Radio frequency matcher

Abstract

The utility model relates to the technical field of radio frequency matchers, in particular to a radio frequency matcher, which is characterized in that a partition plate is provided with a first vent hole, a fan is arranged in a shell corresponding to the first vent hole, and the shell is provided with second vent holes corresponding to the two sides of the first vent hole, so that air generated by the fan can form convection, and the air flow is uniform. The heat dissipation capability of the main loop assembly and the control assembly in the shell is greatly improved; a through hole is formed in the position, close to the main loop assembly, of the shell, a detachable cover plate and a through hole provided with the detachable cover plate are arranged in at least part of the through hole, the connection position of the radio frequency output end can be adjusted by detaching the cover plate, and the connection position of the radio frequency output end can be adjusted without the through hole provided with the detachable cover plate; the radio frequency output end is connected with the main loop assembly; by enhancing the heat dissipation capability and selecting the connecting through holes of the radio frequency output end, the radio frequency module can be applied to different reaction chambers, so that the radio frequency module is higher in universality and better in compatibility.

Description

Technical Field

[0001] This utility model relates to the field of radio frequency matching technology, and in particular to a radio frequency matching device. Background Technology

[0002] An RF matching device is used to match the load impedance and the power supply impedance to reduce reflected power and maximize transmitted power. In applications, the output impedance of the RF power supply is typically 50Ω. To ensure the reaction chamber receives maximum power from the RF power supply and to reduce reflected power, an impedance matching device is usually placed between the RF power supply and the reaction chamber to match the output impedance of the RF power supply with the load impedance. The load impedance is equal to the sum of the impedance of the RF matching device and the impedance of the reaction chamber.

[0003] Chinese utility model patent CN215935216U discloses an integrated structure for an RF power supply matching device, including a housing comprising a bottom shell, a rear panel, a front panel, a right side panel, a left side panel, and a cover. A first partition parallel to the front panel is detachably fixed to the bottom shell, with the area in front of the first partition being a fan area. A second partition parallel to the right side panel is also detachably fixed to the bottom shell, with the area to the left of the second partition being the RF power supply area. A third partition is detachably fixed to the right side of the second partition, dividing the area to the right of the second partition into a matching adjustment area and a control board area. This design integrates the RF power supply and matching adjustment mechanism into a single machine, visually reducing the appearance to only the power output line and one AC input line of the matching device, increasing ease of use. The left side panel is detachable for easy power adjustment, and the right side panel is detachable for easy matching circuit adjustment. The aforementioned integrated structure of the RF power matching unit discloses the use of a fan for heat dissipation, and ventilation holes are provided on the rear panel, front panel, right side panel, and left side panel. However, the placement of the second and third partitions and the location of the fan result in only average heat dissipation capacity.

[0004] In addition, the position of the RF output terminal of the above-mentioned RF matching device is fixed, and the connection position of the RF output terminal of the RF matching device cannot be adjusted, thus making it unable to adapt to different types of reaction chambers.

[0005] In summary, in the existing technology, different types and models of reaction chambers have different requirements for RF matching devices. For example, different reaction chambers have different requirements for the position of the RF output terminal of the RF matching device and different requirements for the heat dissipation capacity of the RF matching device. As a result, the compatibility and versatility of the current RF matching devices are low and they cannot adapt to the requirements of various reaction chambers. Utility Model Content

[0006] The purpose of this invention is to overcome the shortcomings of existing radio frequency matching devices, such as low compatibility and versatility, difficulty in adapting the position of the radio frequency output terminal of the radio frequency matching device to different reaction chambers, and low heat dissipation capacity, and to provide a radio frequency matching device.

[0007] In a first aspect, the present invention provides an RF matching device, comprising a housing, a partition disposed within the housing, a main circuit assembly, a control assembly, an RF input terminal and an RF output terminal mounted on the housing; the main circuit assembly and the control assembly are respectively located on both sides of the partition in a first direction; the housing is provided with a plurality of through holes for mounting the RF output terminal; the RF output terminal is mounted in one of the through holes and electrically connected to the main circuit assembly through a conductive element, and the through holes where the RF output terminal is not mounted are provided with removable cover plates;

[0008] The radio frequency matching device also includes a fan. The partition is provided with a first ventilation hole. The fan is provided corresponding to the first ventilation hole. The housing is provided with a second ventilation hole corresponding to the fan. The second ventilation hole is located on both sides of the fan in a first direction.

[0009] The RF matching unit described in this solution divides the internal space of the housing into two areas using a partition, which facilitates the separate integration of the main circuit component and the control component. A first ventilation hole is provided in the partition, and a fan is installed inside the housing corresponding to the first ventilation hole. Second ventilation holes are provided on both sides of the housing corresponding to the first ventilation hole in a first direction, allowing the air generated by the fan to form convection, thereby greatly improving its heat dissipation capacity for the main circuit component and the control component inside the housing. Furthermore, the housing has through holes near the main circuit component. One through hole without a removable cover is used for connecting the RF output terminal to the main circuit component, while the remaining through holes with removable covers allow for connection of the RF output terminal by removing the cover, thus enabling the RF output terminal to be connected to different positions within the housing. Through the enhanced heat dissipation capacity and the selectable connection through holes for the RF output terminal, it can be applied to different reaction chambers, resulting in higher versatility and better compatibility.

[0010] Preferably, the housing includes a bottom plate and a side plate, both of which have through holes near the main circuit assembly; the conductive component includes a first copper component and a second copper component.

[0011] The base plate is provided with two through holes, and both through holes of the base plate can be electrically connected to the main circuit assembly through the first copper component;

[0012] The through-hole in the side plate allows for electrical connection to the main circuit assembly via the second copper component.

[0013] Preferably, the through hole is a circular hole or a square hole, which makes processing easier and can be adapted to various types of RF output interface terminals.

[0014] Preferably, the housing has a connecting hole on the periphery of the through hole, and the cover plate is connected to the connecting hole by screws, which is easy to disassemble and the connection is stable.

[0015] Preferably, the control component includes a switching power supply, a motherboard, and a motor, and the switching power supply, motherboard, and motor are electrically connected.

[0016] The main circuit assembly includes a variable capacitor and an inductor, and the RF input terminal and RF output terminal are electrically connected to the variable capacitor and the inductor.

[0017] The motor and the variable capacitor are arranged coaxially.

[0018] Preferably, the side panel includes a left side panel, a right side panel, a front side panel, and a rear side panel, wherein the left side panel and the right side panel are arranged opposite to each other, the front side panel and the rear side panel are arranged opposite to each other, and the partition connects the left side panel, the right side panel, and the bottom panel;

[0019] The fan is connected to the partition plate, and there are two motors, which are arranged on the left and right sides of the fan. The main board is arranged above or below the fan.

[0020] The number of variable capacitors is 2, and the number of inductors is 1. The inductor is set corresponding to the first ventilation hole, and the two variable capacitors are set on the left and right sides of the inductor. The inductor is detachably connected to the two variable capacitors through a third copper component and is suspended inside the housing through the third copper component.

[0021] The symmetrical arrangement allows the fan to better dissipate heat from the main circuit components and control components.

[0022] Preferably, the left side plate has a third ventilation hole on the front and rear sides corresponding to the partition, and the right side plate has a third ventilation hole on the front and rear sides corresponding to the partition, which can better dissipate heat from the main circuit assembly and the control assembly.

[0023] Preferably, the housing further includes a top plate, which is detachably connected to the side plates and / or partitions. At least two of the top plate, side plates, and bottom plate are provided with through holes with detachable covers, thereby improving the versatility and compatibility of the RF matching device.

[0024] When the through hole with the removable cover plate is provided in the base plate, the cover plate is located inside the base plate to avoid affecting the height of the bottom surface of the base plate and to ensure the flatness of the bottom surface of the base plate.

[0025] Preferably, the top plate has a fourth ventilation hole on both the front and rear sides corresponding to the partition, which can better dissipate heat from the main circuit assembly and the control assembly.

[0026] Preferably, one end of the inductor is electrically connected to one of the variable capacitors and the radio frequency input terminal, and is connected to the housing ground through the variable capacitor;

[0027] The other end of the inductor is sequentially connected to another variable capacitor and the radio frequency output terminal;

[0028] The two through holes of the base plate are located outside the two ends of the inductor, and both through holes of the base plate can be electrically connected to the corresponding capacitor through the first copper component.

[0029] Preferably, the inductor is a hollow inductor in a spiral shape, with the inductor axis corresponding to the center of the first ventilation hole, thereby enhancing the heat dissipation capacity of the inductor.

[0030] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0031] This invention provides an RF matching device. A partition divides the internal space of the housing into two areas, facilitating the separate integration of the main circuit assembly and the control assembly. A first ventilation hole is provided in the partition, and a fan is installed inside the housing corresponding to the first ventilation hole. Second ventilation holes are provided on both sides of the housing in a first direction corresponding to the first ventilation hole. This allows the air generated by the fan to form convection, significantly improving the heat dissipation capacity for the main circuit assembly and control assembly within the housing, meeting the heat dissipation requirements of different reaction chambers. Furthermore, the housing has through holes near the main circuit assembly, at least some of which are equipped with removable covers. Through holes with removable covers allow connection of the RF output terminal by removing the cover, while through holes without removable covers are used for connection between the RF output terminal and the main circuit assembly, satisfying the installation requirements of different reaction chambers. The enhanced heat dissipation capacity and the selectable connection through holes for the RF output terminal make it suitable for different reaction chambers, resulting in higher versatility and better compatibility. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the first structure of the radio frequency matching device according to the present invention;

[0033] Figure 2 This is an exploded view of the first structure of the radio frequency matching device described in this utility model;

[0034] Figure 3 This is a schematic diagram showing the arrangement of the main board, motor, and fan inside the housing of the radio frequency matching device described in this utility model;

[0035] Figure 4 for Figure 2 Schematic diagram of the internal structure of the middle shell;

[0036] Figure 5 for Figure 4 A schematic diagram showing the connection positions of the first and third copper parts;

[0037] Figure 6 This is a first-view axial side schematic diagram of the second structure of the radio frequency matching device described in this utility model;

[0038] Figure 7 This is a second-view axial side schematic diagram of the second structure of the radio frequency matching device described in this utility model;

[0039] Figure 8 This is a third-view axial side schematic diagram of the second structure of the radio frequency matching device described in this utility model;

[0040] Figure 9 This is a fourth-view axial side schematic diagram of the second structure of the radio frequency matching device described in this utility model;

[0041] Figure 10 This is a schematic diagram of the second structure of the radio frequency matching device described in this utility model, without a top plate and a main board.

[0042] Figure 11 This is a schematic diagram showing the connection positions of the second and third copper components in the second structure of the radio frequency matching device described in this utility model.

[0043] Figure 12 This is a schematic diagram showing the connection positions of the first and third copper components in the second structure of the radio frequency matching device described in this utility model.

[0044] Figure 13 This is a schematic diagram of the structure of the first copper component;

[0045] Figure 14 This is a schematic diagram of the second copper component.

[0046] Marked in the diagram: 11. Base plate; 12. Rear side plate; 13. Front side plate; 14. Left side plate; 15. Right side plate; 16. Top plate; 161. Front top plate; 162. Rear top plate; 17. Partition plate; 18. Through hole;

[0047] 21. First ventilation opening; 22. Second ventilation opening; 23. Third ventilation opening; 24. Fourth ventilation opening; 25. Fan;

[0048] 31. Cover plate; 32. Sheet metal part; 33. RF input terminal; 34. RF output terminal;

[0049] 41. Switching power supply; 42. Main board; 43. Motor; 44. Variable capacitor; 45. Inductor;

[0050] 51. First bronze component; 52. Second bronze component; 53. Third bronze component. Detailed Implementation

[0051] The present invention will be further described in detail below with reference to specific embodiments. However, it should not be construed as limiting the scope of the present invention to the following embodiments; all technologies implemented based on the content of the present invention fall within the scope of the present invention.

[0052] Unless otherwise specified, the use of terms such as "upper," "lower," "left," "right," "center," "inner," and "outer" to indicate orientation or positional relationships in the description of specific embodiments of this utility model is based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product / equipment / device is typically placed during use. These terms are merely for the purpose of facilitating the description of the utility model solution or simplifying the description in specific embodiments, enabling those skilled in the art to quickly understand the solution, and do not indicate or imply that a specific device / component / element must have a specific orientation, or be constructed and operated in a specific positional relationship. Therefore, they should not be construed as limitations on this utility model.

[0053] Furthermore, the use of terms such as "horizontal," "vertical," "suspended," and "parallel" does not imply that the corresponding device / component / element must be absolutely horizontal, vertical, suspended, or parallel, but rather that it can be slightly tilted or have a deviation. For example, "horizontal" merely means that its direction is more horizontal relative to "vertical," not that the structure must be completely horizontal, but can be slightly tilted. Alternatively, it can be simplified to mean that the corresponding device / component / element, when set in a "horizontal," "vertical," "suspended," or "parallel" direction, can have an error / deviation of ±10% relative to the corresponding direction, more preferably within ±8%, more preferably within ±6%, more preferably within ±5%, and more preferably within ±4%. As long as the corresponding device / component / element is within the error / deviation range, it can still achieve its function in the present invention.

[0054] Furthermore, the use of terms such as "first," "second," and "third" in terminology is merely for distinguishing descriptions of identical or similar components and should not be interpreted as emphasizing or implying the relative importance of a particular component.

[0055] Furthermore, in the description of the embodiments of this utility model, "several", "multiple", and "several" represent at least two. The number can be any number, such as two, three, four, five, six, seven, eight, or nine, and can even exceed nine.

[0056] Furthermore, in the description of the technical solution of this utility model, unless otherwise explicitly specified / limited / restricted, the terms "set up," "install," "connect," "link," "equipped with," "laid out," and "arranged" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to common connection methods in the art, such as welding, riveting, bolting, and threaded connections. Such connections can be mechanical, electrical, or communication connections; they can be direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components.

[0057] Example 1

[0058] like Figures 1-10 As shown, an RF matching device includes a housing, a partition 17 disposed within the housing, a main circuit assembly, a control assembly, a fan 25, an RF input terminal 33 and an RF output terminal 34 mounted on the housing.

[0059] like Figure 1 and Figure 2 As shown, the housing includes a bottom plate 11, a top plate 16, a front side plate 13, a rear side plate 12, a left side plate 14, and a right side plate 15. The front side plate 13 and rear side plate 12 are positioned opposite each other, the left side plate 14 and right side plate 15 are positioned opposite each other, and the bottom plate 11 and top plate 16 are positioned opposite each other. The arrangement of the bottom plate 11, top plate 16, and side plates forms a rectangular closed structure, protecting the internal structure. In addition, a partition 17 is provided inside the housing, dividing the interior into a main circuit area and a control circuit area. The main circuit area is used to house the main circuit components, and the control circuit area is used to house the control components, with the main circuit components and the control components located on opposite sides of the partition 17. Specifically, the partition 17 is vertically oriented, with its bottom connected to the bottom plate 11, its left side connected to the left side plate 14, its right side connected to the right side plate 15, and its top side connected to the top plate 16. In other words, the partition 17 divides the interior space of the housing into two areas: front and rear.

[0060] like Figure 2As shown, the partition 17 is provided with a first ventilation hole 21, and the fan 25 is disposed corresponding to the first ventilation hole 21. The housing is provided with second ventilation holes 22 on both sides of the first ventilation hole 21. Here, "both sides of the first ventilation hole 21" refers to both sides of the housing along the first direction, that is, both the front side plate 13 and the rear side plate 12 are provided with second ventilation holes 22 corresponding to the first ventilation hole 21. Of course, the placement of the fan 25 can be selected. For example, the fan 25 can be adjacent to the partition 17 and disposed on both sides of the partition 17. Here, "both sides of the partition 17" refers to both sides of the partition along the first direction. It can also be disposed on the rear side plate 12 within the control loop area. The air generated by the fan 25 can form convection through the first ventilation hole 21 and the second ventilation hole 22, thereby greatly improving its heat dissipation capacity for the main loop components and control components inside the housing.

[0061] like Figure 2 As shown, the left side plate 14 is provided with third ventilation holes 23 on the front and rear sides of the partition 17, and the right side plate 15 is provided with third ventilation holes 23 on the front and rear sides of the partition 17, which can better dissipate heat from the main circuit components and control components.

[0062] like Figure 2 As shown, the top plate 16 has fourth ventilation holes 24 on both the front and rear sides corresponding to the partition plate 17, which can better dissipate heat from the main circuit assembly and the control assembly.

[0063] like Figures 2-4 As shown, the control component includes a switching power supply 41, a main board 42, and a motor 43. The switching power supply 41, main board 42, and motor 43 are electrically connected. The main circuit component includes a variable capacitor 44 and an inductor 45. The RF input terminal 33 and RF output terminal 34 are electrically connected to the variable capacitor 44 and inductor 45. The motor 43 is coaxially arranged with the variable capacitor 44, and the motor 43 controls the adjustment of the variable capacitor 44. Figure 3 As shown, the fan 25 is connected to the partition 17, and the fan 25 is fixed to the partition 17 with screws, so that the center of the fan 25 corresponds to the center of the first ventilation hole 21. There are two motors 43, which are arranged on the left and right sides of the fan 25, and the main board 42 is located above the fan 25; Figure 4As shown, there are two variable capacitors 44 and one inductor 45. The inductor is positioned corresponding to the first ventilation hole 21, which is located in the middle of the partition 17. The two variable capacitors 44 are positioned on the left and right sides of the inductor. The connection between the variable capacitors 44 and the inductor 45 is detachable via a third copper component 53, enabling conductivity. The third copper component 53 is a copper busbar connecting the capacitors and the inductor. One end of the inductor 45 is electrically connected to one of the variable capacitors 44 and the RF input terminal 33, and is connected to the housing ground through the variable capacitor 44. The other end of the inductor 45 is electrically connected to the other variable capacitor 44 and the RF output terminal 34. The symmetrical arrangement of the variable capacitors 44 on both sides of the inductor 45 allows the fan 25 to better cool the main circuit components and control components. Furthermore, the inductor 45 is a spiral-shaped hollow inductor, and its position corresponding to the first ventilation hole 21 enhances heat dissipation. Figure 2 As shown, the first ventilation hole 21, the second ventilation hole 22, the third ventilation hole 23, and the fourth ventilation hole 24 are all composed of a large array of through holes. The axis of the inductor 45 corresponds to the middle of the first ventilation hole 21, that is, the axis of the inductor 45 corresponds to the middle of the through hole array, which makes the heat dissipation of the inductor better.

[0064] In this design, the housing has through holes 18 near the main circuit assembly; one through hole 18 is used to connect the RF output terminal 34, allowing the RF output terminal 34 to be electrically connected to the main circuit assembly through the through hole 18. The other through holes 18 are provided with removable covers 31, which cover the through holes 18 and protect them. The through holes 18 with removable covers 31 allow the RF output terminal 34 to be connected by removing the covers 31, thus allowing the connection position of the RF output terminal 34 on the housing to be changed. Figure 1 and Figure 2 As shown, the RF output terminal 34 is connected to the through hole 18 via the sheet metal part 32 to achieve electrical connection with the main circuit component inside the housing.

[0065] In this embodiment, the conductive component includes a first copper component 51 and a second copper component 52.

[0066] like Figures 6-7 As shown, a through hole is provided on the front panel 13. This through hole does not have a removable cover plate 31, and an RF output terminal 34 is provided there. Figure 10 and Figure 11 As shown, the RF output terminal 34 is connected to the second copper component 52 (second copper component reference). Figure 14A variable capacitor 44 is detachably connected to one end of the front panel 13 near the RF output terminal 34. The other end of the variable capacitor 44 is detachably connected to the corresponding end (the end away from the front panel 13) of the inductor 45 via a third copper component. The end of the inductor 45 near the front panel 13 is detachably connected to the corresponding end (the end near the front panel 13) of another variable capacitor 44 via another third copper component. The end of the variable capacitor 44 away from the front panel 13 is connected to the RF input terminal 33.

[0067] And such as Figure 7 As shown, two through holes 18 are also provided on the base plate 11. A detachable cover plate 31 is provided at the through hole 18. When the cover plate 31 is removed, the radio frequency output terminal 34 can be connected to the through hole 18 through the sheet metal part 32.

[0068] like Figures 1-5 As shown, a through hole is provided on the front side plate 13, and a removable cover plate 31 is provided at this through hole. Two through holes 18 are also provided on the bottom plate 11, with the two through holes 18 located on the outer sides of both ends of the inductor 45 in the first direction. The through hole on the bottom plate 11 away from the front side plate 13 is provided with a removable cover plate 31, and the through hole on the bottom plate 11 near the front side plate 13 is where the RF output terminal 34 is located. The RF output terminal 34 passes through the first copper component 51 (refer to the first copper component 51). Figure 13 A variable capacitor 44 is detachably connected to one end of the front panel 13 near the RF output terminal 34. The other end of the variable capacitor 44 is detachably connected to the corresponding end (the end away from the front panel 13) of the inductor 45 via a third copper component. The end of the inductor 45 near the front panel 13 is detachably connected to the corresponding end (the end near the front panel 13) of another variable capacitor 44 via another third copper component. The end of the variable capacitor 44 away from the front panel 13 is connected to the RF input terminal 33. That is, from... Figure 5 Transform into Figure 10 The first copper component 51 is simply replaced with the second copper component 52, and the RF output terminal 34 is moved from the base plate 11 to the through hole of the front side plate 13. The second copper component 52 is detachably connected to the variable capacitor 44 near the front side plate 13.

[0069] like Figure 12 As shown, two through holes 18 are provided on the base plate 11, wherein the two through holes 18 are located on the outer sides of both ends of the inductor 45 in the first direction, and a removable cover plate 31 is provided on the through hole of the base plate 11 near the front side plate 13, and the RF output terminal 34 is provided on the through hole of the base plate 11 away from the front side plate 13. The RF output terminal 34 passes through the first copper component 51 (the first copper component 51 is referenced). Figure 13A variable capacitor 44, detachably connected to the end of the variable capacitor 44 near the right side panel 15 away from the front side panel 13, has its other end detachably connected to the corresponding end of the inductor 45 (near the front side panel 13) via a third copper component. The end of the inductor 45 away from the front side panel 13 is detachably connected to the corresponding end of another variable capacitor 44 (away from the front side panel 13) via another third copper component. The end of the variable capacitor 44 near the front side panel 13 is connected to the RF input terminal 33. That is, from... Figure 5 Transform into Figure 12 The positions of the first copper component 51, the third copper component, and the RF output terminal 34 need to be changed.

[0070] This design allows for selection of the location of the RF output terminal 34 on the housing, thus adapting to different installation positions within the reaction chamber. The shape of the through-hole 18 can be selected. Preferably, the through-hole 18 is circular or square, which facilitates manufacturing and accommodates various types of interface terminals for the RF output terminal 34. The shape of the sheet metal part 32 can also be selected; a rectangular sheet metal part 32 connected at the through-hole 18 protects the through-hole 18 when connecting the RF output terminal 34. The shape of the cover plate 31 can also be selected, but it must be able to cover the through-hole 18. Figure 2 As shown, the housing has a connecting hole on the periphery of the through hole, and the cover plate is connected to the connecting hole by screws, which is easy to disassemble and the connection is stable.

[0071] In addition to the through holes 18 provided in the base plate 11 and the front side plate 13, in this design, at least two of the top plate 16, side plates, and base plate 11 are provided with the through holes 18, which can improve the versatility and compatibility of the RF matching unit. Furthermore, the top plate 16 is detachably connected to the side plates and / or partitions 17, facilitating the inspection and replacement of the main circuit assembly and control assembly, and can adapt to the position of the through holes 18 to accommodate different reaction chambers. Figure 1 and Figure 2 As shown, the top plate 16 is divided into a front top plate 161 and a rear top plate 162. The front top plate 161 is located above the main circuit assembly, and the rear top plate 162 is located above the control assembly. They are detachably connected to the side plates and / or partitions 17, respectively, to facilitate the selection of the areas that need to be opened. As a preferred option, when the through holes 18 corresponding to the detachable cover plate 31 are provided on the bottom plate 11, the cover plate 31 is located inside the bottom plate 11 to avoid the cover plate 31 affecting the bottom surface height of the bottom plate 11, ensuring the flatness of the bottom surface of the bottom plate 11, which is beneficial for installation.

[0072] The RF matching device described in this embodiment features a first ventilation hole 21 on the partition 17, a fan 25 inside the housing corresponding to the first ventilation hole 21, and second ventilation holes 22 on both sides of the housing corresponding to the first ventilation hole 21. This allows the air generated by the fan 25 to form convection, achieving external circulation for air cooling and significantly improving its heat dissipation capacity for the main circuit components and control components inside the housing, meeting the heat dissipation requirements of different reaction chambers. By opening through holes 18 at different positions on the housing, the installation requirements of different reaction chambers for the RF matching device are met, making it suitable for different reaction chambers. For example, by setting through holes 18 on the side plate, top plate 16, and bottom plate 11, it can be used in multiple reaction chambers, making it more versatile and compatible. Furthermore, the RF output terminals 34 located in different through holes on the bottom plate can be connected by changing the position of the same first copper component 51, and the RF output terminals 34 located in different through holes on the side plate can be connected by changing the position of the same second copper component 52, improving the versatility of the copper components and reducing costs.

[0073] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A radio frequency (RF) matching device, comprising a housing, a partition disposed in the housing, a main circuit assembly, a control assembly, an RF input terminal and an RF output terminal mounted on the housing; the main circuit assembly and the control assembly are respectively located on two sides of the partition in a first direction; characterized in that, The shell is provided with a plurality of through holes for mounting radio frequency output terminals; the radio frequency output terminals are mounted in one of the through holes and electrically connected to the main loop assembly through a conductive member, and the through holes without the radio frequency output terminals are provided with removable cover plates for shielding; The radio frequency matching device further comprises a fan, the partition plate is provided with a first air vent, the fan is arranged corresponding to the first air vent, the shell is provided with a second air vent corresponding to the fan, and the second air vent is located on both sides of the fan in the first direction.

2. A radio frequency matching device according to claim 1, wherein, The shell comprises a bottom plate and a side plate, and the bottom plate and the side plate are both provided with through holes near the main loop assembly; the conductive member comprises a first copper member and a second copper member; The bottom plate is provided with two through holes, and the two through holes of the bottom plate can be electrically connected to the main loop assembly through the first copper member; The through hole of the side plate can be electrically connected to the main loop assembly through the second copper member.

3. A radio frequency matching device according to claim 2, wherein, The through hole is a circular hole or a square hole; The shell is connected to the cover plate through a screw on the side of the through hole.

4. A radio frequency matching device according to any one of claims 2-3, characterized in that, The control assembly comprises a switching power supply, a mainboard and a motor, and the switching power supply, the mainboard and the motor are electrically connected; The main loop assembly comprises a variable capacitor and an inductor, and the radio frequency input terminal and the radio frequency output terminal are electrically connected to the variable capacitor and the inductor; The motor is coaxially arranged with the variable capacitor.

5. A radio frequency matching device according to claim 4, wherein, The side plate comprises a left side plate, a right side plate, a front side plate and a rear side plate, the left side plate and the right side plate are oppositely arranged, the front side plate and the rear side plate are oppositely arranged, and the partition plate is connected to the left side plate, the right side plate and the bottom plate; The fan is connected to the partition plate, the number of the motor is 2, and the two motors are arranged on the left and right sides of the fan, and the mainboard is arranged above or below the fan; The number of the variable capacitor is 2, the number of the inductor is 1, the inductor is arranged corresponding to the first air vent, and the two variable capacitors are arranged on the left and right sides of the inductor; the inductor is detachably connected to the two variable capacitors through a third copper member, and is suspended in the shell through the third copper member.

6. A radio frequency matching network according to claim 5, wherein, The left side plate is provided with a third air vent corresponding to the front and rear sides of the partition plate, and the right side plate is provided with a third air vent corresponding to the front and rear sides of the partition plate.

7. A radio frequency matching network according to claim 5, wherein, The shell further comprises a top plate, the top plate is detachably connected to the side plate and / or the partition plate, and at least two of the top plate, the side plate and the bottom plate are provided with a through hole with a detachable cover plate; When the through hole with the detachable cover plate is arranged on the bottom plate, the cover plate is arranged on the inner side of the bottom plate.

8. A radio frequency matching device according to claim 7, wherein, The top plate is provided with a fourth air vent corresponding to the front and rear sides of the partition plate.

9. A radio frequency matching network according to claim 5, wherein, One end of the inductor is electrically connected to one of the variable capacitors and the radio frequency input terminal, and the inductor is connected to the shell ground through the variable capacitor; The other end of the inductor is sequentially electrically connected to the other variable capacitor and the radio frequency output terminal; The two through holes of the bottom plate are located outside the two ends of the inductor, and the two through holes of the bottom plate can be electrically connected to the corresponding capacitors through the first copper member.

10. A radio frequency matching network according to claim 5, wherein, The inductor is a hollow inductor in a spiral shape, and the inductor axis corresponds to the middle of the first air vent.

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