Manipulator suitable for ultrahigh vacuum transfer cavity

Abstract

The utility model discloses a manipulator suitable for an ultrahigh vacuum transfer cavity. The manipulator comprises a three-axis magnetic coupling transmission mechanism, a rotary driving mechanism, a frog arm assembly and a mounting flange, the mounting flange is mounted on a top cover of the ultrahigh vacuum conveying cavity, one end of the three-axis magnetic coupling transmission mechanism is connected with the rotary driving mechanism, and the other end of the three-axis magnetic coupling transmission mechanism penetrates through the mounting flange, extends into the ultrahigh vacuum conveying cavity and is connected with the frog arm assembly; and the rotation driving mechanism is used for driving the three-axis magnetic coupling transmission mechanism to perform transmission so as to drive the frog arm assembly to integrally rotate in the ultrahigh vacuum conveying cavity or drive the frog arm assembly to contract or expand so as to convey materials in the ultrahigh vacuum conveying cavity. The conveying device has the advantages of being compact in structure, simple in principle, high in stability and the like, and the transfer efficiency of materials in the ultrahigh vacuum conveying cavity is improved.

Description

Technical Field

[0001] This utility model relates to the field of wafer transfer technology, specifically to a robotic arm suitable for ultra-high vacuum transfer cavities. Background Technology

[0002] As semiconductor manufacturing processes advance towards smaller linewidths, higher precision, and thinner films, higher demands are being placed on the automation level and vacuum level of semiconductor process vacuum equipment. The use of robotic arms in these processes is becoming increasingly widespread. Conventional process equipment such as PVD, CVD, and Etch processes all utilize vacuum robotic arms; however, the vacuum level used by these robotic arms is generally around 10. -4 Pa~10 -6 Pa level, in higher vacuum levels (10 -7 Pa~10 -9 In ultra-high vacuum (UHV) process equipment such as MBE and vacuum cleaving coating machines, linear magnetic transfer rods are mainly used to transfer wafers or substrates, which limits the automation level of UHV process equipment. Process equipment such as MBE and vacuum cleaving coating machines place higher demands on the sealing vacuum leakage rate and baking resistance of robotic arms, which cannot be met by conventional vacuum robotic arms. Utility Model Content

[0003] The technical problem to be solved by this utility model is to meet the needs of wafer or substrate transfer in existing ultra-high vacuum coating process equipment, and to provide a manipulator with a compact structure, convenient operation, and high stability suitable for ultra-high vacuum transfer cavities.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0005] A robotic arm suitable for an ultra-high vacuum transfer chamber includes: a three-axis magnetic coupling transmission mechanism, a rotary drive mechanism, a frog arm assembly, and a mounting flange; the mounting flange is mounted on the top cover of the ultra-high vacuum transfer chamber; one end of the three-axis magnetic coupling transmission mechanism is connected to the rotary drive mechanism, and the other end of the three-axis magnetic coupling transmission mechanism extends through the mounting flange into the ultra-high vacuum transfer chamber and is connected to the frog arm assembly; the rotary drive mechanism is used to drive the three-axis magnetic coupling transmission mechanism to rotate the entire frog arm assembly within the ultra-high vacuum transfer chamber, or to retract or expand the frog arm assembly to transfer materials within the ultra-high vacuum transfer chamber.

[0006] As a further improvement of this utility model, the triaxial magnetic coupling transmission mechanism includes a first transmission shaft, a second transmission shaft, and an outer shaft nested from the inside to the outside; the first transmission shaft, the second transmission shaft, and the outer shaft are all connected to a rotary drive mechanism, and the first transmission shaft and the second transmission shaft are both connected to the frog arm assembly. The outer shaft is used to drive the first transmission shaft and the second transmission shaft to rotate synchronously, so as to realize the overall rotation of the frog arm assembly. The rotation directions of the first transmission shaft and the second transmission shaft are opposite, so as to drive the frog arm assembly to retract or open.

[0007] As a further improvement of this utility model, the rotary drive mechanism includes a first rotary drive member, a second rotary drive member, and a third rotary drive member. The output end of the first rotary drive member is rotatably connected to a first transmission shaft via a magnetic fluid. The output end of the second rotary drive member is rotatably connected to a second transmission shaft via a magnetic fluid. The output end of the third rotary drive member is rotatably connected to an outer shaft via a magnetic fluid.

[0008] As a further improvement of this utility model, the triaxial magnetic coupling transmission mechanism further includes a housing and a support plate. The housing is mounted on the support plate, and the outer shaft is nested inside the housing. The magnetofluid includes an outer magnet and an inner magnet. The outer magnet is nested outside the housing and cooperates with the rotary drive mechanism. The inner magnet is nested inside the housing and cooperates with each transmission shaft.

[0009] As a further improvement of this utility model, the frog arm assembly includes a first upper arm, a second upper arm, a first lower arm, a second lower arm, a third upper arm, a fourth upper arm, and a claw; the first lower arm is located between the first upper arm and the third upper arm, one end of the first upper arm and the third upper arm is connected to a second drive shaft, and the other end of the first upper arm and the third upper arm is connected to one end of the first lower arm through a first pin; the second lower arm is located between the second upper arm and the fourth upper arm, one end of the second upper arm and the fourth upper arm is connected to the first drive shaft, and the other end of the second upper arm and the fourth upper arm is connected to one end of the second lower arm through a second pin, and the other ends of the first lower arm and the second lower arm are connected to the claw; the rotation direction of the first upper arm and the third upper arm is opposite to the rotation direction of the second upper arm and the fourth upper arm, so as to realize that the first lower arm and the second lower arm drive the claw to extend or retract.

[0010] As a further improvement of this utility model, the hand claw includes a wrist and fingers, one end of the wrist is connected to the first forearm and the second forearm, and the other end of the wrist is connected to the fingers.

[0011] As a further improvement of this utility model, the first, second, third and fourth main arms are located in different vertical planes.

[0012] As a further improvement of this utility model, the first forearm and the second forearm are symmetrically arranged, and both the first forearm and the second forearm have concave structures.

[0013] As a further improvement of this utility model, a lifting mechanism is also included. The lifting mechanism includes a lifting drive component, a linear module, and a connecting plate. The output end of the lifting drive component is connected to the linear module. One end of the linear module is fixedly connected to the mounting flange. The first and second drive shafts are sealed through the mounting flange and extend into the ultra-high vacuum transmission chamber to connect to the frog arm assembly. The other end of the linear module is connected to the support plate through the connecting plate. Under the drive of the lifting drive component, the linear module drives the frog arm assembly to reciprocate up and down in the ultra-high vacuum transmission chamber.

[0014] As a further improvement of this utility model, the lifting mechanism also includes a bellows, one end of which is sealed to the support plate and the other end of which is sealed to the mounting flange.

[0015] Compared with the prior art, the advantages of this utility model are:

[0016] This invention relates to a robotic arm suitable for ultra-high vacuum transfer chambers. One end of a three-axis magnetic coupling transmission mechanism is connected to a rotary drive mechanism, while the other end extends through a mounting flange into the ultra-high vacuum transfer chamber and connects to a frog arm assembly. When the rotary drive mechanism drives the three-axis magnetic coupling transmission mechanism to rotate, the mechanism can both rotate the entire frog arm assembly within the ultra-high vacuum transfer chamber and cause it to retract or open, mimicking the swimming motion of a frog. This smooth movement helps reduce the installation space occupied by the robotic arm within the ultra-high vacuum transfer chamber, achieving high-efficiency material transfer. Furthermore, the robotic arm of this invention is installed above the center of the transfer chamber's top cover, while conventional vacuum robotic arms are installed below the center of the transfer chamber. This invention avoids the electrical components on the robotic arm being baked at high temperatures during the ultra-high vacuum transfer chamber's baking process, improving the reliability of the robotic arm. Attached Figure Description

[0017] Figure 1 This is a schematic diagram illustrating the structural principle of a robotic arm applicable to an ultra-high vacuum transfer cavity in a specific embodiment of this utility model;

[0018] Figure 2 This is a top view schematic diagram of the frog arm assembly in a specific embodiment of the present invention.

[0019] Figure 3 This is a schematic diagram of the three-dimensional structure of the frog arm assembly in a specific embodiment of the present invention;

[0020] Legend: 100, Three-axis magnetic coupling transmission mechanism; 200, Rotary drive mechanism; 300, Lifting mechanism; 400, Frog arm assembly; 500, Mounting flange; 101, First drive shaft; 102, Second drive shaft; 103, Outer shaft; 104, Housing; 105, Magnetofluid; 106, Support plate; 107, Bearing; 201, First rotary drive component; 202, Second rotary drive component; 203, Third rotary drive component; 301, Lifting drive component; 302, Linear module; 303, Connecting plate; 304, Bellows; 401, First upper arm; 402, Second upper arm; 403, First forearm; 404, Second forearm; 405, Wrist; 406, Finger; 407, Third upper arm; 408, Fourth upper arm; 409, First pin; 410, Second pin. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0022] In the description of this utility model, it should be understood that the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0023] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "multiple" means two or more, unless otherwise explicitly specified.

[0024] Example

[0025] like Figure 1 , Figure 2 and Figure 3As shown, the present invention relates to a robotic arm suitable for ultra-high vacuum transfer chambers, comprising: a three-axis magnetic coupling transmission mechanism 100, a rotary drive mechanism 200, a frog arm assembly 400, and a mounting flange 500. The mounting flange 500 is mounted on the top cover of the ultra-high vacuum transfer chamber; that is, the mounting flange 500, together with the components mounted on it, is installed from top to bottom onto the corresponding ultra-high vacuum transfer chamber top cover. The sealing method is a metal seal to meet the low leakage rate requirements for use in ultra-high vacuum environments. One end of the three-axis magnetic coupling transmission mechanism 100 is connected to the rotary drive mechanism 200, and the other end of the three-axis magnetic coupling transmission mechanism 100 extends through the mounting flange 500 into the ultra-high vacuum transfer chamber and is connected to the frog arm assembly 400. The rotary drive mechanism 200 drives the three-axis magnetic coupling transmission mechanism 100 to rotate the entire frog arm assembly 400 within the ultra-high vacuum transfer chamber, or to retract or open the frog arm assembly 400 to transfer materials within the ultra-high vacuum transfer chamber.

[0026] In this embodiment, one end of the triaxial magnetic coupling transmission mechanism 100 is connected to the rotary drive mechanism 200, and the other end extends through the mounting flange 500 into the ultra-high vacuum transfer chamber, connecting to the frog arm assembly 400. When the rotary drive mechanism 200 drives the triaxial magnetic coupling transmission mechanism 100 to rotate, the triaxial magnetic coupling transmission mechanism 100 can both drive the frog arm assembly 400 to rotate as a whole within the ultra-high vacuum transfer chamber and also drive the frog arm assembly 400 to retract or open, mimicking the swimming posture of a frog. This smooth movement helps reduce the installation space occupied by the robot in the ultra-high vacuum transfer chamber, achieving high-efficiency material transfer within the ultra-high vacuum transfer chamber. Simultaneously, the robot of this invention is installed above the center of the transfer chamber top cover, while conventional vacuum robot arms are installed below the center of the transfer chamber body. This invention avoids the electrical components on the robot arm being baked by high temperatures during the baking process of the ultra-high vacuum transfer chamber, improving the reliability of the robot arm.

[0027] like Figure 1 As shown, the triaxial magnetic coupling transmission mechanism 100 includes a first transmission shaft 101, a second transmission shaft 102, and an outer shaft 103 nested sequentially from the inside to the outside. The first transmission shaft 101, the second transmission shaft 102, and the outer shaft 103 are all connected to the rotary drive mechanism 200, and both the first transmission shaft 101 and the second transmission shaft 102 are connected to the frog arm assembly 400. The inner ends of the outer shaft 103 are respectively connected to the second transmission shaft 102 via bearings 107. Multiple bearings 107 are also provided between the second transmission shaft 102 and the first transmission shaft 101 for transmission connection. The outer shaft 103 drives the first transmission shaft 101 and the second transmission shaft 102 to rotate synchronously, thereby achieving the overall rotation of the frog arm assembly 400. The rotation directions of the first transmission shaft 101 and the second transmission shaft 102 are opposite, thereby driving the frog arm assembly 400 to retract or open.

[0028] In this embodiment, the triaxial magnetic coupling transmission mechanism 100 is a three-layer cylindrical structure with a coaxial design. The lengths of the first transmission shaft 101, the second transmission shaft 102, and the outer shaft 103 increase sequentially from the inside to the outside. When the outermost outer shaft 103 rotates, it can drive the two inner transmission shafts to rotate synchronously, realizing the overall rotation of the three-layer coaxial magnetic coupling assembly. The first transmission shaft 101 and the second transmission shaft 102 are used for synchronous forward and reverse rotation. A single motor can be used to achieve synchronous rotation of the two concentric shafts, or separate motors can be used to synchronously drive forward and reverse rotation.

[0029] like Figure 1 As shown, the rotary drive mechanism 200 includes a first rotary drive component 201, a second rotary drive component 202, and a third rotary drive component 203. The output end of the first rotary drive component 201 is rotatably connected to the upper part of the first transmission shaft 101 via a magnetic fluid 105. The output end of the second rotary drive component 202 is rotatably connected to the upper part of the second transmission shaft 102 via a magnetic fluid 105. The output end of the third rotary drive component 203 is rotatably connected to the upper part of the outer shaft 103 via a magnetic fluid 105. When only the rotary drive component 203 is running, the outer shaft 103 drives the first transmission shaft 101 and the second transmission shaft 102 to rotate synchronously. When the first rotary drive component 201 and the second rotary drive component 202 are running, the outer shaft 103 remains stationary, and the first transmission shaft 101 and the second transmission shaft 102 rotate synchronously in both forward and reverse directions. The first rotary drive component 201, the second rotary drive component 202, and the third rotary drive component 203 can all be motors, which drive the frog arm assembly 400 to move via magnetic coupling. The structure is simple and the transmission is stable.

[0030] like Figure 1 As shown, the triaxial magnetic coupling transmission mechanism 100 also includes a housing 104 and a support plate 106. The housing 104 is mounted on the support plate 106, and the outer shaft 103 is nested inside the housing 104. A bearing 107 is provided between the outer shaft 103 and the housing 104 to enable the outer shaft 103 to rotate smoothly within the housing 104. The magnetohydrodynamic fluid 105 includes an outer magnet and an inner magnet. The outer magnet is nested outside the housing 104 and cooperates with the rotary drive mechanism 200. The inner magnet is nested inside the housing 104 and cooperates with each transmission shaft.

[0031] In this embodiment, the first drive shaft 101, the second drive shaft 102, and the outer shaft 103 of the triaxial magnetic coupling transmission mechanism 100 are installed inside the housing 104, with a coaxial design. Magnetorheological fluids 105 are arranged from bottom to top to achieve magnetic coupling rotational drive of the three coaxial layers. The inner and outer magnets of the magnetorheological fluids 105 used for driving each shaft are composed of multiple permanent magnets, evenly distributed in a ring, with alternating magnetic pole directions. The inner magnets are fixed on the corresponding first drive shaft 101, second drive shaft 102, and outer shaft 103, while the outer magnets are installed outside the housing 104 and can rotate relative to the housing 104. The inner and outer magnets have opposite magnetic poles in the direction closest to the housing 104.

[0032] The rotary drive mechanism 200 is mounted on the housing 104 and includes three drive components: a first rotary drive component 201, a second rotary drive component 202, and a third rotary drive component 203. These components are used to drive the rotation of the first drive shaft 101, the second drive shaft 102, and the outer shaft 103 of the three-axis magnetic coupling transmission mechanism 100, respectively. This enables the rotation of the outer magnet, which is mounted on the housing 104 corresponding to the three shafts. The rotation of the outer magnet drives the corresponding shaft, which is fixedly mounted relative to the inner magnet, to rotate. When the outermost third rotary drive component 203 rotates, it drives the rotary drive components of the two inner drive shafts to rotate together with the two drive shafts.

[0033] like Figure 2 and Figure 3 As shown, the frog arm assembly 400 includes a first upper arm 401, a second upper arm 402, a first forearm 403, a second forearm 404, a third upper arm 407, a fourth upper arm 408, and a claw. Figure 1 and Figure 3 As shown, the first upper arm 401, the second upper arm 402, the third upper arm 407, and the fourth upper arm 408 are located in different vertical planes, and their movements do not interfere with each other. The first forearm 403 is located between the first upper arm 401 and the third upper arm 407. One end of the first upper arm 401 and the third upper arm 407 is connected to the second drive shaft 102, and the other end of the first upper arm 401 and the third upper arm 407 is connected to one end of the first forearm 403 via the first pin 409. The second forearm 404 is located between the second upper arm 402 and the fourth upper arm 408. One end of the second upper arm 402 and the fourth upper arm 408 is connected to the first drive shaft 101, and the other end of the second upper arm 402 and the fourth upper arm 408 is connected to one end of the second forearm 404 via the second pin 410. The other ends of the first forearm 403 and the second forearm 404 are connected to the gripper. The rotation directions of the first large arm 401 and the third large arm 407 are opposite to those of the second large arm 402 and the fourth large arm 408, so that the first forearm 403 and the second forearm 404 can drive the gripper to extend or retract. It can be understood that the specific connection and working principle of the frog arm assembly 400 in this embodiment can refer to the prior art CN117182942A. The difference is that in this embodiment, the movement of a robotic hand is driven by two rotary drive components, resulting in more precise control.

[0034] like Figure 2 As shown, the gripper includes a wrist 405 and fingers 406. One end of the wrist 405 is connected to the first forearm 403 and the second forearm 404, and the other end of the wrist 405 is connected to the fingers 406. The fingers 406 are used to receive and transfer materials.

[0035] like Figure 2As shown, the first forearm 403 and the second forearm 404 are symmetrically arranged, and both the first forearm 403 and the second forearm 404 have a bent concave structure at the end near the finger 406 to reduce the width required for the front channel during the extension of the frog arm. The transfer valve configured in a typical transfer chamber is a standard valve with a limited width; for example, the transfer valve for 8-inch wafer transfer has a width of 236mm.

[0036] In this embodiment, the frog arm has a symmetrical structure, with fingers 406 mounted at the front end of the symmetrical frog arm. The forward and backward movement of the fingers 406 is achieved by extending and retracting the frog arm. The upper arms of the frog arm are symmetrical in shape, each mounted on a first drive shaft 101 and a second drive shaft 102. When the first drive shaft 101 and the second drive shaft 102 rotate synchronously in both forward and reverse directions, they drive the frog arm to synchronously move inward or outward. It can be understood that the distance the fingers 406 need to extend outward is designed according to the required dimensions of the equipment from the center of the transfer cavity to the substrate stage of the process cavity, with a certain margin of safety.

[0037] like Figure 1 As shown, it also includes a lifting mechanism 300. The lifting mechanism 300 includes a lifting drive component 301, a linear module 302, and a connecting plate 303. The output end of the lifting drive component 301 is connected to the linear module 302. One end of the linear module 302 is fixedly connected to the mounting flange 500. The first drive shaft 101 and the second drive shaft 102 extend through the mounting flange 500 and into the ultra-high vacuum transfer chamber to connect to the frog arm assembly 400. The other end of the linear module 302 is connected to the support plate 106 through the connecting plate 303. Driven by the lifting drive component 301, the linear module 302 drives the frog arm assembly 400 to reciprocate up and down in the ultra-high vacuum transfer chamber, realizing the Z-axis movement function of the robot. The Z-axis movement height is generally 30-50mm. The lifting drive component 301 can be in the form of a motor, cylinder, or electric push rod. The specific structure of the linear module 302 can adopt conventional settings in this field, which will not be described in detail here.

[0038] Furthermore, the lifting mechanism 300 also includes a bellows 304. One end of the bellows 304 is sealed to the support plate 106, and the other end of the bellows 304 is sealed to the mounting flange 500, so as to maintain a seal between the first drive shaft 101 and the second drive shaft 102 and the ultra-high vacuum transmission chamber.

[0039] In this embodiment, the rotary drive mechanism 200 and the lifting mechanism 300 are installed at a certain distance above the mounting flange 500, located in the atmospheric environment. This design primarily considers the need for baking the ultra-high vacuum chamber during the initial vacuuming process, typically at temperatures below 200°C. The installation height of heat-sensitive components such as motors and sensors can be designed based on temperature simulations, generally above 200mm. These components are positioned above the baking hood during chamber baking, reducing the temperature resistance requirements of the motors, sensors, and bearings, and improving the reliability of the robotic arm.

[0040] The above description is merely a preferred embodiment of this utility model. The protection scope of this utility model is not limited to the above embodiments. All technical solutions falling within the scope of this utility model's concept are protected. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A robotic arm suitable for ultra-high vacuum transfer cavities, characterized in that, include: The system comprises a three-axis magnetic coupling transmission mechanism (100), a rotary drive mechanism (200), a frog arm assembly (400), and a mounting flange (500). The mounting flange (500) is mounted on the top cover of the ultra-high vacuum transfer chamber. One end of the three-axis magnetic coupling transmission mechanism (100) is connected to the rotary drive mechanism (200), and the other end of the three-axis magnetic coupling transmission mechanism (100) extends through the mounting flange (500) into the ultra-high vacuum transfer chamber and is connected to the frog arm assembly (400). The rotary drive mechanism (200) is used to drive the three-axis magnetic coupling transmission mechanism (100) to rotate the frog arm assembly (400) as a whole within the ultra-high vacuum transfer chamber, or to retract or open the frog arm assembly (400) to transfer materials within the ultra-high vacuum transfer chamber.

2. The robotic arm suitable for ultra-high vacuum transfer chambers according to claim 1, characterized in that, The triaxial magnetic coupling transmission mechanism (100) includes a first transmission shaft (101), a second transmission shaft (102), and an outer shaft (103) nested from the inside to the outside. The first transmission shaft (101), the second transmission shaft (102), and the outer shaft (103) are all connected to the rotary drive mechanism (200), and the first transmission shaft (101) and the second transmission shaft (102) are both connected to the frog arm assembly (400). The outer shaft (103) is used to drive the first transmission shaft (101) and the second transmission shaft (102) to rotate synchronously, so as to realize the overall rotation of the frog arm assembly (400). The rotation directions of the first transmission shaft (101) and the second transmission shaft (102) are opposite, so as to drive the frog arm assembly (400) to retract or open.

3. The robotic arm suitable for ultra-high vacuum transfer cavities according to claim 2, characterized in that, The rotary drive mechanism (200) includes a first rotary drive (201), a second rotary drive (202), and a third rotary drive (203). The output end of the first rotary drive (201) is rotatably connected to the first transmission shaft (101) via a magnetic fluid (105). The output end of the second rotary drive (202) is rotatably connected to the second transmission shaft (102) via a magnetic fluid (105). The output end of the third rotary drive (203) is rotatably connected to the outer shaft (103) via a magnetic fluid (105).

4. The robotic arm suitable for ultra-high vacuum transfer cavities according to claim 3, characterized in that, The triaxial magnetic coupling transmission mechanism (100) further includes a housing (104) and a support plate (106). The housing (104) is mounted on the support plate (106), and the outer shaft (103) is nested inside the housing (104). The magnetofluid (105) includes an outer magnet and an inner magnet. The outer magnet is nested outside the housing (104) and cooperates with the rotary drive mechanism (200). The inner magnet is nested inside the housing (104) and cooperates with each transmission shaft.

5. The robotic arm suitable for ultra-high vacuum transfer cavities according to claim 2, characterized in that, The frog arm assembly (400) includes a first upper arm (401), a second upper arm (402), a first lower arm (403), a second lower arm (404), a third upper arm (407), a fourth upper arm (408), and a claw; the first lower arm (403) is located between the first upper arm (401) and the third upper arm (407), one end of the first upper arm (401) and the third upper arm (407) is connected to the second drive shaft (102), and the other end of the first upper arm (401) and the third upper arm (407) is connected to one end of the first lower arm (403) through a first pin (409); the second lower arm (404) is located between the second upper arm (401) and the third upper arm (402), the second lower arm (403) and the third upper arm (404), the fourth upper arm (408), and a claw; Between the second upper arm (402) and the fourth upper arm (408), one end of the second upper arm (402) and the fourth upper arm (408) is connected to the first drive shaft (101), and the other end of the second upper arm (402) and the fourth upper arm (408) is connected to one end of the second lower arm (404) through the second pin (410). The other ends of the first lower arm (403) and the second lower arm (404) are connected to the gripper. The rotation direction of the first upper arm (401) and the third upper arm (407) is opposite to the rotation direction of the second upper arm (402) and the fourth upper arm (408) so that the first lower arm (403) and the second lower arm (404) drive the gripper to extend or retract.

6. The robotic arm suitable for ultra-high vacuum transfer cavities according to claim 5, characterized in that, The hand includes a wrist (405) and fingers (406), one end of the wrist (405) is connected to the first forearm (403) and the second forearm (404), and the other end of the wrist (405) is connected to the fingers (406).

7. The robotic arm suitable for ultra-high vacuum transfer cavities according to claim 6, characterized in that, The first arm (401), the second arm (402), the third arm (407) and the fourth arm (408) are located in different vertical planes.

8. The robotic arm suitable for ultra-high vacuum transfer cavities according to claim 5, characterized in that, The first forearm (403) and the second forearm (404) are symmetrically arranged, and both the first forearm (403) and the second forearm (404) are concave structures.

9. The robotic arm suitable for ultra-high vacuum transfer cavities according to claim 4, characterized in that, It also includes a lifting mechanism (300), which includes a lifting drive (301), a linear module (302), and a connecting plate (303). The output end of the lifting drive (301) is connected to the linear module (302). One end of the linear module (302) is fixedly connected to the mounting flange (500). The first drive shaft (101) and the second drive shaft (102) extend into the ultra-high vacuum transfer chamber after sealing through the mounting flange (500) to connect to the frog arm assembly (400). The other end of the linear module (302) is connected to the support plate (106) through the connecting plate (303). Under the drive of the lifting drive (301), the linear module (302) drives the frog arm assembly (400) to reciprocate up and down in the ultra-high vacuum transfer chamber.

10. The robotic arm suitable for ultra-high vacuum transfer chambers according to claim 9, characterized in that, The lifting mechanism (300) also includes a bellows (304), one end of which is sealed to the support plate (106), and the other end of which is sealed to the mounting flange (500).

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