Grinding and repairing device for sealing surface of semiconductor gas gate valve

Abstract

The utility model provides a semiconductor gas gate valve sealing surface grinding and repairing device, which relates to the technical field of semiconductor gas gate valves and comprises a processing table and a grinder arranged at the top of the processing table, a gas gate valve body is arranged at the bottom of the grinder, and a positioning component comprises a first connecting rod mounted at the bottom of the grinder. The top of the first connecting rod is provided with a lantern ring, the top of the lantern ring is rotationally connected with a sleeve, the top of the sleeve is fixedly connected with a first supporting plate, the top of the first supporting plate is provided with a supporting rod, and the side face of the supporting rod is fixedly connected with a flexible touch rod. Through the first connecting rod installed on the side face of the grinder, when the grinder moves downwards, the sleeve is synchronously promoted to rotate anticlockwise, and through the arrangement of the lantern ring, the sleeve can be supported.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor gas valve technology, and in particular to a device for grinding and repairing the sealing surface of a semiconductor gas valve. Background Technology

[0002] The semiconductor gas valve sealing surface grinding and repair device is specially designed for the maintenance of gas valves in semiconductor manufacturing. It can accurately remove scratches and wear marks on the sealing surface, and restore its flatness and smoothness through fine grinding, ensuring the valve sealing performance, avoiding gas leakage, and ensuring the stability of semiconductor production processes and the reliability of product quality.

[0003] In practical applications, existing gas valve sealing surface grinding and repair devices, using a grinding disc and drive motor in conjunction, can meet the basic maintenance needs of valves, but the following problems still exist:

[0004] When common semiconductor gas valves are ground and repaired, they are mostly fixed by locating pins and manual assistance. This inevitably leads to different locating positions each time, which in turn causes the valve to shift during the grinding and repair process, affecting the repair effect. Therefore, this application provides a semiconductor gas valve sealing surface grinding and repair device to meet the needs. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a device for grinding and repairing the sealing surface of a semiconductor gas valve.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a semiconductor gas valve sealing surface grinding and repair device, including a processing table and a grinder disposed on the top of the processing table, with a gas valve body disposed at the bottom of the grinder;

[0007] A positioning component, comprising a first connecting rod installed at the bottom of a grinder, a collar being provided at the top of the first connecting rod, a sleeve being rotatably connected to the top of the collar, a first support plate being fixedly connected to the top of the sleeve, a support rod being provided at the top of the first support plate, and a flexible touch rod being fixedly connected to the side of the support rod.

[0008] The clamping assembly includes a second connecting rod disposed on the side of the sleeve, a fixing seat disposed on the side of the second connecting rod, and a flexible clamping plate disposed on the side of the fixing seat away from the second connecting rod.

[0009] Furthermore, a first groove is provided on the side of the sleeve, and a protrusion is fixedly connected to the side of the first connecting rod. One end of the protrusion extends into the inner cavity of the first groove, and the one end of the protrusion is slidably connected to the inner cavity of the first groove.

[0010] The technical effect of adopting the above technical solution is that, through the cooperation of the first groove and the protrusion, the sleeve can be made to rotate counterclockwise when the first connecting rod moves downward.

[0011] Furthermore, a second groove is provided on the top of the first support plate, and one end of the support rod extends into the inner cavity of the second groove, and the one end of the support rod is slidably connected to the inner cavity of the second groove.

[0012] The technical effect of adopting the above technical solution is that by opening the second groove, when the first support plate rotates counterclockwise, the support rod drives the flexible contact rod to move towards the end close to the inner wall of the gas valve body.

[0013] Furthermore, a second support plate is fixedly connected to the inner wall of the processing table, and a third groove is provided on the top of the second support plate.

[0014] The technical effect of adopting the above technical solution is that the movement trajectory of the support rod can be limited by the cooperation of the second support plate and the third groove.

[0015] Compared with the prior art, the advantages and positive effects of this utility model are as follows:

[0016] The sealing surface of the valve can be ground and repaired by using a grinder and an external drive. The first connecting rod installed on the side of the grinder can simultaneously cause the sleeve to rotate counterclockwise when the grinder moves downward. The sleeve can be supported by a collar. The first support plate fixedly connected to the top of the sleeve can cause the support rod to drive the flexible contact rod to move towards the end close to the inner wall of the gas valve body, thereby achieving the effect of positioning the gas valve body and effectively improving work efficiency and positioning accuracy. Attached Figure Description

[0017] Figure 1 A three-dimensional structural schematic diagram of a semiconductor gas valve sealing surface grinding and repair device provided by this utility model;

[0018] Figure 2 A schematic diagram of the internal connection structure of a semiconductor gas valve sealing surface grinding and repair device provided by this utility model;

[0019] Figure 3 A cross-sectional view of the positioning component of a semiconductor gas valve sealing surface grinding and repair device provided by this utility model;

[0020] Figure 4 A schematic diagram of the connection structure of the clamping assembly of the semiconductor gas valve sealing surface grinding and repair device provided by this utility model;

[0021] Figure 5 This is a cross-sectional structural schematic diagram of the clamping assembly of a semiconductor gas valve sealing surface grinding and repair device provided by this utility model.

[0022] Legend:

[0023] 1. Processing table; 11. Grinding machine; 12. Gas valve body;

[0024] 2. Positioning assembly; 21. First connecting rod; 22. Sleeve; 23. First groove; 24. Protrusion; 25. First support plate; 26. Second groove; 27. Support rod; 28. Flexible contact rod; 29. ​​Second support plate; 210. Third groove; 211. Collar;

[0025] 3. Clamping assembly; 31. Second connecting rod; 32. Fixing base; 33. Slider; 34. Third connecting rod; 35. Fourth connecting rod; 36. Mounting base; 37. Fifth connecting rod; 38. Fixing block; 39. Flexible clamping plate. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] like Figure 1 - Figure 3 As shown, this embodiment provides a technical solution: a semiconductor gas valve sealing surface grinding and repair device, a processing table 1 and a grinder 11 disposed on the top of the processing table 1, and a gas valve body 12 disposed at the bottom of the grinder 11.

[0028] Positioning component 2 includes a first connecting rod 21 installed at the bottom of the grinder 11. A collar 211 is provided at the top of the first connecting rod 21. A sleeve 22 is rotatably connected to the top of the collar 211. A first support plate 25 is fixedly connected to the top of the sleeve 22. A support rod 27 is provided at the top of the first support plate 25. A flexible touch rod 28 is fixedly connected to the side of the support rod 27.

[0029] The clamping assembly 3 includes a second connecting rod 31 disposed on the side of the sleeve 22. A fixing seat 32 is disposed on the side of the second connecting rod 31. A flexible clamping plate 39 is disposed on the side of the fixing seat 32 away from the second connecting rod 31. A first groove 23 is formed on the side of the sleeve 22. A protrusion 24 is fixedly connected to the side of the first connecting rod 21. One end of the protrusion 24 extends into the inner cavity of the first groove 23 and is slidably connected to the inner cavity of the first groove 23. A second groove 26 is formed on the top of the first support plate 25. One end of the support rod 27 extends into the inner cavity of the second groove 26 and is slidably connected to the inner cavity of the second groove 26. A second support plate 29 is fixedly connected to the inner wall of the processing table 1. A third groove 210 is formed on the top of the second support plate 29. The specific model of the gas valve body 12 is DN250PN16. The first groove 23 is spiral in shape. In use, the gas valve body 12 is first placed on the processing table. The grinding machine 11 is then started at the top of the platform 1. One end of the grinding machine 11 moves downward. Through the first connecting rod 21 installed on the side of the grinding machine 11, the protrusion 24 can be driven to move along the inner cavity of the first groove 23 when the grinding machine 11 moves downward. This causes the sleeve 22 to drive the first support plate 25 to move counterclockwise along the top of the collar 211. Through the second groove 26 opened on the top of the first support plate 25, the support rod 27 can be driven to move the flexible contact rod 28 towards the end close to the inner wall of the gas valve body 12. By setting the flexible contact rod 28, the inner wall of the gas valve body 12 can be flexibly positioned, thereby ensuring that the position of the gas valve body 12 is directly below the grinding machine 11, effectively improving the positioning efficiency and positioning accuracy. During the movement of the support rod 27, the movement trajectory of the support rod 27 can be limited by the cooperation of the second support plate 29 and the third groove 210.

[0030] Furthermore, such as Figure 4 and Figure 5As shown: A slider 33 is fixedly connected to the top of the second connecting rod 31. The side of the slider 33 is slidably connected to the side of the fixed seat 32. A third connecting rod 34 is rotatably connected to one end of the slider 33. A fourth connecting rod 35 is rotatably connected to one end of the third connecting rod 34. A mounting seat 36 is rotatably connected to the end of the fourth connecting rod 35 away from the third connecting rod 34. The bottom of the mounting seat 36 is fixedly connected to the top of the fixed seat 32. A fifth connecting rod 37 is rotatably connected to the side of the third connecting rod 34. A fixing block 38 is rotatably connected to one end of the fifth connecting rod 37. By setting one end of the second connecting rod 31 in the inner cavity of the first groove 23, the second connecting rod 31 can be driven to move downward synchronously when the sleeve 22 rotates counterclockwise. When the second connecting rod 31 moves downward, the slider 33 can drive the third connecting rod 34 to rotate counterclockwise. When the fixed seat 32 is set, the movement trajectory of the slider 33 can be limited. When the third connecting rod 34 rotates counterclockwise, the fifth connecting rod 37 can be pushed by the mounting seat 36 and the fourth connecting rod 35 to move the fixed block 38 clockwise along the inner wall of the fixed seat 32. When the fixed block 38 moves clockwise, the flexible clamp 39 slidably connected to one end of the fixed block 38 moves smoothly towards the end close to the gas valve body 12 until it contacts the side of the gas valve body 12, thereby fixing the position of the gas valve body 12 and preventing the gas valve body 12 from shifting position during the grinding and repair process. With the cooperation of the positioning component 2 and the clamping component 3, the positioning and fixing of the gas valve body 12 can be completed simultaneously when the grinder 11 is started, effectively improving work efficiency and positioning accuracy.

[0031] Working principle:

[0032] like Figure 1-5 As shown:

[0033] In use: First, place the gas valve body 12 on top of the processing table 1. Then, start the grinder 11 with an external power supply. One end of the grinder 11 moves downward, which in turn drives the protrusion 24 to move downward along the inner cavity of the first groove 23 via the first connecting rod 21. This allows the support rod 27 to move along the inner cavity of the second groove 26 towards the end closer to the inner wall of the gas valve body 12 via the first support plate 25. When the support rod 27 moves to a certain position, the side of the flexible contact rod 28 contacts the inner wall of the gas valve body 12, thereby positioning the gas valve body 12. When the sleeve 22 rotates counterclockwise, the second connecting rod 31 rotates synchronously. The downward movement causes the slider 33 to move downward along the side of the fixed seat 32, which in turn causes the third connecting rod 34 to rotate counterclockwise along the side of the slider 33. When the third connecting rod 34 moves to a certain position, the fifth connecting rod 37 pushes the fixed block 38 to move clockwise through the cooperation of the mounting seat 36 and the fourth connecting rod 35. This pushes the flexible clamp 39 to move closer to the side of the gas valve body 12. When the flexible clamp 39 has finished fixing the side of the gas valve body 12, the grinder 11 moves to the top of the sealing surface of the gas valve body 12. At this time, the grinder 11 is started to grind and repair the sealing surface.

[0034] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A semiconductor gas gate valve seal face polishing repair device, characterized by, include: A processing table (1) and a grinder (11) set on top of the processing table (1), with a gas valve body (12) set at the bottom of the grinder (11); Positioning component (2), the positioning component (2) includes a first connecting rod (21) installed at the bottom of the grinder (11), a collar (211) is provided at the top of the first connecting rod (21), a sleeve (22) is rotatably connected to the top of the collar (211), a first support plate (25) is fixedly connected to the top of the sleeve (22), a support rod (27) is provided at the top of the first support plate (25), and a flexible touch rod (28) is fixedly connected to the side of the support rod (27); The clamping assembly (3) includes a second connecting rod (31) disposed on the side of the sleeve (22), a fixing seat (32) is disposed on the side of the second connecting rod (31), and a flexible clamping plate (39) is disposed on the side of the fixing seat (32) away from the second connecting rod (31).

2. The device for repairing the sealing surface of a semiconductor gas gate valve according to claim 1, wherein The sleeve (22) has a first groove (23) on its side, and a protrusion (24) is fixedly connected to the side of the first connecting rod (21). One end of the protrusion (24) extends into the inner cavity of the first groove (23), and one end of the protrusion (24) is slidably connected to the inner cavity of the first groove (23).

3. The device according to claim 1, wherein the device is characterized by: The top of the first support plate (25) is provided with a second groove (26), and one end of the support rod (27) extends into the inner cavity of the second groove (26), and one end of the support rod (27) is slidably connected to the inner cavity of the second groove (26).

4. The device for repairing the sealing surface of a semiconductor gas gate valve according to claim 1, characterized in that, The inner wall of the processing table (1) is fixedly connected to a second support plate (29), and a third groove (210) is provided on the top of the second support plate (29).

5. The device for repairing the sealing surface of a semiconductor gas gate valve according to claim 1, characterized in that, The top of the second connecting rod (31) is fixedly connected to a slider (33), the side of the slider (33) is slidably connected to the side of the fixed seat (32), and one end of the slider (33) is rotatably connected to a third connecting rod (34).

6. The device for repairing the sealing surface of a semiconductor gas gate valve according to claim 5, wherein One end of the third connecting rod (34) is rotatably connected to a fourth connecting rod (35), and the end of the fourth connecting rod (35) away from the third connecting rod (34) is rotatably connected to a mounting base (36). The bottom of the mounting base (36) is fixedly connected to the top of the fixed base (32).

7. The device for repairing the sealing surface of a semiconductor gas gate valve according to claim 5, wherein The side of the third connecting rod (34) is rotatably connected to a fifth connecting rod (37), and one end of the fifth connecting rod (37) is rotatably connected to a fixing block (38).

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