer filtering apparatus according to claim 1, wherein It also includes a circulation pipeline, the first end of which is connected to the outlet pipe and located at the rear end of the one-way check valve, and the second end of which is connected to the inlet pipe and located at the front end of the first valve. When the one-way check valve is closed, the developer in the outlet pipe located at the rear end of the one-way check valve can flow into the inlet pipe through the circulation pipeline.

6. The developer filtering apparatus according to claim 5, wherein A third valve is provided at the first end near the circulation pipeline. When the one-way check valve is open and the third valve is closed, the developer in the filter body can be output through the outlet pipe.

7. The developer filtering apparatus according to claim 5, wherein A fourth valve is provided at the second end near the circulation pipeline. When the first valve is open and the fourth valve is closed, the developer can be pumped into the filter body through the inlet pipe.

8. The developer filtering apparatus according to claim 1, wherein It also includes a controller, wherein the first valve, the one-way check valve and the second valve are all solenoid valves, and the controller is electrically connected to the first valve, the one-way check valve and the second valve, and is used to control the opening and closing of the first valve, the one-way check valve and the second valve.

9. The developer filtering apparatus according to claim 1, wherein The first valve, the one-way check valve, and the second valve are all manual valves.

10. A gumming and developing apparatus characterized by comprising: The developing solution filtration device includes any one of claims 1 to 9.

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