High-power objective lens mounting device
By using a floating connection between the mounting base and the fixed bracket, and real-time detection by a pressure sensor, the problem of easy damage to high-magnification objectives is solved, achieving reliable protection and safe control of the objectives, and improving the applicability and operational efficiency of the device.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- YANTAI MAGIC NANOTECHNOLOGY CO LTD
- Filing Date
- 2025-06-19
- Publication Date
- 2026-04-21
AI Technical Summary
In existing technologies, high-magnification objectives are prone to being squeezed and collided with the processing stage due to factors such as mechanical motion control errors in micro-nano laser direct writing technology, resulting in damage to the optical lenses. Laser rangefinders also have large measurement errors under certain conditions and cannot reliably protect the objectives.
The mounting base and fixed bracket are floatingly connected by an axial elastic element. Combined with a pressure sensor to detect the pressure change between the objective lens and the processing stage in real time, the automatic control system controls the lifting and lowering of the processing stage according to the pressure signal to avoid squeezing and collision.
It provides reliable protection for the objective lens, avoids damage caused by mechanical collisions, improves the versatility and applicability of the device, and enhances the safety and efficiency of operation.
Smart Images
Figure CN224152851U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of objective lens mounting technology, specifically to a high-magnification objective lens mounting device. Background Technology
[0002] Objective lenses are one of the core optical components in optical systems (such as microscopes, telescopes, and laser processing equipment). Their main function is to converge or diverge light to achieve functions such as imaging, focusing, or energy transfer. In micro-nano laser direct writing technology, the application of high-magnification objectives is an important guarantee for achieving high-precision processing. With their superior optical performance, they can precisely focus laser light to the micro-nano scale, meeting complex and delicate processing requirements.
[0003] High-magnification objectives are expensive. When used in micro-nano laser direct writing technology, the distance between the front end of the objective and the substrate is extremely short, usually only a few hundred micrometers or even less. During the process of the processing stage lifting the substrate, due to factors such as mechanical motion control errors and system response delays, the processing stage is very likely to squeeze and collide with the objective, thereby damaging the optical lenses of the objective and causing significant economic losses.
[0004] To address this issue, existing technologies often employ laser displacement ranging to monitor the distance between the objective lens and the processing stage in real time, hoping to trigger an alarm or stop the stage's movement when they approach a dangerous distance. However, the operating environment of laser rangefinders is significantly limited. With transparent liquids, glass, reflective surfaces, and silicon wafers, the reflected laser light is deflected, and the receiving device cannot fully receive the reflected light, ultimately leading to a substantial increase in measurement error. This makes it difficult to accurately reflect the actual distance between the objective lens and the processing stage, and thus fails to provide reliable protection for the objective lens. Utility Model Content
[0005] To address the technical problem that existing technologies using laser displacement ranging to monitor the distance between the objective lens and the processing stage in real time cannot provide reliable protection for the objective lens, and the processing stage is prone to squeezing and colliding with the objective lens, thereby damaging the optical lenses of the objective lens, this utility model provides a high-magnification objective lens mounting device.
[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:
[0007] A high-magnification objective lens mounting device includes a mounting base with a mounting opening that extends through the base. A mounting cylinder is installed inside the mounting opening, and the inner cavity of the mounting cylinder is cylindrical and used to mount the objective lens. A fixed bracket is provided on one side of the mounting cylinder in the axial direction of the mounting base. The mounting base and the mounting cylinder are connected by several axial elastic elements, each of which is parallel to the axial direction of the mounting cylinder. A pressure sensor is installed on the side of the mounting base facing the fixed bracket, and the sensitive element of the pressure sensor is in indirect contact with the fixed bracket.
[0008] In this application, the mounting base and the fixed bracket are floatingly connected by an axial elastic element. The fixed bracket is fixedly connected to the external mounting platform. When the processing table moves upward and squeezes or collides with the objective lens, the squeezing force is transmitted to the mounting base through the objective lens and the mounting cylinder, causing a change in the pressure between the mounting base and the fixed bracket. The pressure sensor can detect the pressure between the objective lens and the fixed bracket in real time. The operator can receive the pressure detected by the pressure sensor. When the pressure change exceeds the protection threshold, the operator immediately stops the upward operation of the processing table, thereby preventing the objective lens from being crushed. This solves the problem in the prior art where laser ranging cannot reliably protect the objective lens due to environmental limitations.
[0009] In actual operation, the pressure sensor can be electrically connected to the automatic control system, and the automatic control system can be electrically connected to the lifting drive mechanism of the processing table. The pressure sensor converts the detected pressure signal into an electrical signal and feeds it back to the automatic control system. The automatic control system can monitor pressure changes in real time. Once the pressure change exceeds the preset protection threshold, it will immediately cut off the power supply to the lifting drive mechanism of the processing table, or immediately move the processing table in the opposite direction to prevent the objective lens from being crushed. At the same time, it can also trigger the corresponding alarm device to remind the operator.
[0010] As a preferred implementation of a high-magnification objective lens mounting device, the fixed bracket has two circular adjustment holes. The axial direction of the two adjustment holes is parallel to the axial direction of the mounting cylinder. Both adjustment holes penetrate the fixed bracket and are opposite to the side of the mounting base facing the fixed bracket. The two adjustment holes are symmetrically arranged on both radial sides of the mounting cylinder. Each adjustment hole is threadedly connected to a cylindrical adjustment rod, with both ends of the adjustment rod protruding from the mounting hole. During installation and debugging, the relative angle between the mounting base and the fixed bracket can be finely adjusted by rotating the adjustment rod, thereby finely adjusting the tilt angle of the objective lens in the mounting cylinder to adapt to different processing requirements and equipment installation conditions, improving the versatility and applicability of the device.
[0011] In a preferred embodiment of a high-magnification objective lens mounting device, the mounting base has a mounting groove on its side facing the fixed bracket. This groove is used to mount a pressure sensor, and its position corresponds to an adjustment hole, with the pressure sensor's sensing element facing this hole. The pressure sensor is a miniaturized, high-precision thin-film sensor with a flat shape and thin thickness. It is embedded in the mounting groove and secured and sealed using a special sealant to prevent loosening and the intrusion of external impurities. The pressure sensor's sensing element facing the adjustment hole allows it to contact the adjustment rod, facilitating contact between the sensor's sensing element and the fixed bracket.
[0012] As a preferred implementation of a high-magnification objective lens mounting device, the mounting base has a groove on its side in the radial direction of the mounting cylinder, and the groove communicates with the mounting slot. The groove provides a dedicated channel for laying the wiring of the pressure sensor.
[0013] In a preferred embodiment of a high-magnification objective lens mounting device, the adjusting rod is hollow with a cylindrical inner cavity. A copper set screw is connected to the end of the adjusting rod facing the mounting base, threaded into the inner cavity of the adjusting rod. The sensitive element of the pressure sensor contacts the end of the copper set screw facing the mounting base. The copper set screw is relatively soft, providing a buffer and ensuring even pressure distribution during pressure transmission. This prevents pressure concentration due to rigid contact, which could damage the adjusting rod and the sensitive element of the pressure sensor, thus extending the device's lifespan and preventing damage to the adjusting rod from affecting adjustment accuracy.
[0014] As a preferred implementation of a high-magnification objective lens mounting device, the outer periphery of the end of the adjustment rod furthest from the mounting base is securely connected to an adjustment knob, which has a ring-shaped structure. The ring-shaped structure of the adjustment knob facilitates the operator's grip and rotation of the adjustment rod, greatly improving the convenience and comfort of the adjustment operation. Simultaneously, rotating the adjustment knob allows for more precise and efficient rotation of the adjustment rod, thereby achieving fine adjustment of the mounting base and objective lens position, enhancing the device's operational performance and work efficiency.
[0015] In a preferred embodiment of a high-magnification objective lens mounting device, a retaining ring is fitted onto the outer circumferential surface of the end of the adjusting rod facing the mounting base. The retaining ring acts as a limiter, restricting the displacement of the adjusting rod away from the mounting base, preventing the adjusting rod from disengaging from the mounting base, and ensuring that the pressure detected by the pressure sensor has a non-zero initial value.
[0016] As a preferred implementation of a high-magnification objective lens mounting device, both the mounting base and the fixing bracket are horizontally arranged flat structures. The mounting opening is circular and extends through the upper and lower surfaces of the mounting base. The mounting base has three sides, two of which are mutually perpendicular vertical surfaces one, and one side is a vertical curved surface one. The middle of the curved surface one protrudes away from the two vertical surfaces one to form a semi-circular surface one. The mounting opening is coaxially arranged with the semi-circular surface one. The fixing bracket has three sides, two of which are mutually perpendicular vertical surfaces two, and one side is a vertical curved surface two. The vertical surface two is vertically aligned with the vertical surface one. The middle of the curved surface two protrudes towards the two vertical surfaces two to form a semi-circular surface two. The mounting opening is coaxially arranged with the semi-circular surface two. Compared to using a rectangular plate as the mounting base, the design of the upper semicircular surface one of the mounting base in this application provides a wider field of view in the mounting area for the mounting tube and objective lens. The second semicircular surface of the fixing bracket also avoids obstructing the mounting tube's view, making it easier for installers to observe the mounting position, alignment, and progress of the mounting tube and objective lens more clearly and intuitively. In practice, installers do not need to frequently and significantly adjust their viewing angle to check installation details, allowing them to quickly and accurately install the mounting tube into the mounting opening and complete the objective lens installation within the mounting tube's inner cavity, effectively improving installation efficiency.
[0017] The beneficial effects of this utility model include:
[0018] 1. In this application, the mounting base and the fixed bracket are floatingly connected by an axial elastic element. The fixed bracket is fixedly connected to the external mounting platform. When the processing table moves upward and squeezes or collides with the objective lens, the squeezing force is transmitted to the mounting base through the objective lens and the mounting cylinder, causing a change in the pressure between the mounting base and the fixed bracket. The pressure sensor can detect the pressure between the objective lens and the fixed bracket in real time. The operator can receive the pressure detected by the pressure sensor. When the pressure change exceeds the protection threshold, the operator immediately stops the upward operation of the processing table, thereby preventing the objective lens from being crushed. This solves the problem in the prior art where laser ranging cannot reliably protect the objective lens due to environmental limitations.
[0019] 2. When combined with an automatic control system, the pressure sensor converts the detected pressure signal into an electrical signal and feeds it back to the automatic control system. The automatic control system can monitor pressure changes in real time. Once the pressure change exceeds the preset protection threshold, the automatic control system immediately cuts off the power supply to the lifting drive mechanism of the processing table, or immediately moves the processing table in the opposite direction to prevent the objective lens from being crushed. At the same time, it can also trigger the corresponding alarm device to remind the operator.
[0020] 3. The adjustment holes and adjustment rods on the fixed bracket allow for fine-tuning of the relative angle between the mounting base and the fixed bracket during installation and commissioning by rotating the adjustment rods. This fine-tunes the tilt angle of the objective lens in the mounting tube, adapting to different processing requirements and equipment installation conditions, thus improving the versatility and applicability of the device. Attached Figure Description
[0021] To more clearly illustrate the technical solution of this utility model, the drawings used in the description will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0022] Figure 1 A three-dimensional structural diagram of a high-magnification objective lens mounting device according to a specific embodiment of this utility model. Figure 1 ;
[0023] Figure 2 A three-dimensional structural diagram of a high-magnification objective lens mounting device according to a specific embodiment of this utility model. Figure 2 ;
[0024] Figure 3 A three-dimensional structural diagram of a high-magnification objective lens mounting device according to a specific embodiment of this utility model. Figure 3 ;
[0025] Figure 4 A side view of a high-magnification objective lens mounting device according to a specific embodiment of this utility model. Figure 1 ;
[0026] Figure 5 A side view of a high-magnification objective lens mounting device according to a specific embodiment of this utility model. Figure 2 ;
[0027] Figure 6 This is a half-sectional view of a portion of the structure of the fixing bracket in a specific embodiment of this utility model;
[0028] Figure 7 This is a top view of a high-magnification objective lens mounting device according to a specific embodiment of the present invention;
[0029] Figure 8 This is a bottom view of a high-magnification objective lens mounting device according to a specific embodiment of the present invention.
[0030] List of components and reference numerals:
[0031] 1. Mounting base; 11. Mounting port; 12. Mounting groove; 13. Cable groove; 14. Vertical surface one; 15. Curved surface one; 16. Semicircular surface one; 2. Mounting cylinder; 21. Stepped section; 3. Fixed bracket; 31. Adjustment hole; 32. Vertical surface two; 33. Curved surface two; 34. Semicircular surface two; 4. Axial elastic element; 5. Pressure sensor; 6. Adjusting rod; 7. Copper set screw; 8. Adjusting knob; 9. Snap ring; 10. Fixing screw hole. Detailed Implementation
[0032] To make the objectives, features, and advantages of this utility model more apparent and understandable, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings of the specific embodiments. Obviously, the embodiments described below are only some embodiments of this utility model, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0033] Reference Figure 1-3 and Figure 7 This embodiment proposes a high-magnification objective lens mounting device, including a mounting base 1 with a circular mounting opening 11. The mounting base 1 is a horizontally arranged flat structure. The mounting opening 11 penetrates the upper and lower surfaces of the mounting base 1. The mounting base 1 has three sides, two of which are mutually perpendicular vertical surfaces 14, and one side is a vertical curved surface 15. The middle part of the curved surface 15 protrudes away from the two vertical surfaces 14 to form a semi-circular surface 16. The mounting opening 11 and the semi-circular surface 16 are coaxially arranged. A mounting cylinder 2 is installed inside the mounting opening 11. The inner cavity of the mounting cylinder 2 is cylindrical and is used to mount the objective lens. The top of the mounting cylinder 2 is threaded to the mounting opening 11. The outer diameter of the bottom of the mounting cylinder 2 is larger than the outer diameter of the mounting opening 11, forming a stepped portion 21. The stepped surface at the top of the stepped portion 21 abuts against the lower surface of the mounting base 1, serving a positioning function.
[0034] Reference Figure 1-4 A fixed bracket 3 is provided below the mounting base 1. The mounting base 1 and the mounting cylinder 2 are connected by several axial elastic elements 4. Specifically, two axial elastic elements 4 are connected to the lower surface of the mounting base 1 near each vertical surface. The axial elastic elements 4 can be helical springs. The axial direction of each axial elastic element 4 is parallel to the mounting cylinder 2.
[0035] Reference Figure 2-4 and Figure 8The fixing bracket 3 is a horizontally arranged flat structure with three sides. Two sides are mutually perpendicular vertical surfaces 32, and one side is a vertical curved surface 33. The vertical surfaces 32 are aligned vertically with the vertical surface 14. The middle of the curved surface 33 protrudes towards the two vertical surfaces 32 to form a semi-circular surface 34. The mounting opening 11 is coaxial with the semi-circular surface 34, which avoids the mounting cylinder 2. Both vertical surfaces 32 of the fixing bracket 3 have fixing screw holes 10. The axial direction of the fixing screw holes 10 is perpendicular to the mounting cylinder 2. The fixing screw holes 10 are used for fixed connection with the external mounting platform by bolts.
[0036] Reference Figure 1-2 , Figure 5 , Figure 6 and Figure 7 The fixed bracket 3 has two circular adjustment holes 31, the axial direction of which is parallel to the axial direction of the mounting cylinder 2. Both adjustment holes 31 penetrate the upper and lower surfaces of the fixed bracket 3 and are opposite to the lower surface of the mounting base 1. The two adjustment holes 31 are symmetrically arranged on both radial sides of the mounting cylinder 2. Each adjustment hole 31 is threadedly connected to a cylindrical adjustment rod 6, with both ends of the adjustment rod 6 protruding from the mounting hole. The outer circumference of the bottom end of the adjustment rod 6 is securely connected to an adjustment knob 8, which has a ring-shaped structure. A retaining spring 9 is fitted onto the outer circumference of the top end of the adjustment rod 6 to limit its downward adjustment.
[0037] Reference Figure 6 The adjusting rod 6 is a hollow rod with a cylindrical inner cavity. The end of the adjusting rod 6 facing the mounting base 1, i.e., the top end of the adjusting rod 6, is connected to a copper set screw 7. The copper set screw 7 is threaded into the inner cavity of the adjusting rod 6, and the sensitive element of the pressure sensor 5 is in contact with the top end of the copper set screw 7.
[0038] Reference Figure 1-2 The mounting base 1 has a mounting groove 12 on its lower surface. A pressure sensor 5 is installed in the mounting groove 12. The mounting groove 12 is positioned opposite an adjustment hole 31. The sensitive element of the pressure sensor 5 faces the adjustment hole 31 and is in contact with the top of the copper set screw 7. The mounting base 1 has a wire groove 13 on its radial side of the mounting cylinder 2. The wire groove 13 communicates with the mounting groove 12 and is used for the wires of the pressure sensor 5 to pass through.
[0039] Work process:
[0040] First, the fixed bracket 3 is fixedly connected to the external mounting platform to ensure the entire device is stably installed on the equipment. Then, the objective lens is installed into the cylindrical inner cavity of the mounting cylinder 2. Using the threaded connection between the top of the mounting cylinder 2 and the mounting port 11 of the mounting base 1, the mounting cylinder 2 is securely installed onto the mounting base 1. Simultaneously, the stepped portion 21 at the bottom of the mounting cylinder 2 abuts against the lower surface of the mounting base 1, completing the initial positioning of the objective lens. Next, fine adjustments are made using the adjustment hole 31 and adjustment rod 6 on the fixed bracket 3. The operator holds the adjustment knob 8 and rotates the adjustment rod 6. Because the adjustment rod 6 is threadedly connected to the adjustment hole 31, rotating the adjustment rod 6 allows for fine adjustment of the relative angle between the mounting base 1 and the fixed bracket 3, thereby adjusting the tilt angle of the objective lens in the mounting cylinder 2 to meet different processing requirements and equipment installation conditions. During adjustment, the retaining spring 9 limits the downward adjustment of the adjustment rod 6 to prevent over-adjustment. After adjustment, the protection threshold of the pressure sensor 5 is set according to the actual situation.
[0041] Before processing begins, the pressure sensor 5 detects a certain initial pressure value due to the gravity of the mounting base 1 and the tension of the axial elastic element 4 after the copper set screw 7 is tightened. When the processing table lifts the substrate to prepare for processing, if the processing table and the objective lens do not collide or squeeze, the entire device maintains stable operation, and the pressure value detected by the pressure sensor 5 fluctuates within the normal range. At this time, if the pressure sensor 5 is electrically connected to the automatic control system, the automatic control system continuously monitors pressure changes and prepares for early warning of possible abnormalities.
[0042] If the machining stage encounters pressure or collision with the objective lens during its ascent, the pressure will be transmitted sequentially through the objective lens, mounting cylinder 2, and then to the mounting base 1. Since the mounting base 1 and the fixed support 3 are floatingly connected by an axial elastic element 4, the mounting base 1 will displace relative to the fixed support 3 under pressure, causing a change in pressure between them. In this embodiment, the mounting base 1 is located above the fixed support 3. Therefore, if the machining stage encounters pressure or collision with the objective lens during ascent, the mounting base 1 will move upwards, causing the pressure value detected by the pressure sensor 5 to decrease. The operator can obtain the pressure value detected by the pressure sensor 5. If the pressure change exceeds a pre-set protection threshold, immediate action will be taken to either cut off the power supply to the lifting drive mechanism of the machining stage or immediately move the machining stage away from the objective lens. If pressure sensor 5 is electrically connected to the automatic control system, on the one hand, pressure sensor 5 will feed the signal back to the automatic control system, and the automatic control system will immediately cut off the power supply to the lifting drive mechanism of the processing table, or immediately move the processing table away from the objective lens to quickly eliminate the squeezing pressure and prevent the objective lens from being further damaged; on the other hand, the automatic control system will also trigger the corresponding alarm device to remind the operator of the abnormal situation so that subsequent processing can be carried out in a timely manner.
[0043] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A high-power objective mounting device comprising a mounting seat (1), characterized in that, The mounting base (1) has a mounting port (11) that passes through the mounting base (1). A mounting cylinder (2) is installed inside the mounting port (11). The inner cavity of the mounting cylinder (2) is cylindrical and is used to mount the objective lens. The mounting base (1) has a fixed bracket (3) on one side of the mounting cylinder (2) in the axial direction. The mounting base (1) and the mounting cylinder (2) are connected by several axial elastic elements (4). The axial direction of each axial elastic element (4) is parallel to that of the mounting cylinder (2). A pressure sensor (5) is installed on the side of the mounting base (1) facing the fixed bracket (3). The sensitive element of the pressure sensor (5) is in indirect contact with the fixed bracket (3).
2. A high power objective mounting device according to claim 1, wherein The fixed bracket (3) has two circular adjustment holes (31). The axial direction of the two adjustment holes (31) is parallel to the axial direction of the mounting cylinder (2). Both adjustment holes (31) pass through the fixed bracket (3). Both adjustment holes (31) are opposite to the side of the mounting seat (1) facing the fixed bracket (3). The two adjustment holes (31) are symmetrically arranged on the radial sides of the mounting cylinder (2). Each adjustment hole (31) is threadedly connected to a cylindrical adjustment rod (6). Both ends of the adjustment rod (6) pass through the mounting hole.
3. A high power objective mounting device according to claim 2, wherein The mounting base (1) has a mounting groove (12) on the side facing the fixed bracket (3). The mounting groove (12) is used to install the pressure sensor (5). The position of the mounting groove (12) is opposite to an adjustment hole (31), and the sensitive element of the pressure sensor (5) faces the adjustment hole (31).
4. The high-power objective mounting device of claim 3, wherein The mounting base (1) has a groove (13) on the side of the mounting cylinder (2) in the radial direction, and the groove (13) is connected to the mounting groove (12).
5. A high power objective mounting device according to claim 2 or 3, characterized in that The adjusting rod (6) is a hollow rod with a cylindrical inner cavity. A copper set screw (7) is connected to one end of the adjusting rod (6) facing the mounting base (1). The copper set screw (7) is threaded into the inner cavity of the adjusting rod (6). The sensitive element of the pressure sensor (5) is in contact with the end of the copper set screw (7) facing the mounting base (1).
6. The high power objective mounting device of claim 2, wherein The outer periphery of the end of the adjusting rod (6) away from the mounting base (1) is fastened to the adjusting knob (8), which has a ring structure.
7. The high power objective mounting device of claim 2, wherein A retaining ring (9) is attached to the outer circumference of the end of the adjusting rod (6) facing the mounting base (1).
8. The high-magnification objective lens mounting device according to claim 1, characterized in that, The mounting base (1) and the fixed bracket (3) are both horizontally arranged flat structures. The mounting opening (11) is circular and penetrates the upper and lower surfaces of the mounting base (1). The mounting base (1) has three sides, two of which are vertical surfaces (14) that are perpendicular to each other, and one side is a vertical curved surface (15). The middle part of the curved surface (15) protrudes away from the two vertical surfaces (14) to form a semi-circular surface (16). The mounting opening (11) and the semi-circular surface (16) are coaxially arranged. The side of the fixed support (3) has three, two of which are vertical upright surfaces two (32) and one is vertical curved surface two (33). The upright surfaces two (32) are vertically aligned with the upright surfaces one (14), and the middle of the curved surface two (33) protrudes in the direction close to the two upright surfaces two (32) to form a semicircular surface two (34). The mounting port (11) is coaxially arranged with the semicircular surface two (34).