Feeding arm posture adjusting structure

Abstract

The utility model relates to a feeding arm posture adjusting structure. The feeding arm posture adjusting structure comprises a first base with a horizontal plate body, a lifting module arranged on the upper surface of the horizontal plate body, a first supporting plate driven by the lifting module, a first up-down swing adjusting plate, an up-down swing adjusting bolt, a first left-right swing adjusting plate and a left-right swing adjusting knob. According to the utility model, the posture adjusting structure is designed on the feeding arm driving mechanism, so that the posture of the feeding arm can be adjusted on the driving mechanism, the requirements of working conditions are met, and the application scene of automatic feeding is expanded.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor processing technology, and in particular relates to a feeding arm posture adjustment structure. Background Technology

[0002] In semiconductor wafer thin film deposition processes, chemical vapor deposition (CVD) furnaces require a feed arm to precisely transport the wafer carrier boat to the furnace reaction zone. Traditional operation relies on manual handling of the feed arm for feeding and unloading, which suffers from low production efficiency, poor process consistency, and safety risks. Therefore, the industry has attempted to integrate the feed arm into a linear drive mechanism to achieve automated feeding. However, if the drive mechanism and the feed arm are rigidly connected, the feed arm can only translate along a single axis, making it impossible to adjust the feed arm's posture and adapt to certain operating conditions. Utility Model Content

[0003] Based on this, a feeding arm posture adjustment structure is provided to address the aforementioned technical problems.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] A feeding arm posture adjustment structure, characterized in that it includes a first base with a horizontal plate, a lifting module disposed on the upper surface of the horizontal plate, a first support plate driven by the lifting module, a first vertical swing adjustment plate, a vertical swing adjustment bolt, a first horizontal swing adjustment plate, and a horizontal swing adjustment knob. The first base is fixed to the driving mechanism of the feeding arm. The horizontal plate has a first horizontal adjustment bolt for pushing and pulling the lifting module left and right to make it move horizontally on the horizontal plate. The upper surface of the first support plate has two first rotating seats spaced apart from each other. The left and right sides of the first vertical swing adjustment plate are respectively connected to the corresponding first rotating seats. The moving base is rotatably connected up and down. The up and down swing adjustment bolt passes through the rear end of the first up and down swing adjustment plate from top to bottom and is threadedly connected to the first support plate. The first left and right swing adjustment plate is located on the first up and down swing adjustment plate and is passed through by the up and down swing adjustment bolt. The front part of the first left and right swing adjustment plate has a left and right swing adjustment hole. The rod of the left and right swing adjustment knob passes through the front part of the first up and down swing adjustment plate from bottom to top and is rotatably connected to the first up and down swing adjustment plate. Its upper end face has an eccentric column extending into the left and right swing adjustment hole. The rear part of the arm body of the feeding arm is fixed on the first left and right swing adjustment plate.

[0006] This invention incorporates a posture adjustment structure on the feeding arm drive mechanism, which allows for adjustment of the feeding arm's posture on the drive mechanism, meeting the requirements of the working conditions and expanding the application scenarios of automated feeding. Attached Figure Description

[0007] Figure 1 This is a three-dimensional structural diagram of an embodiment of the present utility model;

[0008] Figure 2 This is a schematic diagram of the feeding arm in Embodiment 1 of this utility model;

[0009] Figure 3 This is a schematic diagram of the attitude adjustment structure in Embodiment 1 of this utility model. Figure 1 ;

[0010] Figure 4 This is a schematic diagram of the attitude adjustment structure in Embodiment 1 of this utility model. Figure 2 ;

[0011] Figure 5 This is a schematic diagram of the attitude adjustment structure in Embodiment 1 of this utility model. Figure 3 ;

[0012] Figure 6 This is a schematic diagram of the first left and right swing adjustment plate of the attitude adjustment structure in Embodiment 1 of this utility model;

[0013] Figure 7 This is a schematic diagram of the first vertical swing adjustment plate of the attitude adjustment structure in Embodiment 1 of this utility model;

[0014] Figure 8 This is a schematic diagram of the feeding arm in Embodiment 2 of this utility model;

[0015] Figure 9 This is a schematic diagram of the furnace door sealing buffer mechanism and attitude adjustment structure in Embodiment 2 of this utility model;

[0016] Figure 10 This is a schematic diagram of the furnace door structure of the furnace door sealing and buffer mechanism in Embodiment 2 of this utility model;

[0017] Figure 11 This is a three-dimensional structural diagram of the attitude adjustment structure of Embodiment 2 of this utility model. Detailed Implementation

[0018] The embodiments of this utility model will be described below with reference to the accompanying drawings. It should be noted that the embodiments described in this specification are not exhaustive and do not represent the only embodiments of this utility model. The following corresponding embodiments are only for clearly illustrating the utility model content of this patent and are not intended to limit its implementation. For those skilled in the art, different variations and modifications can be made based on the described embodiments. Any obvious variations or modifications that fall within the technical concept and utility model content of this utility model are also within the protection scope of this utility model.

[0019] like Figure 1 As shown in the figure, this application provides a chemical vapor deposition furnace feeding device, including multiple feeding arms 1100.

[0020] Multiple feeding arms 1100 are arranged vertically at intervals, each corresponding to a different chemical vapor deposition furnace 2 on the cabinet 4.

[0021] The feeding arm 1100 includes an arm body 1110, a posture adjustment structure 1120, and a drive mechanism 1130.

[0022] Example 1

[0023] The arm 1110 is used for non-contact horizontal insertion or withdrawal from the chemical vapor deposition furnace 2. It is horizontally arranged on the axial rear side of the furnace opening of the chemical vapor deposition furnace 2. The upper front part of the arm 1110 forms a support surface for supporting the wafer carrier 3. The shape of this support surface is adapted to the bottom shape of the wafer carrier 3. (See [reference]). Figure 2 .

[0024] In this embodiment, the arm 1110 extends horizontally into the chemical vapor deposition furnace 2 from its initial position. The exit action includes descent and horizontal reverse movement. The purpose of descent is to place the wafer carrier boat 3 on the processing rack inside the chemical vapor deposition furnace 2. After horizontal reverse movement to below the initial position, it rises back to the initial position.

[0025] Among them, such as Figure 2 As shown, the arm body 1110 includes a thick portion 1111 and a sheet-like portion 1112.

[0026] The thick part 1111 is made of silicon carbide. To improve its strength, it is designed as a hollow tube. The lower part of the tube opening at the front end extends forward to form a sheet-like part 1112. The vertical cross-sectional shape of the sheet-like part 1112 is arc-shaped. The above-mentioned support surface is the upper surface of the sheet-like part 1112, which can be adapted to a wafer carrier with an arc-shaped bottom vertical cross-section.

[0027] The posture adjustment structure 1120 is used to adjust the posture of the arm body 1110 and is connected to the thick part 1111 of the arm body.

[0028] In this embodiment, as Figure 3 and Figure 5 As shown, the attitude adjustment structure 1120 includes a first base 1121, a lifting module 1122, a first support plate 1123, a first up-and-down swing adjustment plate 1124, an up-and-down swing adjustment bolt 1125, a first left-and-right swing adjustment plate 1126, a left-and-right swing adjustment knob 1127, and a locking knob 1128.

[0029] The first base 1121 includes a horizontal plate 1121a and a vertical plate 1121b. The horizontal plate 1121a is fixed to the vertical plate 1121b by bolts. The vertical plate 1121b faces left and right and is fixed to the drive mechanism 1130.

[0030] like Figure 4 As shown, the horizontal plate 1121a has two first blocks 1121c arranged at a distance from front to back. Each of the two first blocks 1121c is threaded with a first left-right adjusting bolt 1121d in the left-right direction, which is used to push and pull the lifting module 1122 left and right, so that it can move left and right on the horizontal plate 1121a.

[0031] The lifting module 1122 uses an electric cylinder, such as Figure 3 As shown, it specifically includes a lower support 1122a, a top plate 1122b, a lead screw 1122c, multiple guide rods 1122d, and a motor 1122e.

[0032] like Figure 4 As shown, the lower support 1122a is disposed on the upper surface of the horizontal plate 1121a and is threadedly connected to the first left-right adjusting bolt 1121d. It can move left and right on the horizontal plate 1121a under the pushing and pulling of the first left-right adjusting bolt 1121d. It has multiple vertical locking through holes 1122f. Correspondingly, the horizontal plate 1121a has locking slots 1121e corresponding to the locking through holes 1122f. (See attached image.) Figure 5 The left and right positions of the lower support 1122a can be locked by locking through hole 1122f, locking waist hole 1121e and bolts.

[0033] like Figure 3 As shown, the top plate 1122b is located above the lower support 1122a, and a lead screw 1122c and multiple guide rods 1122d are arranged between the two. The two ends of the lead screw 1122c are rotatably connected to the top plate 1122b and the lower support 1122a.

[0034] The motor 1122e is fixed on the lower surface of the top plate 1122b. Its output shaft is connected to the lead screw 1122c via a transmission belt and two transmission wheels. The movable frame 1122g is fixed on the nut seat of the lead screw 1122c. Driven by the motor 1122e, the movable frame 1122g can move up and down.

[0035] The first support plate 1123 is fixed to the movable frame 1122g by bolts, such as Figure 3 and Figure 7As shown, its upper surface has two first rotating seats 1123a spaced apart from left to right. The left and right sides of the first vertical swing adjustment plate 1124 are respectively connected to the corresponding first rotating seats 1123a for vertical rotation. The vertical swing adjustment bolt 1125 passes through the rear end of the first vertical swing adjustment plate 1124 from top to bottom and is threadedly connected to the first support plate 1123. The vertical swing adjustment bolt 1125 can be operated to adjust the vertical tilt angle of the first vertical swing adjustment plate 1124.

[0036] like Figure 3 As shown, the first left-right swing adjustment plate 1126 is located on the first up-down swing adjustment plate 1124 and is passed through by the up-down swing adjustment bolt 1125, allowing it to swing left and right with the up-down swing adjustment bolt 1125 as the center. Figure 6 As shown, the front of the first left-right swing adjustment plate 1126 has a left-right swing adjustment hole 1126a, as... Figure 7 As shown, the rod 1127a of the left-right swing adjustment knob 1127 passes through the front part of the first up-down swing adjustment plate 1124 from bottom to top and is rotatably connected to the first up-down swing adjustment plate 1124. The upper end face of the rod 1127a has an eccentric column 1127c extending into the left-right swing adjustment hole 1126a. Rotating the left-right swing adjustment knob 1127 causes the eccentric column 1127c to rotate, thereby driving the first left-right swing adjustment plate 1126 to swing left and right through the left-right swing adjustment hole 1126a, thereby realizing the adjustment of the left-right deflection angle.

[0037] like Figure 3 As shown, the first left-right swing adjustment plate 1126 has a left-right hoop 1126b for fixing the thick part 1111 of the arm body 1110.

[0038] Based on the above structure, the horizontal position, vertical position, vertical tilt angle, and left-right deflection angle of the arm 1110 can be adjusted.

[0039] like Figure 5-7 As shown, the lever 1128a of the locking knob 1128 passes through the front of the first vertical swing adjustment plate 1124 and the first horizontal swing adjustment plate 1126 from bottom to top. The hole 1124a through which the lever 1128a passes in the first vertical swing adjustment plate 1124 is a waist-shaped through hole in the left and right direction to prevent the locking knob 1128 from interfering with the first vertical swing adjustment plate 1124 when the first horizontal swing adjustment plate 1126 swings left and right. The first horizontal swing adjustment plate 1126 is threadedly connected to the lever 1128a of the locking knob 1128.

[0040] After the posture of the arm body 1110 is adjusted, the arm body 1110 is locked by pressing the locking knob 1128 against it. At the same time, it can also be used to finely adjust the up and down tilt angle of the arm body 1110.

[0041] The drive mechanism 1130 is mounted on the cabinet 4. It adopts a linear module and can be an electric cylinder or a pneumatic cylinder. It is used to drive the arm 1110 to extend horizontally into or out of the chemical vapor deposition furnace.

[0042] Example 2

[0043] The difference between this embodiment and Embodiment 1 is as follows:

[0044] 1. After the arm 1110 extends horizontally into the target position of the chemical vapor deposition furnace 2 from its initial position, it remains in the furnace. After the wafer is processed, the arm 1110 moves horizontally in the opposite direction back to its initial position.

[0045] 2. For example Figure 8 As shown, the thick part 1111 is made of quartz and is a solid rod with a square vertical cross-section. The front end of the solid rod extends forward to form a plate-like part 1112, and the vertical cross-section of the plate-like part 1112 is an inverted trapezoid.

[0046] 3. Since the arm 1110 needs to remain in the furnace, the feeding arm 1100 in this embodiment also has a furnace door sealing and buffering mechanism 1140, such as... Figure 9 As shown, the sealing buffer mechanism 1140 includes a furnace door 1141, a moving spring seat 1142, a stationary spring seat 1143, a first spring 1144, and a positioning pin 1145.

[0047] like Figure 10 As shown, the furnace door 1141 is a vertical disc that fits the furnace opening. The lower side of the furnace door 1141 has an eccentrically arranged perforation 1141a for the rear part (thick part 1111) of the arm body 1110 to pass through horizontally.

[0048] The rear opening of the perforation 1141a forms an annular step 1141b.

[0049] like Figure 9 As shown, the furnace door 1141, the moving spring seat 1142, the first spring 1144 and the stationary spring seat 1143 are arranged in sequence from front to back, and all are horizontally passed through the rear part of the arm body 1110.

[0050] The movable spring seat 1142 is sleeve-shaped, with its front end abutting against the aforementioned step 1141b. Its outer diameter is equal to that of the step 1141b. The sealing performance at the connection between the movable spring seat 1142 and the through hole 1141a can be further guaranteed by the sealing element.

[0051] The stationary spring seat 1143 is annular and is fixed to the circumferential surface of the disc body formed at the rear of the arm body 1110. The disc body can prevent gas leakage in the furnace. The sealing performance can be further improved by setting a seal between the stationary spring seat 1143 and the disc body.

[0052] The first spring 1144 is circumferentially closed, and its two ends are connected to the moving spring seat 1142 and the stationary spring seat 1143 respectively. The sealing performance of the connection is ensured by a sealing element.

[0053] After the arm 1110 reaches the target position, the furnace door 1141 is pressed tightly by the force of the first spring 1144, ensuring the sealing performance of the furnace door.

[0054] The positioning pin 1145 is mainly used to position the furnace door 1141 to prevent it from rotating, and also has a buffering effect. In this embodiment, there are two positioning pins 1145. Both positioning pins 1145 are parallel to the arm body 1110 and are arranged at intervals on the left and right sides, and are located on the rear side of the furnace door 1141. The positioning pin 1145 includes a stationary rod 1145a and a movable rod 1145b. The stationary rod 1145a is fixed to the connecting seat 1145c by bolts. The connecting seat 1145c is fixed to the rear part of the arm body 1110 by clamping. An axially extending sliding hole is formed on the front end face of the stationary rod 1145a. A second spring is provided in the sliding hole to play a buffering role. The rear end of the movable rod 1145b is slidably disposed in the sliding hole and cooperates with the keyway of the stationary rod 1145a to prevent the furnace door 1141 from rotating. The front end of the movable rod 1145b is connected to the rear side of the upper part of the furnace door 1141.

[0055] 4. The structure of the attitude adjustment structure 1120 in this embodiment is different from that in embodiment 1.

[0056] In this embodiment, as Figure 9 As shown, the attitude adjustment structure 1120 includes a second base 1121, a second left-right swing adjustment plate 1122, a second support plate 1123, and a second up-down swing adjustment plate 1124.

[0057] The second base 1121 includes a back plate 1121a and an L-shaped plate 1121b. The back plate faces left and right and is fixed on the drive mechanism 1130. The L-shaped plate 1121b has a vertical plate 1121b-1 and a horizontal plate 1121b-2.

[0058] The vertical plate 1121b-1 faces left and right, and has a slide on its back. It slides up and down with the slide rail on the back plate 1121a, so that the vertical position of the L-shaped plate 1121b on the back plate 1121a can be adjusted. The vertical plate 1121b-1 has multiple vertical position locking holes 1121b-3, which are vertical. The back plate 1121a has locking screw holes corresponding to the positions of the vertical position locking holes 1121b-3. After the L-shaped plate 1121b is adjusted to the expected vertical position, the position can be locked by the vertical position locking holes 1121b-3, the locking screw holes, and the bolts.

[0059] The horizontal plate 1121b-2 is integrally formed on the vertical plate 1121b-1.

[0060] The second left-right swing adjustment plate 1122 is located on the horizontal plate 1121b-2, and the two are horizontally rotatably connected by a central shaft 1122a located at the center. See Figure 11 This allows for adjustment of the horizontal left and right deflection angle of the second left and right swing adjustment plate 1122. The horizontal plate 1121b-2 has four left and right swing angle locking holes 1121b-4, which are arranged on the same circumference with the central axis 1122a as the center, and are all arc-shaped with the central axis 1122a as the center. The second left and right swing adjustment plate 1122 has locking screw holes corresponding to the positions of the left and right swing angle locking holes 1121b-4. After the horizontal deflection angle of the second left and right swing adjustment plate 1122 is adjusted to the expected angle, it is locked by the left and right swing angle locking holes 1121b-4, the locking screw holes, and the bolts.

[0061] like Figure 9 As shown, the second left and right swing adjustment plate 1122 has a second block 1122b, and the second block 1122b is threaded with a second left and right adjustment bolt 1122c in the left and right direction, which is used to push and pull the second support plate 1123 left and right, so that it moves left and right on the second left and right swing adjustment plate 1122.

[0062] The second support plate 1123 is located on the second left and right swing adjustment plate 1122 and slides horizontally with the track on the second left and right swing adjustment plate 1122, so that the left and right horizontal position of the second support plate 1123 on the second left and right swing adjustment plate 1122 can be adjusted. The position of the second support plate 1123 can also be locked by locking the waist hole, locking bolt and bolt.

[0063] The upper surface of the second support plate 1123 has an n-shaped frame, and the left and right side plates of the frame form two second rotating seats 1123a spaced apart from each other. One of the side plates is threadedly connected to the second left and right adjusting bolts 1122c.

[0064] like Figure 9As shown, the vertical cross-section of the second vertical swing adjustment plate 1124 is U-shaped. The left and right sides of its front part are respectively connected to the corresponding second rotating seat 1123a via shaft 1123b. The rear part of the upper surface of the second support plate 1123 has two vertical screws 1123b spaced apart from left to right. The left and right sides of the rear part of the second vertical swing adjustment plate 1124 have ears 1124a. The ears 1124a are passed through by the corresponding vertical screws 1123b and locked by two locking nuts provided on the vertical screws 1123b. By adjusting the position of the two locking nuts on the vertical screws 1123b, the vertical tilt angle of the second vertical swing adjustment plate 1124 can be adjusted.

[0065] The upper side of the second vertical swing adjustment plate 1124 has a fixed plate 1125 that is mirrored thereto. The two are fixed by bolts to fix the rear clamp of the arm body 1110.

[0066] As can be seen from the above, the beneficial effects of the embodiments of this application include:

[0067] 1. An attitude adjustment structure was designed on the feeding arm drive mechanism, which allows the attitude of the feeding arm to be adjusted on the drive mechanism, meeting the requirements of the working conditions and expanding the application scenarios of automated feeding.

[0068] 2. Completely eliminate friction particle pollution:

[0069] The feed arm is automatically driven by the drive mechanism, and the posture of the arm is adjusted by the posture adjustment structure to ensure that the arm extends horizontally into / out of the chemical vapor deposition furnace without contact. The arm will not contact the furnace wall or slide, which can completely avoid the generation of friction particles, fundamentally solve the problem of wafer surface contamination, and improve the thin film deposition yield.

[0070] 3. Significantly improves operational safety:

[0071] Avoiding the risk of burns: Operators only need to place the boat carrying the wafers on the arm, without having to operate the high-temperature furnace at close range, realizing fully automated feeding and completely eliminating the risk of burns caused by human intervention.

[0072] Preventing wafer damage: After adjusting the posture of the arm body through the posture adjustment structure, the drive mechanism can ensure that the carrier boat remains horizontal and stable during transportation, avoiding wafer collision damage caused by shaking or deviation.

[0073] 4. High efficiency and low labor costs:

[0074] The drive mechanism is programmable and controls the insertion / exit speed and stroke of the feeding arm, supporting continuous transport of multiple batches of wafer carriers, significantly shortening the single process cycle, improving production line efficiency, eliminating the need for manual pushing, and greatly saving labor costs.

[0075] Obviously, those skilled in the art should recognize that the above embodiments are only used to illustrate the present utility model and are not intended to limit the present utility model. Any changes or modifications to the above embodiments within the scope of the essential spirit of the present utility model will fall within the scope of the claims of the present utility model.

Claims

1. A feeding arm posture adjustment structure, characterized in that, The device includes a first base with a horizontal plate, a lifting module disposed on the upper surface of the horizontal plate, a first support plate driven by the lifting module, a first vertical swing adjustment plate, vertical swing adjustment bolts, a first horizontal swing adjustment plate, and a horizontal swing adjustment knob. The first base is fixed to the drive mechanism of the feeding arm. The horizontal plate has a first horizontal adjustment bolt for pushing and pulling the lifting module left and right to move it horizontally on the horizontal plate. The upper surface of the first support plate has two first rotating seats spaced apart from each other. The left and right sides of the first vertical swing adjustment plate are respectively rotatably connected to the corresponding first rotating seats. The up-and-down swing adjustment bolt passes through the rear end of the first up-and-down swing adjustment plate from top to bottom and is threadedly connected to the first support plate. The first left-and-right swing adjustment plate is located on the first up-and-down swing adjustment plate and is passed through by the up-and-down swing adjustment bolt. The front part of the first left-and-right swing adjustment plate has a left-and-right swing adjustment hole. The rod of the left-and-right swing adjustment knob passes through the front part of the first up-and-down swing adjustment plate from bottom to top and is rotatably connected to the first up-and-down swing adjustment plate. Its upper end face has an eccentric column extending into the left-and-right swing adjustment hole. The rear part of the feeding arm is fixed to the first left-and-right swing adjustment plate.

2. The feeding arm posture adjustment structure according to claim 1, characterized in that, The attitude adjustment structure also includes a locking knob. The lever of the locking knob passes through the front of the first vertical swing adjustment plate and the first horizontal swing adjustment plate from bottom to top. The hole through which the lever of the locking knob passes in the first vertical swing adjustment plate is a waist-shaped through hole in the left-right direction. The first horizontal swing adjustment plate is threadedly connected to the lever of the locking knob.

3. The feeding arm posture adjustment structure according to claim 1, characterized in that, The upper surface of the horizontal plate has a first block, and the first left and right adjusting bolts are threadedly connected to the first block.

4. The feeding arm posture adjustment structure according to claim 3, characterized in that, The lifting module includes a lower support base, a top plate, a lead screw, multiple guide rods, and a motor. The lower support base is disposed on the upper surface of the horizontal plate and is threadedly connected to a first left-right adjusting bolt. The lower support base has multiple locking through holes in the vertical direction. The horizontal plate has locking waist holes corresponding to the locking through holes. The top plate is located above the lower support base, and a lead screw and multiple guide rods are disposed between the two. The two ends of the lead screw are rotatably connected to the top plate and the lower support base. The motor is fixed on the lower surface of the top plate, and its output shaft is connected to the lead screw via a transmission belt and two transmission wheels. A movable frame is fixed on the nut seat of the lead screw, and the first support plate is fixed to the movable frame by bolts.

5. The feeding arm posture adjustment structure according to claim 1, characterized in that, The first left-right swing adjustment plate has a hoop in the left-right direction for fixing the rear part of the arm body.

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