Small-size automatic opening and closing device for upper cover of crystal furnace

The automated opening and closing device driven by servo motors and reducers solves the problems of low opening and closing efficiency and safety hazards of traditional crystal furnace lids, achieving precise control and stable sealing, and improving the operational safety and efficiency of crystal furnaces.

CN224160745UActive Publication Date: 2026-04-24SUZHOU CHENGJUN SEMICONDUCTOR EQUIPMENT CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SUZHOU CHENGJUN SEMICONDUCTOR EQUIPMENT CO LTD
Filing Date
2025-05-28
Publication Date
2026-04-24

AI Technical Summary

Technical Problem

Traditional crystal furnaces have low efficiency in opening and closing the furnace lid and pose safety hazards. Manual operation can easily lead to burns and the seal is unstable.

Method used

An automated opening and closing device driven by a servo motor and reducer, combined with limit switches and sealing strips, enables precise control of the furnace cover's height and angle, automating the opening and closing process.

Benefits of technology

It improves the efficiency and safety of opening and closing the cover, enhances the sealing effect, and reduces safety hazards during operation.

✦ Generated by Eureka AI based on patent content.

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    Figure CN224160745U_ABST
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Abstract

The utility model relates to the field of crystal growth equipment, and discloses a small-size automatic opening and closing device for an upper cover of a crystal furnace, which comprises a hearth and a furnace cover, a fixing frame is mounted at the top end of the right side of the hearth, a stator is mounted at the top end of the fixing frame, a rotor is movably connected to the top end of the stator, and a cantilever is mounted at the top end of the rotor. A rotating servo motor and a speed reducer are installed on the right side of the top end of the cantilever, a motor support is installed on the left side of the top end of the cantilever, and a lifting servo motor and a speed reducer are installed on the motor support. According to the small-size automatic opening and closing device for the upper cover of the crystal furnace, the furnace cover is driven by the lifting servo motor and the speed reducer to move upwards to the position of the lower position limiting switch and then is stopped and self-locked, and then the servo motor and the speed reducer are rotated to drive the cantilever to rotate, so that the furnace cover is moved away from the top of a hearth to realize cover opening; the servo motor and the speed reducer are matched for driving, precise height control and angle control are achieved, and the problems that the cover opening efficiency is low and potential safety hazards exist are solved.
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Description

Technical Field

[0001] This utility model relates to the field of crystal growth equipment technology, specifically a small-volume automated opening and closing device for the top cover of a crystal furnace. Background Technology

[0002] A crystal furnace is an important piece of equipment with wide applications in the field of crystal growth. Specifically, it is a key tool for synthesizing crystalline materials. Precise temperature control and environmental parameters can be set inside the crystal furnace to simulate specific physical or chemical conditions to promote the growth of crystalline materials.

[0003] Traditional crystal furnaces often require manual opening and closing of the furnace lid during use. This process can easily cause burns to workers, and manual opening and closing is inefficient, leading to problems such as inaccurate sealing and unstable sealing.

[0004] There is an urgent need for a small-volume automated opening and closing device for the top cover of a crystal furnace to address the technical deficiencies mentioned above. Utility Model Content

[0005] The purpose of this invention is to provide a small-volume automated opening and closing device for the top cover of a crystal furnace, so as to solve the problems of low opening efficiency and safety hazards mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a small-volume automated opening and closing device for a crystal furnace cover, comprising a furnace chamber and a furnace cover. A fixed frame is installed at the top right side of the furnace chamber, a stator is installed at the top of the fixed frame, a rotor is movably connected to the top of the stator, a cantilever is installed at the top of the rotor, a rotary servo motor and a reducer are installed on the right side of the top of the cantilever, a motor bracket is installed on the left side of the top of the cantilever, a lifting servo motor and a reducer are installed on the motor bracket, the output end of the lifting servo motor and the reducer is connected to the top of the furnace cover, a lower position limit switch is installed at the top of the furnace cover, and an upper position limit switch is installed at the top of the cantilever.

[0007] As a further technical solution of this utility model, the output end of the rotary servo motor and reducer is connected to the rotor, and both the lifting servo motor and reducer and the rotary servo motor and reducer are externally connected to a controller.

[0008] As a further technical solution of this utility model, the top end of the lower position limit switch slides through the cantilever and is connected to the upper position limit switch in a sliding limit connection.

[0009] As a further technical solution of this utility model, an opening angle limit switch is installed on the right side of the stator, and the opening angle limit switch is a photoelectric angle limit switch.

[0010] As a further technical solution of this utility model, a cover-closing angle limit switch is installed on the left side of the rotor.

[0011] As a further technical solution of this utility model, a sealing groove is provided at the bottom of the furnace cover, and a sealing strip is installed inside the sealing groove.

[0012] Compared with the prior art, the beneficial effects of this utility model are: the small-volume automatic opening and closing device for the crystal furnace cover not only realizes the function of low opening and closing efficiency and enhances the sealing effect, but also reduces safety hazards.

[0013] (1) By setting up a lifting servo motor and reducer, an upper position limit switch, a cantilever, a rotary servo motor and reducer and a lower position limit switch, when the cover needs to be opened, the controller controls the lifting servo motor and reducer through the command. The lifting servo motor and reducer drive the furnace cover to move up to the position of the lower position limit switch and then stop and self-lock. Then the rotary servo motor and reducer drive the cantilever to rotate so that the furnace cover is moved from the top of the furnace to open the cover. Closing the cover is done in the reverse operation. The opening and closing of the cover are both automatic operations. The servo motor and reducer are used to drive the precise height and angle control, which not only has high work efficiency but is also safer and more precise.

[0014] (2) By setting up a furnace cover, lifting servo motor and reducer, sealing strip and sealing groove, during the closing process, the lifting servo motor and reducer can push the furnace cover down, and the sealing groove at the bottom of the furnace cover fits tightly against the top of the furnace chamber. The sealing strip installed inside the sealing groove can seal and protect the connection between the furnace cover and the furnace chamber. This structure achieves the function of enhancing the sealing effect through mechanical stable pressure and sealing fit.

[0015] (3) By setting a rotary servo motor and reducer, a lid closing angle limit switch and a lid opening angle limit switch, the rotary servo motor and reducer drive the cantilever to rotate so that the furnace lid moves away from the top of the furnace. When the rotary servo motor and reducer are rotating and adjusting, the lid closing angle limit switch and the lid opening angle limit switch can limit the position angle of the lid closing and opening, thereby enhancing the stability and safety of the lid opening and closing. The automated operation does not require manual assistance and reduces the safety hazards of operation. Attached Figure Description

[0016] Figure 1 This is a frontal three-dimensional structural diagram of the present invention;

[0017] Figure 2 This is a front view structural diagram of the present utility model;

[0018] Figure 3This is a bottom-view three-dimensional structural diagram of the present invention;

[0019] Figure 4 This is a schematic diagram of the furnace cover structure from below according to this utility model.

[0020] In the diagram: 1. Furnace chamber; 2. Furnace cover; 3. Motor bracket; 4. Lifting servo motor and reducer; 5. Upper position limit switch; 6. Cantilever; 7. Rotary servo motor and reducer; 8. Cover closing angle limit switch; 9. Rotor; 10. Cover opening angle limit switch; 11. Stator; 12. Lower position limit switch; 13. Fixing frame; 14. Sealing strip; 15. Sealing groove. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1-4 An embodiment of this utility model provides a small-volume automated opening and closing device for a crystal furnace cover, comprising a furnace chamber 1 and a furnace cover 2. A fixed frame 13 is installed at the top right side of the furnace chamber 1, a stator 11 is installed at the top of the fixed frame 13, a rotor 9 is movably connected to the top of the stator 11, a cantilever 6 is installed at the top of the rotor 9, a rotary servo motor and a reducer 7 are installed on the right side of the top of the cantilever 6, a motor bracket 3 is installed on the left side of the top of the cantilever 6, a lifting servo motor and a reducer 4 are installed on the motor bracket 3, the output end of the lifting servo motor and the reducer 4 is connected to the top of the furnace cover 2, a lower position limit switch 12 is installed at the top of the furnace cover 2, and an upper position limit switch 5 is installed at the top of the cantilever 6.

[0023] The output end of the rotary servo motor and reducer 7 is connected to the rotor 9. The lifting servo motor and reducer 4 and the rotary servo motor and reducer 7 are both connected to an external controller. The top of the lower position limit switch 12 slides through the cantilever 6 and is connected to the upper position limit switch 5 in a sliding limit connection.

[0024] Specifically, such as Figure 1 , Figure 2 and Figure 3 As shown, when the lid needs to be opened, the controller controls the lifting servo motor and reducer 4 through the command. The lifting servo motor and reducer 4 drive the furnace lid 2 to move up to the lower position limit switch 12 and then stop and self-lock. Then the rotation servo motor and reducer 7 drive the cantilever 6 to rotate so that the furnace lid 2 is moved away from the top of the furnace chamber 1 to open the lid. Closing the lid is done by reversing the operation.

[0025] A sealing groove 15 is provided at the bottom of the furnace cover 2, and a sealing strip 14 is installed inside the sealing groove 15;

[0026] Specifically, such as Figure 1 and Figure 4 As shown, during the closing process, the lifting servo motor and reducer 4 can push the furnace cover 2 downwards. The sealing groove 15 at the bottom of the furnace cover 2 fits tightly into the top of the furnace chamber 1. The sealing strip 14 installed inside the sealing groove 15 can seal and protect the connection between the furnace cover 2 and the furnace chamber 1.

[0027] An opening angle limit switch 10 is installed on the right side of the stator 11. The opening angle limit switch 10 is a photoelectric angle limit switch. A closing angle limit switch 8 is installed on the left side of the rotor 9.

[0028] Specifically, such as Figure 1 and Figure 2 As shown, the rotary servo motor and reducer 7 drive the cantilever 6 to rotate, thereby moving the furnace cover 2 away from the furnace chamber 1. When the rotary servo motor and reducer 7 rotates and adjusts, the closing angle limit switch 8 and the opening angle limit switch 10 can limit the position angle of the closing and opening of the cover, enhancing the stability and safety of opening and closing the cover. The automated operation does not require manual assistance, reducing the safety hazards of operation.

[0029] Working principle: During the opening operation, the lifting servo motor and reducer 4 start working after receiving the instruction, driving the furnace cover 2 to rise slowly away from the furnace chamber 1. When the height reaches the upper position limit switch 5, the lifting servo motor and reducer 4 stop working and self-lock. Then, the rotation servo motor and reducer 7 start working after receiving the instruction, driving the rotor 9, which drives the cantilever 6 and the furnace cover 2 to rotate to the opening angle limit switch 10. The rotation servo motor and reducer 7 then stop working and self-lock, thus completing the opening operation. The operation is reversed when closing the lid. When closing the lid, the rotary servo motor and reducer 7 start working upon receiving the command, driving the cantilever 6 and the furnace lid 2 to rotate until they stop and self-lock at the closing angle limit switch 8. Then, the lifting servo motor and reducer 4 start working upon receiving the command, driving the furnace lid 2 to descend until it stops and self-locks at the lower position limit switch 12, thus completing the lid closing operation. After the lid is closed, the furnace lid 2 fits tightly against the top of the furnace chamber 1. The sealing groove 15 and sealing strip 14 at the bottom of the furnace lid 2 can improve the sealing effect of the lid. Moreover, during the opening and closing process, the upper position limit switch 5 can limit the downward position of the lid, and the lower position limit switch 12 can limit the upward opening position. This structure uses a servo motor and reducer to drive the operation, achieving precise height and angle control, thus improving the efficiency and safety of opening and closing the lid.

[0030] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A small-volume automated opening and closing device for a crystal furnace lid, comprising a furnace chamber (1) and a furnace lid (2), characterized in that: A fixed frame (13) is installed at the top right side of the furnace chamber (1). A stator (11) is installed at the top of the fixed frame (13). A rotor (9) is movably connected to the top of the stator (11). A cantilever (6) is installed at the top of the rotor (9). A rotary servo motor and a reducer (7) are installed on the right side of the top of the cantilever (6). A motor bracket (3) is installed on the left side of the top of the cantilever (6). A lifting servo motor and a reducer (4) are installed on the motor bracket (3). The output end of the lifting servo motor and the reducer (4) is connected to the top of the furnace cover (2). A lower position limit switch (12) is installed at the top of the furnace cover (2). An upper position limit switch (5) is installed at the top of the cantilever (6).

2. The small-volume automated opening and closing device for the top cover of a crystal furnace according to claim 1, characterized in that: The output end of the rotary servo motor and reducer (7) is connected to the rotor (9), and both the lifting servo motor and reducer (4) and the rotary servo motor and reducer (7) are connected to an external controller.

3. The small-volume automated opening and closing device for the top cover of a crystal furnace according to claim 1, characterized in that: The top of the lower position limit switch (12) slides through the cantilever (6) and is connected to the upper position limit switch (5) in a sliding limit connection.

4. The small-volume automated opening and closing device for the top cover of a crystal furnace according to claim 1, characterized in that: The right side of the static element (11) is equipped with a cover opening angle limit switch (10), which is a photoelectric angle limit switch.

5. The small-volume automated opening and closing device for the top cover of a crystal furnace according to claim 1, characterized in that: A cover-closing angle limit switch (8) is installed on the left side of the rotor (9).

6. The small-volume automated opening and closing device for the top cover of a crystal furnace according to claim 1, characterized in that: The bottom end of the furnace cover (2) is provided with a sealing groove (15), and a sealing strip (14) is installed inside the sealing groove (15).