Sand blasting device capable of conveniently positioning monocrystalline silicon chip

Abstract

The utility model discloses a sand blasting device capable of conveniently positioning a monocrystalline silicon chip, which relates to the technical field of monocrystalline silicon chip surface treatment and comprises a sand blasting box body and a sand blasting head fixedly arranged at the top of the inner wall of the sand blasting box body, and two symmetrically arranged support rods are fixedly arranged at the bottom of the inner wall of the sand blasting box body. The tops of the two supporting rods are jointly and fixedly provided with a positioning ring, elastic positioning assemblies are arranged on the two sides of the positioning ring, a transverse rod is arranged through the elastic positioning assemblies, a pressing block is fixedly arranged at the end of the transverse rod, an air compressor is fixedly arranged on the inner side wall of the sand blasting box body and communicates with an exhaust pipe, and an electric push rod is fixedly arranged at the bottom of the inner wall of the sand blasting box body. A transverse plate is fixedly arranged at the tail end of an output shaft of the electric push rod, and a plurality of suction cups arranged at intervals are fixedly arranged in the transverse plate in a penetrating mode. According to the utility model, the intervention of an operator can be reduced, the monocrystalline silicon chip is turned over and turned over after one side of the monocrystalline silicon chip is subjected to sand blasting, and the other side of the monocrystalline silicon chip is subjected to quick positioning sand blasting, so that the use multifunctionality of the sand blasting device is improved.

Description

Technical Field

[0001] This utility model relates to the field of surface treatment technology for monocrystalline silicon chips, and specifically to a sandblasting device that facilitates the positioning of monocrystalline silicon chips. Background Technology

[0002] Before the packaging process, the surface of a single-crystal silicon chip needs to be roughened by sandblasting to increase surface energy and micro-roughness, ensuring that the packaging material is tightly bonded to the chip surface. During the sandblasting process, in order to ensure the stability of the single-crystal silicon chip, the chip needs to be conveniently positioned and clamped.

[0003] However, the existing clamping method involves placing the chip in the adsorption tank and using suction components such as suction cups at the bottom of the adsorption tank to stably adsorb the chip. However, because vacuum adsorption is used, when the chip needs to be sandblasted on both sides, the operator still needs to take the chip out and reposition it, which increases the operator's intervention and reduces the sandblasting efficiency. Utility Model Content

[0004] In view of the problems of the existing sandblasting devices that facilitate the positioning of single-crystal silicon chips, this utility model is proposed.

[0005] Therefore, the purpose of this utility model is to provide a sandblasting device that facilitates the positioning of single-crystal silicon chips, and solves the problem that existing sandblasting devices cannot perform double-sided sandblasting clamping and positioning of chips with reduced manual intervention.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A sandblasting device for facilitating the positioning of monocrystalline silicon chips includes a sandblasting box and a sandblasting head fixedly disposed on the top of the inner wall of the sandblasting box. Two symmetrically arranged support rods are fixedly disposed on the bottom of the inner wall of the sandblasting box. A positioning ring is fixedly disposed on the top of the two support rods. Elastic positioning components are disposed on both sides of the positioning ring, and a crossbar is disposed through the elastic positioning components. A pressure block is fixedly disposed at the end of the crossbar.

[0008] An air compressor is fixedly installed on the inner wall of the sandblasting box. The air compressor is connected to an air extraction pipe. An electric push rod is fixedly installed at the bottom of the inner wall of the sandblasting box. A horizontal plate is fixedly installed at the end of the output shaft of the electric push rod. Multiple suction cups are fixedly installed inside the horizontal plate at intervals. The bottom of the suction cups is connected to a branch pipe. The multiple branch pipes are connected to the air extraction pipe.

[0009] A face-changing adsorption mechanism is provided between the cross plate and the crossbar to drive the crossbar to rotate in one direction.

[0010] Preferably, the elastic positioning component includes a sleeve, which is rotatably inserted through the side of the positioning ring and sleeved on the outside of the crossbar. The inner wall of the sleeve has two symmetrically arranged sliding grooves, and a slider is slidably inserted through the inner wall of the sliding groove. The slider is fixedly connected to the crossbar, and a limiting spring is fixedly provided between the slider and the inner wall of the sliding groove.

[0011] Preferably, the face-changing adsorption mechanism includes a vertical plate, which is fixedly disposed on the top of the horizontal plate, and a plurality of mounting blocks are fixedly disposed on its outer wall. The end pins of the mounting blocks are rotatably provided with ratchet teeth. A compression spring is fixedly disposed between the ratchet teeth and the vertical plate. A baffle is contacted at the top of the ratchet teeth. The baffle is fixedly connected to the vertical plate. A ratchet wheel is fixedly sleeved on the wall of the horizontal bar. The ratchet teeth are configured to cooperate with the ratchet wheel.

[0012] Preferably, a strip-shaped hole is provided inside the support rod on one side, and a guide rod is fixedly provided on the inner wall of the strip-shaped hole. The horizontal plate passes through the strip-shaped hole and is slidably sleeved on the outside of the guide rod.

[0013] Furthermore, the pressing block is a rubber pressing block.

[0014] Preferably, both the extraction pipe and the branch pipe are high-pressure hoses.

[0015] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0016] This invention, through the provision of a support rod, positioning rod, elastic positioning component, electric push rod, horizontal plate, suction cup, and face-changing adsorption mechanism, can reduce operator intervention and quickly position and sandblast the other side of a single-crystal silicon chip after sandblasting one side, thereby improving the versatility of the sandblasting device.

[0017] This invention, through the provision of a positioning ring, crossbar, pressure block, and elastic positioning component, can assist in positioning the single-crystal silicon chip before the suction cup adsorbs it, thereby further improving the stability of the chip during the sandblasting process. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0019] Figure 1 This is a schematic diagram of the structure of this utility model;

[0020] Figure 2This is a side view of the face-changing adsorption mechanism of this utility model.

[0021] Figure 3 This is a schematic diagram of the internal structure of the elastic positioning mechanism of this utility model.

[0022] Explanation of reference numerals in the attached figures:

[0023] 1. Sandblasting box; 2. Sandblasting head; 3. Support rod; 4. Positioning ring; 5. Crossbar; 6. Pressure block; 7. Air compressor; 8. Air extraction pipe; 9. Electric push rod; 10. Horizontal plate; 11. Suction cup; 12. Branch pipe; 13. Sleeve; 14. Slider; 15. Limit spring; 16. Vertical plate; 17. Mounting block; 18. Ratchet; 19. Compression spring; 20. Baffle; 21. Ratchet; 22. Guide rod. Detailed Implementation

[0024] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0025] This utility model discloses a sandblasting device for convenient positioning of single-crystal silicon chips.

[0026] This utility model provides, for example Figure 1-3 The sandblasting device shown is convenient for positioning single-crystal silicon chips. It includes a sandblasting box 1 and a sandblasting head 2 fixedly installed on the top of the inner wall of the sandblasting box 1. Two symmetrically arranged support rods 3 are fixedly installed on the bottom of the inner wall of the sandblasting box 1. The top of the two support rods 3 is fixedly provided with a positioning ring 4. Both sides of the positioning ring 4 are provided with elastic positioning components, and a crossbar 5 is provided through the elastic positioning components. A pressure block 6 is fixedly installed at the end of the crossbar 5. The pressure block 6 is a rubber pressure block.

[0027] An air compressor 7 is fixedly installed on the inner wall of the sandblasting box 1. The air compressor 7 is connected to an air extraction pipe 8. An electric push rod 9 is fixedly installed at the bottom of the inner wall of the sandblasting box 1. A horizontal plate 10 is fixedly installed at the end of the output shaft of the electric push rod 9. A strip-shaped hole is opened inside the support rod 3 on one side. A guide rod 22 is fixedly installed on the inner wall of the strip-shaped hole. The horizontal plate 10 passes through the strip-shaped hole and is slidably sleeved on the outside of the guide rod 22. Multiple suction cups 11 are fixedly installed inside the horizontal plate 10 at intervals. A branch pipe 12 is connected to the bottom of the suction cup 11. The multiple branch pipes 12 are connected to the air extraction pipe 8. The air extraction pipe 8 and the branch pipes 12 are both high-pressure hoses.

[0028] A face-changing adsorption mechanism for driving the crossbar 5 to rotate in one direction is provided between the cross plate 10 and the crossbar 5. The face-changing adsorption mechanism includes a vertical plate 16, which is fixedly installed on the top of the cross plate 10. Multiple mounting blocks 17 are fixedly installed on the outer wall. The end pin of the mounting block 17 is provided with a ratchet 18. A compression spring 19 is fixedly installed between the ratchet 18 and the vertical plate 16. A baffle 20 is contacted at the top of the ratchet 18. The baffle 20 is fixedly connected to the vertical plate 16. A ratchet 21 is fixedly sleeved on the bar wall of the crossbar 5. The ratchet 18 and the ratchet 21 are configured to cooperate.

[0029] To assist in positioning the chip before it is adsorbed, and to ensure stable chip adsorption and positioning, such as... Figure 1 and Figure 3 As shown, the elastic positioning assembly includes a sleeve 13, which is rotatably inserted through the side of the positioning ring 4 and sleeved on the outside of the crossbar 5. The inner wall of the sleeve 13 has two symmetrically arranged sliding grooves, and a slider 14 is slidably inserted through the inner wall of the sliding groove. The slider 14 is fixedly connected to the crossbar 5, and a limiting spring 15 is fixedly provided between the slider 14 and the inner wall of the sliding groove.

[0030] Working principle: Before sandblasting the chip, the single crystal silicon chip is placed on the positioning ring 4. The limiting spring 15 of the elastic positioning component pushes the crossbar 5, so that the rubber pressure block 6 lightly presses the edge of the chip to achieve pre-positioning.

[0031] Then, the air compressor 7 generates negative pressure in the suction cup 11 through the air extraction pipe 8 and the branch pipe 12, adsorbing the chip onto the horizontal plate 10. At this time, the chip is stably adsorbed, and then the sandblasting head 2 is started to sandblast the upper surface of the chip.

[0032] After sandblasting one side of the chip is completed, the air compressor 7 is turned off, the suction cup 11 separates from the chip, and the chip is still held laterally by the pressure block 6. Then the electric push rod 9 drives the horizontal plate 10 to descend, and the vertical plate 16 on the horizontal plate 10 moves down accordingly. The ratchet 18 engages with the ratchet 21 due to the action of the compression spring 19, and drives the horizontal bar 5 to rotate in one direction during the movement of the horizontal plate 10, so as to flip the chip.

[0033] After the chip is flipped over, the electric push rod 9 returns to its original position, causing the horizontal plate 10 to move the suction cup 11 upward, and the air compressor 7 is turned on, so that the suction cup 11 releases negative pressure and adsorbs and positions the chip again, and the sandblasting process is repeated to complete the treatment of the other side.

[0034] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A sandblasting device for convenient positioning of single-crystal silicon chips, comprising a sandblasting chamber (1) and a sandblasting head (2) fixedly disposed on the top of the inner wall of the sandblasting chamber (1), characterized in that, The bottom of the inner wall of the sandblasting box (1) is fixed with two symmetrically arranged support rods (3), and the top of the two support rods (3) is fixed with a positioning ring (4). Both sides of the positioning ring (4) are provided with elastic positioning components, and a crossbar (5) is provided through the elastic positioning components. A pressure block (6) is fixed at the end of the crossbar (5). An air compressor (7) is fixedly installed on the inner wall of the sandblasting box (1). The air compressor (7) is connected to an air extraction pipe (8). An electric push rod (9) is fixedly installed at the bottom of the inner wall of the sandblasting box (1). A horizontal plate (10) is fixedly installed at the end of the output shaft of the electric push rod (9). A plurality of spaced suction cups (11) are fixedly installed inside the horizontal plate (10). A branch pipe (12) is connected to the bottom of the suction cup (11). The plurality of branch pipes (12) are connected to the air extraction pipe (8). A face-changing adsorption mechanism is provided between the horizontal plate (10) and the horizontal bar (5) for driving the horizontal bar (5) to rotate in one direction.

2. The sandblasting device for convenient positioning of single-crystal silicon chips according to claim 1, characterized in that, The elastic positioning component includes a sleeve (13), which is rotatably inserted through the side of the positioning ring (4) and sleeved on the outside of the crossbar (5). The inner wall of the sleeve (13) has two symmetrically arranged sliding grooves. A slider (14) is slidably inserted through the inner wall of the sliding groove. The slider (14) is fixedly connected to the crossbar (5). A limiting spring (15) is fixedly provided between the slider (14) and the inner wall of the sliding groove.

3. The sandblasting device for convenient positioning of single-crystal silicon chips according to claim 1, characterized in that, The face-changing adsorption mechanism includes a vertical plate (16), which is fixedly mounted on the top of the horizontal plate (10), and has multiple mounting blocks (17) fixedly mounted on its outer wall. The end pin of the mounting block (17) is provided with a ratchet (18), and a compression spring (19) is fixedly mounted between the ratchet (18) and the vertical plate (16). The top of the ratchet (18) contacts a baffle (20), which is fixedly connected to the vertical plate (16). The wall of the horizontal bar (5) is fixedly fitted with a ratchet (21), and the ratchet (18) and the ratchet (21) are configured to cooperate.

4. The sandblasting device for convenient positioning of single-crystal silicon chips according to claim 1, characterized in that, A strip-shaped hole is provided inside the support rod (3) on one side. A guide rod (22) is fixedly provided on the inner wall of the strip-shaped hole. The horizontal plate (10) passes through the strip-shaped hole and is slidably sleeved on the outside of the guide rod (22).

5. The sandblasting device for convenient positioning of single-crystal silicon chips according to claim 1, characterized in that, The pressing block (6) is a rubber pressing block.

6. The sandblasting device for convenient positioning of single-crystal silicon chips according to claim 1, characterized in that, Both the extraction pipe (8) and the branch pipe (12) are high-pressure hoses.

Images