Device for carrying out ion nitriding treatment on surface of steel and iron material

By designing a concave-convex structure and circular through holes on the active screen, the problem of uneven electric field distribution was solved, achieving uniformity and safety in nitriding of steel materials.

CN224172832UActive Publication Date: 2026-04-28SHENZHEN SHENGGE PLASMA PENETRATION TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHENZHEN SHENGGE PLASMA PENETRATION TECH CO LTD
Filing Date
2025-05-23
Publication Date
2026-04-28

AI Technical Summary

Technical Problem

The planar structure of existing high-frequency power supply active screens leads to uneven electric field distribution, which affects the uniformity and consistency of nitriding layers in workpieces with large or complex shapes.

Method used

An active screen with a concave-convex structure, combined with a circular through-hole design, is used to improve the electric field distribution and increase the sputtering intensity.

Benefits of technology

It improves the uniformity and effect of nitriding on the workpiece surface, enhances the ion bombardment effect, and ensures equipment safety.

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Abstract

The utility model relates to the technical field of ion nitriding treatment, in particular to a device for carrying out ion nitriding treatment on the surface of a steel material, which comprises a base, a shell, a vacuum chamber, a lower locking piece, a sealing cover, an upper locking piece, a first lifting hanging piece, an insulating fixing frame and an objective table, a plurality of lower locking pieces are fixedly connected to the shell, a sealing cover covers the shell, a plurality of upper locking pieces are fixedly connected to the sealing cover, a first lifting hanging piece is fixedly connected to the sealing cover, a plurality of insulating fixing frames are fixedly connected to the shell, and an objective table is fixedly connected to the insulating fixing frames. By means of the concave-convex structure on the concave-convex structure active screen, the nitriding uniformity of workpieces at different positions in an effective working area is improved, the sputtering strength can be improved through the circular through holes, and the nitriding effect is improved.
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Description

Technical Field

[0001] This utility model relates to the field of ion nitriding technology, and in particular to a device for ion nitriding treatment of steel material surface. Background Technology

[0002] Ion nitriding is a heat treatment process used to improve the surface hardness, wear resistance, fatigue resistance and corrosion resistance of steel materials. This technology injects nitrogen ions into the surface of steel materials by glow discharge in a vacuum or low-pressure atmosphere, thereby forming a hard nitrided layer.

[0003] Patent CN217026049U discloses a high-frequency power supply active screen ion nitriding device. It includes a reaction chamber, a main power supply, and a bias power supply. The cathode of the main power supply is connected to the active screen, and the bias power supply has a bias electrode. The cathode of the bias electrode is connected to the sample stage. Both the main power supply and the bias power supply are high-frequency pulse power supplies. When using this patent, the sample is placed on the sample stage, the vacuum pump is turned on to evacuate the ion nitriding furnace to a vacuum, high-purity ammonia gas is introduced and its flow rate is adjusted, and the current and voltage of the main power supply and the bias power supply are adjusted. The high-frequency power supply active screen undergoes a glow discharge reaction during ion nitriding. However, this existing patent still has some shortcomings in practical use. Because the surface of the high-frequency power supply active screen in the existing patent is planar, it leads to uneven electric field distribution during the reaction. When processing large or complex-shaped workpieces, some areas may not receive sufficient ion bombardment, affecting the uniformity and consistency of the nitrided layer.

[0004] Therefore, there is a need for an apparatus for ion nitriding treatment of steel material surfaces with an active screen having a concave-convex structure. Utility Model Content

[0005] In order to overcome the shortcomings of the existing high-frequency power supply active screen, which has a planar surface structure, resulting in uneven electric field distribution during the reaction, and causing insufficient ion bombardment in some areas when processing large or complex workpieces, thus affecting the uniformity and consistency of the nitriding layer, this utility model provides an apparatus for ion nitriding treatment of steel material surfaces with an active screen having a concave-convex structure.

[0006] To address the aforementioned problems, this utility model adopts the following technical solution: A device for ion nitriding treatment of steel materials, comprising a base, a housing, a vacuum chamber, lower locking components, a sealing cover, upper locking components, a first lifting bracket, an insulating fixing frame, a platform, a vacuum system, an air intake system, a pressure measuring unit, a temperature measuring unit, and a power supply system. The housing is fixedly connected to the base, and a vacuum chamber is disposed within the housing. Multiple lower locking components are fixedly connected to the housing, and a sealing cover is placed on top of the housing. Multiple upper locking components are fixedly connected to the sealing cover, and a first lifting bracket is fixedly connected to the sealing cover. The housing is also fixedly connected to... It has multiple insulating brackets, each with a platform fixedly connected to it. A vacuum system and an air intake system are installed on the base. A pressure measuring unit is installed on the sealing cover, and a temperature measuring unit is installed on the housing. A power supply system is also installed on the base. It further includes insulating fasteners, a textured active screen, an active screen cover, and a second lifting bracket. Multiple insulating fasteners are fixedly connected inside the housing, and textured active screens are mounted on these fasteners. The textured active screens have multiple circular through holes. An active screen cover is placed over the textured active screen, and a second lifting bracket is fixedly connected to the active screen cover.

[0007] Furthermore, the air extraction system includes a vacuum pump and an air extraction pipe. The vacuum pump is mounted on the base, and the air extraction pipe is connected between the vacuum pump and the housing.

[0008] Furthermore, the air intake system includes a flow controller, a mounting bracket, a gas mixer, and an air intake pipe. The flow controller is mounted on the base, the mounting bracket is fixedly connected to the base, the gas mixer is mounted on the mounting bracket, the gas mixer is connected to the flow controller using a connecting pipe, and the air intake pipe is connected between the gas mixer and the housing.

[0009] Furthermore, the pressure measurement unit includes a pressure gauge and a pressure probe. The pressure gauge is installed on the sealing cover, and the pressure probe is installed on the pressure gauge. The pressure probe passes through the sealing cover and is located inside the housing.

[0010] Furthermore, the temperature measurement unit includes a temperature sensor, which is mounted on the housing.

[0011] Furthermore, the power system includes a first power supply, a second power supply, a first terminal block, and a second terminal block. The first power supply is installed on the base, the second power supply is installed on the base, the first terminal block is installed on the concave-convex structure active screen, and the second terminal block is installed on the stage.

[0012] Compared with the prior art, the present invention has the following technical effects: 1. By using the concave-convex structure on the active screen, the uniformity of nitriding of workpieces in different parts of the effective working area is improved, and the circular through hole can increase the sputtering intensity and improve the nitriding effect.

[0013] 2. The pressure probe detects pressure changes in the vacuum chamber in real time and converts this information into electrical signals, which are then transmitted to the pressure gauge. The corresponding pressure value is displayed on the pressure gauge, and the reading on the pressure gauge alerts the operator to potential safety hazards, preventing equipment damage or dangerous accidents caused by excessive pressure. In addition, the temperature sensor can provide real-time feedback on the temperature inside the vacuum chamber. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0015] Figure 2 This is a three-dimensional structural diagram of the base, shell, and sealing cap of this utility model.

[0016] Figure 3 This is a three-dimensional cross-sectional view of the pressure gauge, pressure probe, and temperature sensor of this utility model.

[0017] Figure 4 This is a three-dimensional cross-sectional view of the concave-convex structure active screen and active screen cover of this utility model.

[0018] Component names and numbers in the diagram: 1-Base, 2-House, 201-Vacuum Chamber, 3-Lower Locking Component, 4-Sealing Cover, 5-Upper Locking Component, 6-First Lifting Mount, 7-Vacuum Pump, 8-Evacuation Pipe, 9-Flow Controller, 10-Mounting Bracket, 11-Gas Mixer, 12-Inlet Pipe, 13-Pressure Gauge, 14-Pressure Probe.

[0019] 15-Temperature sensor, 16-Insulating fastener, 17-Concave-convex structure active screen, 18-Circular through hole, 19-Active screen cover, 20-Second lifting bracket, 21-Insulating fastener, 22-Platform, 23-First power supply, 24-Second power supply, 26-First terminal block, 27-Second terminal block. Detailed Implementation

[0020] The preferred technical solution of this utility model will be described in detail below with reference to the accompanying drawings.

[0021] Example 1: An apparatus for ion nitriding treatment of steel materials, see [reference] Figures 1-4As shown, the system includes a base 1, a housing 2, a vacuum chamber 201, lower locking components 3, a sealing cover 4, upper locking components 5, a first lifting bracket 6, an insulating fixing frame 21, a platform 22, a vacuum system, an air intake system, a pressure measuring unit, a temperature measuring unit, and a power supply system. The housing 2 is welded to the top of the base 1. The vacuum chamber 201 is located inside the housing 2. Four lower locking components 3 are welded to the upper part of the housing 2 at even intervals. A sealing cover 4 covers the top of the housing 2. Four upper locking components 5 are welded to the outer side of the sealing cover 4 at even intervals. The four lower locking components 3 are fitted to the four upper locking components 5. The first lifting bracket 6 is fixedly connected to the top of the sealing cover 4. Four insulating fixing frames 21 are fixedly connected to the bottom of the housing 2 at even intervals. A platform 22 is fixedly connected to the four insulating fixing frames 21. The base 1 is equipped with a vacuum system for extracting gas from the housing 2 and an air intake system for filling with nitrogen. The sealing cover 4 is equipped with a... The pressure measuring unit monitors the pressure level of the vacuum chamber 201. A temperature measuring unit for detecting the temperature inside the housing 2 is located at the bottom of the housing 2. A power supply system for providing electrical energy is located on the base 1. The system also includes insulating fasteners 16, a concave-convex structure active screen 17, an active screen cover 19, and a second lifting bracket 20. Four insulating fasteners 16 are evenly spaced and fixedly connected to the bottom of the housing 2. Concave-convex structure active screens 17 are installed on the four insulating fasteners 16. The cylindrical cage wall of the active screen has a concave-convex structure, which can be evenly distributed throughout the active screen or only locally. The concave-convex structure can be distributed along the longitudinal or transverse direction of the active screen according to a certain pattern. The concave-convex structure can be centrally symmetrical or non-centrally symmetrical. The stage 22 is located inside the concave-convex structure active screen 17. Multiple circular through holes 18 are evenly spaced on the concave-convex structure active screen 17. An active screen cover 19 covers the top of the concave-convex structure active screen 17, and a second lifting bracket 20 is fixedly connected to the top of the active screen cover 19.

[0022] When performing ion nitriding on the surface of steel materials, firstly, the sealing cover 4 is opened using the first lifting bracket 6, and then the steel material is placed on the stage 22. After placement, the sealing cover 4 is replaced and bolted to the upper locking member 5 and the lower locking member 3 to ensure a sealed state inside the housing 2. Then, the power system is connected to the stage 22 and the concave-convex structure active screen 17 using electrical wires, with the stage 22 as the negative terminal and the concave-convex structure active screen 17 as the positive terminal. After connection, the gas in the vacuum chamber 201 is evacuated using the evacuation system to create a vacuum state. Then, nitrogen is drawn into the housing 2 through the air intake system, and the electrical system is activated. This causes the electrical system to apply voltage, generating a glow discharge between the cathode and anode. This causes nitrogen molecules to decompose into nitrogen atoms, which are then further ionized into nitrogen ions. Under the influence of the electric field, the nitrogen ions accelerate and impact the surface of the steel material, diffuse into the surface layer of the material, and react with the alloying elements on the surface of the steel material to form nitrides. This process is used to perform ion nitriding treatment on the steel material. During the reaction, the pressure and temperature inside the housing 2 are detected by the pressure measurement unit and the temperature measurement unit. During the reaction, the uneven structure on the active screen 17 improves the uniformity of nitriding in different parts of the workpiece within the effective working area, and the circular through-hole 18 can increase the sputtering intensity and improve the nitriding effect.

[0023] Example 2: Based on Example 1, refer to Figure 2 As shown, the air extraction system includes a vacuum pump 7 and an air extraction pipe 8. The vacuum pump 7 is installed on the top right side of the base 1 by means of bolt connection, and the air extraction pipe 8 is connected between the vacuum pump 7 and the housing 2.

[0024] When the evacuation system is needed, the vacuum pump 7 is started, which evacuates the gas in the housing 2 through the evacuation pipe 8, thereby putting the vacuum chamber 201 into a vacuum state.

[0025] See Figure 2 As shown, the air intake system includes a flow controller 9, a mounting bracket 10, a gas mixer 11, and an air intake pipe 12. The flow controller 9 is bolted to the top of the base 1, and the mounting bracket 10 is welded to the top of the base 1. The mounting bracket 10 is located to the right of the flow controller 9. The gas mixer 11 is bolted to the mounting bracket 10. The gas mixer 11 is connected to the flow controller 9 using a connecting pipe. The air intake pipe 12 connects the gas mixer 11 to the housing 2.

[0026] When the intake system is to be used, nitrogen is input into the flow controller 9 by connecting the flow controller 9 to the nitrogen supply pipe. The flow controller 9 precisely controls the flow rate of nitrogen entering the system. The nitrogen is then input into the gas mixer 11, which helps to evenly distribute the gas flow. Finally, the nitrogen enters the housing 2 through the intake pipe 12, thereby adding nitrogen to the system.

[0027] See Figures 1-3 As shown, the pressure measuring unit includes a pressure gauge 13 and a pressure probe 14. The pressure gauge 13 is installed on the top of the sealing cover 4, and the pressure probe 14 is installed on the bottom of the pressure gauge 13. The pressure probe 14 penetrates the sealing cover 4 and is located inside the housing 2.

[0028] See Figure 3 As shown, the temperature measurement unit includes a temperature sensor 15. The temperature sensor 15 is installed at the bottom of the housing 2 by means of bolt connection. The temperature sensor 15 is located to the right of the concave-convex structure active screen 17.

[0029] During the reaction, the pressure probe 14 detects the pressure changes in the vacuum chamber 201 in real time and converts this information into an electrical signal, which is then transmitted to the pressure gauge 13. The corresponding pressure value is displayed on the pressure gauge 13. The reading on the pressure gauge 13 alerts the operator to potential safety hazards and prevents equipment damage or dangerous accidents caused by excessive pressure. In addition, the temperature sensor 15 can provide real-time feedback on the temperature inside the vacuum chamber 201.

[0030] See Figure 1 , Figure 2 and Figure 4 As shown, the power system includes a first power supply 23, a second power supply 24, a first terminal block 26, and a second terminal block 27. The first power supply 23 is installed on the top of the base 1, and the second power supply 24 is installed on the base 1. The second power supply 24 is a bias power supply and is located to the right of the first power supply 23. The first terminal block 26 is installed inside the concave-convex structure active screen 17, and the second terminal block 27 is installed at the bottom of the stage 22.

[0031] When a power system is required, the first terminal 26 and the second terminal 27 are connected to the first power supply 23 by using wires, so that the second terminal 27 is the cathode and the first terminal 26 is the positive terminal. Then, the second power supply 24 is connected. The second power supply 24 is a bias power supply and the bias value can be adjusted to further enhance the ion bombardment effect.

[0032] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An apparatus for ion nitriding treatment of steel material surface, comprising a base (1), a housing (2), a vacuum chamber (201), a lower locking member (3), a sealing cover (4), an upper locking member (5), a first lifting bracket (6), an insulating fixing frame (21), a stage (22), a vacuum system, an air intake system, a pressure measuring unit, a temperature measuring unit, and a power supply system. The housing (2) is fixedly connected to the base (1), the vacuum chamber (201) is provided inside the housing (2), and multiple lower locking members (3) are fixedly connected to the housing (2). (2) The upper cover has a sealing cover (4), and multiple upper locking parts (5) are fixedly connected to the sealing cover (4). A first lifting bracket (6) is fixedly connected to the sealing cover (4). Multiple insulating brackets (21) are fixedly connected to the housing (2). A platform (22) is fixedly connected to the multiple insulating brackets (21). An air extraction system is provided on the base (1). An air intake system is provided on the base (1). A pressure measuring unit is provided on the sealing cover (4). A temperature measuring unit is provided on the housing (2). A power supply system is provided on the base (1). The feature is that It also includes an insulating fastener (16), a concave-convex structure active screen (17), an active screen cover (19), and a second lifting bracket (20). Multiple insulating fasteners (16) are fixedly connected inside the housing (2). The concave-convex structure active screen (17) is installed on the multiple insulating fasteners (16). Multiple circular through holes (18) are opened on the concave-convex structure active screen (17). The active screen cover (19) is covered on the concave-convex structure active screen (17). The second lifting bracket (20) is fixedly connected to the active screen cover (19).

2. The apparatus for ion nitriding treatment of steel material surface according to claim 1, characterized in that, The air extraction system includes a vacuum pump (7) and an air extraction pipe (8). The vacuum pump (7) is installed on the base (1), and the air extraction pipe (8) is connected between the vacuum pump (7) and the housing (2).

3. The apparatus for ion nitriding treatment of steel material surface according to claim 2, characterized in that, The air intake system includes a flow controller (9), a mounting bracket (10), a gas mixer (11), and an air intake pipe (12). The flow controller (9) is mounted on the base (1), the mounting bracket (10) is fixedly connected to the base (1), the gas mixer (11) is mounted on the mounting bracket (10), the gas mixer (11) is connected to the flow controller (9) by a connecting pipe, and the air intake pipe (12) is connected between the gas mixer (11) and the housing (2).

4. The apparatus for ion nitriding treatment of steel material surface according to claim 3, characterized in that, The pressure measuring unit includes a pressure gauge (13) and a pressure probe (14). The pressure gauge (13) is installed on the sealing cover (4), and the pressure probe (14) is installed on the pressure gauge (13). The pressure probe (14) passes through the sealing cover (4) and is located inside the housing (2).

5. The apparatus for ion nitriding treatment of steel material surface according to claim 4, characterized in that, The temperature measurement unit includes a temperature sensor (15), and the temperature sensor (15) is mounted on the housing (2).

6. The apparatus for ion nitriding treatment of steel material surface according to claim 5, characterized in that, The power system includes a first power supply (23), a second power supply (24), a first terminal block (26), and a second terminal block (27). The first power supply (23) is installed on the base (1), the second power supply (24) is installed on the base (1), the first terminal block (26) is installed on the concave-convex structure active screen (17), and the second terminal block (27) is installed on the stage (22).

Citation Information

Patent Citations

  • High-frequency power supply active screen ion nitriding device

    CN217026049U