Vertical furnace pressure constant control device and vertical furnace

Abstract

The utility model provides a vertical furnace pressure constant control device and a vertical furnace, and relates to the field of semiconductor manufacturing. The pressure constant control device of the vertical furnace comprises a gas inlet pipeline and an adjusting assembly, the gas inlet pipeline is used for being connected with a reaction chamber of the vertical furnace, and the adjusting assembly is connected with the gas inlet pipeline and used for controlling the amount of gas entering the reaction chamber of the vertical furnace through the gas inlet pipeline, so that the pressure of the reaction chamber of the vertical furnace is constant. According to the pressure constant control device for the vertical furnace, the pressure of the reaction chamber of the vertical furnace can be more stably kept constant, the normal proceeding of a TEOS production process is ensured, and the problems that butterfly valves are stuck, the later maintenance cost is high, energy is wasted and fire hazards exist when the butterfly valves are used are solved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing, and more specifically, to a pressure constant control device for a vertical furnace and a vertical furnace. Background Technology

[0002] In semiconductor device manufacturing, the TEOS process is a crucial process. (TEOS, Tetraethyl Orthosilicate, is an organosilicon compound, also known as tetraethoxysilane.) The TEOS source solution is liquid at room temperature, but it needs to be in a gaseous state before entering the equipment. Because TEOS is composed of tetraethyl orthosilicate, its molecular formula is: It is a colorless liquid with a slight odor, a melting point of -77℃, a lightning strike point of 46℃, and a boiling point of 165.5℃. During its gaseous transport, strict requirements for temperature and vacuum are necessary.

[0003] Due to the vertical furnace structure, the temperature inside the reaction chamber is typically 600℃-700℃. TEOS, in a gaseous state, decomposes at high temperature, forming a dense TEOS layer on the silicon wafer surface. To ensure the uniformity of the chips inside the reaction chamber, the gas is usually in an oversaturated state. Some unreacted substances and other post-reaction materials enter the vacuum pipe and are expelled from the chamber. These unreacted and post-reaction materials, upon entering the vacuum pipe, experience a rapid temperature drop from the high temperature inside the reaction chamber, causing them to adhere to the inner wall of the vacuum pipe, forming a transparent product with a certain degree of hardness.

[0004] The TEOS production process requires operation under specific pressure, necessitating equipment capable of automatically maintaining constant pressure. Currently, TEOS equipment maintains constant pressure by installing butterfly valves inside the vacuum pipeline. By adjusting the opening and closing angle of the butterfly valves, the diameter of the vacuum pipeline is controlled, ensuring a constant pressure within the reaction chamber. However, since TEOS produces numerous byproducts, these byproducts adhere to and accumulate on the butterfly valves after a period of use, limiting the valve's opening angle. In severe cases, this can lead to the butterfly valve failing to close or open, causing the normal PM time of the vertical furnace to be advanced, resulting in production disruptions. Utility Model Content

[0005] To overcome the aforementioned shortcomings in the prior art, the purpose of this application is to provide a vertical furnace pressure constant control device and a vertical furnace. This vertical furnace pressure constant control device can more stably maintain a constant pressure in the reaction chamber of the vertical furnace, ensuring the normal operation of the TEOS production process, and overcomes the problems of butterfly valve jamming, high maintenance costs, energy waste, and fire hazards associated with using butterfly valves.

[0006] This utility model provides a pressure constant control device for a vertical furnace, used for constant pressure control of the reaction chamber of a vertical furnace. The pressure constant control device includes an air inlet pipe and an adjustment component. The air inlet pipe is connected to the reaction chamber of the vertical furnace, and the adjustment component is connected to the air inlet pipe to control the amount of gas entering the reaction chamber of the vertical furnace through the air inlet pipe, so as to keep the pressure of the reaction chamber of the vertical furnace constant.

[0007] Further, in an optional embodiment, the regulating component includes a pressure sensor and a pneumatic valve. The pressure sensor is disposed within the vertical furnace reaction chamber to acquire the internal pressure of the vertical furnace reaction chamber. The pneumatic valve is disposed within the air inlet pipe to control the air intake volume of the air inlet pipe. The pressure sensor is used to acquire the internal pressure of the vertical furnace reaction chamber, and the pneumatic valve is used to control the amount of gas entering the vertical furnace reaction chamber through the air inlet pipe. Based on the internal pressure of the vertical furnace reaction chamber acquired by the pressure sensor, the pneumatic valve can adjust the air intake volume of the air inlet pipe, thereby regulating and maintaining the pressure balance within the vertical furnace reaction chamber. In this embodiment of the invention, real-time dynamic regulation is achieved through the linkage of the pressure sensor and the pneumatic valve, ensuring a constant pressure in the vertical furnace reaction chamber.

[0008] Furthermore, in an optional embodiment, the regulating component further includes a gas flow meter disposed in the inlet pipe for controlling the gas flow rate. The gas flow meter can control the amount of gas entering the vertical furnace reaction chamber through the inlet pipe, thereby achieving pressure balance within the vertical furnace reaction chamber.

[0009] Furthermore, in an optional embodiment, the gas flow meter is a nitrogen flow meter. The gas introduced into the vertical furnace reaction chamber can be nitrogen, and the gas flow meter is a nitrogen flow meter.

[0010] Furthermore, in an optional embodiment, the regulating component further includes a pressure regulating valve, which is disposed in the air inlet pipe and adjacent to the air inlet, and the pneumatic valve is disposed between the pressure regulating valve and the gas flow meter, the pressure regulating valve being used to control the air pressure in the air inlet pipe.

[0011] Furthermore, in an optional embodiment, the regulating component further includes a one-way valve disposed in the intake pipe.

[0012] Furthermore, in an optional embodiment, the air intake pipe has a bent first air intake section and a second air intake section, wherein the first air intake section is close to the air inlet, the second air intake section is adjacent to the vertical furnace reaction chamber, the pressure regulating valve, the pneumatic valve and the gas flow meter are disposed in the first air intake section, and the one-way valve is disposed in the second air intake section.

[0013] Furthermore, in an optional embodiment, the intake pipe is a 1 / 4 pipe.

[0014] Secondly, this utility model provides a vertical furnace, including the vertical furnace pressure constant control device of any of the foregoing claims.

[0015] Furthermore, in an optional embodiment, the vertical furnace further includes a vacuum chain clamp, which is disposed on the outer wall of the reaction chamber of the vertical furnace.

[0016] In existing technologies, a butterfly valve is added to the vacuum pipeline to control the pressure inside the reaction chamber. The pressure inside the vacuum chamber is adjusted by changing the opening and closing angle of the butterfly valve to maintain a constant pressure. However, existing technologies have several drawbacks: First, the butterfly valve angle is set between 0 and 90°; exceeding this range results in inaccurate opening angles. Second, the TEOS reaction produces numerous byproducts, which accumulate on the butterfly valve over time, limiting its opening angle and potentially causing it to jam. Third, the butterfly valve consists of a valve body, motor, and encoder, increasing maintenance costs. Fourth, the internal heating element in the butterfly valve leads to energy waste and fire hazards with prolonged use. Compared to existing technologies, this application offers the following advantages: This invention uses an inlet pipeline and regulating components to control the pressure in the vertical furnace reaction chamber, ensuring a constant pressure. The pressure in the vertical furnace reaction chamber is maintained by introducing gas into it. The air inlet pipe is used to introduce gas into the reaction chamber of the vertical furnace. The regulating component is mainly used to control the amount of gas entering the reaction chamber, thereby maintaining a constant pressure within the reaction chamber and ensuring the normal operation of the TEOS production process. Because a butterfly valve is not used, the pressure in the reaction chamber can be maintained more stably, ensuring the normal operation of the TEOS production process. This also overcomes the problems associated with butterfly valves, such as valve jamming, high maintenance costs, energy waste, and fire hazards. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the structure of the vertical furnace reaction chamber and the vertical furnace pressure constant control device provided in the embodiments of this application;

[0019] Figure 2 A schematic diagram of the vertical furnace reaction chamber and the vertical furnace pressure constant control device provided in the embodiments of this application from another perspective;

[0020] Figure 3 This is a schematic diagram of the structure of the vertical furnace pressure constant control device provided in the embodiments of this application.

[0021] Icons: 100, Vertical furnace pressure constant control device; 110, Inlet pipe; 112, First inlet section; 114, Second inlet section; 120, Adjustment component; 122, Pneumatic valve; 123, Gas flow meter; 124, Pressure regulating valve; 125, Check valve; 200, Vertical furnace reaction chamber; 210, Vacuum chain clamp. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0024] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0025] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of the invention is in use. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0026] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0027] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0028] Please see Figures 1 to 3 This utility model provides a vertical furnace pressure constant control device 100 for constant pressure control of the vertical furnace reaction chamber 200. This vertical furnace pressure constant control device 100 can more stably maintain a constant pressure in the vertical furnace reaction chamber 200, ensuring the normal operation of the TEOS production process, and overcoming the problems of butterfly valve jamming, high maintenance costs, energy waste, and fire hazards associated with using butterfly valves.

[0029] like Figure 1 As shown, the vertical furnace pressure constant control device 100 includes an air inlet pipe 110 and an adjustment component 120. The air inlet pipe 110 is connected to the vertical furnace reaction chamber 200, and the adjustment component 120 is connected to the air inlet pipe 110 to control the amount of gas entering the vertical furnace reaction chamber 200 through the air inlet pipe, so as to keep the pressure of the vertical furnace reaction chamber 200 constant.

[0030] It should be noted that the vertical furnace pressure constant control device 100 provided in this embodiment does not use the butterfly valve in the prior art, thus overcoming many problems associated with the use of butterfly valves in the prior art. In the prior art, a butterfly valve is added to the vacuum pipeline to ensure constant pressure inside the reaction chamber. By adjusting the opening and closing angle of the butterfly valve, the pressure inside the vacuum chamber is adjusted to meet the constant pressure requirement. The objective disadvantages of the prior art are: First, the butterfly valve angle is set between 0 and 90°. If the set value exceeds this range, the butterfly valve opening angle cannot be accurate; Second, since the TEOS reaction produces a large number of products, after a period of use, the products will adhere to and accumulate on the butterfly valve, limiting the opening angle of the butterfly valve, and in severe cases, causing the butterfly valve to jam; Third, the butterfly valve consists of a valve body, motor, and encoder, etc., resulting in high maintenance costs; Fourth, the butterfly valve has a heating device inside, which leads to energy waste and fire hazards with long-term use. In this embodiment, the pressure of the vertical furnace reaction chamber 200 is controlled by the air inlet pipeline 110 and the regulating component 120 to keep the pressure constant. In this embodiment of the invention, the pressure in the vertical furnace reaction chamber 200 is maintained constant by introducing gas into the chamber. Specifically, the gas inlet pipe 110 is used to introduce gas into the vertical furnace reaction chamber 200, and the regulating component 120 is mainly used to control the amount of gas introduced into the chamber, thereby maintaining a constant pressure within the chamber and ensuring the normal operation of the TEOS production process. Because a butterfly valve is not used, the pressure in the vertical furnace reaction chamber 200 can be maintained more stably, ensuring the normal operation of the TEOS production process, and overcoming the problems associated with butterfly valves, such as valve jamming, high maintenance costs, energy waste, and fire hazards.

[0031] In an optional embodiment, the regulating component 120 includes a pressure sensor and a pneumatic valve 122. The pressure sensor is disposed inside the vertical furnace reaction chamber 200 to obtain the internal pressure of the vertical furnace reaction chamber 200, and the pneumatic valve 122 is disposed in the air inlet pipe 110 to control the air intake size of the air inlet pipe 110.

[0032] It should be noted that in this embodiment of the utility model, the pressure sensor is used to acquire the internal pressure of the vertical furnace reaction chamber 200, and the pneumatic valve 122 is used to control the amount of gas entering the vertical furnace reaction chamber 200 through the air inlet pipe 110. Based on the internal pressure of the vertical furnace reaction chamber 200 acquired by the pressure sensor, the pneumatic valve 122 can adjust the air intake volume of the air inlet pipe 110, thereby regulating and maintaining the pressure within the vertical furnace reaction chamber 200. In this embodiment of the utility model, real-time dynamic adjustment is achieved through the linkage of the pressure sensor and the pneumatic valve 122, ensuring a constant pressure in the vertical furnace reaction chamber 200.

[0033] In an optional embodiment, the regulating component 120 may further include a gas flow meter 123, which is disposed in the inlet pipe 110 and used to control the gas flow rate. The gas flow meter 123 can control the amount of gas entering the vertical furnace reaction chamber 200 through the inlet pipe 110, thereby achieving pressure balance within the vertical furnace reaction chamber 200.

[0034] Optionally, the gas introduced into the vertical furnace reaction chamber 200 can be nitrogen, and the gas flow meter 123 is a nitrogen flow meter.

[0035] Furthermore, in an optional embodiment, the regulating component 120 may further include a pressure regulating valve 124, which is disposed in the air intake pipe 110 and adjacent to the air inlet. A pneumatic valve 122 is disposed between the pressure regulating valve 124 and the gas flow meter 123. The pressure regulating valve 124 is used to control the air pressure in the air intake pipe 110. The pressure regulating valve 124 may be disposed in the air intake pipe 110 near the air inlet of the air intake pipe 110 to regulate the air pressure in the air intake pipe 110.

[0036] It should be noted that in this embodiment of the utility model, the butterfly valve in the prior art has been eliminated. For the gas flow meter 123 mentioned above, it and the pressure sensor can be added to control the flow meter flow using the PID algorithm of the original butterfly valve, so as to realize real-time dynamic adjustment and ensure constant pressure in the reaction chamber.

[0037] Furthermore, in an optional embodiment, the regulating assembly 120 further includes a one-way valve 125, which is located in the inlet pipe 110 near the vertical furnace reaction chamber 200, downstream of the gas flow meter 123. The one-way valve 125 prevents gas from flowing from the vertical furnace reaction chamber 200 into the inlet pipe 110.

[0038] like Figure 3 As shown, in this embodiment, the regulating component 120 includes a pressure sensor, a pressure regulating valve 124, a pneumatic valve 122, a gas flow meter 123, and a one-way valve 125. The pressure sensor is used to acquire the internal pressure of the vertical furnace reaction chamber 200. The pressure regulating valve 124 can be set near the air inlet of the air inlet pipe 110 to regulate the air pressure in the air inlet pipe 110. The pneumatic valve 122 is used to control the amount of gas entering the vertical furnace reaction chamber 200 through the air inlet pipe 110. The gas flow meter 123 can control the amount of gas entering the vertical furnace reaction chamber 200 through the air inlet pipe 110, thereby achieving pressure balance within the vertical furnace reaction chamber 200. The one-way valve 125 can prevent gas in the vertical furnace reaction chamber 200 from flowing back into the air inlet pipe 110.

[0039] Furthermore, in this embodiment, the air intake pipe 110 has a bent first air intake section 112 and a bent second air intake section 114. The first air intake section 112 is close to the air inlet, and the second air intake section 114 is adjacent to the vertical furnace reaction chamber 200. A pressure regulating valve 124, a pneumatic valve 122, and a gas flow meter 123 are located in the first air intake section 112, and a one-way valve 125 is located in the second air intake section 114. In other words, the air intake pipe 110 is in a bent form.

[0040] Optionally, in this embodiment, the air inlet pipe 110 can be a 1 / 4 pipe. The pipes in the vertical furnace reaction chamber 200 can be 40 pipes.

[0041] This utility model embodiment also provides a vertical furnace including the vertical furnace pressure constant control device 100 of any of the foregoing. The vertical furnace uses the aforementioned vertical furnace pressure constant control device 100 to control the pressure of the vertical furnace reaction chamber 200 at a constant level, instead of using a butterfly valve to control the pressure of the vertical furnace reaction chamber 200. This can more stably maintain the constant pressure of the vertical furnace reaction chamber 200, and overcome the problems of butterfly valve jamming, high maintenance costs, energy waste, and fire hazards that exist when using a butterfly valve.

[0042] Furthermore, in an optional embodiment, the vertical furnace also includes a vacuum chain clamp 210, which is disposed on the outer wall of the reaction chamber 200 of the vertical furnace for fixing the vertical furnace.

[0043] Please refer to the following: Figures 1 to 3 This utility model provides a vertical furnace pressure constant control device and a vertical furnace. The pressure in the vertical furnace reaction chamber 200 is controlled by an inlet pipe 110 and an adjusting component 120 to maintain a constant pressure, eliminating the need for a butterfly valve in existing technologies. The pressure in the vertical furnace reaction chamber 200 is maintained by introducing gas into it. The inlet pipe 110 is the pipe for introducing gas into the vertical furnace reaction chamber 200, and the adjusting component 120 is mainly used to control the amount of gas introduced into the vertical furnace reaction chamber 200, thereby maintaining a constant pressure within the vertical furnace reaction chamber 200 and ensuring the normal operation of the TEOS production process. Because a butterfly valve is not used, the pressure in the vertical furnace reaction chamber 200 can be maintained more stably, ensuring the normal operation of the TEOS production process, and overcoming the problems of butterfly valve jamming, high maintenance costs, energy waste, and fire hazards associated with butterfly valves.

[0044] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0045] The above descriptions are merely various embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A pressure constant control device for a vertical furnace, used for constant pressure control in the reaction chamber (200) of a vertical furnace, characterized in that, The vertical furnace pressure constant control device (100) includes an air inlet pipe (110) and an adjustment component (120). The air inlet pipe (110) is connected to the vertical furnace reaction chamber (200). The adjustment component (120) is connected to the air inlet pipe (110) and is used to control the amount of gas entering the vertical furnace reaction chamber (200) through the air inlet pipe so as to keep the pressure of the vertical furnace reaction chamber (200) constant.

2. The vertical furnace pressure constant control device according to claim 1, characterized in that, The regulating component (120) includes a pressure sensor and a pneumatic valve (122). The pressure sensor is located inside the vertical furnace reaction chamber (200) and is used to obtain the internal pressure of the vertical furnace reaction chamber (200). The pneumatic valve (122) is located in the air inlet pipe (110) and is used to control the air intake of the air inlet pipe (110).

3. The vertical furnace pressure constant control device according to claim 2, characterized in that, The regulating component (120) also includes a gas flow meter (123), which is disposed in the air inlet pipe (110) and is used to control the gas flow rate.

4. The vertical furnace pressure constant control device according to claim 3, characterized in that, The gas flow meter (123) is a nitrogen flow meter.

5. The vertical furnace pressure constant control device according to claim 3, characterized in that, The regulating component (120) further includes a pressure regulating valve (124), which is disposed in the air inlet pipe (110) and adjacent to the air inlet. The pneumatic valve (122) is disposed between the pressure regulating valve (124) and the gas flow meter (123). The pressure regulating valve (124) is used to control the air pressure of the air inlet pipe (110).

6. The vertical furnace pressure constant control device according to claim 5, characterized in that, The regulating assembly (120) also includes a one-way valve (125) disposed in the intake pipe (110).

7. The vertical furnace pressure constant control device according to claim 6, characterized in that, The air intake pipe (110) has a bent first air intake section (112) and a second air intake section (114), wherein the first air intake section (112) is close to the air inlet, the second air intake section (114) is adjacent to the vertical furnace reaction chamber (200), the pressure regulating valve (124), the pneumatic valve (122) and the gas flow meter (123) are located in the first air intake section (112), and the one-way valve (125) is located in the second air intake section (114).

8. The vertical furnace pressure constant control device according to any one of claims 1-7, characterized in that, The air intake pipe (110) is a 1 / 4 pipe.

9. A vertical furnace, characterized in that, Includes the vertical furnace pressure constant control device (100) as described in any one of claims 1-8.

10. The vertical furnace according to claim 9, characterized in that, The vertical furnace also includes a vacuum chain clamp (210), which is disposed on the outer wall of the reaction chamber (200) of the vertical furnace.

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