Air inlet control device and plate type coating equipment

Abstract

The utility model relates to the field of plate-type coating equipment, and provides an air inlet control device and plate-type coating equipment, the air inlet control device comprises an air distribution pipe, an air inlet assembly and a spraying pipe, and the air distribution pipe is axially provided with a plurality of air distribution holes at intervals; the air inlet assembly comprises a plurality of air inlet pipes, a sealing assembly and a control valve, one ends of the air inlet pipes are suitable for being connected with the air distribution holes through the control valve, and the other ends of the air inlet pipes penetrate into a cavity cover of the vacuum cavity through the sealing assembly. And the air inlet pipe and the spraying pipe can be controlled to move up and down. Each gas inlet pipe is provided with a control valve capable of being independently controlled, the spraying amount of each spraying pipe can be accurately controlled by adjusting opening and closing of the control valves, and then the density of reaction gas at different positions is adjusted and controlled; the relative position of the second connecting flange and the first connecting flange is manually or electrically adjusted, the first telescopic pipe can be driven to stretch out and draw back in the axial direction, and therefore accurate displacement of the air inlet pipe and the spraying pipe in the vertical direction is achieved.

Description

Technical Field

[0001] This utility model relates to the field of plate coating equipment, and further to an air intake control device and plate coating equipment. Background Technology

[0002] Adjusting the uniformity of the film layer on existing plate coating machines can only be done manually by attaching the spray nozzles of the reactive gas spray pipes after the machine is opened, or by manually changing the spray orifice diameter. This method lacks automation and convenience, and the entire adjustment process is cumbersome and time-consuming, taking at least one hour, which seriously slows down the production line's mass production pace and significantly reduces production efficiency. In addition, the opening operation also poses potential risks, as the high-temperature environment and the presence of residual special gases threaten personnel safety and do not meet the requirements of scientific and safe operating procedures. Utility Model Content

[0003] To address the aforementioned technical problems, the purpose of this utility model is to provide an inlet control device and a plate-type coating equipment. During the process reaction, the reaction gas first enters the gas distribution pipe, and then is diverted by the gas distribution pipe to several inlet pipes and spray pipes. Each inlet pipe is equipped with an individually controllable control valve. By adjusting the opening and closing of these control valves, the spray volume of each spray pipe can be precisely controlled, thereby regulating the reaction gas density at different locations and effectively adjusting the uniformity of the coating. The entire process does not require opening the cover of the vacuum chamber. By manually or electrically adjusting the relative position of the second connecting flange and the first connecting flange, the axial extension and retraction of the first telescopic pipe can be driven, thereby achieving precise vertical displacement of the inlet pipe and spray pipe. When adjusting the height of the spray pipe, it is not necessary to disassemble the vacuum chamber, which avoids the impact of pressure fluctuations in the chamber on the coating quality and significantly shortens the process preparation time.

[0004] To achieve the above objectives, this utility model provides an air intake control device, including an air distribution pipe, an air intake assembly, and a spray pipe. The air distribution pipe is adapted to allow the reaction gas to enter, and the air distribution pipe is provided with a plurality of air distribution holes at axial intervals. The air intake assembly includes a plurality of air intake pipes, a sealing assembly, and a control valve. One end of the air intake pipe is adapted to be connected to the air distribution holes through the control valve, and the other end is adapted to penetrate into the cavity cover of a vacuum chamber through the sealing assembly.

[0005] The spray pipe is located at the end of the air inlet pipe that enters the vacuum chamber.

[0006] In some embodiments, the sealing assembly includes a first connecting flange, a second connecting flange, and a first telescopic tube. The first connecting flange and the second connecting flange are respectively disposed at both ends of the first telescopic tube. The first connecting flange is fixedly connected to the vacuum chamber. The air inlet pipe is adapted to be sealed to the second connecting flange and then passes through the first telescopic tube and the first connecting flange to reach the vacuum chamber.

[0007] By adjusting the relative position of the second connecting flange and the first connecting flange, the vertical movement of the air inlet pipe and the spray pipe can be controlled.

[0008] In some embodiments, the sealing assembly further includes a retaining screw and a retaining nut, the retaining screw being adapted to pass through and connect the first connecting flange and the second connecting flange, and the retaining nut being used to adjust the relative positions of the first connecting flange and the second connecting flange.

[0009] In some embodiments, the air intake assembly further includes a second telescopic tube that connects the air distribution port and the control valve, enabling the control valve to move up and down following the air intake tube.

[0010] In some embodiments, the first telescopic tube and the second telescopic tube are metal corrugated pipes.

[0011] In some embodiments, the central axis of the spray pipe is perpendicular to the central axis of the air distribution pipe, and the nozzles of the spray pipe are located at both ends of the central axis of the spray pipe.

[0012] In some embodiments, the two ends of the spray pipe along the central axis are inclined downwards and form a certain angle with the horizontal plane.

[0013] In some embodiments, an air supply pipe is also included, which is connected to the center of the central axis of the air distribution pipe.

[0014] According to another aspect of this application, a plate-type coating apparatus is further provided, including any one of the air intake control devices and a vacuum chamber described in the preferred embodiments above.

[0015] Compared with the prior art, the air intake control device and plate coating equipment provided by this utility model have at least one of the following beneficial effects:

[0016] 1. During the process reaction, the reaction gas first enters the gas distribution pipe, and then is diverted to several gas inlet pipes and spray pipes. Each gas inlet pipe is equipped with an individually controllable control valve. By adjusting the opening and closing of these control valves, the spray volume of each spray pipe can be precisely controlled, thereby regulating the reaction gas density at different locations and effectively adjusting the uniformity of the coating. The entire process does not require opening the cover of the vacuum chamber. By manually or electrically adjusting the relative position of the second connecting flange and the first connecting flange, the axial extension and retraction of the first telescopic pipe can be driven, thereby achieving precise vertical displacement of the gas inlet pipe and spray pipe. When adjusting the height of the spray pipe, it is not necessary to disassemble the vacuum chamber, which avoids the impact of pressure fluctuations in the chamber on the coating quality and significantly shortens the process preparation time.

[0017] 2. The second telescopic tube connects the air distribution port to the control valve, thereby ensuring that the control valve can adjust its position synchronously as the air intake pipe moves up and down.

[0018] 3. The two ends of the spray pipe along the central axis are inclined downwards, forming a certain angle with the horizontal plane. In this way, when the gas is ejected from the nozzle, its trajectory is inclined downwards. On the one hand, it can more accurately cover the substrate surface at different locations inside the vacuum chamber, achieving uniform coating. On the other hand, the inclined nozzle helps to optimize the gas flow path, reduce the disorderly diffusion of gas after ejection, thereby improving the utilization rate of the reactive gas and further improving the uniformity and quality of the coating. Attached Figure Description

[0019] The preferred embodiments will be described below in a clear and easy-to-understand manner, in conjunction with the accompanying drawings, to further explain the above-mentioned characteristics, technical features, advantages and implementation methods of this utility model.

[0020] Figure 1 This is an overall diagram of the intake control device;

[0021] Figure 2 This is a front view of the intake control device;

[0022] Figure 3 This is a structural diagram of the sealing assembly;

[0023] Figure 4 This is a structural diagram of the spray pipe.

[0024] Explanation of icon numbers:

[0025] Air distribution pipe 1, air supply pipe 11, air intake assembly 2, air intake pipe 21, sealing assembly 22, first connecting flange 221, second connecting flange 222, first telescopic pipe 223, fixing screw 224, fixing nut 225, control valve 23, second telescopic pipe 24, spray pipe 3, chamber cover 4. Detailed Implementation

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the specific implementation methods of this utility model will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of this utility model. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0027] To keep the drawings concise, each figure only schematically shows the parts relevant to the utility model, and these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some figures, only one of the components with the same structure or function is schematically depicted, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one."

[0028] It should also be further understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0029] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0030] Furthermore, in the description of this application, the terms "first," "second," etc., are used only for distinguishing descriptions and should not be construed as indicating or implying relative importance. It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

[0031] refer to Figures 1 to 3 This utility model provides an air intake control device, including a gas distribution pipe 1, an air intake assembly 2, and a spray pipe 3. The gas distribution pipe 1 is suitable for entering the reaction gas, and the gas distribution pipe 1 is provided with a plurality of gas distribution holes at axial intervals. The air intake assembly 2 includes a plurality of air intake pipes 21, a sealing assembly 22, and a control valve 23. One end of the air intake pipe 21 is suitable for connecting to the gas distribution holes through the control valve 23, and the other end is suitable for passing through the sealing assembly 22 and entering the cavity cover 4 of the vacuum chamber. The spray pipe 3 is disposed at the end of the air intake pipe 21 that enters the vacuum chamber.

[0032] In this embodiment, during the process reaction, the reaction gas first enters the gas distribution pipe 1, and then is diverted by the gas distribution pipe 1 to several gas inlet pipes 21 and spray pipes 3. Each gas inlet pipe 21 is equipped with a control valve 23 that can be controlled individually. By adjusting the opening and closing of these control valves 23, the spray volume of each spray pipe 3 can be precisely controlled, thereby regulating the reaction gas density at different positions, thus effectively adjusting the uniformity of the coating. The entire process does not require opening the cavity cover 4 of the vacuum chamber.

[0033] Specifically, the gas distribution pipe 1 is adapted to guide the reaction gas inward, and multiple gas distribution holes are regularly spaced in the axial direction. These gas distribution holes provide a key channel for the subsequent gas diversion.

[0034] The intake assembly 2 includes several intake pipes 21, a sealing assembly 22, and a control valve 23. One end of each intake pipe 21 can be connected to a gas distribution port through a corresponding control valve 23, while the other end is precisely inserted into the cavity cover 4 of the vacuum chamber through the sealing assembly 22, thereby achieving a stable connection between the intake pipe 21 and the vacuum chamber, ensuring both smooth gas transmission and the airtightness of the vacuum chamber. At this time, the sealing assembly 22 provides a sealing function at the connection between the intake pipe 21 and the vacuum chamber.

[0035] During the reaction stage, the reactant gas first enters the gas distribution pipe 1, and is then diverted through the pipe to multiple inlet pipes 21 and spray pipes 3. Each inlet pipe 21 is equipped with an individually adjustable control valve 23. By precisely controlling the opening and closing of these control valves 23, the spray volume of each spray pipe 3 can be meticulously managed. In this way, the reactant gas density at different locations can be precisely adjusted, thereby effectively improving the uniformity of the coating. Throughout the adjustment process, there is no need to open the vacuum chamber cover 4, which saves time and improves the safety and convenience of operation.

[0036] It is worth noting that this application effectively solves the time-consuming and labor-intensive problem of frequently opening and closing the chamber cover 4 and starting and stopping the vacuum pump when adjusting the uniformity of the film layer. During the process, the uniformity of the film thickness can be easily adjusted by simply adjusting the control valve 23 on each gas inlet pipe 21, without stopping the machine, which greatly improves production efficiency. The control valve 23 may also include a pressure regulating device and a flow control device to ensure the stability of the gas pressure and flow rate during transmission. These devices can monitor and adjust the gas supply parameters in real time to adapt to different process requirements, further improving the gas utilization efficiency and the controllability of the reaction.

[0037] Furthermore, the sealing assembly 22 includes a first connecting flange 221, a second connecting flange 222, and a first telescopic tube 223. The first connecting flange 221 and the second connecting flange 222 are respectively disposed at both ends of the first telescopic tube 223. The first connecting flange 221 is fixedly connected to the vacuum chamber. The air inlet pipe 21 is adapted to be sealed to the second connecting flange 222 and then passes through the first telescopic tube 223 and the first connecting flange 221 to reach the vacuum chamber. By adjusting the relative position of the second connecting flange 222 and the first connecting flange 221, the up and down movement of the air inlet pipe 21 and the spray pipe 3 can be controlled.

[0038] In this embodiment, by manually or electrically adjusting the relative position of the second connecting flange 222 and the first connecting flange 221, the axial extension and retraction of the first telescopic pipe 223 can be driven, thereby achieving precise vertical displacement of the air inlet pipe 21 and the spray pipe 3. When adjusting the height of the spray pipe 3, there is no need to disassemble the vacuum chamber, which avoids the impact of pressure fluctuations in the chamber on the coating quality and significantly shortens the process preparation time.

[0039] Specifically, the sealing assembly 22 includes a first connecting flange 221, a second connecting flange 222, and a first telescopic tube 223. The first connecting flange 221 and the second connecting flange 222 are respectively fixedly installed at both ends of the first telescopic tube 223, while the first connecting flange 221 is rigidly connected to the vacuum chamber by bolts, ensuring the stability of the device. The inlet pipe 21 is sealed to the second connecting flange 222 by a sealing gasket and passes sequentially through the first telescopic tube 223 and the first connecting flange 221, ultimately precisely delivering the reaction gas into the vacuum chamber. In actual operation, the axial extension and retraction of the first telescopic tube 223 can be driven by manually or electrically adjusting the relative position of the second connecting flange 222 and the first connecting flange 221, thereby achieving precise vertical displacement of the inlet pipe 21 and the spray pipe 3. This not only meets the flexible adjustment requirements of the vacuum chamber for the position of the spray pipe 3 at different process stages but also effectively prevents gas leakage through a multi-layer sealing structure (such as O-rings and conical seals). Its greatest advantage lies in the fact that the vacuum chamber does not need to be disassembled when adjusting the height of the spray pipe 3, thus avoiding the impact of pressure fluctuations within the chamber on the coating quality and significantly shortening the process preparation time. The sealing assembly 22 can also be fitted with a gasket between the first connecting flange 221 and the second connecting flange 222 to further enhance the sealing effect. The gasket can be made of high-temperature resistant and corrosion-resistant materials to adapt to different process environments. This multi-layer sealing design not only improves sealing performance but also ensures the long-term stable operation of the equipment.

[0040] Preferably, the sealing assembly 22 further includes a fixing screw 224 and a fixing nut 225. The fixing screw 224 is adapted to pass through and connect the first connecting flange 221 and the second connecting flange 222, and the fixing nut 225 adjusts the relative position of the first connecting flange 221 and the second connecting flange 222. The fixing screw 224 is adapted to pass through and connect the first connecting flange 221 and the second connecting flange 222. By rotating the fixing nut 225, the relative distance between the first connecting flange 221 and the second connecting flange 222 can be precisely adjusted, thereby achieving fine control over the axial extension and retraction of the first telescopic tube 223. This adjustment mechanism not only improves the accuracy of position adjustment but also enhances the stability and reliability of the entire device.

[0041] It is worth noting that the sealing assembly 22 can take many forms, which will not be elaborated further in this application, as long as it can achieve the sealing and axial movement of the intake pipe 21. In a modified embodiment, the sealing assembly 22 includes a magnetic rotor, an upper end cover, a lower end cover, and a magnetic fluid. The magnetic rotor is mounted on the intake pipe 21, the upper end cover is fixed to the vacuum chamber, and the lower end cover is connected to the intake pipe 21. The magnetic fluid fills the annular gap between the magnetic rotor and the upper and lower end covers. Under the action of the magnetic field, the magnetic fluid forms a sealing ring, preventing gas leakage. When the vertical position of the intake pipe 21 and the spray pipe 3 is adjusted, the magnetic rotor moves with the intake pipe 21, and the magnetic fluid can still maintain good sealing performance under the redistribution of the magnetic field.

[0042] Furthermore, the intake assembly 2 also includes a second telescopic tube 24, which connects the air distribution port and the control valve 23, so that the control valve 23 can move up and down with the intake pipe 21.

[0043] In this embodiment, the second telescopic tube 24 connects the air distribution port to the control valve 23, thereby ensuring that the control valve 23 can adjust its position synchronously as the air intake pipe 21 moves up and down.

[0044] Specifically, the second telescopic tube 24 is made of high-strength, corrosion-resistant material, possessing excellent flexibility and stability, and capable of withstanding temperature changes and pressure fluctuations that may occur during the process. Its coordinated operation with the first telescopic tube 223 makes the vertical adjustment of the entire intake assembly 2 smoother and more precise. Preferably, the first telescopic tube 223 and the second telescopic tube 24 are metal bellows. It is worth noting that the vertical movement of the intake assembly 2 can also move the air distribution pipe 1 along with it; this will not be further elaborated upon here.

[0045] Further, refer to Figure 4 The central axis of the spray pipe 3 is perpendicular to the central axis of the air distribution pipe 1, and the nozzles of the spray pipe 3 are located at both ends of the central axis of the spray pipe 3. The two ends of the central axis of the spray pipe 3 are inclined downward and form a certain angle with the horizontal plane.

[0046] In this embodiment, the two ends of the central axis of the spray pipe 3 are inclined downwards, forming a certain angle with the horizontal plane. In this way, when the gas is ejected from the nozzle, its trajectory is inclined downwards. On the one hand, it can more accurately cover the substrate surface at different positions inside the vacuum chamber and achieve uniform coating. On the other hand, the inclined nozzle helps to optimize the gas flow path and reduce the disordered diffusion of gas after ejection, thereby improving the utilization rate of the reactive gas and further improving the uniformity and quality of the coating.

[0047] Specifically, the central axis of the spray pipe 3 is perpendicular to the central axis of the gas distribution pipe 1, and the nozzles of the spray pipe 3 are located at both ends of its central axis. Both ends of the spray pipe 3 slope downwards along its central axis, forming a specific acute angle with the horizontal plane, typically between 15° and 45°. This ensures that when the gas is ejected from the nozzles, its flow direction is not only perpendicular to the axis of the gas distribution pipe 1 in the horizontal direction, but also diffuses to all corners of the vacuum chamber at a certain downward angle. This allows for more uniform coverage of the substrate surface at different locations within the vacuum chamber, achieving a more uniform coating effect. The inclined nozzle design not only increases the gas coverage area but also helps reduce turbulence and backflow after ejection, thereby improving the utilization rate of the reactive gas and the uniformity of the coating.

[0048] Furthermore, the tilt angle of the spray pipe 3 and the opening parameters of the nozzle can be adjusted according to specific process requirements. For example, in applications with a large coating area, the opening area of ​​the nozzle can be appropriately increased and the tilt angle reduced to increase the gas coverage; while in areas where the coating thickness requirement is high, the opening area of ​​the nozzle can be reduced and the tilt angle increased to improve the local gas concentration.

[0049] Furthermore, it also includes a gas supply pipe 11, which is connected to the center of the central axis of the gas distribution pipe 1. In this embodiment, the gas can stably enter the central region of the gas distribution pipe 1 through the gas supply pipe 11, and then be evenly distributed to each gas distribution hole, and then enter each gas inlet pipe 21 and spray pipe 3. This central gas supply method not only improves the uniformity of gas distribution, but also reduces turbulence and pressure loss when the gas enters the gas distribution pipe 1, thereby ensuring the stable transmission and efficient utilization of the reactant gas in the entire system.

[0050] Specifically, when gas enters the distribution pipe 1 from the supply pipe 11, because the supply pipe 11 is connected to the center of the central axis of the distribution pipe 1, the gas can enter the central region of the distribution pipe 1 at a relatively low speed and with a uniform flow pattern. This avoids the gas impacting the inner wall of the distribution pipe 1 at high speed, thereby reducing turbulence and eddy currents caused by high-speed impact.

[0051] Furthermore, this application provides a plate-type coating equipment, including the air intake control device and vacuum chamber as described in any of the above embodiments, wherein the air intake component 2 of the air intake control device is installed on the chamber cover 4 of the vacuum chamber.

[0052] It should be noted that the above embodiments can be freely combined as needed. The above are merely preferred embodiments of this utility model. It should be pointed out that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. An intake control device, characterized in that, include: Gas distribution pipe, the gas distribution pipe is adapted to enter the reaction gas, and the gas distribution pipe is provided with a plurality of gas distribution holes at axial intervals; An air intake assembly includes several air intake pipes, a sealing assembly, and a control valve. One end of the air intake pipe is adapted to connect to the air distribution port through the control valve, and the other end is adapted to penetrate into the cover of the vacuum chamber through the sealing assembly. A spray pipe is disposed at one end of the air inlet pipe that enters the vacuum chamber; The sealing assembly includes a first connecting flange, a second connecting flange, and a first telescopic tube. The first connecting flange and the second connecting flange are respectively disposed at both ends of the first telescopic tube. The first connecting flange is fixedly connected to the vacuum chamber. The air inlet pipe is adapted to be sealed and connected to the second connecting flange, and then passes through the first telescopic tube and the first connecting flange to reach the vacuum chamber. By adjusting the relative position of the second connecting flange and the first connecting flange, the vertical movement of the air inlet pipe and the spray pipe can be controlled.

2. The intake control device according to claim 1, characterized in that, The sealing assembly further includes a fixing screw and a fixing nut. The fixing screw is adapted to pass through and connect the first connecting flange and the second connecting flange, and the fixing nut is used to adjust the relative position of the first connecting flange and the second connecting flange.

3. The intake control device according to claim 2, characterized in that, The air intake assembly also includes a second telescopic tube, which connects the air distribution port and the control valve, allowing the control valve to move up and down with the air intake tube.

4. An intake control device according to claim 3, characterized in that, The first telescopic tube and the second telescopic tube are metal corrugated pipes.

5. An intake control device according to any one of claims 1-4, characterized in that, The central axis of the spray pipe is perpendicular to the central axis of the air distribution pipe, and the nozzles of the spray pipe are located at both ends of the central axis of the spray pipe.

6. An intake control device according to claim 5, characterized in that, The two ends of the spray pipe are inclined downwards along the central axis and form a certain angle with the horizontal plane.

7. An intake control device according to claim 1, characterized in that, It also includes an air supply pipe, which is connected to the center of the central axis of the air distribution pipe.

8. A plate-type coating equipment, characterized in that, An intake control device and a vacuum chamber as described in any one of claims 1-7.

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