Reflection type linear optical system and defect detection system and device

Abstract

The utility model relates to the technical field of optical detection, in particular to a reflective linear optical system, a defect detection system and a defect detection device. The reflective linear optical system comprises: a light emitting device for emitting a first light beam; the light condensing structure is used for reflecting and condensing the first light beam to a light condensing area; the semi-transmitting and semi-reflecting mirror is located between the light condensing structure and the light condensing area, and part of the first light beam can transmit the semi-transmitting and semi-reflecting mirror; an included angle a is formed between the semi-transparent and semi-reflective mirror and the main direction of the first light beam condensed by the light condensing structure, and a is more than or equal to 10 degrees and less than or equal to 80 degrees; the first light beam between the light condensation structure and the light condensation area is in a convergent state. According to the reflection type linear optical system, the first light beams in the convergent state are emitted to the local structure of the detected object from different angles, part of the side face of the local structure of the detected object can be illuminated, most defects and defect types of the detected object can be displayed only by taking a picture, and the detection cost can be reduced.

Description

Technical Field

[0001] This utility model relates to the field of optical inspection technology, and in particular to a reflective linear optical system, a defect detection system and device. Background Technology

[0002] In visual defect detection, when inspecting defects such as scratches, dirt, and dents, traditional inspection light sources mostly illuminate only one side of the object during imaging. This results in the defect appearing as a black mass in the image, making it impossible to accurately determine the defect type. To better visualize the defects, some fields use 2.5D programmable stripe light sources to capture multiple images of the object from different angles. These images are then composited in post-processing to reveal the object's three-dimensional features. However, capturing multiple images from different angles significantly increases inspection costs. Utility Model Content

[0003] The purpose of this invention is to overcome the problem in the prior art that multiple photos from different angles are required to determine the type of defect, which leads to a significant increase in detection costs. This invention provides a reflective linear optical system, a defect detection system, and a device.

[0004] In a first aspect, the present invention provides a reflective linear optical system, comprising:

[0005] A light-emitting device for emitting a first beam of light;

[0006] A light-focusing structure is used to reflect and concentrate the first light beam onto a light-focusing region;

[0007] A semi-transparent and semi-reflective mirror is located between the light-concentrating structure and the light-concentrating region, and a portion of the first light beam can be transmitted through the semi-transparent and semi-reflective mirror; the semi-transparent and semi-reflective mirror has an angle α with the main direction of the first light beam after it has been concentrated by the light-concentrating structure, where 10°≤a≤80°.

[0008] The first beam of light between the focusing structure and the focusing region is in a converging state.

[0009] The reflective linear optical system of this invention converges a first light beam through a focusing structure, ensuring that the first light beam between the focusing structure and the focusing area is in a convergent state. This means the first light beam can be directed towards the focusing area from multiple directions at different angles. In a preferred embodiment, a portion of the inspected object's structure is placed in the focusing area. Light rays from different angles illuminate not only the front of the inspected object's structure but also parts of its sides. Reflection of light from the front and sides reveals the characteristics of the inspected object's structure, allowing for defect identification. A semi-transparent mirror is placed between the focusing structure and the focusing area. Through the semi-transparent mirror's partial transmission and reflection, a portion of the first light beam can pass through the mirror to illuminate the inspected object. The reflected beam formed by the inspected object's reflection of the first light beam is separated from the first light beam's path after reflection by the semi-transparent mirror. A clear image of the inspected object can be obtained by receiving the separated reflected beam.

[0010] The reflective linear optical system described in this invention illuminates a portion of the local structure of the inspected object by projecting a first beam in a converging state from different angles. This allows for the display of most defects and defect types of the inspected object with just one photograph, thereby reducing inspection costs.

[0011] As a preferred embodiment of the present invention, the light-concentrating structure includes a reflector, the reflector having a light-concentrating reflective surface for reflecting the first light beam, the light-concentrating reflective surface extending along a first direction, and the projection of the light-concentrating reflective surface in the first direction being a concave curve.

[0012] As a preferred embodiment of this utility model, in the projection of the first direction, the first beam is obliquely directed toward the focusing reflective surface.

[0013] As a preferred embodiment of the present invention, the light-emitting device includes a plurality of LED beads arranged along a first direction, and the first light beam between the light-emitting device and the focusing structure is in a divergent state.

[0014] As a preferred embodiment of this utility model, the light-emitting device further includes a light-collecting mirror, which is located on the light-emitting side of the LED lamp bead.

[0015] As a preferred embodiment of this utility model, the light-collecting mirror is a strip Fresnel lens.

[0016] As a preferred embodiment of this utility model, the light-concentrating area is linear.

[0017] As a preferred embodiment of this utility model, a = 45°.

[0018] As a preferred embodiment of the present invention, it further includes a detection component located on the side of the semi-transparent mirror away from the light-concentrating structure, and the detection component is capable of receiving light reflected by the semi-transparent mirror.

[0019] As a preferred embodiment of the present invention, the detection component includes a front surface mirror and a camera. The front surface mirror is located on the side of the semi-transparent mirror away from the light-gathering structure, and the camera is located on the side of the front surface mirror that reflects light. The front surface mirror is capable of reflecting the light reflected by the semi-transparent mirror to the camera.

[0020] In a second aspect, the present invention provides a defect detection system, including a reflective linear optical system as described above, and an object to be inspected, wherein a portion of the object to be inspected is located in the focusing area, the portion of the object to be inspected is irradiated by the first light beam and reflects a reflected light beam; a portion of the reflected light beam is reflected by the semi-transparent mirror and then directed toward the detection component.

[0021] In a third aspect, the present invention provides a defect detection device, including the reflective linear optical system as described above, or the defect detection system as described above.

[0022] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0023] The reflective linear optical system of this invention converges a first light beam through a focusing structure, ensuring that the first light beam between the focusing structure and the focusing area is in a convergent state. This means the first light beam can be directed towards the focusing area from multiple directions at different angles. In a preferred embodiment, a portion of the inspected object's structure is placed in the focusing area. Light rays from different angles illuminate not only the front of the inspected object's structure but also parts of its sides. Reflection of light from the front and sides reveals the characteristics of the inspected object's structure, allowing for defect identification. A semi-transparent mirror is placed between the focusing structure and the focusing area. Through the semi-transparent mirror's partial transmission and reflection, a portion of the first light beam can pass through the mirror to illuminate the inspected object. The reflected beam formed by the inspected object's reflection of the first light beam is separated from the first light beam's path after reflection by the semi-transparent mirror. A clear image of the inspected object can be obtained by receiving the separated reflected beam. The reflective linear optical system described in this invention illuminates a portion of the local structure of the inspected object by projecting a first beam in a converging state from different angles. This allows for the display of most defects and defect types of the inspected object with just one photograph, thereby reducing inspection costs. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the defect detection system described in this utility model;

[0025] Figure 2 This is a schematic diagram of the defect detection device described in this utility model;

[0026] Figure 3 for Figure 2 Enlarged view of section A in the middle;

[0027] Figure 4 This is a schematic diagram of the light-concentrating structure described in this utility model;

[0028] Figure 5 This is a projection of the light-concentrating structure of this utility model in the first direction;

[0029] Figure 6 This is a schematic diagram of the defect detection device described in this utility model.

[0030] Marked in the image:

[0031] 1-Light-emitting device;

[0032] 11-LED lamp beads; 12-Light-collecting mirror;

[0033] 2-Concentrating structure;

[0034] 21-Concentrating reflective surface;

[0035] 3- Semi-transparent and semi-reflective mirror;

[0036] 31 - First page; 32 - Second page;

[0037] 4-Focusing area;

[0038] 5-Detection components;

[0039] 51-Front surface mirror; 52-Camera;

[0040] 6-The item being inspected;

[0041] 7-Outer shell. Detailed Implementation

[0042] The present invention will be further described in detail below with reference to specific embodiments. However, it should not be construed as limiting the scope of the present invention to the following embodiments; all technologies implemented based on the content of the present invention fall within the scope of the present invention.

[0043] Unless otherwise specified, the use of terms such as "upper," "lower," "left," "right," "center," "inner," and "outer" to indicate orientation or positional relationships in the description of specific embodiments of this utility model is based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product / equipment / device is typically placed during use. These terms are merely for the purpose of facilitating the description of the utility model solution or simplifying the description in specific embodiments, enabling those skilled in the art to quickly understand the solution, and do not indicate or imply that a specific device / component / element must have a specific orientation, or be constructed and operated in a specific positional relationship. Therefore, they should not be construed as limitations on this utility model.

[0044] Furthermore, the use of terms such as "horizontal," "vertical," "suspended," and "parallel" does not imply that the corresponding device / component / element must be absolutely horizontal, vertical, suspended, or parallel, but rather that it can be slightly tilted or have a deviation. For example, "horizontal" merely means that its direction is more horizontal relative to "vertical," not that the structure must be completely horizontal, but can be slightly tilted. Alternatively, it can be simplified to mean that the corresponding device / component / element, when set in a "horizontal," "vertical," "suspended," or "parallel" direction, can have an error / deviation of ±10% relative to the corresponding direction, more preferably within ±8%, more preferably within ±6%, more preferably within ±5%, and more preferably within ±4%. As long as the corresponding device / component / element is within the error / deviation range, it can still achieve its function in the present invention.

[0045] Furthermore, the use of terms such as "first," "second," and "third" in terminology is merely for distinguishing descriptions of identical or similar components and should not be interpreted as emphasizing or implying the relative importance of a particular component.

[0046] Furthermore, in the description of the embodiments of this utility model, "several", "multiple", and "several" represent at least two. The number can be any number, such as two, three, four, five, six, seven, eight, or nine, and can even exceed nine.

[0047] Furthermore, in the description of the technical solution of this utility model, unless otherwise explicitly specified / limited / restricted, the terms "set up," "install," "connect," "link," "equipped with," "laid out," and "arranged" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to common connection methods in the art, such as welding, riveting, bolting, and threaded connections. Such connections can be mechanical, electrical, or communication connections; they can be direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components.

[0048] Example 1

[0049] like Figure 1 and Figure 2 As shown, this embodiment provides a reflective linear optical system, including a light-emitting device 1, a light-concentrating structure 2, and a semi-transparent mirror 3. The light-emitting device 1 is used to emit a first light beam; the light-concentrating structure 2 is used to reflect and focus the first light beam into a light-concentrating region 4, and the first light beam between the light-concentrating structure 2 and the light-concentrating region 4 is in a converging state; the semi-transparent mirror 3 is located between the light-concentrating structure 2 and the light-concentrating region 4, and part of the first light beam can be transmitted through the semi-transparent mirror 3; the semi-transparent mirror 3 and the main direction of the first light beam after being focused by the light-concentrating structure 2 have an angle α, where 10° < α < 80°.

[0050] The light-emitting device 1 preferably uses an LED light source. LED light sources have advantages such as high luminous efficiency, low heat, and uniform illumination, and can form a beam of light in a specific direction. In this embodiment, the directional beam emitted by the light-emitting device 1 is defined as the first beam.

[0051] The focusing structure 2 converges the first beam. Located on the optical path of the first beam, the focusing structure 2 receives the first beam and converts it from a divergent state to a convergent state, converging the beam into a localized area. In this embodiment, this localized area is defined as the focusing region 4. Figure 1 As shown, those skilled in the art will understand that the first beam in the converging state includes light rays with different tilt angles or incident directions. This means that when the object under inspection 6 is placed in the focusing area 4, the local structures on the object under inspection 6 with raised or recessed features can be illuminated not only from the front but also from some of its sides. In the photograph formed by the object under inspection 6 reflecting the first beam, the local structures with raised or recessed features, such as depressions, protrusions, scratches, and dirt, will show different shapes and contrasts of light and dark, thus enabling the identification of the type of defect based on shape and light and dark relationships. Moreover, light rays with different tilt angles can make the raised or recessed defects have a stronger sense of layering, making them more three-dimensional and intuitive to the eye, and enabling the differentiation between serious defects and general defects.

[0052] In terms of spatial orientation, the focusing structure 2 and the light-emitting device 1 are arranged alternately. The first beam emitted by the light-emitting device 1 can illuminate a large area on the focusing structure 2. Through focusing, the first beam is transformed into a converging beam and finally focused on a smaller area. The light density in this area is high, which can clearly illuminate the object 6 placed within this area. In this embodiment, the focusing structure 2 uses reflection to focus the light, which can reduce the length of the entire optical system and make it easier to install and use.

[0053] The semi-transparent and semi-reflective mirror 3 is an optical structure that can partially transmit and partially reflect incident light. Generally, the reflectivity and transmittance each account for 50%, but adjustments may be made as needed. In terms of spatial orientation, the semi-transparent and semi-reflective mirror 3 is located between the light-concentrating structure 2 and the light-concentrating region 4. It is located on the optical path of the first light beam after being reflected by the light-concentrating structure 2 and can receive the first light beam. After the first light beam shines on the first surface 31 of the semi-transparent and semi-reflective mirror 3, part of it is transmitted through the semi-transparent and semi-reflective mirror 3 and continues to shine on the light-concentrating region 4.

[0054] In terms of orientation, the semi-transparent mirror 3 is tilted to the main direction of the first beam after it has been focused by the focusing structure 2. The second surface 32 of the semi-transparent mirror 3, which is opposite to the first surface 31, also has the effect of partial transmission and partial reflection. When the object under test 6 is placed in the focusing area 4, the partially reflected beam formed by the object under test 6 reflecting the first beam can be directed in the opposite direction to the second surface 32 of the semi-transparent mirror 3. The partially reflected beam that hits the second surface 32 is reflected by the semi-transparent mirror 3. Since the semi-transparent mirror 3 and the main direction of the first beam after it has been focused by the focusing structure 2 have an angle α, the reflected beam reflected by the second surface 32 is deflected to one side, so that the partially reflected beam is separated from the optical path of the first beam and can be received by the detection device for imaging.

[0055] like Figure 1 As shown, the angle α between the semi-transparent mirror 3 and the main direction of the first beam is 10°≤a≤80°. Different angles α can reflect the reflected beam directed towards the second surface 32 to different directions. If the value of the angle α is too close to 0° or too close to 90°, it will greatly increase the difficulty for the detection device to receive the reflected beam reflected by the second surface 32, and will also increase the size of the optical system. Therefore, preferably, 40°≤a≤50°; more preferably, a=45°.

[0056] In some embodiments, the semi-transparent mirror 3 is also called a semi-reflective lens, beam splitter, or beam splitter.

[0057] In summary, the reflective linear optical system described in this embodiment converges the first beam through the focusing structure 2, ensuring that the first beam between the focusing structure 2 and the focusing area 4 is in a convergent state. This means the first beam can be directed towards the focusing area 4 from multiple directions at different angles. In a preferred application, a portion of the inspected object 6 is placed in the focusing area 4. Light rays from different angles illuminate not only the front of the portion of the inspected object 6 but also parts of its sides. The reflection of light from the front and sides reveals the characteristics of the local structure of the inspected object 6, which can be used to determine the type of defect. A semi-transparent mirror 3 is placed between the focusing structure 2 and the focusing area 4. Through the partial transmission and reflection of light by the semi-transparent mirror 3, part of the first beam can pass through the semi-transparent mirror 3 to illuminate the inspected object 6. The reflected beam formed by the inspected object 6 reflecting the first beam is separated from the optical path of the first beam after reflection by the semi-transparent mirror 3. A clear image of the inspected object 6 can be obtained by receiving the separated reflected beam.

[0058] The reflective linear optical system described in this embodiment illuminates a portion of the local structure of the inspected object 6 by projecting a first beam in a converging state from different angles. This allows for the display of most defects and defect types of the inspected object 6 with just one photograph, thus reducing inspection costs.

[0059] The principal direction of the beam is used to describe the main direction of beam propagation. In this embodiment, the principal direction of the first beam points to the convergence point or divergence point of the first beam. For the first beam between the light-emitting device 1 and the focusing structure 2, its principal direction is located on the beam propagation axis originating from the light-emitting device 1. For the first beam between the focusing structure 2 and the focusing region 4, its principal direction is located on the beam propagation axis pointing towards the focusing region 4.

[0060] In some embodiments, the focusing structure 2 includes a reflector with a focusing reflective surface 21 for reflecting the first beam. The focusing reflective surface 21 extends along a first direction, and the projection of the focusing reflective surface 21 in the first direction is a concave curve.

[0061] The reflector can be an aluminum component; such as Figure 2 As shown, the focusing reflector 21 is located on the side of the reflector plate closest to the light-emitting device 1. The focusing reflector 21 reflects and converges the first light beam, changing the first beam from a divergent state to a convergent state. Specifically, as... Figure 4 and Figure 5 As shown, the focusing reflective surface 21 extends along the first direction, and its projection in the first direction is a concave surface. The concave surface enables it to focus and reflect the first beam, and by extending along the first direction, it can be adapted to a line light source.

[0062] Preferably, in the projection of the first direction, the first beam is obliquely directed toward the focusing reflective surface 21. For example... Figure 1 As shown, the main direction of the first beam incident on the focusing reflector 21 has an angle with the central axis of the focusing reflector 21, so that there is an angle between the main direction of the first beam incident on the focusing reflector 21 and the main direction reflected from the focusing reflector 21, thereby separating the light-emitting device 1 and the focusing area 4 in space, leaving space for the semi-transparent and semi-reflective mirror 3.

[0063] In some embodiments, the light-emitting device 1 includes a plurality of LED beads 11 arranged along a first direction, and the first light beam between the light-emitting device 1 and the focusing structure 2 is in a divergent state.

[0064] The light-emitting device 1 can be a linear light source, forming a strip-shaped first beam of light through a plurality of LED beads 11 arranged along the first direction. Combined with a focusing structure 2 extending along the first direction, a strip-shaped or linear focusing area 4 can be formed, achieving linear scanning of the inspected object 6. During scanning, the inspected object 6 can be moved perpendicular to the first direction. The detection device collects the strip-shaped local areas of the inspected object 6 located within the focusing area 4 at various times, ultimately obtaining a complete photograph of the inspected object 6.

[0065] Preferably, the light-emitting device 1 further includes a light-collecting mirror 12, which is located on the light-emitting side of the LED bead 11. The light-collecting mirror 12 can control the light-emitting angle of the LED bead 11, so that most of the light emitted by the LED bead 11 is directed to the light-collecting structure 2, thereby improving energy utilization.

[0066] The light-collecting mirror 12 can be a convex lens or the like. In this embodiment, the light-collecting mirror 12 is a strip Fresnel lens, which is used to reduce the volume and weight of the light-emitting device 1.

[0067] In some embodiments, a detection component 5 is also included, which is located on the side of the semi-transparent mirror 3 away from the light-concentrating structure 2. The detection component 5 is capable of receiving light reflected by the semi-transparent mirror 3.

[0068] The detection component 5 may include detection equipment such as camera 52. The detection component 5 is located on the side of the semi-transparent mirror 3 away from the light-concentrating structure 2, that is, on the side of the second surface 32 of the semi-transparent mirror 3. The detection component 5 receives the light reflected by the semi-transparent mirror 3 to image a local area of ​​the object 6 located in the light-concentrating area 4, and then uses it for manual or machine defect identification.

[0069] Preferably, such as Figure 1 As shown, the detection component 5 includes a front surface mirror 51 and a camera 52. The front surface mirror 51 is located on the side of the semi-transparent mirror 3 away from the light-concentrating structure 2, and the camera 52 is located on the side of the front surface mirror 51 that reflects light. The front surface mirror 51 can reflect the light reflected by the semi-transparent mirror 3 to the camera 52.

[0070] The front surface mirror 51, also known as the first surface mirror, has its reflective surface located on the front surface of the substrate. This can prevent refraction and secondary reflection of light when it passes through the glass substrate, thereby improving image quality and reducing ghosting. The front surface mirror 51 is positioned on the side of the semi-transparent mirror 3 away from the light-concentrating structure 2, so that it can receive the light reflected by the semi-transparent mirror 3. The camera 52 is positioned on the reflective side of the front surface mirror 51, so that it can receive the light reflected by the front surface mirror 51.

[0071] The front surface mirror 51 performs secondary reflection of the light reflected by the semi-transparent mirror 3, which can optimize the installation position of the camera 52. In most usage scenarios, the light-emitting device 1, the light-concentrating structure 2, the semi-transparent mirror 3 and the front surface mirror 51 can be integrated into the same housing 7. The camera 52 is a precision and relatively independent device, which can be set up independently from the aforementioned components to facilitate maintenance and replacement.

[0072] In this embodiment, the semi-transparent mirror 3 is parallel to the front surface mirror 51, and the angle α between the semi-transparent mirror 3 and the main direction of the first beam is 45°.

[0073] Preferably, the camera 52 is a line scan camera; the camera 52 is located on the opposite side of the object 6 to reduce the influence of stray light reflected from the object 6 on the imaging of the camera 52.

[0074] Example 2

[0075] This embodiment provides a defect detection system, including a reflective linear optical system as described in Embodiment 1, and an object 6 to be inspected. A portion of the object 6 is located in the focusing area 4. The portion of the object 6 is irradiated by a first light beam and reflects a reflected light beam. A portion of the reflected light beam is reflected by a semi-transparent mirror 3 and then directed toward the detection component 5.

[0076] In this embodiment, the light reflected by the first beam from the object under inspection 6 is defined as the reflected beam. Part of the reflected beam is directed toward the second surface 32 of the semi-transparent mirror 3 in the opposite direction to the first beam. Part of the reflected beam is deflected to one side after being reflected by the second surface 32. The reflected beam can be directly received by the camera 52, or it can be reflected twice or multiple times by the mirror before being received by the camera 52.

[0077] The object to be inspected 6 can be a transparent film, aluminum foil, copper foil, polarizing film, or highly reflective printed matter, etc.; the defect detection system described in this embodiment can be used for surface defect detection of transparent films, aluminum foil, copper foil, polarizing film, and highly reflective printed matter, etc.

[0078] In the inspection of defects on the surface of transparent films and polarizing films, it is possible to clearly display defects such as lateral scratches, diagonal scratches, dents, protrusions and impurities in a product on a single photograph.

[0079] In the inspection of surface defects of highly reflective printed materials, it is possible to clearly show defects such as missing gloss and misaligned printing on a single photograph.

[0080] The object under test 6 and the reflective linear optical system move relative to each other in a direction perpendicular to the first direction. The camera 52 records the strip-shaped local areas of the object under test 6 located in the focusing area 4 at various times, and finally forms an overall photograph of the object under test 6.

[0081] Example 3

[0082] like Figure 2 , Figure 3 and Figure 6 As shown, this embodiment provides a defect detection device, including a reflective linear optical system as described in Embodiment 1, or a defect detection system as described in Embodiment 2.

[0083] Figure 2 for Figure 6 A cross-sectional view of the grid area in the image.

[0084] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A catoptric line optical system, characterized in that, include: Light-emitting device (1), used to emit a first beam of light; A light-focusing structure (2) is used to reflect and focus the first light beam onto the light-focusing region (4). A semi-transparent and semi-reflective mirror (3) is located between the light-concentrating structure (2) and the light-concentrating region (4), and part of the first beam can be transmitted through the semi-transparent and semi-reflective mirror (3); the semi-transparent and semi-reflective mirror (3) and the main direction of the first beam after being concentrated by the light-concentrating structure (2) have an angle α, where 10°≤α≤80°; The first beam is in a converging state between the focusing structure (2) and the focusing region (4).

2. The catoptric line optical system according to claim 1, characterized in that, The light-concentrating structure (2) includes a reflector, and the reflector is provided with a light-concentrating reflective surface (21) for reflecting the first light beam. The light-concentrating reflective surface (21) extends along a first direction, and the projection of the light-concentrating reflective surface (21) in the first direction is a concave curve.

3. The catoptric line optical system according to claim 2, characterized in that, In the projection of the first direction, the first beam is obliquely directed toward the focusing reflective surface (21).

4. The catoptric line optical system according to claim 1, characterized in that, The light-emitting device (1) includes a plurality of LED beads (11) arranged along a first direction, and the first light beam between the light-emitting device (1) and the focusing structure (2) is in a divergent state.

5. The catoptric line optical system according to claim 4, characterized in that, The light-emitting device (1) also includes a light-collecting mirror (12), which is located on the light-emitting side of the LED lamp bead (11).

6. The reflective linear optical system according to claim 5, characterized in that: The light-collecting mirror (12) is a strip Fresnel lens; And / or, The light-concentrating area (4) is linear; And / or, a=45°。 7. The catoptric line-optical system according to any one of claims 1 to 6, characterized in that, It also includes a detection component (5), which is located on the side of the semi-transparent mirror (3) away from the light-concentrating structure (2), and the detection component (5) is capable of receiving light reflected by the semi-transparent mirror (3).

8. The catoptric line optical system according to claim 7, characterized in that, The detection component (5) includes a front surface mirror (51) and a camera (52). The front surface mirror (51) is located on the side of the semi-transparent mirror (3) away from the light-gathering structure (2), and the camera (52) is located on the side of the front surface mirror (51) that reflects light. The front surface mirror (51) is able to reflect the light reflected by the semi-transparent mirror (3) to the camera (52).

9. A defect detection system, characterized by, The system includes a reflective linear optical system as described in claim 7 or 8, and further includes an object under test (6), a portion of which is located in the focusing area (4), a portion of which is irradiated by the first light beam and reflects a reflected light beam; a portion of the reflected light beam is reflected by the semi-transparent mirror (3) and then directed toward the detection component (5).

10. A defect detection apparatus characterized by comprising: This includes the reflective linear optical system as described in any one of claims 1-8, or the defect detection system as described in claim 9.

Images