Push-pull device of wafer test fixture

Abstract

The utility model provides a push-pull device of a wafer test fixture, and relates to the technical field of wafer test. According to the utility model, the wafer test clamp is movably arranged on the frame body along the preset direction. The first driving piece is connected with the sliding assembly and used for driving the sliding assembly to move. The clamping assembly is installed on the sliding assembly and arranged to move along with the sliding assembly, and the clamping mechanism comprises a second driving piece connected with the clamping piece. Under the driving of the second driving piece, the clamping piece moves up and down in the vertical direction and can be matched with the limiting part in a limiting mode, and under the driving of the first driving piece, the clamping mechanism drives the wafer testing clamp to move in the preset direction. According to the technical scheme, the clamping piece of the clamping mechanism is matched with the limiting part of the wafer test fixture, the clamping mechanism can drive the wafer test fixture to move and can limit the wafer test fixture when moving along with the sliding assembly, the wafer test fixture is prevented from sliding, and the accuracy of the moving distance of the wafer test fixture can be improved.

Description

Technical Field

[0001] This utility model relates to the field of wafer testing technology, and in particular to a push-pull device for a wafer testing fixture. Background Technology

[0002] In the field of wafer testing technology, it is necessary to push wafer test fixtures containing the wafers under test into an aging test cabinet for aging testing. In existing technologies, this is typically done manually, or automatically. Automated methods exist, where the wafer test fixture is placed on a timing belt and then driven to move it into the aging test cabinet. However, the inability to position the wafer test fixture during this process causes it to slip, affecting the accuracy of its movement. Therefore, there is a pressing need for a push-pull device to prevent displacement of the wafer test fixture during this process. Utility Model Content

[0003] One objective of this invention is to provide a push-pull device for a wafer test fixture, which solves the technical problem that the wafer test fixture is prone to slippage during the process of being pushed into the aging test cabinet in the prior art.

[0004] A further objective of this invention is to increase the push stroke of the wafer test fixture.

[0005] Specifically, this utility model provides a push-pull device for a wafer testing fixture, wherein the bottom of the wafer testing fixture has at least one limiting portion, and the push-pull device includes:

[0006] The frame has a first mounting plate arranged in a horizontal direction, and the wafer test fixture is movably located on the frame in a preset direction;

[0007] A driving mechanism having a first driving member and a sliding component, wherein the first driving member is connected to the sliding component and is used to drive the sliding component to move;

[0008] A latching mechanism is mounted on the sliding assembly and configured to move with the sliding assembly. The latching mechanism includes a second driving member and a latching member. The second driving member is connected to the latching member. Under the drive of the second driving member, the latching member can move vertically up and down, thereby engaging with the limiting part. Under the drive of the first driving member, the latching mechanism can drive the wafer test fixture to move along the preset direction.

[0009] Optionally, the latching mechanism further includes:

[0010] A second mounting plate is connected to the sliding assembly, the second driving member is mounted on the second mounting plate, and the snap-fit ​​member is vertically retractable on the second mounting plate;

[0011] The first slide rail is mounted on the second mounting plate and is arranged along the moving direction of the sliding assembly;

[0012] A push rod is slidably mounted on the first slide rail and connected to the second drive member, the push rod having an inclined surface;

[0013] A clamping member is disposed on one side of the snap-fit ​​member; under the drive of the second driving member, the inclined surface abuts against the clamping member and moves relative to the clamping member to drive the clamping member to move vertically, thereby causing the snap-fit ​​member to move vertically.

[0014] Optionally, the push rod also has a horizontal plane located at one end of the inclined plane;

[0015] The push rod is configured to limit the abutment when it moves to the horizontal plane and abuts against the abutment, thereby limiting the locking member.

[0016] Optionally, the latching mechanism further includes:

[0017] An elastic element is vertically disposed between the second mounting plate and the snap-fit ​​element, with both ends of the elastic element connected or snapped to the second mounting plate and the snap-fit ​​element, respectively.

[0018] Optionally, the latching mechanism further includes:

[0019] The mounting component is connected to the second mounting plate. The mounting component has a limiting groove for limiting the snap-fit ​​member, and the abutment member is located outside the limiting groove.

[0020] Optionally, the inner wall of the limiting groove and the outer wall of the snap-fit ​​member are respectively provided with mutually cooperating movable limiting structures, which extend vertically to limit the moving direction of the snap-fit ​​member.

[0021] Optionally, the limiting part is hole-shaped, and the snap-fit ​​member is column-shaped.

[0022] Optionally, the frame includes two opposite and spaced-apart side panels, and the push-pull device further includes:

[0023] Two sets of rollers are respectively installed on two side plates. Each set of rollers includes multiple rollers arranged at intervals along the preset direction. The wafer test fixture is located on the rollers. Driven by the snap-fit ​​mechanism, the wafer test fixture moves along the roller set.

[0024] Optionally, the sliding component includes:

[0025] The second slide rail is mounted on the first mounting plate and extends along the preset direction;

[0026] The third slide rail is slidably mounted on the second slide rail and connected to the first drive member; the locking mechanism is slidably mounted on the third slide rail.

[0027] A pair of synchronized pulleys are mounted on the side of the third slide rail;

[0028] The conveyor belt is fitted onto the pair of synchronous pulleys.

[0029] A first connector is mounted on the first mounting plate and connected to the conveyor belt;

[0030] The second connector is connected to the snap-fit ​​mechanism and to the conveyor belt.

[0031] Optionally, the first driving component is a lead screw motion mechanism, which includes a motor, a lead screw, and a nut. The lead screw is arranged along the preset direction, and the nut is connected to the third slide rail.

[0032] In this invention, a wafer testing fixture is movably positioned on a frame along a preset direction. A first driving member is connected to a sliding component and is used to drive the sliding component to move. A latching component is mounted on the sliding component and configured to follow the sliding component's movement. The latching mechanism includes a second driving member connected to the latching component. Driven by the second driving member, the latching component can move vertically up and down, thereby engaging with a limiting part for positioning. Under the drive of the first driving member, the latching mechanism can drive the wafer testing fixture to move along the preset direction. This technical solution, by setting the latching component of the latching mechanism to engage with the limiting part of the wafer testing fixture, allows the latching mechanism to both drive the wafer testing fixture to move and limit its movement while following the sliding component, preventing slippage and improving the accuracy of the wafer testing fixture's movement distance.

[0033] Furthermore, in this utility model, the second slide rail of the sliding component is mounted on the first mounting plate, the third slide rail is slidably mounted on the second slide rail and connected to the first driving member, and the locking mechanism is slidably mounted on the third slide rail. A pair of synchronous pulleys are mounted on the side of the third slide rail. The conveyor belt is sleeved on the pair of synchronous pulleys. The first connecting member is mounted on the first mounting plate and connected to the conveyor belt. The second connecting member is connected to the locking mechanism and also connected to the conveyor belt. The above technical solution, through the cooperation of the second slide rail, the third slide rail, and the conveyor belt, can achieve a double-stroke pushing motion by adding the moving stroke of the third slide rail to the conveying stroke of the conveyor belt. Compared with a single-stroke motion mechanism, this reduces the number of structural components in the push-pull device, making the structure of the push-pull device more compact and avoiding the occupation of installation space.

[0034] The above and other objects, advantages and features of this utility model will become more apparent to those skilled in the art from the following detailed description of specific embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0035] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0036] Figure 1 This is a schematic structural diagram of a wafer testing fixture placed on a push-pull device according to an embodiment of the present invention;

[0037] Figure 2 This is a schematic structural diagram of a push-pull device according to an embodiment of the present invention;

[0038] Figure 3 This is a schematic structural diagram of a wafer testing fixture according to an embodiment of the present invention;

[0039] Figure 4 yes Figure 2 A schematic structural diagram of the driving mechanism and the locking mechanism shown;

[0040] Figure 5 This is a schematic structural diagram of a snap-fit ​​mechanism according to an embodiment of the present utility model;

[0041] Figure 6 This is a schematic partial cross-sectional view of a snap-fit ​​mechanism according to an embodiment of the present invention;

[0042] Figure 7 This is a schematic structural diagram of the first driving member according to an embodiment of the present utility model.

[0043] Figure label:

[0044] 100-Push-pull device, 200-Wafer test fixture, 210-Limiting part, 10-Frame, 11-First mounting plate, 12-Side plate, 20-Snap-fit ​​mechanism, 30-Drive mechanism, 40-Roller assembly, 21-Snap-fit ​​component, 22-Second mounting plate, 23-Second drive component, 24-Mounting component, 241-Limiting groove, 25-Clamping component, 26-Push rod, 261-Inclined surface, 262-Horizontal surface, 27-Elastic component, 28-Moving limiting joint Structure, 281-convex strip, 282-groove, 29-first slide rail, 31-first drive component, 311-motor, 312-lead screw, 313-nut, 314-drive wheel, 315-synchronous belt, 316-driven wheel, 32-sliding assembly, 321-conveyor belt, 322-second connector, 323-first connector, 324-second slide rail, 325-third slide rail, 326-synchronous wheel, 327-third connector, 41-roller. Detailed Implementation

[0045] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0046] In the description of this utility model, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0047] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature, that is, include one or more of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. When a feature "includes or contains" one or more of the features it encompasses, unless otherwise specifically described, this indicates that other features are not excluded and may be further included.

[0048] Unless otherwise expressly specified and limited, the terms "connection," "installation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art should be able to understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0049] Unless otherwise specified, all terms (including technical and scientific terms) used in the description of this embodiment have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0050] Figure 1 This is a schematic structural diagram of a wafer testing fixture 200 placed on a push-pull device 100 according to an embodiment of the present invention. Figure 2 This is a schematic structural diagram of a push-pull device 100 according to an embodiment of the present invention. Figure 3 This is a schematic structural diagram of a wafer testing fixture 200 according to an embodiment of the present invention. Figure 4 yes Figure 2 The schematic structural diagram of the drive mechanism 30 and the locking mechanism 20 is shown.

[0051] like Figures 1 to 4 As shown, in one specific embodiment, the wafer test fixture 200 has at least one limiting portion 210 at its bottom. The push-pull device 100 includes a frame 10, a drive mechanism 30, and a locking mechanism 20. The frame 10 has a first mounting plate 11 arranged horizontally, and the wafer test fixture 200 is movably located on the frame 10 in a preset direction. The drive mechanism 30 has a first drive member 31 and a sliding assembly 32, the first drive member 31 being connected to the sliding assembly 32 for driving the sliding assembly 32 to move. The locking mechanism 20 is mounted on the sliding assembly 32 and configured to follow the movement of the sliding assembly 32. The locking mechanism 20 includes a second drive member 23 and a locking member 21, the second drive member 23 being connected to the locking member 21. Driven by the second drive member 23, the locking member 21 can move vertically up and down, thereby engaging with the limiting portion 210 for limiting, and driven by the first drive member 31, the locking mechanism 20 can drive the wafer test fixture 200 to move in a preset direction. Here, the second drive element 23 is a cylinder. In other embodiments, the second drive element 23 may also be other drive components.

[0052] In this embodiment, by setting the snap-fit ​​part 21 of the snap-fit ​​mechanism 20 to cooperate with the limiting part 210 of the wafer test fixture 200, the snap-fit ​​mechanism 20 can both drive the wafer test fixture 200 to move and limit the wafer test fixture 200 when it moves with the sliding component 32, thus preventing the wafer test fixture 200 from sliding and improving the accuracy of the moving distance of the wafer test fixture 200.

[0053] In some embodiments, the limiting portion 210 is hole-shaped, and the snap-fit ​​member 21 is column-shaped. When the snap-fit ​​member 21 is inserted into the limiting portion 210, the snap-fit ​​mechanism 20 engages with the wafer test fixture 200. When the snap-fit ​​member 21 disengages from the limiting portion 210, the snap-fit ​​mechanism 20 separates from the wafer test fixture 200. In other embodiments, the limiting portion 210 and the snap-fit ​​member 21 can also be engaged by other mating methods, such as a hook structure.

[0054] Figure 5 This is a schematic structural diagram of the latching mechanism 20 according to an embodiment of the present invention. Figure 5 As shown, in some embodiments, the latching mechanism 20 further includes a second mounting plate 22, a first slide rail 29, a push rod 26, and a retaining member 25. The second mounting plate 22 is connected to the sliding assembly 32, the second driving member 23 is mounted on the second mounting plate 22, and the latching member 21 is vertically telescopically mounted on the second mounting plate 22. The first slide rail 29 is mounted on the second mounting plate 22 and arranged along the moving direction of the sliding assembly 32. The push rod 26 is slidably mounted on the first slide rail 29 and connected to the second driving member 23, and the push rod 26 has an inclined surface 261. The retaining member 25 is disposed on one side of the latching member 21. Driven by the second driving member 23, the inclined surface 261 abuts against the retaining member 25 and moves relative to the retaining member 25 to drive the retaining member 25 to move vertically, thereby causing the latching member 21 to move vertically. Here, the second driving member 23 is mounted on the second mounting plate 22 in a horizontal direction.

[0055] This embodiment achieves the vertical movement of the latching member 21 through the cooperation of the inclined surface 261 and the clamping member 25, which is equivalent to converting the horizontal force into the vertical force. This reduces the vertical arrangement space, making the latching mechanism 20 more compact. In addition, the freed-up vertical arrangement space can be used to arrange other components.

[0056] In some embodiments, the push rod 26 further has a horizontal surface 262 located at one end of the inclined surface 261. The push rod 26 is configured to limit the stop member 25 when it moves to abut against the stop member 25 at the horizontal surface 262, thereby limiting the locking member 21. That is, the horizontal surface 262 can limit the height of the locking member 21.

[0057] In some embodiments, the abutment 25 is a roller, which can roll when the push rod 26 moves, reducing the contact area between the abutment 25 and the push rod 26, thereby reducing friction.

[0058] Figure 6 This is a schematic partial cross-sectional view of the latching mechanism 20 according to an embodiment of the present invention. Figure 6 As shown, in some embodiments, the snap-fit ​​mechanism 20 further includes an elastic element 27, which is vertically disposed between the second mounting plate 22 and the snap-fit ​​member 21. Both ends of the elastic element 27 are connected to or snap-fitted to the second mounting plate 22 and the snap-fit ​​member 21, respectively. Here, the elastic element 27 is a spring.

[0059] This embodiment achieves the reset of the locking member 21 by setting the elastic element 27. When the push rod 26 is pushed away from the clamping member 25, the inclined surface 261 presses the clamping member 25 downward, and the elastic element 27 is in a compressed state. When the push rod 26 is pushed away from the clamping member 25, the elastic element 27 drives the clamping member 25 to reset, which in turn drives the locking member 21 to reset.

[0060] In some embodiments, the bottom of the snap-fit ​​member 21 is provided with a first mounting groove, and the top of the second mounting plate 22 is provided with a second mounting groove. The two ends of the elastic member 27 are respectively limited within the first mounting groove and the second mounting groove.

[0061] In some embodiments, the clamping member 25 is located below the horizontal plane 262 and at the highest point of the inclined plane 261. The inclined plane 261 extends downward from the horizontal plane 262. When the push rod 26 is pushed toward the clamping member 25, the inclined plane 261 presses the clamping member 25 downward, which is equivalent to causing the latching member 21 to move downward to disengage from the limiting portion 210 of the wafer test fixture 200. When the push rod 26 is pushed away from the clamping member 25, the clamping member 25 returns to its original position and abuts against the horizontal plane 262, causing the latching member 21 to move upward to engage with the limiting portion 210 of the wafer test fixture 200. It can be understood that the setting of the horizontal plane 262 can limit the height of the latching member 21.

[0062] In some embodiments, the latching mechanism 20 further includes a mounting member 24 connected to the second mounting plate 22. The mounting member 24 has a limiting groove 241 for limiting the latching member 21, and a clamping member 25 is located outside the limiting groove 241. The shape of the limiting groove 241 matches the shape of the latching member 21, that is, it can limit the latching member 21 without affecting the up and down movement of the latching member 21.

[0063] In a preferred embodiment, the inner wall of the limiting groove 241 and the outer wall of the snap-fit ​​member 21 are respectively provided with mutually cooperating movable limiting structures 28. The movable limiting structures 28 extend vertically, thereby limiting the movement direction of the snap-fit ​​member 21. Specifically, the movable limiting structure 28 includes a protrusion 281 and a groove 282, with the protrusion 281 being limited within the groove 282. When the snap-fit ​​member 21 moves vertically, the protrusion 281 moves up and down along the groove 282 to limit the snap-fit ​​member 21.

[0064] In some embodiments, the protrusion 281 is located on the inner wall of the limiting groove 241, and the groove 282 is disposed on the outer wall of the snap-fit ​​member 21. In other embodiments, the protrusion 281 may also be disposed on the outer wall of the snap-fit ​​member 21, and the groove 282 may be disposed on the inner wall of the limiting groove 241.

[0065] See Figure 1 and Figure 2 In some embodiments, the frame 10 includes two side plates 12 arranged opposite to each other and spaced apart. The push-pull device 100 also includes two sets of roller groups 40, which are respectively installed on the two side plates 12. Each set of roller groups 40 includes a plurality of rollers 41 arranged at intervals along a preset direction. The wafer test fixture 200 is located on the rollers 41. Driven by the snap-fit ​​mechanism 20, the wafer test fixture 200 moves along the roller groups 40. Here, the two sets of roller groups 40 are located above the drive mechanism 30, that is, the wafer test fixture 200 is located above the drive mechanism 30, the limiting part 210 is located at the bottom of the wafer test fixture 200, and the snap-fit ​​member 21 needs to move upward to snap into the limiting part 210 of the wafer test fixture 200. In other embodiments, the two sets of rollers 40 can also be located below the drive mechanism 30, and the wafer test fixture 200 is also located below the drive mechanism 30. The limiting part 210 is located on the top of the wafer test fixture 200, and can only engage with the limiting part 210 of the wafer test fixture 200 below by moving downward through the snap-fit ​​part 21. The two implementation methods can be determined according to specific design requirements.

[0066] In some embodiments, the sliding assembly 32 includes a second slide rail 324, a third slide rail 325, a pair of synchronous pulleys 326, a conveyor belt 321, a first connector 323, and a second connector 322. The second slide rail 324 is mounted on the first mounting plate 11 and extends in a predetermined direction. The third slide rail 325 is slidably mounted on the second slide rail 324 and connected to the first drive member 31. The locking mechanism 20 is slidably mounted on the third slide rail 325. The pair of synchronous pulleys 326 are mounted on the sides of the third slide rail 325. The conveyor belt 321 is sleeved on the pair of synchronous pulleys 326. The first connector 323 is mounted on the first mounting plate 11 and connected to the conveyor belt 321. The second connector 322 is connected to the locking mechanism 20 and to the conveyor belt 321.

[0067] This embodiment, through the cooperation of the second slide rail 324, the third slide rail 325 and the conveyor belt 321, can realize the pushing of double the stroke by adding the moving stroke of the third slide rail 325 to the conveying stroke of the conveyor belt 321. Compared with the single-stroke motion mechanism, the structural components of the push-pull device 100 can be reduced, making the structure of the push-pull device 100 more compact and avoiding occupying installation space.

[0068] In some embodiments, a first slider is mounted on the second slide rail 324, and the first slider is movable relative to the second slide rail 324. A third slide rail 325 is mounted on the second slider. The second slide rail 324 is mounted on the third slide rail 325, and a second mounting plate 22 is mounted on the second slide rail 324.

[0069] Figure 7 This is a schematic structural diagram of the first driving member 31 according to an embodiment of the present invention. Figure 7 As shown, and see Figure 4 In some embodiments, the first driving member 31 is a lead screw motion mechanism, which includes a motor 311, a lead screw 312, and a nut 313. The lead screw 312 is arranged along a preset direction, and the nut 313 is connected to the third slide rail 325. Here, the nut 313 is connected to the third slide rail 325 through a third connector 327.

[0070] In some embodiments, the motor 311 is mounted on the side of the lead screw 312, and the first drive member 31 further includes a transmission assembly connected to the motor 311 and the lead screw 312 for transmitting the output power of the motor 311 to the lead screw 312.

[0071] Specifically, the transmission assembly includes a drive pulley 314, a driven pulley 316, and a timing belt 315. The drive pulley 314 is mounted on the output shaft of the motor 311, the driven pulley 316 is mounted on the lead screw 312, and the timing belt 315 is mounted on the drive pulley 314 and the driven pulley 316.

[0072] In this embodiment, the motor 311 is installed on the side of the lead screw 212, and then the power is transmitted through the transmission assembly. The space at the end of the lead screw 312 can be reserved for the installation of other components or for the collection of cables.

[0073] When the motor 311 rotates, it sequentially transmits power to the drive pulley 314, the synchronous belt 315, the driven pulley 316, and the lead screw 312. The rotation of the lead screw 312 causes the nut 313 to move relative to it. Since the nut 313 is connected to the third slide rail 325, it causes the third slide rail 325 to slide relative to the second slide rail 324. Because the conveyor belt 321 and a pair of synchronous pulleys 326 are mounted on the third slide rail 325, and the conveyor belt 321 is mounted on the first mounting plate 11 via the first connector 323, the conveyor belt 321 also moves while the third slide rail 325 slides. Since the clamping mechanism 20 is connected to the conveyor belt 321 via the second connector 322, the conveyor belt 321 causes the clamping mechanism 20 to slide relative to the third slide rail 325, thus achieving double the travel distance and enabling the wafer testing fixture 200 to move double the travel distance.

[0074] Therefore, those skilled in the art should recognize that although many exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications conforming to the principles of the present invention can be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A push-pull device for a wafer testing fixture, characterized in that, The bottom of the wafer testing fixture has at least one limiting portion, and the push-pull device includes: The frame has a first mounting plate arranged in a horizontal direction, and the wafer test fixture is movably located on the frame in a preset direction; A driving mechanism having a first driving member and a sliding component, wherein the first driving member is connected to the sliding component and is used to drive the sliding component to move; A latching mechanism is mounted on the sliding assembly and configured to move with the sliding assembly. The latching mechanism includes a second driving member and a latching member. The second driving member is connected to the latching member. Under the drive of the second driving member, the latching member can move vertically up and down, thereby engaging with the limiting part. Under the drive of the first driving member, the latching mechanism can drive the wafer test fixture to move along the preset direction.

2. The push-pull device according to claim 1, characterized in that, The snap-fit ​​mechanism also includes: A second mounting plate is connected to the sliding assembly, the second driving member is mounted on the second mounting plate, and the snap-fit ​​member is vertically retractable on the second mounting plate; The first slide rail is mounted on the second mounting plate and is arranged along the moving direction of the sliding assembly; A push rod is slidably mounted on the first slide rail and connected to the second drive member, the push rod having an inclined surface; A clamping member is disposed on one side of the snap-fit ​​member; under the drive of the second driving member, the inclined surface abuts against the clamping member and moves relative to the clamping member to drive the clamping member to move vertically, thereby causing the snap-fit ​​member to move vertically.

3. The push-pull device according to claim 2, characterized in that, The push rod also has a horizontal surface, which is located at one end of the inclined surface; The push rod is configured to limit the abutment when it moves to the horizontal plane and abuts against the abutment, thereby limiting the locking member.

4. The push-pull device according to claim 3, characterized in that, The snap-fit ​​mechanism also includes: An elastic element is vertically disposed between the second mounting plate and the snap-fit ​​element, with both ends of the elastic element connected or snapped to the second mounting plate and the snap-fit ​​element, respectively.

5. The push-pull device according to claim 4, characterized in that, The snap-fit ​​mechanism also includes: The mounting component is connected to the second mounting plate. The mounting component has a limiting groove for limiting the snap-fit ​​member, and the abutment member is located outside the limiting groove.

6. The push-pull device according to claim 5, characterized in that, The inner wall of the limiting groove and the outer wall of the snap-fit ​​member are respectively provided with mutually cooperating movable limiting structures. The movable limiting structures extend vertically, thereby limiting the moving direction of the snap-fit ​​member.

7. The push-pull device according to any one of claims 1-6, characterized in that, The limiting part is hole-shaped, and the snap-fit ​​part is column-shaped.

8. The push-pull device according to any one of claims 1-6, characterized in that, The frame includes two side panels arranged opposite each other and spaced apart, and the push-pull device further includes: Two sets of rollers are respectively installed on two side plates. Each set of rollers includes multiple rollers arranged at intervals along the preset direction. The wafer test fixture is located on the rollers. Driven by the snap-fit ​​mechanism, the wafer test fixture moves along the roller set.

9. The push-pull device according to any one of claims 1-6, characterized in that, The sliding component includes: The second slide rail is mounted on the first mounting plate and extends along the preset direction; The third slide rail is slidably mounted on the second slide rail and connected to the first drive member; the locking mechanism is slidably mounted on the third slide rail. A pair of synchronized pulleys are mounted on the side of the third slide rail; The conveyor belt is fitted onto the pair of synchronous pulleys. A first connector is mounted on the first mounting plate and connected to the conveyor belt; The second connector is connected to the snap-fit ​​mechanism and to the conveyor belt.

10. The push-pull device according to claim 9, characterized in that, The first driving component is a lead screw motion mechanism, which includes a motor, a lead screw, and a nut. The lead screw is arranged along the preset direction, and the nut is connected to the third slide rail.

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