Material frame carrying mechanism

Abstract

The utility model relates to the technical field of silicon wafer production, in particular to a material frame carrying mechanism which comprises a supporting frame body, and the supporting frame body is provided with a clamp component used for clamping a material frame and a six-axis moving component used for controlling the clamp component to move along the X axis, the Y axis and the Z axis. The six-axis movable part comprises a truss which moves on the supporting frame body along the X axis, a movable seat which moves on the truss along the Y axis and a lifting seat which moves on the movable seat along the Z axis; a lifting plate is arranged at the bottom of the lifting base, the clamping material frame is arranged on the lifting plate, the lifting plate is further provided with a material supporting component, and after the material supporting component operates, the executing end of the material supporting component supports supporting feet on the crystal support. The carrying mechanism not only can carry the material frame, but also can carry the crystal support, an additional carrying mechanism does not need to be arranged, the cost is saved, and the efficiency in the silicon wafer processing procedure is improved.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer production technology, and in particular to a material frame handling mechanism. Background Technology

[0002] In the field of silicon wafer manufacturing technology, the material frame, as the core carrier holding the wafer and the silicon tray, is a crucial link in the production process due to its efficient handling. In the prior art, the material frame 114 is used to hold the wafer tray 116 and the silicon wafer 117 bonded to it, and the silicon wafer 117 is transported or conveyed by using the material frame 114 as a carrier. In the debonding process, the material frame 114 needs to be placed in a debonding tank and heated to separate the silicon wafer 117 from the wafer tray 116. Subsequently, the separated wafer tray 117 needs to be handled separately for subsequent processes.

[0003] However, traditional material frame handling mechanisms only have the function of clamping the material frame, and their structural design is only for handling control of the material frame, lacking adaptability to the crystal tray 116. The existing crystal tray 116 design has a pair of parallel and T-shaped support feet 1161 on the side away from the silicon wafer 117. Its unique T-shaped structure makes it impossible for the clamping components of the traditional handling mechanism to directly and stably clamp or lift it.

[0004] In existing technologies, to achieve the handling of the crystal tray 116, a separate crystal tray handling mechanism, such as a dedicated robotic arm or clamp, is usually required. This not only increases equipment costs and installation space but also leads to complex process connections, requiring secondary positioning and transfer of the crystal tray 116 using additional equipment after the material frame is handled, which seriously affects production efficiency. Therefore, a material frame handling mechanism is provided to solve the above-mentioned technical problems. Utility Model Content

[0005] The purpose of this utility model is to provide a material frame transport mechanism to address the shortcomings of the existing technology, thereby solving the technical problem that the existing material frame transport mechanism cannot transport the crystal tray.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows:

[0007] A material frame handling mechanism includes a support frame, which is provided with a clamping component for gripping the material frame and a six-axis movable component for controlling the clamping component to move along the X-axis, Y-axis and Z-axis. The six-axis movable component includes a truss that moves along the X-axis on the support frame, a movable seat that moves along the Y-axis on the truss, and a lifting seat that moves along the Z-axis on the movable seat. A lifting plate is installed at the bottom of the lifting seat, the material frame is mounted on the lifting plate, and the lifting plate is also equipped with a material support component. After the material support component is in operation, its actuator supports the support foot on the crystal tray.

[0008] Furthermore, several material support components are provided.

[0009] Furthermore, the material support component includes a support plate and a rotary cylinder mounted on the support plate. The output shaft of the rotary cylinder is arranged downwards, and a vertically arranged rotating rod is mounted on its output shaft. The bottom end of the rotating rod extends downwards to pass through the lifting plate. The bottom end of the rotating rod is equipped with a support block that, after rotation, cooperates with the support foot to support the crystal tray.

[0010] Furthermore, the material support component also includes several guide seats, with the support plate movably mounted on the guide seats, and the guide seats are equipped with buffer springs for applying an upward pushing force to the support plate.

[0011] Furthermore, the six-axis moving component also includes a first drive component for driving the truss movement, a second drive component for driving the moving seat movement, and a third drive component for driving the lifting seat movement.

[0012] Furthermore, the first drive component includes a right-angle steering gear mounted on the truss. Each of the two output shafts of the right-angle steering gear arranged laterally is provided with a first rotating shaft arranged coaxially. The first rotating shafts on both sides are arranged laterally and their axes are perpendicular to the direction of movement of the truss. The support frame is equipped with a pair of first racks whose length direction is parallel to the direction of movement of the truss. The first racks on both sides are close to different first rotating shafts. The ends of the first rotating shafts on both sides that are far apart from each other are provided with first gears. The first gears on both sides mesh with different first racks. It also includes a first stepper motor. The output shaft of the first stepper motor is connected to the vertically arranged output shaft of the right-angle steering gear.

[0013] Furthermore, the third driving component includes a support seat mounted on a movable seat, a second rotating shaft arranged laterally with its axis perpendicular to the direction of movement of the lifting seat rotatably mounted on the support seat, a second rack arranged vertically mounted on the lifting seat, and a second gear meshing with the second rack on the second rotating shaft; the movable seat is equipped with a second stepper motor for driving the second rotating shaft to rotate.

[0014] Furthermore, the clamping components include a left clamping part and a right clamping part.

[0015] Furthermore, the left clamping part includes a slider that can move toward or away from the right clamping part, and a control cylinder for controlling the movement of the slider. The slider is equipped with a gripper for clamping the material frame.

[0016] The beneficial effects of this utility model are as follows: In use, the six-axis movable parts control the clamping parts to move along the X-axis, Y-axis and Z-axis, and transport the material frames one by one to the designated position according to the processing steps, thereby realizing the transportation of the material frames.

[0017] In addition, a wafer tray handling process is required. The six-axis moving parts control the lifting plate to move along the X, Y, and Z axes to directly above the material frame. Then, the lifting plate is controlled to move downwards so that the actuator of the material-supporting component is positioned between the two support feet on the wafer tray. Subsequently, several material-supporting components operate simultaneously. Because the support feet are T-shaped, their actuators are positioned directly below the lips of the two T-shaped support feet. Then, the lifting plate is controlled to move upwards, thus removing the wafer tray from the material frame for subsequent silicon wafer processing. This handling mechanism can handle both the material frame and the wafer tray without requiring an additional handling mechanism, saving costs and improving efficiency in the silicon wafer processing process. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0019] Figure 2 This is a structural schematic diagram from another perspective of the present invention.

[0020] Figure 3 This is a schematic diagram of the transport part of this utility model.

[0021] Figure 4 This is a schematic diagram of the structure of the first driving component and the third driving component of this utility model.

[0022] Figure 5 This is a schematic diagram of the material frame and clamp components of this utility model.

[0023] The reference numerals in the figures include:

[0024] 11. Support frame; 12. Material frame conveyor line; 13. Spray tank; 131. Spray pipe; 132. Cover plate; 133. Push cylinder; 14. First degumming tank; 15. Second degumming tank; 16. Soaking tank; 17. Truss; 171. Guide rail; 172. Roller; 18. First drive component; 181. Right angle steering gear; 182. First rotating shaft; 183. First gear; 184. First rack; 185. First stepper motor; 19. Movable seat; 110. Second drive component; 111. Lifting seat; 1111. Lifting plate; 112. Third drive component; 1121. Support seat; 1122. Second rotating shaft; 1123. Second gear; 1124. Second rack; 1125. Second stepper motor; 13. Clamping components; 1131. Sliding component; 1132. Gripper part; 1133. Control cylinder; 1134. Placement slot; 114. Material frame; 1141. Frame plate; 1142. Connecting frame; 1143. First mounting plate; 1144. First slide groove; 1145. Limiting roller; 1146. First slide rod; 1147. Second mounting plate; 1148. Positioning slot; 1149. Second slide groove; 11410. Support roller; 11411. Second slide rod; 11412. Protruding rod; 115. Material transport trolley; 116. Crystal tray; 1161. Support foot; 117. Silicon wafer; 118. Guide seat; 119. Support plate; 120. Buffer spring; 121. Rotary cylinder; 122. Rotating rod; 123. Support block. Detailed Implementation

[0025] The following is a detailed description of a material frame handling mechanism according to the present invention, with reference to the accompanying drawings.

[0026] like Figure 1-3 As shown, an embodiment of the material frame conveying mechanism of this utility model includes a support frame 11 and a plurality of material frame conveying lines 12 mounted on the support frame 11. The plurality of material frame conveying lines 12 are arranged side by side and are all used for continuous conveying of the material frame 114. The material frame 114 is used to load the crystal tray 116 and a plurality of silicon wafers 117 bonded to the crystal tray 116 (e.g., Figure 5 As shown, the silicon wafers 117 are transported by using the material frame 114 as a carrier. A spray tank 13 for rinsing the silicon wafers 117 in the material frame 114 is provided beside the material frame conveyor line 12. The support frame 11 is equipped with a clamping component 113 for gripping the material frame 114 and a six-axis movable component for controlling the movement of the clamping component 113 along the X, Y, and Z axes. The six-axis movable component controls the movement of the clamping component 113 along the X, Y, and Z axes, thereby transporting the material frames 114 from the material frame conveyor line 12 one by one into the spray tank 13 for rinsing, washing away dust and fine debris adhering to the surface of the silicon wafers 117, facilitating subsequent processing of the silicon wafers 117.

[0027] In this embodiment, the spray tank 13 is equipped with a plurality of spray pipes 131. When the material frame 114 is transported into the spray tank 13, it is placed between the spray pipes 131, and water is sprayed from the spray pipes 131 to perform rinsing treatment. The support frame 11 is laterally movably provided with a cover plate 132 for covering the opening of the spray tank 13, and a push cylinder 133 for pushing the cover plate 132 to move. When the spray pipes 131 spray water, the push cylinder 133 pushes the cover plate 132 to move laterally to cover the opening of the spray tank 13, preventing water from splashing out and improving the cleaning effect in the process of cleaning the silicon wafer 117.

[0028] Furthermore, the support frame 11 is also equipped with an immersion tank 16, and a first debonding tank 14 and a second debonding tank 15 are arranged beside the immersion tank 16. Both the first debonding tank 14 and the second debonding tank 15 are filled with a chemical solution and equipped with an electric heating rod for heating the chemical solution. Heating the chemical solution can heat the adhesive between the silicon wafer 117 and the crystal holder 116, thereby achieving the debonding process. After debonding, the silicon wafer 117 is separated from the crystal holder 116. In addition, an ultrasonic device (existing technology) can be installed at the bottom of the first debonding tank 14 and the second debonding tank 15. While heating the adhesive, the ultrasonic device is running, and the debonding efficiency is improved by combining heating and ultrasonic waves. The immersion tank 16 contains hot water. After the silicon wafer 117 is separated from the crystal holder 116, the material frame 114 in the first debonding tank 14 and the second debonding tank 15 is transported to the immersion tank 16 through the cooperation of the six-axis moving part and the clamping part 113 for buffering. The material frame 114 containing the silicon wafer 117 is then transported to the next mechanism for processing. During the waiting process, the silicon wafer 117 is kept in an immersion state.

[0029] The six-axis movable component includes a truss 17 that moves along the X-axis on the support frame 11, a movable seat 19 that moves along the Y-axis on the truss 17, and a lifting seat 111 that moves along the Z-axis on the movable seat 19; it also includes a first drive component 18 for driving the truss 17 to move, a second drive component 110 for driving the movable seat 19 to move, and a third drive component 112 for driving the lifting seat 111 to move.

[0030] In addition, a guide rail 171 arranged along the X-axis in the length direction is provided on the support frame 11, and rollers 172 rolling on the guide rail 171 are installed on the truss 17. Under the guidance of the guide rail 171, the truss 17 moves along the X-axis on the support frame 11. Furthermore, a slide rail arranged along the Y-axis is provided on the truss 17, and the movable seat 19 is slidably mounted on the slide rail. The guide rail 171 and the slide rail provided on the truss 17 are arranged horizontally or substantially horizontally.

[0031] like Figure 4As shown, the first drive component 18 includes a right-angle steering gear 181 (model XCT2, T-type steering gear) mounted on the truss 17. Two output shafts of the right-angle steering gear 181 are laterally arranged, each with a coaxially arranged first rotating shaft 182. The first rotating shafts 182 on both sides are laterally arranged and their axes are perpendicular to the direction of movement of the truss 17. The right-angle steering gear 181 controls the first rotating shafts 182 on both sides to rotate simultaneously in the same direction. A pair of first racks 184, parallel in length to the direction of movement of the truss 17, are mounted on the support frame 11. The first racks 184 on both sides are close to different first rotating shafts 182. A first gear 183 is provided at the ends of the first rotating shafts 182 that are far apart from each other. The first gears 183 on both sides mesh with different first racks 184. It also includes a first stepper motor 185, the output shaft of which is connected to the vertically arranged output shaft of the right-angle steering gear 181; running the first stepper motor 185 drives the right-angle steering gear 181 to control the first rotating shafts 182 on both sides to rotate simultaneously in the same direction. Because the first rack 184 is fixedly set, in cooperation with the first gears 183 on both sides, it drives the truss 17 to move along the X-axis on the support frame 11.

[0032] Furthermore, the third drive component 112 includes a support base 1121 mounted on the movable seat 19. A second rotating shaft 1122, arranged laterally and with its axis perpendicular to the direction of movement of the lifting seat 111, is rotatably mounted on the support base 1121. The lifting seat 111 is equipped with a vertically arranged second rack 1124, and the second rotating shaft 1122 is provided with a second gear 1123 meshing with the second rack 1124. The movable seat 19 is equipped with a second stepper motor 1125 for driving the second rotating shaft 1122 to rotate. Running the second stepper motor 1125 drives the second rotating shaft 1122 and the second gear 1123 to rotate. Because the second rack 1124 is fixedly mounted, it can drive the lifting seat 111 to move along the Z-axis when engaged with the second gear 1123.

[0033] like Figure 5 As shown, a lifting plate 1111 is installed at the bottom of the lifting seat 111, and a clamping component 113 is installed on the lifting plate 1111. The clamping component 113 includes a left clamping part and a right clamping part, which have the same structure and are arranged in a mirror image. The left clamping part includes a sliding member 1131 that can move towards or away from the right clamping part, and a control cylinder 1133 for controlling the movement of the sliding member 1131. The sliding member 1131 is equipped with a gripper part 1132 for clamping the material frame 114. By operating the control cylinder 1133, the sliding member 1131 is controlled to move towards or away from the right clamping part, so that the two sides move closer or further apart, thereby clamping and releasing the material frame 114.

[0034] In this embodiment, the material frame 114 includes a connecting frame 1142. The left and right ends of the connecting frame 1142 are each equipped with a frame plate 1141. The crystal tray 116 is placed on the top of the connecting frame 1142, and the silicon wafer 117 is placed between the left and right frame plates 1141. The left frame plate 1141 and the right frame plate 1141 are each equipped with a pair of second mounting plates 1147. The pair of second mounting plates 1147 on the left and the pair of second mounting plates 1147 on the right are arranged opposite to each other. Each second mounting plate 1147 is formed with a second groove 1149. The second groove 1149 on the left and the second groove 1149 on the right are arranged in a figure-eight pattern. A pair of support rollers 11410 are provided between the left and right frame plates 1141 for supporting the silicon wafer 117 after it is detached from the crystal holder 116. The two ends of one support roller 11410 are respectively aligned with a left second mounting plate 1147 and a right second mounting plate 1147. Each support roller 11410 has a second slide rod 11411 at both ends, and each second slide rod 11411 is slidably disposed in a different second slide groove 1149. Since the second slide groove 1149 on the left and the second slide groove 1149 on the right are both arranged in a figure-eight pattern, each second slide groove 1149 is arranged at an angle. Each second slide groove 1149 has a positioning groove 1148 formed in the upper end to position the second slide rod 11411. After the second slide rod 11411 is forced to disengage from the positioning groove 1148, under the action of the weight of the support roller 11410, the second slide rod 11411 automatically moves in the second slide groove 1149 in a downward direction, so that the pair of support rollers 11410 move away from each other when they move in the downward direction.

[0035] After the material frame 114 removes the adhesive in the first de-adhesive groove 14 or the second de-adhesive groove 15, the silicon wafer 117, after being removed from the crystal holder 116, automatically falls and is supported by the support roller 11410 to facilitate the continued handling of the silicon wafer 117. However, in order to remove the silicon wafer 117 from the material frame 114, force is applied to the second slide bar 11411 to disengage it from the positioning groove 1148. Then, the support roller 11410 moves in a direction away from each other until it stops supporting the silicon wafer 117, thus completing the unloading of the silicon wafer 117.

[0036] A pair of protruding rods 11412 are provided on the opposite sides of the left and right frame plates 1141. The gripper portion 1132 is formed with a pair of placement grooves 1134 for placing the protruding rods 11412. When the left and right gripper portions 1132 are placed on both sides of the material frame 114, the gripper portions 1132 are controlled to move closer to each other, so that each protruding rod 11412 is placed in a different placement groove 1134. Then, the gripper portions 1132 are controlled to move along the X-axis, Y-axis and Z-axis to realize the transportation of the material frame 114.

[0037] Furthermore, both the left and right frame plates 1141 are equipped with a pair of first mounting plates 1143. The pair of first mounting plates 1143 on the left and the pair of first mounting plates 1143 on the right are arranged opposite each other. Each first mounting plate 1143 is formed with a first sliding groove 1144. The first sliding grooves 1144 on the left and the first sliding grooves 1144 on the right are arranged in an inverted "V" shape. A pair of limiting rollers 1145 are arranged between the left and right frame plates 1141, respectively placed on the front and rear sides of the silicon wafer 117. The limiting rollers 1145 are positioned above the support rollers 11410. The two ends of one limiting roller 1145 are aligned with one left first mounting plate 1143 and one right first mounting plate 1143, respectively. Each end of each limiting roller 1145 is provided with a first sliding rod 1146, and each first sliding rod 1146 is slidably disposed in a different first sliding groove 1144. Because both the first slide groove 1144 on the left and the first slide groove 1144 on the right are arranged in an inverted "V" shape, each of the first slide grooves 1144 is inclined. Under the weight of the limiting roller 1145, the first slide rod 1146 automatically moves in a downward direction within the first slide groove 1144, and the limiting roller 1145 also moves in a downward direction. When it moves to contact the side of the silicon wafer 117, it can limit the silicon wafer 117 after it is detached from the crystal holder 116, so as to prevent the silicon wafer 117 placed on the support roller 11410 from collapsing. The limiting roller 1145 is a sponge roller. When unloading the silicon wafer 117, it applies an upward force to each of the first slide rods 1146, so that the first slide rods 1146 move upward in the first slide groove 1144. The limiting roller 1145 separates from the side of the silicon wafer 117, preventing the limiting roller 1145 from scratching or damaging the silicon wafer 117 during the unloading process.

[0038] Before unloading the silicon wafer 117, in order to remove the crystal tray 116 from the connecting frame 1142, a pair of parallel and T-shaped support feet 1161 are formed on the side of the crystal tray 116 away from the silicon wafer 117. The lifting plate 1111 is also equipped with several material support components for supporting the crystal tray 116. The material support components include a support plate 119 and a rotary cylinder 121 mounted on the support plate 119. The output shaft of the rotary cylinder 121 is arranged downward, and a vertically arranged rotating rod 122 is mounted on its output shaft. The bottom end of the rotating rod 122 extends downward to pass through the lifting plate 1111. The bottom end of the rotating rod 122 is equipped with a support block 123 that, after rotation, cooperates with the support feet 1161 to support the crystal tray 116. When the material frame 114 is placed in the soaking tank 16, the crystal tray 116 needs to be moved out of the material frame 114. Specifically: control the lifting plate 1111 to move along the X-axis, Y-axis and Z-axis to the top of the material frame 114, and then control the lifting plate 1111 to move downward so that the support block 123 is placed between the two T-shaped support feet 1161. Then, run the rotary cylinder 121 to drive the support block 123 to rotate 90 degrees. At this time, the two ends of the support feet 1161 are respectively placed directly below the lips of the two T-shaped support feet 1161. Then control the lifting plate 1111 to move upward so that the crystal tray 116 can be moved away from the discharge frame 114.

[0039] Furthermore, the material support component also includes several guide seats 118, and a support plate 119 is movably mounted on the guide seats 118. The guide seats 118 are equipped with buffer springs 120 for applying an upward pushing force to the support plate 119. During the handling of the crystal tray 116, the buffer springs 120 provide pressure buffering for the support plate 119, reducing wear on the rotary cylinder 121.

[0040] A material handling trolley 115 for loading crystal trays 116 is provided inside the support frame 11. The crystal trays 116 that are removed from the discharge frame 114 are placed on the material handling trolley 115. When the material handling trolley 115 is loaded with a sufficient number of crystal trays 116, the staff will push the material handling trolley 115 out of the support frame 11 to replace the empty material handling trolley 115.

[0041] In summary, this utility model possesses the aforementioned excellent characteristics, enabling it to achieve unprecedented efficiency in use and thus become a highly practical product.

[0042] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. A material frame conveying mechanism, characterized in that: It includes a support frame (11), which is provided with a clamping component (113) for clamping the material frame (114) and a six-axis movable component for controlling the clamping component (113) to move along the X-axis, Y-axis and Z-axis; the six-axis movable component includes a truss (17) that moves along the X-axis on the support frame (11), a movable seat (19) that moves along the Y-axis on the truss (17) and a lifting seat (111) that moves along the Z-axis on the movable seat (19); the bottom of the lifting seat (111) is equipped with a lifting plate (1111), the material frame (114) is installed on the lifting plate (1111), the lifting plate (1111) is also equipped with a material support component, and after the material support component is running, its execution end supports the support foot (1161) on the crystal tray (116).

2. The material frame conveying mechanism according to claim 1, characterized in that: Several material support components are provided.

3. The material frame conveying mechanism according to claim 2, characterized in that: The material support component includes a support plate (119) and a rotary cylinder (121) mounted on the support plate (119). The output shaft of the rotary cylinder (121) is arranged downward, and a vertically arranged rotating rod (122) is mounted on its output shaft. The bottom end of the rotating rod (122) extends downward to pass through the lifting plate (1111). The bottom end of the rotating rod (122) is equipped with a support block (123) that, after rotation, cooperates with the support foot (1161) to support the crystal tray (116).

4. The material frame conveying mechanism according to claim 3, characterized in that: The material support component also includes several guide seats (118), and the support plate (119) is movably mounted on the guide seats (118). The guide seats (118) are provided with buffer springs (120) for applying an upward pushing force to the support plate (119).

5. A material frame conveying mechanism according to claim 1, characterized in that: The six-axis moving parts also include a first drive component (18) for driving the truss (17) to move, a second drive component (110) for driving the moving seat (19) to move, and a third drive component (112) for driving the lifting seat (111) to move.

6. A material frame conveying mechanism according to claim 5, characterized in that: The first drive component (18) includes a right-angle steering gear (181) mounted on the truss (17). The two output shafts of the right-angle steering gear (181) are arranged laterally, and the first rotating shafts (182) are arranged coaxially. The first rotating shafts (182) on both sides are arranged laterally and their axes are perpendicular to the direction of movement of the truss (17). The support frame (11) is equipped with a pair of first racks (184) whose length direction is parallel to the direction of movement of the truss (17). The first racks (184) on both sides are close to different first rotating shafts (182). The ends of the first rotating shafts (182) on both sides that are far apart from each other are provided with first gears (183). The first gears (183) on both sides mesh with different first racks (184). The first drive component (185) also includes a first stepper motor (185). The output shaft of the first stepper motor (185) is connected to the vertically arranged output shaft of the right-angle steering gear (181).

7. A material frame conveying mechanism according to claim 5, characterized in that: The third drive component (112) includes a support base (1121) mounted on a movable seat (19). The support base (1121) is rotatably provided with a second rotating shaft (1122) arranged laterally and whose axis is perpendicular to the direction of movement of the lifting seat (111). The lifting seat (111) is equipped with a vertically arranged second rack (1124). The second rotating shaft (1122) is provided with a second gear (1123) meshing with the second rack (1124). The movable seat (19) is equipped with a second stepper motor (1125) for driving the second rotating shaft (1122) to rotate.

8. A material frame conveying mechanism according to claim 1, characterized in that: The clamping component (113) includes a left clamping part and a right clamping part.

9. A material frame conveying mechanism according to claim 8, characterized in that: The left clamping part includes a slider (1131) that can move toward or away from the right clamping part, and a control cylinder (1133) for controlling the movement of the slider (1131). The slider (1131) is equipped with a gripper (1132) for clamping the material frame (114).

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