Positioning tool for forming and machining cooling channel of electrostatic chuck

Abstract

The utility model discloses a positioning tool for forming and processing a cooling channel of an electrostatic chuck, which relates to the field of forming and processing the cooling channel of the electrostatic chuck and comprises a base, a first magnetic block is fixedly connected to the outer wall of the base, a rotating shaft is mounted on the outer wall of the base, and a placing table is mounted on the outer wall of the rotating shaft. A second magnetic block is fixedly connected to the bottom of the containing table, a collecting box is installed in the base, the collecting box is pulled to extend out along the base in a sliding mode, the containing table is pulled upwards to drive the containing table to turn over along the base, and the effect of conveniently cleaning and collecting sweeps generated during machining of the electrostatic chuck cooling channel is achieved. According to the electrostatic chuck limiting device, the electrostatic chuck is placed on the placement table, and the threaded rod is rotated to extrude the bearing plate after rotating, so that the electrostatic chuck is extruded and limited by the two clamping plates, and the effect of conveniently limiting the electrostatic chucks of different models and sizes is achieved.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck cooling channel opening and processing, specifically a positioning tooling for electrostatic chuck cooling channel opening and processing. Background Technology

[0002] An electrostatic chuck is a device that uses electrostatic attraction to fix objects and is widely used in high-precision manufacturing fields such as semiconductor manufacturing and optical processing. It mainly achieves precise fixation and positioning of the workpiece (such as a semiconductor wafer) by generating an electrostatic field on the chuck surface, which attracts the workpiece to be processed. During production, electrostatic chucks require internal cooling channels. Current positioning fixtures for creating these cooling channels are inconvenient for collecting the waste generated during the process; therefore, a positioning fixture specifically designed for creating cooling channels in electrostatic chucks is needed.

[0003] Existing positioning fixtures for machining cooling channels in electrostatic chucks are inconvenient to collect waste generated during the machining process, causing waste to accumulate on the positioning fixture and affecting subsequent use. Furthermore, they are inconvenient to limit the movement of electrostatic chucks of different models and sizes, resulting in low applicability of the positioning fixture. Therefore, there is an urgent need for a positioning fixture for machining cooling channels in electrostatic chucks. Utility Model Content

[0004] Based on this, the purpose of this utility model is to provide a positioning fixture for opening and processing cooling channels in electrostatic chucks, so as to solve the problems of existing positioning fixtures for opening and processing cooling channels in electrostatic chucks being inconvenient to collect waste generated during the opening and processing of cooling channels and inconvenient to limit the movement of electrostatic chucks of different models and sizes.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a positioning fixture for processing the opening of an electrostatic chuck cooling channel, comprising a base, a first magnetic block fixedly connected to the outer wall of the base, a rotating shaft installed on the outer wall of the base, a placement platform installed on the outer wall of the rotating shaft, a second magnetic block fixedly connected to the bottom of the placement platform, and a collection box installed inside the base.

[0006] A support block is fixedly connected to the top of the placement platform. A threaded groove is formed inside the support block. A threaded rod is movably connected inside the support block. A receiving plate is movably connected to one end of the threaded rod. A guide rod is fixedly connected to one side of the receiving plate. A slot is formed inside the receiving plate. A groove is formed on the inner side wall of the slot. An insert is installed inside the receiving plate. An elastic protrusion is fixedly connected to the outer wall of the insert. A clamping plate is fixedly connected to the outer wall of the insert.

[0007] Preferably, the base forms a rotating structure with the placement platform via a rotating shaft, and the first magnetic block and the second magnetic block are magnetically connected.

[0008] Preferably, the base and the collection box form a sliding structure, and the base has a slotted design.

[0009] Preferably, the support block is threadedly connected to the threaded rod via a threaded groove, and the threaded rod and the receiving plate form a rotating structure.

[0010] Preferably, the guide rod and the support block form a sliding structure, and the support block has an open design.

[0011] Preferably, the insert is engaged with the receiving plate via a slot, and the elastic protrusion is engaged with the receiving plate via a groove.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. This utility model, through the setting of a base, a first magnetic block, a placement platform, a second magnetic block and a collection box, allows the collection box to slide out along the base by pulling it, and the placement platform to be pulled upwards to separate the magnetically connected first and second magnetic blocks, causing the placement platform to flip along the base, which facilitates the cleaning and collection of waste generated during the opening of the electrostatic chuck cooling channel, and prevents waste from accumulating on the placement platform.

[0014] 2. This utility model, through the setting of a placement platform, support block, threaded rod, receiving plate, guide rod, slot, groove, insert block, elastic protrusion, and clamping plate, allows the electrostatic chuck to be placed on the placement platform. By moving the clamping plate, the insert block is inserted into the slot, causing the elastic protrusion to engage in the groove for limiting. By rotating the threaded rod, the threaded rod can be rotated to compress the receiving plate, causing the guide rod to slide along the support block. This allows the two clamping plates to compress and limit the electrostatic chuck, thus facilitating the limiting of electrostatic chucks of different models and sizes. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0016] Figure 2 This is a perspective view of the base of this utility model;

[0017] Figure 3 This is a schematic diagram showing the structural breakdown of this utility model;

[0018] Figure 4 This is a perspective view of the receiving plate of this utility model.

[0019] In the diagram: 1. Base; 2. First magnet; 3. Rotating shaft; 4. Placement platform; 5. Second magnet; 6. Collection box; 7. Support block; 8. Threaded groove; 9. Threaded rod; 10. Support plate; 11. Guide rod; 12. Slot; 13. Groove; 14. Insert block; 15. Elastic protrusion; 16. Clamping plate. Detailed Implementation

[0020] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0021] The embodiments of this utility model will be described below based on its overall structure.

[0022] Please see Figure 1-4 A positioning fixture for opening and processing cooling channels in an electrostatic chuck includes a base 1, a first magnetic block 2 fixedly connected to the outer wall of the base 1, a rotating shaft 3 installed on the outer wall of the base 1, a placement platform 4 installed on the outer wall of the rotating shaft 3, a second magnetic block 5 fixedly connected to the bottom of the placement platform 4, and a collection box 6 installed inside the base 1. The base 1 and the placement platform 4 form a rotating structure through the rotating shaft 3. The first magnetic block 2 and the second magnetic block 5 are magnetically connected. The base 1 and the collection box 6 form a sliding structure. The base 1 has a slotted design, which facilitates the cleaning and collection of waste generated during the opening and processing of the cooling channels in the electrostatic chuck.

[0023] Please see Figure 1-4 A positioning fixture for processing cooling channels of electrostatic chucks is disclosed. A support block 7 is fixedly connected to the top of a placement table 4. A threaded groove 8 is formed inside the support block 7. A threaded rod 9 is movably connected inside the support block 7. A receiving plate 10 is movably connected to one end of the threaded rod 9. A guide rod 11 is fixedly connected to one side of the receiving plate 10. A slot 12 is formed inside the receiving plate 10. A groove 13 is formed on the inner side wall of the slot 12. An insert block 14 is installed inside the receiving plate 10. An elastic protrusion 15 is fixedly connected to the outer wall of the insert block 14. A clamping plate 16 is fixedly connected to the outer wall of the insert block 14. The support block 7 is threadedly connected to the threaded rod 9 through the threaded groove 8. The threaded rod 9 and the receiving plate 10 form a rotating structure. The guide rod 11 and the support block 7 form a sliding structure. The support block 7 is designed with an open hole. The insert block 14 is engaged with the receiving plate 10 through the slot 12. The elastic protrusion 15 is engaged with the receiving plate 10 through the groove 13. This design facilitates the positioning of electrostatic chucks of different models and sizes.

[0024] Working principle: In use, the electrostatic chuck is placed on the placement platform 4. A clamping plate 16 matching the model and size of the electrostatic chuck is selected. The clamping plate 16 is moved so that the insert block 14 is inserted into the slot 12, causing the elastic protrusion 15 to be locked into the groove 13 for limiting. By rotating the threaded rod 9, which is threaded to the support block 7 through the threaded groove 8, the threaded rod 9 can be rotated to squeeze the receiving plate 10, causing the guide rod 11 to slide along the support block 7. This allows the two clamping plates 16 to squeeze and limit the electrostatic chuck. After the cooling channel is opened, the electrostatic chuck is removed. By pulling the collection box 6, the collection box 6 slides out along the base 1. Pulling the placement platform 4 upwards separates the magnetically connected first magnetic block 2 and second magnetic block 5, causing the placement platform 4 to flip along the base 1, allowing the waste to fall into the collection box 6 for collection. This completes the use of the device. The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0025] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A positioning tool for electrostatic chuck cooling channel opening machining, comprising a base (1), characterized in that: The outer wall of the base (1) is fixedly connected to a first magnetic block (2), the outer wall of the base (1) is equipped with a rotating shaft (3), the outer wall of the rotating shaft (3) is equipped with a placement platform (4), the bottom of the placement platform (4) is fixedly connected to a second magnetic block (5), and a collection box (6) is installed inside the base (1). A support block (7) is fixedly connected to the top of the placement platform (4). A threaded groove (8) is provided inside the support block (7). A threaded rod (9) is movably connected inside the support block (7). A receiving plate (10) is movably connected to one end of the threaded rod (9). A guide rod (11) is fixedly connected to one side of the receiving plate (10). A slot (12) is provided inside the receiving plate (10). A groove (13) is provided on the inner side wall of the slot (12). An insert (14) is installed inside the receiving plate (10). An elastic protrusion (15) is fixedly connected to the outer wall of the insert (14). A clamping plate (16) is fixedly connected to the outer wall of the insert (14).

2. The positioning tool for electrostatic chuck cooling channel machining according to claim 1, characterized in that: The base (1) forms a rotating structure with the placement platform (4) through the rotating shaft (3), and the first magnetic block (2) and the second magnetic block (5) are magnetically connected.

3. The positioning tool for electrostatic chuck cooling channel machining according to claim 1, characterized in that: The base (1) and the collection box (6) form a sliding structure, and the base (1) has a slotted design.

4. The positioning tool for electrostatic chuck cooling channel machining according to claim 1, characterized in that: The support block (7) is threadedly connected to the threaded rod (9) through the threaded groove (8), and the threaded rod (9) and the receiving plate (10) form a rotating structure.

5. The positioning tool for electrostatic chuck cooling channel machining according to claim 1, characterized in that: The guide rod (11) and the support block (7) form a sliding structure, and the support block (7) is designed with an open hole.

6. The positioning tool for electrostatic chuck cooling channel machining according to claim 1, characterized in that: The insert (14) is engaged with the receiving plate (10) through the slot (12), and the elastic protrusion (15) is engaged with the receiving plate (10) through the groove (13).

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