Silane purifying and filtering equipment

Abstract

The utility model discloses silane purifying and filtering equipment which comprises an absorption tower, a collecting box mounted at the bottom of the absorption tower, an exhaust port fixedly connected to the top of the absorption tower, second purifying components symmetrically arranged on the inner side of the absorption tower and used for purifying and filtering silane, and a filtering box mounted on the inner side of the absorption tower, a first purification assembly used for purifying and filtering silane is arranged on the inner side of the filter box, the first purification assembly and a second purification assembly are matched with each other, silane gas sprayed out through a silane jet head generates a large number of dense bubbles under stirring of a positive stirring fan and a negative stirring fan, the bubbles can be fully mixed with a chemical reagent solution, and the purpose of purifying and filtering silane is achieved. And through a filtering filler layer arranged above the partition plate and under the action of a spraying frame, residual impurities and particulate matters in the silane gas can be adsorbed and removed by the filtering filler layer such as activated carbon and a molecular sieve, so that the purification efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of silane purification technology, and in particular to a silane purification and filtration device. Background Technology

[0002] The primary purpose of silane purification is to improve the purity of silanes to meet the stringent requirements of various applications. As an important chemical raw material, the purity of silanes directly affects the quality and performance of downstream products. In the semiconductor industry, high-purity silanes are fundamental to the manufacture of key materials such as monocrystalline and polycrystalline silicon, requiring extremely high purity because even minute impurities can affect the performance and reliability of electronic devices. Furthermore, high-purity silanes are also used in solar cells, fiber optic communications, and other fields, where the purity and quality of materials have a significant impact. Therefore, silane purification aims to remove impurities from silanes to ensure that products meet the required purity standards, thereby guaranteeing the stability of subsequent production processes and the superior performance of the final product.

[0003] A search revealed a Chinese utility model patent with patent number CN213528025U, which discloses a high-purity silane purification and filtration device. Compared with the prior art, this utility model patent with Chinese patent number CN213528025U works by: silane entering the tank through the inlet pipe, moving along the direction of the partition, and undergoing multiple filtration and adsorption processes through activated carbon and molecular sieves in sequence; simultaneously, an inner cavity is provided and filled with cooling liquid to maintain the low temperature inside the tank; and a spiral guide plate is provided to increase the moving distance and improve the purification effect.

[0004] However, in actual use, the above-mentioned device uses activated carbon and molecular sieves for purification and filtration. The purification and filtration method is relatively simple. From the perspective of filtration efficiency, a single purification and filtration method may not be able to efficiently remove all impurities in silane. Activated carbon mainly relies on its unique pore structure and high specific surface area for physical and chemical adsorption. Although molecular sieves can remove molecules of a certain size through sieving effect, they may be difficult to effectively remove impurities with a pore size similar to or smaller than that of molecular sieves. Therefore, a silane purification and filtration device is proposed. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing purification and filtration methods that are limited to a single approach, and to propose a silane purification and filtration device.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A silane purification and filtration device includes an absorption tower, a collection box installed at the bottom of the absorption tower, an exhaust port fixedly connected to the top of the absorption tower, and a second purification component for silane purification and filtration symmetrically arranged inside the absorption tower. The second purification component includes a spray rack and a partition plate symmetrically installed inside the absorption tower. The partition plate is filled with a material for silane purification and filtration, and the spray rack is used to spray the purification solution.

[0008] A filter box is installed inside the absorption tower. Multiple silane jet nozzles are fixedly connected to the bottom of the filter box. A first purification component for silane purification filtration is provided inside the filter box. The first purification component includes a rotatable forward stirring fan and a reverse stirring fan installed inside the filter box. The forward stirring fan and the reverse stirring fan cooperate to disperse the gas ejected from the silane jet nozzles.

[0009] The above technical solution further includes:

[0010] The second purification component includes multiple nozzles fixedly connected to the bottom of the spray frame, and the multiple nozzles are arranged in a circumferential array.

[0011] The partition is located at the bottom of the spray frame, and the partition has multiple holes that are arranged in a circular array. A filter material is provided between the partition and the spray frame.

[0012] A fixed support is fixedly connected to the inner side of the absorption tower, and the fixed support is fixedly connected to the filter box. A water top is fixedly connected to the top of the filter box.

[0013] The first purification component includes a motor mounting platform fixedly connected to the bottom of the filter box, a servo motor fixedly connected to the inner side of the motor mounting platform, and a drive shaft fixedly connected to the output end of the servo motor.

[0014] A partition is fixedly connected to the inner side of the filter box. The drive shaft is rotatably connected to the filter box. The forward stirring fan and the reverse stirring fan are both fixedly connected to the drive shaft (16), and the forward stirring fan and the reverse stirring fan are both located inside the partition.

[0015] The filter box and the absorption tower are fixedly connected by an inlet and an outlet, and the silane jet nozzles are arranged in a circular pattern.

[0016] The top of the filter box has multiple vent holes, which are arranged in a circular pattern.

[0017] This utility model has the following beneficial effects:

[0018] 1. In this utility model, the first purification component generates a large number of dense bubbles by spraying silane gas through a silane jet nozzle and stirring it in conjunction with a forward and reverse stirring fan. These bubbles can fully mix with the chemical reagent solution in the filter box, increasing the gas-liquid contact area in the solution, which is beneficial for the gas to react with the chemical substances in the solution, thereby improving the purification and filtration effect.

[0019] 2. In this utility model, the second purification component, through the filter packing layer set above the partition, and under the action of the spray rack, further purifies and filters the silane gas filtered by the first purification component. The filter packing layer (such as activated carbon, molecular sieve, etc.) can adsorb and remove residual impurities and particulate matter in the silane gas. The function of the spray rack is to evenly spray the chemical reagent solution onto the filter packing layer, further promoting the contact and reaction between the gas and the solution, thereby improving the purification efficiency. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of a silane purification and filtration device proposed in this utility model;

[0021] Figure 2 This is a schematic diagram of the internal structure of the absorption tower in this utility model;

[0022] Figure 3 This is a schematic diagram of the internal structure of the filter box in this utility model;

[0023] Figure 4 This is a schematic diagram of the top structure of the filter box in this utility model;

[0024] In the diagram: 1. Absorption tower; 2. Collection tank; 3. Liquid inlet; 4. Liquid outlet; 5. Exhaust outlet; 6. Filter box; 7. Baffle; 8. Spray rack; 9. Spray head; 10. Fixed bracket; 11. Motor mounting platform; 12. Servo motor; 13. Forward stirring fan; 14. Reverse stirring fan; 15. Baffle tank; 16. Drive shaft; 17. Exhaust port; 18. Water top; 19. Leakage hole; 20. Support column; 21. Silane jet nozzle; Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0026] Example 1

[0027] like Figures 1-4As shown, the present invention proposes a silane purification and filtration device, including an absorption tower 1, a collection box 2 installed at the bottom of the absorption tower 1, an exhaust port 5 fixedly connected to the top of the absorption tower 1, and a second purification component for silane purification and filtration symmetrically arranged inside the absorption tower 1. The second purification component includes a spray rack 8 and a partition 7 symmetrically installed inside the absorption tower 1. The partition 7 is filled with a material for silane purification and filtration, and the spray rack 8 is used to spray the purification solution.

[0028] A filter box 6 is installed inside the absorption tower 1. Multiple silane jet nozzles 21 are fixedly connected to the bottom of the filter box 6. A first purification component for silane purification filtration is provided inside the filter box 6. The first purification component includes a rotatable forward stirring fan 13 and a reverse stirring fan 14 installed inside the filter box 6. The forward stirring fan 13 and the reverse stirring fan 14 cooperate with each other to disperse the gas ejected from the silane jet nozzles 21.

[0029] During use, the first purification component generates a large number of dense bubbles in the silane gas inside the filter box 6. These bubbles increase the contact area with the filter box, thereby improving the purification and filtration effect. After being filtered by the first purification component, the silane gas enters the interior of 1 and is then purified again by the second purification component, which adsorbs impurity particles.

[0030] The second purification component also includes multiple nozzles 9 fixedly connected to the bottom of the spray frame 8, and the multiple nozzles 9 are arranged in a circumferential array.

[0031] The partition 7 is located at the bottom of the spray frame 8. The partition 7 has multiple holes 19 through it, which are arranged in a circular array. A filter material is provided between the partition 7 and the spray frame 8.

[0032] The baffle 7 is filled with activated carbon or molecular sieves, which can adsorb and remove residual impurities and particulate matter in silane gas. At the same time, multiple nozzles 9 installed circumferentially on the spray rack 8 spray chemical purification solution, so that other components in silane gas react and further improve the purification effect of the filter layer. The sprayed purification solution is finally collected by the collection box 2.

[0033] A fixed support 10 is fixedly connected to the inner side of the absorption tower 1. The fixed support 10 is fixedly connected to the filter box 6. A water top 18 is fixedly connected to the top of the filter box 6.

[0034] The water top 18 can prevent the chemical purification solution sprayed by the nozzle 9 from entering the filter box 6 and causing pollution. At the same time, a certain distance is set between the water top 18 and the filter box 6, so as not to hinder the silane gas from entering the absorption tower 1.

[0035] The first purification component includes a motor mounting platform 11 fixedly connected to the bottom of the filter box 6, a servo motor 12 fixedly connected to the inner side of the motor mounting platform 11, and a drive shaft 16 fixedly connected to the output end of the servo motor 12.

[0036] A partition 15 is fixedly connected to the inner side of the filter box 6. The drive shaft 16 is rotatably connected to the filter box 6. The forward stirring fan 13 and the reverse stirring fan 14 are both fixedly connected to the drive shaft (16), and the forward stirring fan 13 and the reverse stirring fan 14 are both located inside the partition 15.

[0037] The filter box 6 and the absorption tower 1 are fixedly connected to the inlet 3 and the outlet 4. Multiple silane jet nozzles 21 are fixedly connected to the bottom inner side of the filter box 6, and the silane jet nozzles 21 are arranged in a circular pattern.

[0038] The top of the filter box 6 has multiple exhaust holes 17, which are arranged in a circular pattern.

[0039] First, during use, the inlet 3 and outlet 4 are connected to a connecting pipe, and a circulating chemical reagent solution is used for purification and filtration. Then, silane gas is introduced into the compartment 15 through the silane jet nozzle 21. Then, the servo motor 12 is started by control, and the servo motor 12 drives the transmission shaft 16 to rotate, which in turn drives the forward stirring fan 13 and the reverse stirring fan 14 to rotate synchronously. Since the blades of the forward stirring fan 13 and the reverse stirring fan 14 are set in different directions, the silane gas forms a large number of dense bubbles during the rotation of the forward stirring fan 13 and the reverse stirring fan 14, which fully react with the chemical solution and improve the purification and filtration efficiency. Finally, the gas exits from the compartment 15, enters the absorption tower 1 through the exhaust port 17, and is finally collected through the exhaust port 5.

[0040] In this embodiment, firstly, the silane gas to be purified and filtered is introduced into the compartment 15 through the silane jet nozzle 21. The servo motor 12 is started to drive the forward stirring fan 13 and the reverse stirring fan to rotate synchronously, so that the silane gas forms a large number of dense bubbles. These bubbles can fully react with the chemical solution in the filter box 6. Then, the filtered silane gas enters the absorption tower 1. Multiple nozzles 9 installed on the spray frame 8 spray the chemical purification solution, so that other components in the silane gas react and further improve the purification effect of the packing. The packing material set on the partition 7 can be activated carbon or molecular sieve, which can adsorb and remove residual impurities and particulate matter in the silane gas. The sprayed purification solution is finally collected by the collection box 2, and the purified and filtered silane gas is collected through the exhaust port 5.

[0041] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A silane purification filtration apparatus comprising an absorption column (1), characterized in that, A collection box (2) is installed at the bottom of the absorption tower (1), and an exhaust port (5) is fixedly connected to the top of the absorption tower (1). A second purification component for silane purification filtration is symmetrically arranged inside the absorption tower (1). The second purification component includes a spray rack (8) and a partition (7) symmetrically installed inside the absorption tower (1). The partition (7) is filled with a filling material for silane purification filtration, and the spray rack (8) is used to spray the purification solution. The absorption tower (1) is equipped with a filter box (6) on its inner side. Multiple silane jet nozzles (21) are fixedly connected to the bottom of the inner side of the filter box (6). The filter box (6) is equipped with a first purification component for silane purification filtration. The first purification component includes a rotatable forward stirring fan (13) and a reverse stirring fan (14) in the filter box (6). The forward stirring fan (13) and the reverse stirring fan (14) cooperate with each other to disperse the gas ejected by the silane jet nozzles (21).

2. A silane purification filtration apparatus according to claim 1, wherein, The second purification component includes a plurality of nozzles (9) fixedly connected to the bottom of the spray frame (8), and the plurality of nozzles (9) are arranged in a circumferential array.

3. A silane purification filtration apparatus according to claim 2, wherein, The partition (7) is located at the bottom of the spray frame (8). The partition (7) has multiple holes (19) through it. The multiple holes (19) are arranged in a circular array. A filter material is provided between the partition (7) and the spray frame (8).

4. The silane purification filtration apparatus of claim 1, wherein, The absorption tower (1) is fixedly connected to a fixed bracket (10) on its inner side. The fixed bracket (10) is fixedly connected to the filter box (6). The top of the filter box (6) is fixedly connected to a water top (18).

5. The silane purification filtration apparatus of claim 1, wherein, The first purification component includes a motor mounting platform (11) fixedly connected to the bottom of the filter box (6), a servo motor (12) fixedly connected to the inner side of the motor mounting platform (11), and a drive shaft (16) fixedly connected to the output end of the servo motor (12).

6. A silane purification filtration apparatus as claimed in claim 5, wherein, A partition (15) is fixedly connected to the inner side of the filter box (6). The drive shaft (16) is rotatably connected to the filter box (6). The forward stirring fan (13) and the reverse stirring fan (14) are both fixedly connected to the drive shaft (16), and the forward stirring fan (13) and the reverse stirring fan (14) are both located inside the partition (15).

7. A silane purification filtration apparatus according to claim 6, wherein, The filter box (6) and the absorption tower (1) are fixedly connected by an inlet (3) and an outlet (4), and the silane jet nozzles (21) are arranged in a circular pattern.

8. The silane purification filtration apparatus of claim 1, wherein, The filter box (6) has multiple exhaust holes (17) on its top, and the exhaust holes (17) are arranged in a circular pattern.

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