Rotary driving structure for heavy-load mechanism

Abstract

The utility model belongs to the technical field of driving structures, and discloses a rotary driving structure for a heavy-load mechanism, which comprises an upper fixing shaft and a lower fixing shaft. The upper fixing shaft is connected with a first deep groove ball bearing used for restraining the heavy-load mechanism, and the lower fixing shaft is connected with a thrust ball bearing used for bearing the weight of the heavy-load mechanism and a second deep groove ball bearing used for restraining the heavy-load mechanism. In the utility model, the upper fixed shaft and the lower fixed shaft are separated, so that the manufacture and the installation of each bearing are convenient, in the aspect of bearing distribution, each bearing performs its own functions and shares the load of the heavy-load mechanism in each direction, the thrust ball bearing bears the self weight of the heavy-load mechanism, and the load is concentrated on the lower fixed shaft, so that the whole gravity center is lowered; the stability of rotation movement of the heavy-load mechanism is enhanced, the first deep groove ball bearing and the second deep groove ball bearing only need to bear radial loads, the radial freedom degree of the heavy-load mechanism is restrained, and stable driving is achieved.

Description

Technical Field

[0001] This utility model belongs to the field of drive structure technology, specifically relating to a rotary drive structure for heavy-duty mechanisms. Background Technology

[0002] Foup cleaning machines are cleaning equipment mainly used in the semiconductor manufacturing process to clean and dry various types of wafer pods, such as FOUP (Front Opening Unified Pod), and are widely used in the semiconductor industry.

[0003] The rotating mechanism in a Foup cleaning machine carries a heavy load, classified as a heavy-duty mechanism. This immense load manifests in torque, radial force, and axial force, posing a significant challenge when driving it. The drive structure requires considerable stability, reliability, and precision to ensure the heavy-duty mechanism rotates along a predetermined trajectory. Furthermore, for heavy-duty mechanisms, the drive structure must be simple and reliable; overly complex structures will create considerable obstacles to both initial installation and subsequent maintenance.

[0004] Therefore, a rotary drive structure for heavy-duty mechanisms is provided to achieve stable driving of heavy-duty mechanisms, reduce structural complexity, and improve the convenience of initial installation and subsequent maintenance. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a rotary drive structure for heavy-duty mechanisms.

[0006] To achieve the above-mentioned technical objectives, the technical solution adopted by this utility model is as follows:

[0007] A rotary drive structure for heavy-duty mechanisms includes an upper fixed shaft and a lower fixed shaft;

[0008] The upper fixed shaft is connected to a first deep groove ball bearing for constraining the heavy-duty mechanism, and the lower fixed shaft is connected to a thrust ball bearing for bearing the weight of the heavy-duty mechanism and a second deep groove ball bearing for constraining the heavy-duty mechanism.

[0009] In this utility model, a thrust ball bearing is provided to cope with the large load of the heavy-duty mechanism. The thrust ball bearing is characterized by its ability to withstand axial load. In this scenario, the thrust ball bearing bears the weight of the heavy-duty mechanism.

[0010] Once the weight of the heavy-duty mechanism is borne by the thrust ball bearing, it is only necessary to constrain both ends of the heavy-duty mechanism so that it can only rotate about the axis. Therefore, a first deep groove ball bearing is set at the top and a second deep groove ball bearing is set at the bottom. The first and second deep groove ball bearings mainly bear the radial load and constrain the heavy-duty mechanism. Similarly, they also make the heavy-duty mechanism more stable in the horizontal direction.

[0011] In terms of installation, the first deep groove ball bearing is installed through the upper fixed shaft. The upper fixed shaft does not need to provide too much force in the axial direction, but only needs to provide radial force to maintain rotational stability. The second deep groove ball bearing and the thrust ball bearing are installed through the lower fixed shaft. The weight of the heavy-duty mechanism is concentrated on the lower fixed shaft through the thrust ball bearing, which makes the overall center of gravity shift downward, making the rotational movement of the heavy-duty mechanism more stable.

[0012] In the entire drive structure, the upper fixed shaft and the lower fixed shaft are designed separately, which simplifies the structure and facilitates manufacturing and installation of each bearing. In terms of bearings, there are only a total of 1 bearing. The thrust ball bearing bears the weight of the heavy-duty mechanism, and the first deep groove ball bearing and the second deep groove ball bearing bear the radial load, constraining the radial degree of freedom of the heavy-duty mechanism. The 1 bearing effectively distributes the load of the heavy-duty mechanism in each direction, realizing stable drive.

[0013] The beneficial effects of this utility model are as follows: the separation of the upper fixed shaft and the lower fixed shaft facilitates manufacturing and installation of each bearing. In terms of bearing distribution, each bearing performs its own function and shares the load of the heavy-duty mechanism in each direction. The thrust ball bearing bears the weight of the heavy-duty mechanism and concentrates the load on the lower fixed shaft, thereby lowering the overall center of gravity and enhancing the stability of the rotational motion of the heavy-duty mechanism. The first and second deep groove ball bearings only need to bear the radial load, constraining the radial degree of freedom of the heavy-duty mechanism and achieving stable drive. Attached Figure Description

[0014] This utility model can be further illustrated by the non-limiting embodiments given in the accompanying drawings;

[0015] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model;

[0016] Figure 2 For the embodiments of this utility model in Figure 1 A magnified view of a section at point A in the middle;

[0017] Figure 3 For the embodiments of this utility model in Figure 1 A magnified view of a section at point B in the middle;

[0018] The symbols for the main components are explained below:

[0019] 1. Upper fixed shaft;

[0020] 2. Lower fixed shaft;

[0021] 3. First deep groove ball bearing;

[0022] 4. Second deep groove ball bearing;

[0023] 5. Thrust ball bearing;

[0024] 6. Electric motor;

[0025] 7. Speed ​​reducer;

[0026] 8. Couplings;

[0027] Z, Heavy-duty mechanism. Detailed Implementation

[0028] The technical solution of this utility model will be described in detail below with reference to specific embodiments and accompanying drawings. The embodiments described herein are specific implementations of this utility model, used to illustrate the concept of this utility model; these descriptions are explanatory and exemplary, and should not be construed as limiting the implementation methods or the scope of protection of this utility model. In addition to the embodiments described herein, those skilled in the art can employ other obvious technical solutions based on the content disclosed in the claims and specification of this application. These technical solutions include those that make any obvious substitutions and modifications to the embodiments described herein.

[0029] Example 1

[0030] like Figure 1 As shown, this embodiment provides a rotary drive structure for a heavy-duty mechanism, including an upper fixed shaft 1 and a lower fixed shaft 2;

[0031] The upper fixed shaft 1 is connected to the first deep groove ball bearing 3 for constraining the heavy-duty mechanism Z, and the lower fixed shaft 2 is connected to the thrust ball bearing 5 for bearing the weight of the heavy-duty mechanism Z and the second deep groove ball bearing 4 for constraining the heavy-duty mechanism Z.

[0032] In this embodiment, in order to cope with the large load of the heavy-duty mechanism Z, a thrust ball bearing 5 is provided. The thrust ball bearing 5 is characterized by being able to withstand axial loads. In this scenario, the thrust ball bearing 5 bears the weight of the heavy-duty mechanism Z.

[0033] Once the weight of the heavy-duty mechanism Z is borne by the thrust ball bearing 5, it is only necessary to constrain both ends of the heavy-duty mechanism Z so that the heavy-duty mechanism Z can only rotate about the axis. Therefore, a first deep groove ball bearing 3 located above and a second deep groove ball bearing 4 located below are provided. The first deep groove ball bearing 3 and the second deep groove ball bearing 4 mainly bear the radial load and constrain the heavy-duty mechanism Z. Similarly, this also makes the heavy-duty mechanism Z more stable in the horizontal direction.

[0034] In terms of installation, the first deep groove ball bearing 3 is installed through the upper fixed shaft 1. The upper fixed shaft 1 does not need to provide too much force in the axial direction, but only needs to provide radial force to maintain rotational stability. The second deep groove ball bearing 4 and the thrust ball bearing 5 are installed through the lower fixed shaft 2. The weight of the heavy-duty mechanism Z is concentrated on the lower fixed shaft 2 through the thrust ball bearing 5, which makes the overall center of gravity shift downward, making the rotational movement of the heavy-duty mechanism Z more stable.

[0035] In the entire drive structure, the upper fixed shaft 1 and the lower fixed shaft 2 are designed separately, which simplifies the structure and facilitates manufacturing and installation of each bearing. In terms of bearings, there are only 3 in total. The thrust ball bearing 5 bears the weight of the heavy-duty mechanism Z, and the first deep groove ball bearing 3 and the second deep groove ball bearing 4 bear the radial load and constrain the radial degree of freedom of the heavy-duty mechanism Z. The three bearings effectively distribute the load of the heavy-duty mechanism Z in each direction, thus achieving stable drive.

[0036] Example 2

[0037] like Figure 1 As shown, this embodiment provides a rotary drive structure for a heavy-duty mechanism. The difference from embodiment 1 is that it also includes a motor 6, a reducer 7, and a coupling 8. The reducer 7 is connected to the output shaft of the motor 6, and the coupling 8 realizes the connection between the heavy-duty mechanism Z and the reducer 7.

[0038] In this embodiment, the motor 6 serves as the power to drive the heavy-duty mechanism to rotate. After the torque is amplified by the reducer 7, the power is transmitted to the heavy-duty mechanism Z via the coupling 8.

[0039] Example 3

[0040] like Figure 2 As shown, this embodiment provides a rotary drive structure for heavy-duty mechanisms. The difference from Embodiment 1 is that the upper fixed shaft 1 has an inner cavity that extends through both ends of the axial direction. The first deep groove ball bearing 3 is installed in the inner cavity of the upper fixed shaft 1, and the coupling 8 is located in the inner cavity of the upper fixed shaft 1.

[0041] In this embodiment, the first deep groove ball bearing 3 and the coupling 8 are located in the inner cavity of the upper fixed shaft 1. The upper fixed shaft 1 acts as an external protective structure, which not only protects and prevents dust from the internal structure, but also hides the structure, making the appearance more aesthetically pleasing.

[0042] Example 4

[0043] like Figure 3 As shown, this embodiment provides a rotary drive structure for a heavy-duty mechanism. The difference from embodiment 1 is that the cross-section of the lower fixed shaft 2 is I-shaped. The inner rings of the thrust ball bearing 5 and the second deep groove ball bearing 4 are fitted with the lower fixed shaft 2. The thrust ball bearing 5 and the second deep groove ball bearing 4 form a redundant space for engaging the support part of the heavy-duty mechanism Z through an axial spacing. The outer ring of the second deep groove ball bearing 4 is fitted with the heavy-duty mechanism Z.

[0044] In this embodiment, the lower fixed shaft 2 has an I-shaped cross-section. The lower fixed shaft 2 can be divided into three parts: the base at the bottom of the I-shape, the vertical shaft in the middle of the I-shape, and the end cap at the top of the I-shape. The end cap and the vertical shaft are detachably connected. During structural installation, the thrust ball bearing 5 is first placed along the vertical shaft until it contacts the base. Then, the support part of the heavy-duty mechanism Z is fitted onto the vertical shaft. The entire weight of the heavy-duty mechanism Z is pressed onto the thrust ball bearing 5 by the support part. Then, the inner ring of the second deep groove ball bearing 4 is fitted with the vertical shaft, and the outer ring is fitted with the heavy-duty mechanism Z, so that the heavy-duty mechanism Z rotates under the constraint of the second deep groove ball bearing 4. The support part serves as the gap between the thrust ball bearing 5 and the second deep groove ball bearing 4. Finally, the upper end cap is connected to close the end of the vertical shaft.

[0045] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A rotary drive structure for heavy-duty mechanisms, characterized in that: It includes an upper fixed shaft (1) and a lower fixed shaft (2); The upper fixed shaft (1) is connected to a first deep groove ball bearing (3) for constraining the heavy-duty mechanism (Z), and the lower fixed shaft (2) is connected to a thrust ball bearing (5) for bearing the weight of the heavy-duty mechanism (Z) and a second deep groove ball bearing (4) for constraining the heavy-duty mechanism (Z).

2. The rotary drive structure for a heavy-duty mechanism according to claim 1, characterized in that: It also includes a motor (6), a reducer (7) and a coupling (8), wherein the reducer (7) is connected to the output shaft of the motor (6) and the coupling (8) realizes the connection between the heavy-duty mechanism (Z) and the reducer (7).

3. The rotary drive structure for a heavy-duty mechanism according to claim 2, characterized in that: The upper fixed shaft (1) is provided with an inner cavity that runs through both ends of the axial direction. The first deep groove ball bearing (3) is installed in the inner cavity of the upper fixed shaft (1), and the coupling (8) is located in the inner cavity of the upper fixed shaft (1).

4. A rotary drive structure for a heavy-duty mechanism according to claim 1, characterized in that: The lower fixed shaft (2) has an I-shaped cross-section. The inner rings of the thrust ball bearing (5) and the second deep groove ball bearing (4) are fitted with the lower fixed shaft (2). The thrust ball bearing (5) and the second deep groove ball bearing (4) form a redundant space in the axial direction for locking into the support part of the heavy-duty mechanism (Z). The outer ring of the second deep groove ball bearing (4) is fitted with the heavy-duty mechanism (Z).

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