Multi-station tool clamp for cleaning crystal disc

Abstract

The utility model discloses a multi-station tool clamp for cleaning a crystal disc, which belongs to the technical field of cleaning equipment and comprises two vertical rods and a horizontal plate connected with the bottom ends of the two vertical rods. Two clamp seat sheets are arranged in the middle of the top surface of the horizontal plate; an arc-shaped groove is formed in each clamp seat sheet; a top support and a bottom support are arranged on each clamp seat sheet; the top arc grooves and the bottom arc grooves in the clamp seat pieces pass through an arc line parallel to the front side faces of the two vertical rods. A handle is arranged on each vertical rod; the two clamp seat pieces are connected through two top longitudinal rotating shafts and two bottom longitudinal rotating shafts, top ring grooves in the front ends of the top longitudinal rotating shafts and bottom ring grooves in the front ends of the bottom longitudinal rotating shafts, and top ring grooves in the rear ends of the top longitudinal rotating shafts and bottom ring grooves in the rear ends of the bottom longitudinal rotating shafts pass through arc lines parallel to the front side faces of the two vertical rods respectively. The utility model provides a plurality of crystal disc cleaning stations, which can adapt to crystal discs with different sizes.

Description

Technical Field

[0001] This invention relates to the field of cleaning equipment technology, specifically to a multi-station tooling fixture for cleaning crystal disks. Background Technology

[0002] During the manufacturing process, wafer disks accumulate organic matter and particulate contaminants on their surface, necessitating cleaning. Existing technologies, such as the wafer basket loading trays disclosed in patents CN215834504U, CN215299205U, and CN219738926U, involve placing the wafers into the cleaning tank of a cleaning machine for cleaning. However, the wafer sizes requiring cleaning often vary, necessitating a specific size cleaning basket for each size, resulting in a lack of versatility and inconvenient operation. Summary of the Invention

[0003] The purpose of this invention is to address the shortcomings of existing technologies by providing a multi-station tooling fixture for cleaning crystal disks, which is adaptable to crystal disks of different sizes.

[0004] The technical solution adopted in this utility model is as follows.

[0005] A multi-station fixture for cleaning crystal disks is characterized by: two uprights and a horizontal plate connected to the bottom ends of the two uprights; clamping plates are provided laterally at the front and rear ends of the top surface of the horizontal plate; each clamping plate has an upward-opening arc-shaped groove; each clamping plate has a top support at the left and right top ends and a bottom support at the middle of the bottom end, each top support has a top arc groove and each bottom support has a bottom arc groove; the top arc groove and the bottom arc groove are tangent to the same arc and the plane of the arc is parallel to the front side of the horizontal plate; each upright has a handle at the top end of its side near the other upright.

[0006] The two clamping plates are connected by two top longitudinal rotating shafts and two bottom longitudinal rotating shafts, which are symmetrical about the center of the arc-shaped groove. Each top longitudinal rotating shaft has a top ring groove at both the front and rear ends, and each bottom longitudinal rotating shaft has a bottom ring groove at both the front and rear ends. The top ring groove at the front end of each top longitudinal rotating shaft and the bottom ring groove at the front end of each bottom longitudinal rotating shaft, and the top ring groove at the rear end of each top longitudinal rotating shaft and the bottom ring groove at the rear end of each bottom longitudinal rotating shaft, respectively pass through a plane parallel to the front side of the two uprights and are located on an arc line, and the plane containing the arc line is parallel to the front side of the two uprights.

[0007] The beneficial effects of this utility model are as follows: the top arc grooves of the top supports and the bottom arc grooves of the bottom supports located on the side of the same fixture base are tangent to the same arc, and the plane containing the arc is parallel to the front side of the two uprights; thus, a larger crystal disk can be placed in the top arc grooves of the top supports and the bottom arc grooves of the bottom supports located on the side of the same fixture base. This allows for the simultaneous cleaning of crystal disks of different sizes, resulting in good device versatility. Each fixture base has an upward-opening arc-shaped groove, ensuring free flow of cleaning fluid between two crystal disks and achieving good cleaning effect. The top ring groove at the front end of each top longitudinal rotation shaft and the bottom ring groove at the front end of each bottom longitudinal rotation shaft pass through a plane parallel to the front side of the two uprights and are located on an arc, allowing for the placement of a smaller crystal disk. Two handles are provided for easy hanging and lifting of tooling fixtures.

[0008] As a preferred technical solution, each upright has a fixing protrusion on its side away from the other upright. This design facilitates positioning and fixing of the tooling fixture when it is placed into the cleaning tank of the cleaning machine.

[0009] As a preferred technical solution, the two fixed protrusions are symmetrical.

[0010] As a preferred technical solution, each clamp seat is connected to the horizontal plate with screws.

[0011] As a preferred technical solution, each clamping plate has a top support on the left top edge away from the other clamping plate and a bottom support on the middle of the bottom edge away from the other clamping plate.

[0012] As a preferred technical solution, the fixture base is a ceramic fixture base, the bottom support is a ceramic bottom support, the top support is a ceramic top support, the top longitudinal rotation shaft is a ceramic top longitudinal rotation shaft, and the bottom longitudinal rotation shaft is a ceramic bottom longitudinal rotation shaft.

[0013] This technical solution makes the tooling fixtures more resistant to cleaning fluid corrosion.

[0014] As a preferred technical solution, a middle support is movably connected between the top support and the bottom support on the side of each clamping plate away from the other clamping plate. The middle support is provided with a middle support wafer support arc groove. The top arc groove of each top support, the wafer support arc groove of each middle support, and the bottom arc groove of each bottom support located on the side of the same clamping plate are tangent to the same arc line, and the plane where the arc line is located is parallel to the front side of the two uprights.

[0015] Using this technical solution, a crystal disk can be placed between the support wafer support arc grooves of the two supports on each fixture plate.

[0016] As a preferred technical solution, two adjacent intermediate supports are connected in the longitudinal direction by longitudinal connecting blocks; each longitudinal connecting block has a longitudinal connecting block wafer support arc groove at its front and rear ends; the top ring groove at the front end of each top longitudinal rotating shaft, the bottom ring groove at the front end of each bottom longitudinal rotating shaft, and the longitudinal connecting block wafer support arc groove at the front end of each longitudinal connecting block pass through a plane parallel to the front side of the two uprights and are located on an arc; the top ring groove at the rear end of each top longitudinal rotating shaft, the bottom ring groove at the rear end of each bottom longitudinal rotating shaft, and the longitudinal connecting block wafer support arc groove at the rear end of each longitudinal connecting block are tangent to the same arc and the plane where the arc is located is parallel to the front side of the two uprights.

[0017] Using this technical solution, a crystal disk can be placed between the top ring groove at the rear end of each top longitudinal rotating shaft, the bottom ring groove at the rear end of each bottom longitudinal rotating shaft, and the wafer support arc groove at the rear end of each longitudinal connecting block.

[0018] As a preferred technical solution, each clamping plate is connected to the side of another clamping plate by two top longitudinal rotation shafts and two bottom longitudinal rotation shafts. The two top longitudinal rotation shafts and two bottom longitudinal rotation shafts are symmetrical about the center of the arc-shaped groove. Each top longitudinal rotation shaft is located between the left top end of the two clamping plates and the right top end of the two clamping plates. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of a preferred embodiment of the multi-station tooling clamp for cleaning crystal disks according to this utility model.

[0020] Figure 2 yes Figure 1 A magnified view of part A.

[0021] Figure 3 yes Figure 1 A magnified view of part B.

[0022] Figure 4 yes Figure 1 The image shows a top view of a multi-station tooling fixture for cleaning crystal disks.

[0023] Figure 5 yes Figure 4 A magnified view of part C.

[0024] Figure 6 yes Figure 4 The diagram shows a usage state of a multi-station tooling fixture for disk cleaning.

[0025] Figure 7 yes Figure 6 A magnified view of part D.

[0026] Figure 8 This is a schematic diagram of a preferred embodiment of the multi-station tooling clamp for cleaning crystal disks according to this utility model.

[0027] Figure 9 yes Figure 8 A magnified view of part E.

[0028] Figure 10 yes Figure 8 A magnified view of part F.

[0029] Figure 11 yes Figure 8 The image shows a top view of a multi-station tooling fixture for cleaning crystal disks.

[0030] Figure 12 yes Figure 11 A magnified view of part G.

[0031] Figure 13 yes Figure 8 The diagram shows a usage state of a multi-station tooling fixture for disk cleaning.

[0032] Figure 14 yes Figure 13 A magnified view of part H.

[0033] Among them: horizontal plate-1; vertical pole-11; handle-12; fixed protrusion-13;

[0034] Clamp base plate-2; Arc-shaped groove-21;

[0035] Top support-3; Top arc groove-31;

[0036] Bottom support-4; Bottom arc groove-41;

[0037] Top longitudinal rotation shaft -5; Top ring groove -51; Bottom longitudinal rotation shaft -52; Bottom ring groove -53;

[0038] Center support-6; Center support wafer support arc groove-61;

[0039] Longitudinal connecting block-7; Longitudinal connecting block wafer support arc groove-71;

[0040] Crystal disk-8. Detailed Implementation

[0041] The present invention will now be further described in conjunction with the accompanying drawings and embodiments.

[0042] Example 1. As... Figure 1-7As shown, a multi-station tooling fixture for cleaning crystal disks is characterized by: two uprights 11 and a horizontal plate 1 connected to the bottom ends of the two uprights 11; clamping plates 2 are provided laterally at the front and rear ends of the top surface of the horizontal plate 1; each clamping plate 2 is provided with an upward-opening arc-shaped groove 21; each clamping plate 2 is provided with a top support 3 at the left and right top ends and a bottom support 4 at the bottom center; each top support 3 is provided with a top arc groove 31 and the bottom support 4 is provided with a bottom arc groove 41, wherein the top arc groove 31 and the bottom arc groove 41 are tangent to the same arc and the plane of the arc is parallel to the front side of the horizontal plate 1; and a handle 12 is provided at the top end of the side of each upright 11 near the other upright 11.

[0043] The two clamping plates 2 are connected by two top longitudinal rotating shafts 5 and two bottom longitudinal rotating shafts 52. The two top longitudinal rotating shafts 5 and the two bottom longitudinal rotating shafts 52 are symmetrical about the center of the arc-shaped groove 21. Each top longitudinal rotating shaft 5 has a top ring groove 51 at its front and rear ends, and each bottom longitudinal rotating shaft 52 has a bottom ring groove 53 at its front and rear ends. The top ring groove 51 at the front end of each top longitudinal rotating shaft 5 and the bottom ring groove 53 at the front end of each bottom longitudinal rotating shaft 52, and the top ring groove 51 at the rear end of each top longitudinal rotating shaft 5 and the bottom ring groove 53 at the rear end of each bottom longitudinal rotating shaft 5, respectively pass through a plane parallel to the front side of the two uprights 11 and are located on an arc line, and the plane where the arc line is located is parallel to the front side of the two uprights 11.

[0044] Each upright 11 has a fixing protrusion 13 on its side away from the other upright 11. This technical solution facilitates positioning and fixing of the tooling fixture when it is placed into the cleaning tank of the cleaning machine. The two fixing protrusions 13 are symmetrical.

[0045] Each clamp seat 2 is screwed to the horizontal plate 1.

[0046] Each clamping plate 2 has a top support 3 on the left top edge away from the other clamping plate 2 and on the left top edge away from the other clamping plate 2 respectively; and a bottom support 4 is provided on the middle bottom edge of each clamping plate 2 away from the other clamping plate 2 respectively.

[0047] The fixture base is a ceramic fixture base, the bottom support 4 is a ceramic bottom support 4, the top support 3 is a ceramic top support 3, the top longitudinal rotation shaft 5 is a ceramic top longitudinal rotation shaft 5, and the bottom longitudinal rotation shaft 52 is a ceramic bottom longitudinal rotation shaft 52. Using this technical solution, the tooling fixture can be made more resistant to cleaning fluid corrosion.

[0048] Each clamping plate 2 is connected to the side of the other clamping plate 2 by two top longitudinal rotation shafts 5 and two bottom longitudinal rotation shafts 52. The two top longitudinal rotation shafts 5 and the two bottom longitudinal rotation shafts 52 are symmetrical about the center of the arc-shaped groove 21. Each top longitudinal rotation shaft 5 is located between the left top end of the two clamping plates 2 and the right top end of the two clamping plates 2.

[0049] like Figure 6-7As shown, the top arc groove 31 of each top support 3 and the bottom arc groove 41 of each bottom support 4 located on the side of the same fixture base 2 are tangent to the same arc, and the plane of the arc is parallel to the front side of the two uprights 11; a larger crystal disk 8 can be placed in the top arc groove 31 of each top support 3 and the bottom arc groove 41 of each bottom support 4 located on the side of the same fixture base 2. Crystal disks of different sizes can be cleaned simultaneously, and the device has good versatility. Each fixture base 2 is provided with an upward-opening arc-shaped groove 21, which ensures that the cleaning liquid can flow freely between the two crystal disks, resulting in good cleaning effect. The top ring groove 51 at the front end of each top longitudinal rotation shaft 5 and the bottom ring groove 53 at the front end of each bottom longitudinal rotation shaft 52 pass through a plane parallel to the front side of the two uprights 11 and are located on an arc, which can accommodate a smaller crystal disk 8. Two handles 12 are provided for easy hanging of tooling fixtures. The diameter of the crystal disk is 130-200mm and the thickness is 6-14mm.

[0050] Example 2. (As shown) Figure 8-14 As shown, a middle support 6 is movably connected between the top support 3 and the bottom support 4 on the side of each clamping plate 2 away from the other clamping plate 2. The middle support 6 is provided with a middle support wafer support arc groove 61. The top arc groove 31 of each top support 3, the wafer support arc groove 61 of each middle support, and the bottom arc groove 41 of each bottom support 4 on the same side of the clamping plate 2 are tangent to the same arc line, and the plane of the arc line is parallel to the front side of the two uprights 11. A crystal disk 8 can be placed between the support wafer support arc grooves 61 of the two middle supports 6 on each clamping plate 2.

[0051] Two adjacent longitudinal supports 6 are connected by longitudinal connecting blocks 7; each longitudinal connecting block 7 has a wafer support arc groove 71 at its front and rear ends; the top ring groove 51 at the front end of each top longitudinal rotating shaft 5, the bottom ring groove 53 at the front end of each bottom longitudinal rotating shaft 52, and the wafer support arc groove 71 at the front end of each longitudinal connecting block 7 pass through a plane parallel to the front side of the two uprights 11 and are located on an arc; the top ring groove 51 at the rear end of each top longitudinal rotating shaft 5, the bottom ring groove 53 at the rear end of each bottom longitudinal rotating shaft 52, and the wafer support arc groove 71 at the rear end of each longitudinal connecting block 7 are tangent to the same arc, and the plane containing the arc is parallel to the front side of the two uprights 11. A wafer disk 8 of another size can be placed between the top ring groove 51 at the rear end of each top longitudinal rotating shaft 5, the bottom ring groove 53 at the rear end of each bottom longitudinal rotating shaft 52, and the wafer support arc groove 71 at the rear end of each longitudinal connecting block 7.

[0052] The embodiments listed above are for understanding the present utility model only and are not intended to limit the technical solutions described herein. Those skilled in the art can make various changes or modifications, and all equivalent changes or modifications should be covered within the protection scope of the present utility model. Any aspects not detailed in the present utility model are well-known to those skilled in the art.

Claims

1. A multi-station tooling fixture for cleaning crystal disks, characterized in that: It includes two uprights (11) and a horizontal plate (1) connected to the bottom of the two uprights (11); the horizontal plate (1) has clamp seats (2) at the front and rear ends of the top surface of the horizontal plate (1); each clamp seat (2) has an arc-shaped groove (21) with an upward opening; each clamp seat (2) has a top support (3) at the top left and right ends and a bottom support (4) at the middle of the bottom end; each top support (3) has a top arc groove (31) and a bottom arc groove (41) on the bottom support (4); the top arc groove (31) and the bottom arc groove (41) are tangent to the same arc and the plane of the arc is parallel to the front side of the horizontal plate (1); each upright (11) has a handle (12) at the top of the side of the upright (11) near the other upright (11). The two clamping plates (2) are connected by two top longitudinal rotating shafts (5) and two bottom longitudinal rotating shafts (52). The two top longitudinal rotating shafts (5) and two bottom longitudinal rotating shafts (52) are symmetrical about the center of the arc-shaped groove (21). Each top longitudinal rotating shaft (5) has a top ring groove (51) at both the front and rear ends, and each bottom longitudinal rotating shaft (52) has a bottom ring groove (53) at both the front and rear ends. The top ring groove (51) at the front end of each top longitudinal rotating shaft (5) and the bottom ring groove (53) at the front end of each bottom longitudinal rotating shaft (52), and the top ring groove (51) at the rear end of each top longitudinal rotating shaft (5) and the bottom ring groove (53) at the rear end of each bottom longitudinal rotating shaft (52) pass through a plane parallel to the front side of the two uprights (11) and are located on an arc line, and the plane where the arc line is located is parallel to the front side of the two uprights (11).

2. The multi-station tooling fixture for crystal disk cleaning as described in claim 1, characterized in that: Each upright (11) has a fixed protrusion (13) on the side away from the other upright (11).

3. The multi-station tooling fixture for crystal disk cleaning as described in claim 2, characterized in that: The two fixed protrusions (13) are symmetrical.

4. The multi-station tooling fixture for crystal disk cleaning as described in claim 1, characterized in that: Each clamp seat plate (2) is screwed to the horizontal plate (1).

5. The multi-station tooling fixture for crystal disk cleaning as described in claim 1, characterized in that: Each clamping plate (2) has a top support (3) on the left top edge away from the other clamping plate (2) and a bottom support (4) on the left top edge away from the other clamping plate (2).

6. The multi-station tooling fixture for crystal disk cleaning as described in claim 1, characterized in that: The fixture seat is a ceramic fixture seat, the bottom support (4) is a ceramic bottom support (4), the top support (3) is a ceramic top support (3), the top longitudinal rotation shaft (5) is a ceramic top longitudinal rotation shaft (5), and the bottom longitudinal rotation shaft (52) is a ceramic bottom longitudinal rotation shaft (52).

7. The multi-station tooling fixture for crystal disk cleaning as described in claim 1, characterized in that: A middle support (6) is movably connected between the top support (3) and the bottom support (4) on the side of each clamping plate (2) away from the other clamping plate (2). The middle support (6) is provided with a middle support wafer support arc groove (61). The top arc groove (31) of each top support (3), the middle support wafer support arc groove (61), and the bottom arc groove (41) of each bottom support (4) on the side of the same clamping plate (2) are tangent to the same arc and the plane of the arc is parallel to the front side of the two uprights (11).

8. The multi-station tooling fixture for crystal disk cleaning as described in claim 7, characterized in that: Two adjacent intermediate supports (6) are connected by longitudinal connecting blocks (7); each longitudinal connecting block (7) has a longitudinal connecting block wafer support arc groove (71) at its front and rear ends; the top ring groove (51) at the front end of each top longitudinal rotating shaft (5), the bottom ring groove (53) at the front end of each bottom longitudinal rotating shaft (52), and the longitudinal connecting block wafer support arc groove (71) at the front end of each longitudinal connecting block (7) pass through a plane parallel to the front side of the two uprights (11) and are located on an arc; the top ring groove (51) at the rear end of each top longitudinal rotating shaft (5), the bottom ring groove (53) at the rear end of each bottom longitudinal rotating shaft (52), and the longitudinal connecting block wafer support arc groove (71) at the rear end of each longitudinal connecting block (7) are tangent to the same arc and the plane where the arc is located is parallel to the front side of the two uprights (11).

9. The multi-station tooling fixture for crystal disk cleaning as described in claim 1, characterized in that: Each clamping plate (2) is connected to the side of another clamping plate (2) by two top longitudinal rotation shafts (5) and two bottom longitudinal rotation shafts (52). The two top longitudinal rotation shafts (5) and two bottom longitudinal rotation shafts (52) are symmetrical about the center of the arc groove (21). Each top longitudinal rotation shaft (5) is located between the left top end of the two clamping plates (2) and the right top end of the two clamping plates (2). Each clamping plate (2) has a top support (3) on the left and right top edges away from the other clamping plate (2), and a bottom support (4) on the bottom middle edge away from the other clamping plate (2).

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