Silicon carbide substrate polishing solution recycling and regenerating device

Abstract

The utility model discloses a silicon carbide substrate polishing solution recycling and regenerating device, which belongs to the technical field of silicon carbide substrate polishing solution recycling and regenerating, and comprises a first filter box, a second filter box and a regulation and control mechanism, and the regulation and control mechanism comprises a liquid inlet pipe and a liquid outlet pipe which are communicated with the inner wall of the first filter box; one end of the liquid inlet pipe and one end of the liquid outlet pipe are communicated with the inner wall of the second filter box, the surfaces of the liquid inlet pipe and the liquid outlet pipe are both in a U shape, and the bottom of the first filter box and the bottom of the second filter box are both fixedly connected with fixing frames. Through the mode, the screw rod is matched with the blocking frame, so that one end of the interior of the liquid inlet pipe and one end of the interior of the liquid outlet pipe are blocked, the other end of the interior of the liquid inlet pipe and the other end of the interior of the liquid outlet pipe are opened, and then it is guaranteed that the interior of the first filter box or the second filter box is cleaned under the condition that the machine is not stopped; therefore, shutdown for cleaning the filtering module is avoided, and the recovery and regeneration efficiency of the polishing solution is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide substrate polishing slurry recycling and regeneration technology, specifically to a silicon carbide substrate polishing slurry recycling and regeneration device. Background Technology

[0002] Polishing slurry plays a crucial role in the processing of silicon carbide substrates. However, if the polishing slurry is discarded directly after use, it will not only waste resources but also increase production costs and environmental pollution. Therefore, polishing slurry recycling and regeneration devices are needed to recycle the polishing slurry.

[0003] The filtration module on the polishing slurry recovery and regeneration device first filters the polishing slurry. The filtered polishing slurry then flows to the separation module, which separates the polishing slurry before it flows to the regeneration module to regenerate it, thereby achieving the recycling and reuse of the polishing slurry.

[0004] Polishing slurry recovery and regeneration devices need to be shut down periodically to clean impurities from the filter module. However, shutting down to clean the filter module can easily reduce the efficiency of polishing slurry recovery and regeneration.

[0005] Based on this, the present invention designs a silicon carbide substrate polishing slurry recycling and regeneration device to solve the above problems. Utility Model Content

[0006] In view of the above-mentioned shortcomings of the existing technology, the present invention provides a silicon carbide substrate polishing slurry recycling and regeneration device.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A silicon carbide substrate polishing slurry recycling and regeneration device includes a first filter box and a second filter box, and a control mechanism. The control mechanism includes an inlet pipe and an outlet pipe connected to the inner wall of the first filter box. One end of the inlet pipe and the outlet pipe is connected to the inner wall of the second filter box. The surfaces of the inlet pipe and the outlet pipe are both U-shaped. The bottom of the first filter box and the second filter box are fixedly connected to a fixing frame. The inner wall of the fixing frame is rotatably connected to a lead screw. The surface of the lead screw is threadedly connected to a plug. The surface of the plug is slidably connected to the inner wall of the inlet pipe and the outlet pipe, respectively.

[0009] Furthermore, the inner walls of both the inlet and outlet pipes are fixedly connected with several sealing rings, and the surface of the plug is slidably connected to the inner wall of the sealing rings.

[0010] Furthermore, several first magnetic blocks are fixedly connected to the inner walls of both the inlet pipe and the outlet pipe.

[0011] Furthermore, a plurality of second magnetic blocks are fixedly connected to the surface of the sealing ring, wherein the first magnetic block and the second magnetic block are like poles and repel each other.

[0012] Furthermore, a long rod is slidably connected to the upper end of the inner wall of the lead screw, and the surface of the long rod is slidably connected to the inner wall of the fixed frame.

[0013] Furthermore, a soft ball is fixedly connected to the upper surface of the lead screw, and the surface of the soft ball is engaged with the upper surface of the long rod.

[0014] Furthermore, both the front and rear ends of the fixing frame are fixedly connected to sealing sleeves, and the other end of the sealing sleeve is fixedly connected to the end of the plug frame.

[0015] Furthermore, the top and bottom of the plug are fixedly connected with anti-detachment blocks, one side of which is slidably connected to the inner wall of the inlet pipe, and the other side of which is slidably connected to the inner wall of the outlet pipe.

[0016] Beneficial effects

[0017] 1. By cooperating with the lead screw and the plug, one end of the inlet pipe and the outlet pipe are sealed, while the other end of the inlet pipe and the outlet pipe are left open. This allows the first or second filter box to be cleaned without stopping the machine, thus avoiding the need to stop the machine to clean the filter module and ensuring the efficiency of polishing fluid recycling and regeneration.

[0018] 2. By cooperating with the first and second magnetic blocks, the sealing ring is pressed, ensuring that the sealing ring is always in close contact with the surface of the plug frame, thereby ensuring the sealing effect between the plug frame and the inlet and outlet pipes. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a perspective view of the main structure of a silicon carbide substrate polishing slurry recycling and regeneration device according to the present invention;

[0021] Figure 2 A perspective view of the control mechanism of a silicon carbide substrate polishing slurry recovery and regeneration device according to this utility model;

[0022] Figure 3This is a cross-sectional view of the inlet pipe of a silicon carbide substrate polishing slurry recovery and regeneration device according to the present invention.

[0023] Figure 4 for Figure 3 Enlarged view of point A in the middle.

[0024] The labels in the diagram represent:

[0025] 100. First filter box; 200. Second filter box; 300. Control mechanism; 301. Inlet pipe; 302. Outlet pipe; 303. Plug; 304. Fixing frame; 305. Lead screw; 306. Long rod; 307. Soft ball; 308. Sealing ring; 309. First magnetic block; 310. Second magnetic block; 311. Anti-detachment block; 312. Sealing sleeve. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0027] The present invention will be further described below with reference to the embodiments.

[0028] In some embodiments, please refer to the appendix to the instruction manual. Figure 1-4 A silicon carbide substrate polishing slurry recycling and regeneration device includes a first filter box 100 and a second filter box 200, and a control mechanism 300. The control mechanism 300 includes an inlet pipe 301 and an outlet pipe 302 connected to the inner wall of the first filter box 100. One end of the inlet pipe 301 and the outlet pipe 302 is connected to the inner wall of the second filter box 200. The surfaces of the inlet pipe 301 and the outlet pipe 302 are both U-shaped. The bottom of the first filter box 100 and the second filter box 200 are both fixedly connected to a fixing frame 304. The inner wall of the fixing frame 304 is rotatably connected to a lead screw 305. The surface of the lead screw 305 is threadedly connected to a plug 303. The surfaces of the plug 303 are slidably connected to the inner walls of the inlet pipe 301 and the outlet pipe 302, respectively.

[0029] It should be noted that the polishing slurry recovery and regeneration device typically consists of a first filter box 100, a second filter box 200, a centrifugal separation mechanism, and an abrasive regeneration mechanism.

[0030] Both the first filter box 100 and the second filter box 200 are equipped with coarse filter screens, microfiltration and ultrafiltration devices. The bottom of both the first filter box 100 and the second filter box 200 is connected to a drain pipe, and one side of both the first filter box 100 and the second filter box 200 is connected to a water inlet pipe.

[0031] Coarse filters are used to remove large particulate impurities from polishing fluids, such as silicon carbide debris and metal particles generated during machining. Coarse filters have relatively large pore sizes, typically ranging from tens to hundreds of micrometers.

[0032] Microfiltration and ultrafiltration equipment can remove micron-sized impurity particles, with microfiltration precision typically ranging from 0.1 to 10 microns; ultrafiltration equipment can retain nano-sized particles and large organic molecules, with pore sizes between 0.001 and 0.1 microns. The above descriptions pertain to common and well-known technologies in this field and are not closely related to the technical issues of this application; therefore, no further explanation is provided.

[0033] The inlet pipe 301 is connected to the supply pipe by a flange, the outlet pipe 302 is connected to the centrifugal separation mechanism by a flange, the centrifugal separation mechanism is connected to the abrasive regeneration mechanism by a flange, and the sewage pipe and water inlet pipe on the first filter box 100 and the second filter box 200 are connected to the corresponding pipes by a flange connection, so that each pipe on the recycling and regeneration device is connected to the corresponding pipe by a flange.

[0034] When the polishing slurry for silicon carbide substrates needs to be recycled and regenerated, initially, the inlet pipe 301 and the outlet pipe 302 near the first filter box 100 are open, while the inlet pipe 301 and the outlet pipe 302 near the second filter box 200 are blocked. The used polishing slurry is transported to the first filter box 100 through the inlet pipe 301, allowing it to first pass through a coarse filter to remove large particles of impurities, and then through microfiltration and ultrafiltration units to further remove fine impurities and colloidal substances, improving the purity of the polishing slurry. After filtration, it is transported to a centrifugal separation mechanism to separate the abrasive particles from other components, and the abrasive particles are collected for subsequent regeneration. For the separated liquid portion, a chemical precipitation separation device is used as needed to remove impurities such as metal ions.

[0035] The abrasive collected in the centrifugal separation unit is transported to the abrasive regeneration unit. The collected abrasive undergoes surface cleaning to remove surface contaminants, and the particle size is adjusted to restore the abrasive particle size to a suitable range. The polishing performance of the abrasive is improved through activation treatment, and all components are thoroughly mixed to ensure that the performance of the regenerated polishing fluid meets the requirements for use. The regenerated polishing fluid undergoes comprehensive quality testing, and only polishing fluid that passes the test can be packaged, stored in suitable containers, and properly labeled for subsequent use.

[0036] In this embodiment of the invention, when cleaning the inside of the first filter box 100 is required, the lead screw 305 on the second filter box 200 is rotated, causing the lead screw 305 to rotate and move the plug 303 within the inlet pipe 301 and outlet pipe 302, thus opening the inlet pipe 301 and outlet pipe 302 near the second filter box 200, allowing the used polishing liquid to flow into the second filter box 200. Rotating the lead screw 305 on the first filter box 100 causes the lead screw 305 to rotate... The blocking bracket 303 moves within the inlet pipe 301 and outlet pipe 302, sealing the inside of the inlet pipe 301 and outlet pipe 302 near the first filter box 100, preventing the used polishing liquid from flowing into the first filter box 100. At this time, the drain pipe and water inlet pipe inside the first filter box 100 are opened, allowing cleaning water to flow into the first filter box 100 through the water inlet pipe. The inside of the first filter box 100 is cleaned by backwashing, and impurities are discharged through the drain pipe along with the water flow.

[0037] In this embodiment of the invention, the screw 305 and the plug 303 cooperate to seal one end of the inlet pipe 301 and the outlet pipe 302, while keeping the other end of the inlet pipe 301 and the outlet pipe 302 open. This ensures that the inside of the first filter box 100 or the second filter box 200 can be cleaned without stopping the machine, thus avoiding the need to stop the machine to clean the filter module and ensuring the efficiency of polishing fluid recycling and regeneration.

[0038] In some embodiments, such as Figure 4 As shown in the preferred embodiment of this utility model, a plurality of sealing rings 308 are fixedly connected to the inner walls of both the inlet pipe 301 and the outlet pipe 302. The surface of the plug bracket 303 is slidably connected to the inner wall of the sealing rings 308. A plurality of first magnetic blocks 309 are fixedly connected to the inner walls of both the inlet pipe 301 and the outlet pipe 302. A plurality of second magnetic blocks 310 are fixedly connected to the surface of the sealing rings 308. The first magnetic blocks 309 and the second magnetic blocks 310 are like poles and repel each other. Both the first magnetic blocks 309 and the second magnetic blocks 310 are AlNiCo magnet components, and the sealing rings 308 are fluorosilicone rubber components.

[0039] In this embodiment of the utility model, the first magnetic block 309 and the second magnetic block 310 cooperate with each other to press the sealing ring 308, ensuring that the sealing ring 308 is always in close contact with the surface of the plug frame 303, thereby ensuring the sealing effect between the plug frame 303 and the inlet pipe 301 and the outlet pipe 302.

[0040] In some embodiments, such as Figure 3-4As shown, in a preferred embodiment of this utility model, a long rod 306 is slidably connected to the upper end of the inner wall of the lead screw 305. The surface of the long rod 306 is slidably connected to the inner wall of the fixing frame 304. A soft ball 307 is fixedly connected to the upper end of the surface of the lead screw 305. The surface of the soft ball 307 is engaged with the upper end of the surface of the long rod 306. A sealing sleeve 312 is fixedly connected to both the front and rear ends of the fixing frame 304. The other end of the sealing sleeve 312 is fixedly connected to the end of the plug frame 303. Anti-detachment blocks 311 are fixedly connected to both the top and bottom of the plug frame 303. The surface of one anti-detachment block 311 is slidably connected to the inner wall of the inlet pipe 301, and the surface of the other anti-detachment block 311 is slidably connected to the inner wall of the outlet pipe 302. Both the soft ball 307 and the sealing sleeve 312 are silicone components.

[0041] In this embodiment of the utility model, after the lead screw 305 is rotated to a suitable position, it pushes the long rod 306 to move within the lead screw 305 and slide into the fixing frame 304, so that the soft ball 307 is engaged with the surface of the long rod 306, thereby limiting the lead screw 305.

[0042] In this embodiment of the utility model, the long rod 306 and the soft ball 307 cooperate to lock the lead screw 305, thereby ensuring that the plug 303 is stably located inside the inlet pipe 301 and the outlet pipe 302, thus ensuring that one end of the inlet pipe 301 and the outlet pipe 302 is stably blocked, and the other end of the inlet pipe 301 and the outlet pipe 302 is stably open.

[0043] It should be noted that the first filter box 100, the second filter box 200, the inlet pipe 301, the outlet pipe 302, the plug 303, the lead screw 305, the first magnetic block 309 and the second magnetic block 310 mentioned above are all devices with relatively mature existing technology. The specific models can be selected according to actual needs, and will not be elaborated here.

[0044] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A silicon carbide substrate polishing slurry recycling and regeneration device, comprising a first filter box (100) and a second filter box (200), characterized in that: It also includes a control mechanism (300), which includes an inlet pipe (301) and an outlet pipe (302) connected to the inner wall of the first filter box (100). One end of the inlet pipe (301) and the outlet pipe (302) is connected to the inner wall of the second filter box (200). The surfaces of the inlet pipe (301) and the outlet pipe (302) are both U-shaped. The bottom of the first filter box (100) and the second filter box (200) are both fixedly connected to a fixing frame (304). The inner wall of the fixing frame (304) is rotatably connected to a lead screw (305). The surface of the lead screw (305) is threadedly connected to a plug (303). The surface of the plug (303) is slidably connected to the inner wall of the inlet pipe (301) and the outlet pipe (302).

2. The apparatus according to claim 1, wherein The inner walls of the inlet pipe (301) and the outlet pipe (302) are fixedly connected with a number of sealing rings (308), and the surface of the plug (303) is slidably connected to the inner wall of the sealing rings (308).

3. The apparatus according to claim 2, wherein The inner walls of the inlet pipe (301) and the outlet pipe (302) are each fixedly connected with a number of first magnetic blocks (309).

4. The apparatus according to claim 3, wherein The surface of the sealing ring (308) is fixedly connected with a plurality of second magnetic blocks (310), and the first magnetic block (309) and the second magnetic blocks (310) are like poles and repel each other.

5. The apparatus according to claim 1, wherein The upper end of the inner wall of the lead screw (305) is slidably connected to a long rod (306), and the surface of the long rod (306) is slidably connected to the inner wall of the fixing frame (304).

6. The apparatus according to claim 1, wherein A soft ball (307) is fixedly connected to the upper surface of the lead screw (305), and the surface of the soft ball (307) is engaged with the upper surface of the long rod (306).

7. The apparatus according to claim 1, wherein The front and rear ends of the fixing frame (304) are fixedly connected to sealing sleeves (312), and the other end of the sealing sleeve (312) is fixedly connected to the end of the plug frame (303).

8. The apparatus according to claim 1, wherein The top and bottom of the plug (303) are fixedly connected with anti-detachment blocks (311), one side of the surface of the anti-detachment block (311) is slidably connected to the inner wall of the inlet pipe (301), and the other side of the surface of the anti-detachment block (311) is slidably connected to the inner wall of the outlet pipe (302).

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