Small-magnification lens with bottom monitoring function

Abstract

The utility model discloses a low-magnification lens with a bottom monitoring function, which comprises a laser, a lens main body, a detection frame arranged at an exit port of the lens main body, a prism arranged on the detection frame, a low-pass high-reflection film arranged on an inclined surface of the prism, a detection module arranged on the detection frame, and an annular illumination light source arranged at the bottom of the detection frame, a light path from the laser to the exposure surface through the lens main body and the prism is a short-wave light path, the short-wave light path penetrates through the annular illumination light source, and a light path from the annular illumination light source to the detection module through reflection of the exposure surface and the prism is a long-wave light path; the light beam irradiated along the short-wave light path can penetrate through the prism to reach the exposure surface, the annular illumination light source irradiates the exposure surface and is reflected to the prism, the wavelength of the annular illumination light source is relatively long, and the light along the long-wave light path enters the prism and is reflected to the detection module for detection. Through the prism and the detection module, detection of features depicted by the small-magnification lens is realized.

Description

Technical Field

[0001] This invention belongs to the technical field of laser lithography, specifically a low-magnification lens with bottom monitoring. Background Technology

[0002] Laser direct etching is an advanced manufacturing technology that uses a laser beam to directly shape, process, or etch on the surface of a material. Its basic principle is to focus a high-energy-density laser beam onto the material surface, instantly heating and evaporating or melting the material, thereby achieving the etching and engraving of the desired graphics, text, or structures.

[0003] Existing laser direct lithography lenses, such as the "exposure lens for maskless lithography machine and maskless lithography machine" disclosed in patent document "CN217238599U", can make the width of the connecting substrate smaller along its width direction by reasonably arranging the positional relationship of the laser illumination module, the first reflector, the connecting substrate and the projection module, making the overall structure of the connecting substrate more compact. When this exposure lens is applied to a maskless lithography machine, more exposure lenses can be simultaneously arrayed along the scanning direction of the maskless lithography machine.

[0004] Furthermore, existing laser direct-etching lenses employ various internal lens arrangements to achieve a lower magnification, resulting in smaller features etched by the laser beam. This allows the same exposure area to accommodate more features; however, due to the smaller size of the features, the etched features are difficult to observe, making it impossible to detect the accuracy of the etched features. Utility Model Content

[0005] The purpose of this invention is to provide a low-magnification lens with bottom monitoring to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A low-magnification lens with bottom monitoring includes a laser and a lens body. The laser beam passes through the lens body. A detection frame and a prism mounted on the detection frame are provided at the exit port of the lens body. A low-pass high-reflection film is provided on the inclined surface of the prism. A detection module is provided on the detection frame. A ring-shaped illumination source is provided at the bottom of the detection frame.

[0008] The light path from the laser through the lens body and the prism to the exposure surface is a short-wavelength light path. The short-wavelength light path passes through the annular illumination source. The light path from the annular illumination source through the exposure surface and the prism to the detection module is a long-wavelength light path.

[0009] A further technical solution includes a lens housing, a first light-transmitting tube, and a second light-transmitting tube. The lens housing includes an entrance port, a reflection port, and an emission port. The laser is connected to the lens housing and communicates with the interior of the lens housing through the entrance port. One end of the first light-transmitting tube is connected to the lens housing and communicates with the lens housing through the emission port. The other end of the first light-transmitting tube is connected to the second light-transmitting tube, and the other end of the second light-transmitting tube is used to connect to the detection frame.

[0010] In a further technical solution, a DMD chip is provided on the outer side of the lens housing corresponding to the position of the reflection port. The lens housing includes an incident part and a reflecting part. The incident part and the reflecting part are obliquely connected on one side. A reflector is provided in the inner incident part. A conversion element is provided in the reflecting part. The surface of the conversion element faces the DMD chip.

[0011] A further technical solution is provided in which a lens frame is provided inside the light-transmitting tube, the lens frame is used to install a plurality of lenses, the outer ring wall of the lens frame is provided with an external thread, the inside of the light-transmitting tube is provided with an internal thread, the lens frame is threadedly connected to the light-transmitting tube, the light-transmitting tube is provided with a clearance hole and a handle, the handle is fixedly connected to the lens frame, and the clearance hole is used to avoid the position of the handle.

[0012] In a further technical solution, the first light-transmitting tube extends outward and is provided with a flange, the second light-transmitting tube is fixedly provided with a connecting ring, the connecting ring is provided with an annular groove, the flange is inserted into the annular groove, the flange is provided with a plurality of bolt holes, the bottom of the annular groove is provided with a plurality of bolt holes, and the flange is connected to the connecting ring with a light-transmitting bolt.

[0013] In a further technical solution, a slot is provided on the outer wall of the second light-transmitting tube, the slot is connected to the second light-transmitting tube, the second light-transmitting tube is provided with an adjustable aperture, the adjustable aperture is inserted into the second light-transmitting tube through the slot, and the fixing part of the adjustable aperture is inserted into the slot.

[0014] In a further technical solution, the detection module includes a detection lens and a magnifying lens. The detection lens is connected to the detection frame and communicates with the detection frame. The magnifying lens is installed inside the detection lens and is used to magnify the light image for detection by the detection lens.

[0015] In a further technical solution, the prism includes a first prism and a second prism, the inclined surfaces of the first prism and the second prism coincide, and the light reflected from the exposure surface to the inclined surfaces of the first prism and the second prism is reflected again into the detection lens.

[0016] The beneficial effects of this utility model are:

[0017] This invention utilizes a short-wavelength optical path for the laser beam emitted from the laser, passing through the lens body and prism to reach the exposure surface. It's important to note that the prism is equipped with a low-pass, high-reflection film, allowing short-wavelength light to pass through while reflecting long-wavelength light. Therefore, the beam illuminating the short-wavelength path passes through the prism and reaches the exposure surface. To detect features on the exposure surface, the operator can turn on a ring-shaped illumination source, allowing it to illuminate the surface and reflect back to the prism. Since the ring-shaped illumination source has a longer wavelength, the light along the long-wavelength path is reflected back to the detection module for detection. Thus, the prism and detection module enable the detection of features depicted by a low-magnification lens.

[0018] Other features and advantages of this invention will be described in detail in the following detailed description section. Attached Figure Description

[0019] Figure 1 The overall structure of this utility model Figure 1 .

[0020] Figure 2 The overall structure of this utility model Figure 1 .

[0021] Figure 3 : Front view of this utility model.

[0022] Figure 4 : Cross-sectional view of this utility model.

[0023] Figure 5 : Exploded view of this utility model.

[0024] Figure 6 : Optical path process diagram of this utility model.

[0025] Reference numerals: 1. Laser; 2. Detection frame; 3. Detection module; 31. Detection lens; 4. Lens body; 41. Lens housing; 411. Entrance section; 412. Reflecting section; 42. Light transmission tube one; 421. Flange; 43. Light transmission tube two; 5. Prism; 51. Prism one; 52. Prism two; 6. Annular adapter plate; 7. Locking position; 8. Entrance port; 9. Reflection port; 10. Emission port; 11. DMD chip; 12. Reflector; 13. Converter; 14. Lens holder; 15. Alignment hole; 16. Handle; 17. Connecting ring; 18. Ring groove; 19. Slot; 20. Adjustable aperture; 201. Fixing part; Detailed Implementation

[0026] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0027] Please refer to Figure 1-6 ;

[0028] Existing laser direct-etching lenses employ various arrangements of internal lenses to achieve a lower magnification, enabling the laser beam to etch smaller features. This allows more features to be captured on a single exposure surface. However, the smaller size of these features makes accurate observation and detection difficult.

[0029] Therefore, this utility model discloses a low-magnification lens with bottom monitoring, including a laser 1 and a lens body 4. The light beam emitted by the laser 1 passes through the lens body 4. A detection frame 2 and a prism 5 are set at the exit port of the lens body 4. A low-pass high-reflection film is set on the inclined surface of the prism 5. A detection module 3 is set on the detection frame 2. An annular illumination source is set at the bottom of the detection frame 2. The light path from the laser 1 through the lens body 4 and the prism 5 to the exposure surface is a short-wavelength light path. The short-wavelength light path passes through the annular illumination source. The light path from the annular illumination source through the exposure surface and the reflection of the prism 5 to the detection module 3 is a long-wavelength light path.

[0030] Specifically, the light beam emitted by laser 1 passes through lens body 4 and prism 5 to reach the exposure surface via a short-wavelength light path, meaning the wavelength of the light is relatively short. It should be noted that prism 5 is equipped with a low-pass, high-reflection film, meaning that in this embodiment, prism 5 allows short-wavelength light to pass through while reflecting long-wavelength light. Therefore, in this embodiment, the light beam irradiated along the short-wavelength light path can pass through prism 5 to reach the exposure surface. However, this application aims to detect features on the exposure surface. The operator can turn on the ring-shaped illumination source, allowing the ring-shaped illumination source to irradiate the exposure surface and reflect back to prism 5. Since the wavelength of the ring-shaped illumination source is relatively long, the light along the long-wavelength light path will be reflected into prism 5 and then detected by detection module 3. Thus, the features depicted by the low-magnification lens are detected through prism 5 and detection module 3.

[0031] It is worth noting that the bottom of the testing frame 2 is provided with an annular adapter plate 6. The annular adapter plate 6 and the testing frame 2 are detachably connected by bolts. The annular adapter plate 6 has a slot 7 for mounting an annular lighting source. The annular lighting source is mounted on the slot 7. The light passing through the short-wavelength optical path passes through the annular lighting source and the annular adapter plate 6.

[0032] Furthermore, the lens body 4 includes a lens housing 41, a first light-transmitting tube 42, and a second light-transmitting tube 43. The lens housing 41 includes an entrance port 8, a reflection port 9, and an emission port 10. The laser 1 is connected to the lens housing 41, and the laser 1 communicates with the inside of the lens housing 41 through the entrance port 8. One end of the first light-transmitting tube 42 is connected to the lens housing 41, and the first light-transmitting tube 42 communicates with the lens housing 41 through the emission port 10. The other end of the first light-transmitting tube 42 is connected to the second light-transmitting tube 43, and the other end of the second light-transmitting tube 43 is used to connect to the detection frame 2.

[0033] Specifically, the lens body 4 includes a lens housing 41, a first light-transmitting tube 42, and a second light-transmitting tube 43. The overall layout optimizes the transmission and focusing effect of the laser light path. The lens housing 41 is provided with an entrance port 8, a reflection port 9, and an emission port 10. The laser 1 is connected to the inside of the lens through the entrance port 8 to achieve efficient laser input. The connection design of the first light-transmitting tube 42 and the second light-transmitting tube 43 not only ensures the smooth transmission of the beam, but also provides a convenient interface for the subsequent inspection frame 2, improving the maintainability and easy replacement of the lens body 4. When the lens body 4 needs to be repaired or components replaced, the user can quickly complete the repair by simply disassembling the first light-transmitting tube 42, the second light-transmitting tube 43, or the lens housing 41, thereby reducing downtime and improving overall work efficiency.

[0034] Furthermore, a DMD chip 11 is provided on the outer side of the lens housing 41 at the position corresponding to the reflection port 9. The lens housing 41 includes an incident part 411 and a reflection part 412. The incident part 411 and the reflection part 412 are connected at an angle on one side. A reflector 12 is provided in the incident part 411. A conversion element 13 is provided inside the reflection part 412. The surface of the conversion element 13 faces the DMD chip 11.

[0035] Specifically, the lens housing 41 is divided into an incident section 411 and a reflecting section 412, which are connected at an angle. The incident section 411 is equipped with a mirror 12, while the reflecting section 412 houses a conversion element 13. The surface of the conversion element 13 faces the DMD chip 11, which not only effectively reduces the overall size of the lens but also improves the integration of the optical system. By combining the DMD chip 11 with the compact lens structure, higher beam control and precise feature characterization can be achieved, making it particularly suitable for applications with limited space. The angled connection design ensures effective light transmission while reducing the space occupation problem common in traditional optical systems.

[0036] In this embodiment, a lens holder 14 is provided inside the light-transmitting tube 42. The lens holder 14 is used to install a plurality of lenses. The outer ring wall of the lens holder 14 is provided with an external thread, and the inside of the light-transmitting tube 42 is provided with an internal thread. The lens holder 14 is threadedly connected to the light-transmitting tube 42. The light-transmitting tube 42 is provided with a clearance hole 15 and a handle 16. The handle 16 is fixedly connected to the lens holder 14, and the clearance hole 15 is used to avoid the position of the handle 16.

[0037] Specifically, users can directly rotate the lens holder 14 by turning the handle 16, thereby achieving precise movement of the lens group position and improving the convenience and flexibility of lens adjustment. When adjusting the optical system, users only need to turn the handle 16 to precisely control the position of the lens holder 14, thereby effectively adjusting the focusing and diverging characteristics of the beam. This not only improves the efficiency of adjustment but also reduces the errors that may be caused by manual adjustment, making the optical system settings more accurate and reliable. At the same time, the design of the clearance hole 15 ensures that the movement of the handle 16 is not disturbed, thereby ensuring the stability of the lens holder 14 and the smoothness of operation, further improving the use of the entire system.

[0038] In this embodiment, a flange 421 extends outward from the light-transmitting tube 42, and a connecting ring 17 is fixedly provided on the light-transmitting tube 43. The connecting ring 17 has an annular groove 18. The flange 421 is inserted into the annular groove 18. The flange 421 has several bolt holes 1. The bottom of the annular groove 18 has several bolt holes 2. The flange 421 is connected to the connecting ring 17 by a light-transmitting bolt.

[0039] Specifically, the flange 421 extending outward from the light-transmitting tube 42 and the connecting ring 17 fixed on the light-transmitting tube 43 are connected by the ring groove 18 to form a stable connection. This allows the flange 421 and the connecting ring 17 to be reliably bolted together through multiple bolt holes 1 and 2, ensuring the overall stability of the structure and improving the disassembly and linear docking accuracy.

[0040] In this embodiment, a slot 19 is provided on the outer wall of the second light tube 43. The slot 19 is connected to the second light tube 43. The second light tube 43 is provided with an adjustable aperture 20. The adjustable aperture 20 is inserted into the second light tube 43 through the slot 19. The fixing part 201 of the adjustable aperture 20 is inserted into the slot 19.

[0041] Specifically, the slot 19 on the outer wall of the second light-transmitting tube 43 is connected to the interior of the second light-transmitting tube 43, allowing the adjustable aperture 20 to be easily inserted and removed through the slot 19. The fixing part 201 of the adjustable aperture 20 is inserted into the slot 19, ensuring its stability and reliability in the working state, and improving the adjustability and replacement convenience of the adjustable aperture 20. Users can easily remove the adjustable aperture 20 from the slot 19 by loosening the bolts connecting the fixing part 201 of the adjustable aperture 20 to the second light-transmitting tube 43. After that, users only need to place the new adjustable aperture 20 into the slot 19 and tighten the bolts to ensure its secure fixation, simplifying the replacement process of the adjustable aperture 20 and meeting diverse application needs.

[0042] In this embodiment, the detection module 3 includes a detection lens 31 and a magnifying lens. The detection lens 31 is connected to the detection frame 2 and communicates with the detection frame 2. The magnifying lens is installed inside the detection lens 31 and is used to magnify the light image for detection by the detection lens 31. Furthermore, the prism 5 includes a first prism 51 and a second prism 52. The inclined surfaces of the first prism 51 and the second prism 52 coincide. The light reflected from the exposure surface to the inclined surfaces of the first prism 51 and the second prism 52 is reflected again into the detection lens 31.

[0043] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0044] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other implementations that can be understood by those skilled in the art.

Claims

1. A small-multiple lens with bottom monitoring, characterized in that, The system includes a laser (1) and a lens body (4). The laser beam emitted by the laser (1) passes through the lens body (4). A detection frame (2) and a prism (5) are provided at the outlet of the lens body (4). A low-pass high-reflection film is provided on the inclined surface of the prism (5). A detection module (3) is provided on the detection frame (2). A ring-shaped illumination source is provided at the bottom of the detection frame (2). The light path from the laser (1) through the lens body (4) and the prism (5) to the exposure surface is a short-wavelength light path. The short-wavelength light path passes through the annular illumination source. The light path from the annular illumination source through the exposure surface and the prism (5) to the detection module (3) is a long-wavelength light path.

2. The small-magnification lens with a bottom monitoring according to claim 1, wherein, The lens body (4) includes a lens housing (41), a first light-transmitting tube (42) and a second light-transmitting tube (43). The lens housing (41) includes an entrance port (8), a reflection port (9) and an emission port (10). The laser (1) is connected to the lens housing (41) and the laser (1) communicates with the inside of the lens housing (41) through the entrance port (8). One end of the first light-transmitting tube (42) is connected to the lens housing (41) and the first light-transmitting tube (42) communicates with the lens housing (41) through the emission port (10). The other end of the first light-transmitting tube (42) is connected to the second light-transmitting tube (43), and the other end of the second light-transmitting tube (43) is used to connect to the detection frame (2).

3. The small-hyperhelic lens with bottom monitoring according to claim 2, characterized in that, A DMD chip (11) is provided on the outer side of the lens housing (41) corresponding to the position of the reflection port (9). The lens housing (41) includes an incident part (411) and a reflecting part (412). The incident part (411) and the reflecting part (412) are obliquely connected on one side. A reflector (12) is provided in the incident part (411). A conversion element (13) is provided in the reflecting part (412). The surface of the conversion element (13) faces the DMD chip (11).

4. The small-magnification lens with a bottom monitoring according to claim 2, characterized in that, A lens holder (14) is provided inside the light-transmitting tube (42). The lens holder (14) is used to install a number of lenses. The outer ring wall of the lens holder (14) is provided with an external thread. The inside of the light-transmitting tube (42) is provided with an internal thread. The lens holder (14) is threadedly connected to the light-transmitting tube (42). The light-transmitting tube (42) is provided with a clearance hole (15) and a handle (16). The handle (16) is fixedly connected to the lens holder (14). The clearance hole (15) is used to avoid the position of the handle (16).

5. The small-magnification lens with a bottom monitoring according to claim 2, characterized in that, The first light-transmitting tube (42) extends outward and is provided with a flange (421). The second light-transmitting tube (43) is fixedly provided with a connecting ring (17). The connecting ring (17) has an annular groove (18). The flange (421) is inserted into the annular groove (18). The flange (421) has several bolt holes (first type). The bottom of the annular groove (18) has several bolt holes (second type). The flange (421) is connected to the connecting ring (17) with a light-transmitting bolt.

6. The small-magnification lens with a bottom monitoring according to claim 2, characterized in that, The outer wall of the light-transmitting tube 2 (43) is provided with a slot (19), the slot (19) is connected to the light-transmitting tube 2 (43), the light-transmitting tube 2 (43) is provided with an adjustable aperture (20), the adjustable aperture (20) is inserted into the light-transmitting tube 2 (43) through the slot (19), and the fixing part (201) of the adjustable aperture (20) is inserted into the slot (19).

7. The small-magnification lens with a bottom monitoring according to claim 1, wherein, The detection module (3) includes a detection lens (31) and a magnifying lens. The detection lens (31) is connected to the detection frame (2) and communicates with the detection frame (2). The magnifying lens is installed inside the detection lens (31) and is used to magnify the light image for detection by the detection lens (31).

8. The small-hyperhelic lens with bottom monitoring according to claim 7, characterized in that, The prism (5) includes a first prism (51) and a second prism (52), the inclined surfaces of the first prism (51) and the second prism (52) coincide, and the light reflected from the exposure surface to the inclined surfaces of the first prism (51) and the second prism (52) is reflected again into the detection lens (31).

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