Device for evacuating particles in single crystal furnace

Abstract

The utility model provides an evacuator for particles in a single crystal furnace, and relates to the technical field of single crystal furnaces. The single crystal furnace comprises a gas inlet assembly and a gas exhaust assembly which are communicated with a single crystal furnace body, a vacuum gauge and a particle counter are arranged on the single crystal furnace body, the gas inlet assembly conveys inert gas into the single crystal furnace body, the gas exhaust assembly exhausts gas in the single crystal furnace body, and the particle counter is arranged on a gas flow path. According to the utility model, the cleanliness in the single crystal furnace is improved, an optimal crystal pulling environment is created for crystal pulling, and the crystal forming rate and the single crystal quality are improved.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, specifically to a particle evacuation device inside a single crystal furnace. Background Technology

[0002] Currently, in the photovoltaic industry, the main processes of producing monocrystalline silicon using the Czochralski method in the monocrystalline furnace include furnace assembly, evacuation, leak detection, material melting, and crystal pulling. Before furnace assembly, all parts inside the furnace platform need to be cleaned. During the hot zone process, friction between various components in the hot zone will leave many particles. These particles will significantly affect the success rate of crystal pulling, and sometimes even make crystal formation difficult. At the same time, the excessive introduction of particles will lead to low cleanliness inside the monocrystalline furnace, which will significantly affect the intrinsic quality of the monocrystalline rod and also affect the electrical performance of the crystal rod. Utility Model Content

[0003] The purpose of this invention is to develop a particle evacuation device for a single crystal furnace that improves the cleanliness of the furnace, creates an optimal crystal pulling environment, and increases the crystal formation rate and single crystal quality.

[0004] This utility model is achieved through the following technical solution:

[0005] A particle evacuation device for a single crystal furnace, comprising:

[0006] The air intake assembly and the air extraction assembly are connected to the main body of the single crystal furnace;

[0007] The single crystal furnace body is equipped with a vacuum gauge and a particle counter. The air inlet component delivers inert gas into the single crystal furnace body, the air extraction component extracts air from the inside of the single crystal furnace body, and the particle counter is located in the airflow path.

[0008] Optionally, the air intake component is connected to the top of the single crystal furnace body, and the air extraction component is connected to the bottom of the single crystal furnace body.

[0009] Optionally, the air intake assembly includes an air intake pipe connected to the single crystal furnace body, and the air intake pipe is equipped with an air intake valve and a flow meter.

[0010] Optionally, the gas inlet pipe is connected to an argon gas source.

[0011] Optionally, the evacuation assembly includes an evacuation pipe connected to the single crystal furnace body, and a ball valve and a vacuum pump are sequentially installed on the evacuation pipe.

[0012] Optionally, a filter canister is provided on the air extraction pipe between the ball valve and the vacuum pump.

[0013] The beneficial effects of this utility model are:

[0014] This invention enables real-time online monitoring of particle count within the furnace during furnace assembly, evacuation, leak detection, and crystal pulling. If the particle count is below standard, evacuation and leak detection processes are performed after furnace assembly. The furnace leak rate is checked while the particle count is also checked. Evacuation is continued until the furnace atmosphere meets the standard, which improves the cleanliness of the single crystal furnace body, creates the optimal crystal pulling environment, and improves crystal formation rate and single crystal quality. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a structural diagram of the present utility model.

[0017] Reference numerals in the attached drawings: 1. Single crystal furnace body; 2. Vacuum gauge; 3. Particle counter; 4. Inlet pipe; 5. Flow meter; 6. Inlet valve; 7. Evacuation pipe; 8. Ball valve; 9. Filter tank; 10. Vacuum pump. Detailed Implementation

[0018] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0019] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0020] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0021] like Figure 1As shown, this utility model discloses a particle evacuation device in a single crystal furnace, including an air inlet component connected to the top of the single crystal furnace body 1 and an air extraction component connected to the bottom of the single crystal furnace body 1. The air inlet component delivers inert gas into the single crystal furnace body 1, and the air extraction component evacuates the single crystal furnace body 1, so that an airflow from top to bottom is formed inside the single crystal furnace body 1, and the particles inside the single crystal furnace body 1 are extracted with the airflow.

[0022] The single crystal furnace body 1 is also equipped with a vacuum gauge 2 and a particle counter 3. The vacuum gauge 2 monitors the vacuum level inside the single crystal furnace body 1 and is used for leak rate detection. The particle counter 3 is located on the airflow path inside the single crystal furnace body 1 and detects the number of particles in the airflow.

[0023] The gas inlet assembly includes a gas inlet pipe 4 connected to the single crystal furnace body 1. The gas inlet pipe 4 is equipped with a gas inlet valve 6 and a flow meter 5. The gas inlet pipe 4 is connected to an argon gas source.

[0024] The extraction assembly includes an extraction pipe 7 connected to the single crystal furnace body 1, and a ball valve 8, a filter tank 9 and a vacuum pump 10 are sequentially installed on the extraction pipe 7.

[0025] If the number of particles inside the single crystal furnace does not meet the standard after the furnace body is closed, evacuation and leak detection are performed. The steps are as follows:

[0026] The first step involves the intake assembly supplying 100 slpm of argon gas, and the vacuum pump 10 of the extraction assembly using a low frequency of 20 Hz to evacuate for 10 minutes. Then, the argon gas is stopped and evacuation continues for another 10 minutes. After that, the evacuation is stopped, and the particle count is detected by particle counter 3 and the leak rate is detected by vacuum gauge 2.

[0027] The second step involves the intake assembly supplying 80 slpm of argon gas, and the vacuum pump 10 of the extraction assembly using a medium frequency of 40 Hz. After evacuating for 10 minutes, the argon gas is stopped and evacuation continues for another 10 minutes. After that, evacuation is stopped, and the particle count and leakage rate are detected.

[0028] The third step involves the intake assembly supplying 60 slpm of argon gas, and the vacuum pump 10 of the extraction assembly using a high frequency of 80 Hz. After evacuating for 10 minutes, the argon gas is stopped and evacuation continues until the ultimate vacuum is reached. After that, evacuation is stopped, and the particle count and leakage rate are detected.

[0029] In the first, second, and third steps above, when the number of particles and the leakage rate in the single crystal furnace body 1 reach the standard after any step is completed, the next melting process begins. If the number of particles still exceeds the standard after the above three steps are completed, the evacuation process is performed again, and the above steps are repeated until the number of particles in the furnace reaches the standard.

[0030] During leak detection, the single crystal furnace body 1 is sealed, the air inlet valve 6 and the ball valve 8 are closed, and the pressure change of the vacuum gauge 2 is recorded over a certain period of time. The pressure change divided by the time is the leak rate.

[0031] This invention enables real-time online monitoring of particle count in the furnace during furnace assembly, evacuation, leak detection, and crystal pulling. If the particle count in the furnace is below standard, evacuation and leak detection processes are performed after furnace assembly. The furnace leakage rate is detected while the particle count in the furnace is also detected. The evacuation process is carried out until the furnace atmosphere meets the standard, which can improve the cleanliness of the single crystal furnace body 1, create the optimal crystal pulling environment, and improve the crystal formation rate and single crystal quality.

[0032] The above embodiments are merely preferred embodiments of this utility model and are not intended to limit the technical solutions of this utility model. Any technical solution that can be implemented based on the above embodiments without creative effort should be considered to fall within the scope of protection of this utility model patent.

Claims

1. A particle evacuation device for a single crystal furnace, characterized in that, include: The air intake assembly and the air extraction assembly are connected to the main body of the single crystal furnace; The single crystal furnace body is equipped with a vacuum gauge and a particle counter. The air inlet component delivers inert gas into the single crystal furnace body, the air extraction component extracts air from the inside of the single crystal furnace body, and the particle counter is located in the airflow path.

2. The particle evacuation device inside a single crystal furnace according to claim 1, characterized in that, The air intake component is connected to the top of the single crystal furnace body, and the air extraction component is connected to the bottom of the single crystal furnace body.

3. The particle evacuation device in a single crystal furnace according to claim 1, characterized in that, The air intake assembly includes an air intake pipe connected to the single crystal furnace body, and the air intake pipe is equipped with an air intake valve and a flow meter.

4. The particle evacuation device in a single crystal furnace according to claim 3, characterized in that, The air intake pipe is connected to an argon gas source.

5. The particle evacuation device in a single crystal furnace according to claim 1, characterized in that, The extraction assembly includes an extraction pipe connected to the single crystal furnace body, and a ball valve and a vacuum pump are sequentially installed on the extraction pipe.

6. The particle evacuation device in a single crystal furnace according to claim 5, characterized in that, A filter canister is installed on the air extraction pipe between the ball valve and the vacuum pump.

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