Single crystal furnace gas guide device and single crystal furnace

Abstract

The utility model discloses a single crystal furnace gas guide device and a single crystal furnace. The gas guide device of the single crystal furnace comprises a gas guide cylinder; the shaft strip is fixed in the air guide cylinder and extends in the diameter direction of the air guide cylinder; the two fan blades are both in a semicircular flat plate shape, the linear boundaries of the two fan blades are rotationally connected with the shaft strip, and the two fan blades are located on the two sides of the shaft strip respectively; the two upper blocking structures are respectively positioned above the two fan blades, are fixedly arranged relative to the air guide cylinder and are used for limiting the upward rotating angles of the two fan blades; the two lower blocking structures are respectively positioned below the two fan blades, are fixedly arranged relative to the air guide cylinder and are used for limiting the downward rotating angles of the two fan blades; wherein the maximum angle of upward rotation of any fan blade is smaller than the maximum angle of downward rotation of any fan blade. The gas guide device of the single crystal furnace can prevent impurity-containing protective gas from polluting the single crystal furnace.

Description

Technical Field

[0001] This utility model relates to a gas guiding device for a single crystal furnace and a single crystal furnace. Background Technology

[0002] In the manufacturing process of monocrystalline silicon, argon gas is used as a protective gas to maintain a stable atmosphere inside the furnace. During the growth of the single crystal, silicon monoxide and dust impurities are continuously generated above the crucible within the furnace. To expel the mixture of silicon monoxide, dust impurities, and argon gas through the furnace's exhaust port, an exhaust port and vacuum pump are installed at the furnace bottom to draw the mixture into a filter tank. However, to prevent the volatiles such as silicon monoxide and dust impurities from corroding the furnace bottom insulation components, a gas guide tube is typically installed at the exhaust port. This gas guide tube effectively isolates the volatiles from the furnace bottom insulation components, reducing their corrosion failure rate.

[0003] However, existing technologies have the following problems: abnormal conditions can cause the vacuum pump to fail, and the volatile dust previously accumulated in the filter canister can backflow into the furnace, causing furnace contamination. Utility Model Content

[0004] This invention provides a gas guiding device for a single crystal furnace and a single crystal furnace to suppress the backflow of silicon monoxide and dust.

[0005] This utility model provides the following technical solution: a gas guiding device for a single crystal furnace, comprising:

[0006] Air delivery tube;

[0007] A shaft strip is fixed inside the air guide cylinder and extends along the diameter direction of the air guide cylinder;

[0008] The two fan blades are both semi-circular flat plates, and their straight boundaries are rotatably connected to the shaft strip, respectively located on both sides of the shaft strip;

[0009] Two upper blocking structures are respectively located above the two fan blades and fixed relative to the air guide tube to limit the upward rotation angle of the two fan blades;

[0010] Two lower blocking structures are located below the two fan blades respectively and are fixedly installed relative to the air guide tube to limit the downward rotation angle of the two fan blades;

[0011] Among them, the maximum angle at which any blade rotates upward is less than the maximum angle at which it rotates downward.

[0012] In some implementations, the air guide tube is in the shape of a cylindrical straight tube.

[0013] In other embodiments, the air guide tube is a frustum-shaped straight cylinder. This invention does not limit the specific shape of the air guide tube and it can be designed based on existing technology.

[0014] In some embodiments, the air guide cylinder has through holes through which the two ends of the shaft pass, and the two ends of the shaft are inserted into the through holes.

[0015] The shaft is in the shape of a round rod. During assembly, insert both ends of the shaft into the two opposing through holes on the air guide tube.

[0016] The air guide tube can be made of quartz. The shaft can be made of materials such as quartz or stainless steel.

[0017] A gap is allowed between the shaft and the through hole of the air guide tube.

[0018] In some embodiments, the upper blocking structure is an upper baffle bar, with through holes provided on the air guide cylinder for both ends of the upper baffle bar to pass through, and both ends of the upper baffle bar inserted into the through holes.

[0019] During assembly, insert the upper baffle into the two opposite through holes on the air guide tube.

[0020] A gap is allowed between the upper baffle and the through hole of the air guide tube.

[0021] In some embodiments, the upper baffle is arranged parallel to the shaft and symmetrically with respect to the central section, which is a plane passing through the center line of the shaft and the axis of the air guide tube.

[0022] The central profile is an imaginary surface that passes through the centerline of the shaft and divides the air guide into two symmetrical parts.

[0023] This design maximizes the contact area between the upper baffle and the fan blades and makes them easy to process.

[0024] In some embodiments, the dihedral angle formed by the shaft and the two planes defined by the two upper stops is greater than or equal to 150°.

[0025] In use, the air guide tube is set vertically, and the fan blades can rotate up to 15° relative to the horizontal plane.

[0026] When the airflow flows against the current from bottom to top, it drives the fan blades to rotate upwards. If the upward rotation angle of the fan blades is too large, the resistance to the counter-flowing gas will be limited, resulting in contamination inside the furnace.

[0027] In some embodiments, the lower blocking structure is a lower baffle bar, with through holes provided on the air guide cylinder for both ends of the lower baffle bar to pass through, and both ends of the lower baffle bar inserted into the through holes.

[0028] During assembly, insert the lower baffle into the two opposing through holes on the air guide tube.

[0029] A gap is allowed between the lower baffle and the through hole of the air guide tube.

[0030] In some embodiments, the lower baffle is arranged parallel to the shaft and symmetrically with respect to the central section, which is a plane passing through the center line of the shaft and the axis of the air guide tube.

[0031] This design maximizes the contact area between the lower baffle and the fan blades and makes them easy to process.

[0032] In some embodiments, the dihedral angle formed by the two planes defined by the shaft and the two lower stops is less than or equal to 30°.

[0033] In use, the air guide tube is set vertically, and the fan blades can rotate up to 75° downwards relative to the horizontal plane.

[0034] Under normal operating conditions, the airflow flows counter-currently from top to bottom. The airflow drives the fan blades to rotate downwards. If the fan blades rotate downwards at too large an angle, the counter-current airflow will have difficulty pushing the fan blades to unfold, and the blocking effect on the counter-current airflow may fail.

[0035] In some embodiments, the straight boundary of the fan blade is connected to a cylindrical collar, and the shaft passes through the cylindrical collar to achieve a rotatable connection between the fan blade and the shaft.

[0036] The fan blades can be made of stainless steel. The thickness of the fan blades ranges from 1mm to 2mm.

[0037] With the two fan blades parallel to the radial direction of the air guide tube, the two fan blades are joined together to form a circular shape.

[0038] The difference between the inner diameter of the air guide tube and the diameter of the fan blade is in the range of 0mm to 4mm. Preferably, the difference is in the range of 1mm to 2mm. This design prevents the fan blade from rubbing against the air guide tube.

[0039] This utility model provides the following technical solution: a single crystal furnace, including the above-mentioned single crystal furnace gas guiding device.

[0040] The gas guiding device for a single crystal furnace is used to transport protective gas containing impurities. The internal structure of the single crystal furnace can be designed based on existing technology, and this utility model does not limit it in this regard.

[0041] In operation, the fan blades rotate downwards at a larger maximum angle, which facilitates the smooth discharge of protective gas containing impurities; conversely, the fan blades rotate upwards at a smaller maximum angle, which effectively blocks backflow of protective gas containing impurities. This prevents furnace contamination, fully protects the internal structure of the single crystal furnace, and extends its service life. Attached Figure Description

[0042] Figure 1 This is a perspective view of the gas guiding device for a single crystal furnace according to this utility model.

[0043] Figure 2 This is a cross-sectional view of the gas guiding device for a single crystal furnace of this utility model in one working state.

[0044] Figure 3 This is a cross-sectional view of another working state of the gas guiding device for the single crystal furnace of this utility model.

[0045] The attached diagram is labeled as follows: 1. Air guide tube; 2. Shaft; 3. Fan blade; 4. Upper baffle; 5. Lower baffle. Detailed Implementation

[0046] The present invention will be further described below with reference to specific embodiments, but the scope of protection of the present invention is not limited thereto.

[0047] Example 1

[0048] Figure 1 This is a perspective view of the gas guiding device for a single crystal furnace according to this utility model. Figure 2 This is a cross-sectional view of the gas guiding device for a single crystal furnace of this utility model in one working state. Figure 3 This is a cross-sectional view of another working state of the gas guiding device for the single crystal furnace of this utility model.

[0049] refer to Figures 1 to 3 Example 1 provides a gas guiding device for a single crystal furnace, comprising:

[0050] Air delivery tube 1;

[0051] Shaft 2 is disposed inside air guide cylinder 1 and extends along the diameter direction of air guide cylinder 1;

[0052] The two fan blades 3 are both semi-circular flat plates, and their straight boundaries are rotatably connected to the shaft 2, respectively located on both sides of the shaft 2;

[0053] Two upper blocking structures are located above the two fan blades 3 respectively and are fixed relative to the air guide tube 1 to limit the upward rotation angle of the two fan blades 3;

[0054] Two lower blocking structures are located below the two fan blades 3 respectively, and are fixed relative to the air guide tube 1 to limit the downward rotation angle of the two fan blades 3;

[0055] Among them, the maximum angle at which any blade 3 rotates upward is less than the maximum angle at which it rotates downward.

[0056] In operation, the air guide 3 is placed vertically, and the shaft 2 extends horizontally. The upward rotation angle of the fan blade 3 refers to the angle at which the fan blade 3 rotates upward relative to the horizontal position. The downward rotation angle of the fan blade 3 refers to the angle at which the fan blade 3 rotates downward relative to the horizontal position. The two fan blades 3 are located on both sides of the shaft 2, meaning that the two shafts 3 are located on both sides of the vertical plane passing through the shaft 2.

[0057] The air guide tube 1 is a cylindrical straight tube.

[0058] The air guide cylinder 1 has through holes for the two ends of the shaft 2 to pass through, and the two ends of the shaft 2 are inserted into the through holes.

[0059] The shaft 2 is in the shape of a circular rod. During assembly, the two ends of the shaft 2 are inserted into the two through holes on the air guide tube 1 that are opposite to each other.

[0060] The air guide tube 1 can be made of quartz. The shaft 2 can be made of, for example, quartz or stainless steel.

[0061] A gap is allowed between the shaft 2 and the through hole of the air guide cylinder 1.

[0062] The upper blocking structure is an upper baffle 4. Through holes are opened on the air guide cylinder 1 for the two ends of the upper baffle 4 to pass through, and the two ends of the upper baffle 4 are inserted into the through holes.

[0063] During assembly, insert the upper baffle 4 into the two through holes that are opposite each other on the air guide tube 1.

[0064] A gap is allowed between the upper baffle 4 and the through hole of the air guide tube 1.

[0065] The upper baffle 4 is parallel to the shaft 2 and symmetrically arranged with respect to the central section, which is a plane passing through the center line of the shaft 2 and the axis of the air guide cylinder 1.

[0066] The central profile is an imaginary surface that passes through the centerline of the shaft 2 and divides the air guide tube 1 into two symmetrical parts.

[0067] With this design, the contact area between the upper baffle 4 and the fan blade 3 is maximized and easy to process.

[0068] The dihedral angle formed by the two planes defined by the shaft 2 and the two upper retaining bars 4 is equal to 150°.

[0069] refer to Figure 3 In use, the air guide tube 1 is set in a vertical direction, and the fan blade 3 rotates up to 15° relative to the horizontal plane.

[0070] When the airflow flows against the flow from bottom to top, it drives the fan blades 3 to rotate upwards. If the upward rotation angle of the fan blades 3 is too large, the resistance to the counter-flowing gas will be limited, resulting in contamination inside the furnace.

[0071] The lower blocking structure is a lower baffle 5. Through holes are opened on the air guide cylinder 1 for the two ends of the lower baffle 5 to pass through, and the two ends of the lower baffle 5 are inserted into the through holes.

[0072] During assembly, insert the lower baffle 5 into the two through holes that are opposite each other on the air guide tube 1.

[0073] A gap is allowed between the lower baffle 5 and the through hole of the air guide tube 1.

[0074] The lower baffle 5 is parallel to the shaft 2 and symmetrically arranged with respect to the central section, which is a plane passing through the center line of the shaft 2 and the axis of the air guide cylinder 1.

[0075] With this design, the contact area between the lower baffle 5 and the fan blade 3 is maximized and easy to process.

[0076] refer to Figure 2 The dihedral angle formed by the two planes defined by the shaft strip 2 and the two lower stop strips 5 is equal to 30°.

[0077] In use, the air guide tube 1 is set in a vertical direction, and the fan blade 3 can rotate up to 75° relative to the horizontal plane.

[0078] Under normal operating conditions, the airflow inside the air guide duct 1 flows from top to bottom. The airflow drives the fan blades 3 to rotate downwards. If the downward rotation angle of the fan blades 3 is too large, in the event of backflow, the backflowing gas will have difficulty pushing the fan blades 3 to unfold, and the blocking effect on the backflowing gas may fail.

[0079] The straight boundary of the fan blade 3 is connected to a cylindrical collar, and the shaft 2 passes through the cylindrical collar to achieve a rotatable connection between the fan blade 3 and the shaft 2.

[0080] The fan blade 3 can be made of stainless steel. The thickness of the fan blade 3 is in the range of 1mm to 2mm.

[0081] With the two fan blades 3 parallel to the radial direction of the air guide tube 1, the two fan blades 3 are spliced ​​into a circular shape.

[0082] Note: The seam between the two fan blades 3 is ignored.

[0083] The difference between the inner diameter of the air guide tube 1 and the diameter of the fan blade 3 is in the range of 0 mm to 4 mm. Preferably, the difference between the inner diameter of the air guide tube 1 and the diameter of the fan blade 3 is in the range of 1 mm to 2 mm.

[0084] This design prevents the fan blades 3 from rubbing against the air guide tube 1 and maintains sufficient blocking effect in the event of backflow of protective gas containing impurities.

[0085] Example 2

[0086] Example 2 provides a single crystal furnace, including the single crystal furnace gas guiding device of Example 1.

[0087] The gas guiding device for a single crystal furnace is used to transport protective gas containing impurities.

[0088] In the gas guiding device of the single crystal furnace, the gas guiding cylinder 1 is placed vertically, and the upper baffle 4 is located above the lower baffle 5.

[0089] The internal structure of the single crystal furnace is designed based on existing technology, and this utility model does not limit it.

[0090] This utility model is not limited to the above-described embodiments. Any modifications, improvements, or substitutions that can be conceived by those skilled in the art without departing from the essential content of this utility model fall within the scope of this utility model.

Claims

1. A gas guiding device for a single crystal furnace, characterized in that, include: Air delivery tube; A shaft strip is fixed inside the air guide cylinder and extends along the diameter direction of the air guide cylinder; The two fan blades are both semi-circular flat plates, and their straight boundaries are rotatably connected to the shaft strip, respectively located on both sides of the shaft strip; Two upper blocking structures are respectively located above the two fan blades and fixed relative to the air guide tube to limit the upward rotation angle of the two fan blades; Two lower blocking structures are located below the two fan blades respectively and are fixedly installed relative to the air guide tube to limit the downward rotation angle of the two fan blades; Among them, the maximum angle at which any blade rotates upward is less than the maximum angle at which it rotates downward.

2. The gas guiding device for a single crystal furnace according to claim 1, characterized in that, The air guide cylinder has through holes for the two ends of the shaft to pass through, and the two ends of the shaft are inserted into the through holes.

3. The gas guiding device for a single crystal furnace according to claim 1, characterized in that, The upper blocking structure is an upper baffle bar, and through holes are opened on the air guide cylinder for the two ends of the upper baffle bar to pass through, and the two ends of the upper baffle bar are inserted into the through holes.

4. The gas guiding device for a single crystal furnace according to claim 3, characterized in that, The upper baffle is parallel to the shaft and symmetrically arranged with respect to the central section, which is a plane passing through the center line of the shaft and the axis of the air guide cylinder.

5. The gas guiding device for a single crystal furnace according to claim 4, characterized in that, The dihedral angle formed by the two planes defined by the shaft and the two upper retaining bars is greater than or equal to 150°.

6. The gas guiding device for a single crystal furnace according to claim 1, characterized in that, The lower blocking structure is a lower baffle bar, and through holes are opened on the air guide cylinder for the two ends of the lower baffle bar to pass through, and the two ends of the lower baffle bar are inserted into the through holes.

7. The gas guiding device for a single crystal furnace according to claim 6, characterized in that, The lower baffle is parallel to the shaft and symmetrically arranged with respect to the central section, which is a plane passing through the center line of the shaft and the axis of the air guide cylinder.

8. The gas guiding device for a single crystal furnace according to claim 7, characterized in that, The dihedral angle formed by the two planes defined by the shaft and the two lower stops is less than or equal to 30°.

9. The gas guiding device for a single crystal furnace according to claim 1, characterized in that, The straight boundary of the fan blade is connected to a cylindrical collar, and the shaft passes through the cylindrical collar to achieve a rotatable connection between the fan blade and the shaft.

10. A single crystal furnace, characterized in that, Includes a gas guiding device for a single crystal furnace according to any one of claims 1 to 9.

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