Wafer box clamping device and crown block comprising same

Abstract

The utility model discloses a wafer box clamping device and a crown block comprising the same. The wafer box clamping device comprises a flexible transmission piece, a clamping mechanism and a transmission locking piece, the flexible transmission piece is provided with a first end portion and a second end portion, and when the flexible transmission piece transmits torque from the first end portion to the second end portion, the first end portion and the second end portion of the flexible transmission piece can move relative to each other in the radial direction; the clamping mechanism comprises a seat plate, a connecting rod and a clamping assembly, the seat plate is rotatably connected with a first end of the connecting rod, a second end of the connecting rod is connected with the clamping assembly, the connecting rod can rotate between a retraction position and an extension position, and the clamping assembly abuts against the wafer box at the extension position; the transmission locking piece is provided with an input end and an output end, the input end is connected with the second end of the flexible transmission piece, the output end is connected with the first end of the connecting rod, and the transmission locking piece has a transmission state and a locking state. The wafer box clamping device provided by the utility model can isolate the disturbance of the motor and stably clamp the wafer box.

Description

Technical Field

[0001] This utility model relates to the technical field of wafer transport devices, specifically to a wafer box clamping device and an overhead crane containing it. Background Technology

[0002] In semiconductor manufacturing, overhead cranes are typically used to move wafer cassettes containing wafers between different process stations. During this process, the crane uses a gripping mechanism to grasp the T-shaped structure on top of the wafer cassette. After the crane uses a lifting device to raise the wafer cassette to a predetermined height, clamping devices at the front and rear of the crane body hold the wafer cassette in place to prevent it from wobbling as it moves with the crane. Once clamped, the wafer cassette containing the wafer can move with the crane to the next process station. However, during this movement with the crane, it has been observed that the wafer cassettes can become unstable when clamped. Utility Model Content

[0003] To address the aforementioned technical problems, this utility model provides a wafer cassette clamping device, comprising: a flexible transmission member having a first end and a second end, wherein when the flexible transmission member transmits torque from its first end to its second end, its first end and second end are radially movable relative to each other; and a clamping mechanism comprising a base plate, a connecting rod, and a clamping assembly, wherein the base plate is rotatably connected to a first end of the connecting rod, and the second end of the connecting rod is connected to the clamping assembly, and the connecting rod is rotatable between a retracted position and an extended position, wherein the clamping assembly is located in the extended position. The component abuts against the wafer cassette; a transmission locking member has an input end and an output end, the input end being connected to the second end of the flexible transmission member, and the output end being connected to the first end of the connecting rod. The transmission locking member has a transmission state and a locking state. In the transmission state, the transmission locking member transmits the torque of the flexible transmission member to the first end of the connecting rod to switch the retracted position and the extended position. In the locking state, the transmission locking member disconnects the torque transmitted from the connecting rod to the flexible transmission member to lock the retracted position or the extended position.

[0004] Furthermore, the flexible transmission component is a magnetic coupling, which includes a first part and a second part that are separately disposed and magnetically driven. The first part and the second part are located at the first end and the second end of the flexible transmission component, respectively. The first part is connected to the drive source, and the second part is connected to the input end.

[0005] Furthermore, the magnetic coupling is a planar magnetic coupling. The first part and the second part of the planar magnetic coupling are both disc-shaped and are spaced apart from each other in the thickness direction. Multiple magnets with opposite poles are alternately arranged on the surfaces of the first part and the second part that are close to each other in the circumferential direction. The first part and the second part rotate synchronously by means of the magnetic force of the magnets thereon.

[0006] Furthermore, the plurality of magnets in the first part and the second part respectively form a first magnetic region and a second magnetic region, wherein the projected area of ​​one of the first magnetic region and the second magnetic region in a plane perpendicular to the rotation axis is smaller than the projected area of ​​the other in a plane perpendicular to the rotation axis.

[0007] Furthermore, the transmission locking component is a worm gear assembly or a harmonic reducer.

[0008] Furthermore, the worm and worm wheel of the worm gear assembly form the input end and the output end, respectively, and the rotation axis of the worm is orthogonal to the direction in which the clamping assembly abuts against the wafer cassette.

[0009] Furthermore, the driving source is a motor, and the wafer cassette clamping device also includes a motor mounting base. The motor mounting base has a flange portion and a fixing portion connected to the flange portion. The flange portion is connected to the flange face of the motor, and the fixing portion is connected to the base plate.

[0010] Furthermore, it also includes a worm gear seat and a worm holder. The worm holder includes a connecting portion extending along the axis of the worm and support arm portions connected to both ends of the connecting portion. Both support arm portions are provided with seat holes for supporting the ends of the worm. The worm gear seat is connected to the area of ​​the worm holder near the two seat holes. The worm gear seat has a connecting area for mounting the worm gear between the two seat holes. The connecting area extends away from the worm holder.

[0011] Furthermore, it also includes a connecting plate, and there are two connecting rods, the second ends of which are rotatably connected to the connecting plate, and the clamping assembly is connected to the connecting plate.

[0012] This utility model also provides an overhead crane that can move in a front-to-back direction, including a front body and a rear body arranged at a distance from each other. Both the front body and the rear body have clamping devices, which are the aforementioned wafer cassette clamping devices. When the overhead crane transports a wafer cassette, the connecting rods of the two wafer cassette clamping devices move to the extended position so that the two clamping components abut against the front and rear walls of the wafer cassette and clamp it. Attached Figure Description

[0013] Figure 1 This is a top view of the connecting rod of the wafer cassette clamping device in the extended position according to Embodiment 1 of this utility model.

[0014] Figure 2 This is a three-dimensional structural diagram of the connecting rod of the wafer cassette clamping device in the extended position according to Embodiment 1 of this utility model.

[0015] Figure 3 This is a top view of the connecting rod of the wafer cassette clamping device in the retracted position according to Embodiment 1 of this utility model.

[0016] Figure 4 This is a three-dimensional structural schematic diagram of the connecting rod of the wafer cassette clamping device in the extended position, from another perspective, according to another embodiment of the present invention.

[0017] Figure 5 This is a schematic diagram showing the connection relationship between the worm gear seat and the worm wheel seat of the wafer cassette clamping device according to Embodiment 1 of this utility model;

[0018] Figure 6 This is a cross-sectional structural diagram of the wafer cassette clamping device according to Embodiment 1 of the present invention when the worm gear and worm gear seat are engaged.

[0019] Figure 7 This is a top view of the wafer cassette clamping device according to Embodiment 1 of the present invention when clamping a wafer cassette. Detailed Implementation

[0020] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0021] In related technologies, the motor's output is directly connected to the connecting rod, and the motor has a braking function. After the motor brakes, the connecting rod connected to the motor cannot swing, and the clamping assembly connected to the connecting rod will not move away from the wafer cassette with the swing of the connecting rod. Therefore, motor braking can keep the clamping assembly in the clamping position, and the clamping assembly can effectively clamp the wafer cassette. When the overhead crane is transporting the wafer cassette, the connecting rod tends to swing. When the motor braking components (such as springs) become fatigued, the braking force decreases or the braking is not timely. This braking force cannot suppress the swing of the connecting rod. Therefore, when turning, the clamping assembly moves away from the wafer cassette with the swing of the connecting rod, which leads to unstable clamping of the wafer cassette.

[0022] Based on this, see Appendix Figure 1-5 As shown, the wafer cassette clamping device of this embodiment includes a flexible transmission component 1, a clamping mechanism 2, and a transmission locking component 3.

[0023] The flexible transmission member 1 has a first end 11 and a second end 12. When the flexible transmission member 1 transmits torque from its first end 11 to its second end 12, its first end 11 and second end 12 can move radially relative to each other. The clamping mechanism 2 includes a base plate 21, a connecting rod 22, and a clamping assembly 23. The base plate 21 is rotatably connected to the first end of the connecting rod 22, and the second end of the connecting rod 22 is connected to the clamping assembly 23. The connecting rod 22 can rotate between a retracted position and an extended position. In the extended position, the clamping assembly 23 abuts against the wafer cassette 9. The transmission locking member 3 has an input end 31 and an output end 32. The input end 31 is connected to the second end 12 of the flexible transmission member 1, and the output end 32 is connected to the first end of the connecting rod 22. The transmission locking member 3 has a transmission state and a locking state: in the transmission state, the transmission locking member 3 transmits the torque of the flexible transmission member 1 to the first end of the connecting rod 22 to switch between the retracted position and the extended position; in the locking state, the transmission locking member 3 disconnects the torque of the connecting rod 22 from the flexible transmission member 1 to lock the retracted position or the extended position.

[0024] When it is necessary to clamp the wafer cassette 9, the drive source 4 provides torque to the input end 31 of the transmission locking member 3 through the flexible transmission member 1. The transmission locking member 3 is in the transmission state, and the torque of the input end 31 can be transmitted to the output end 32. The output end 32 drives the connecting rod 22 to swing from the retracted position to the unfolded position. The clamping component 23 at the second end of the connecting rod 22 approaches the wafer cassette 9 and can abut against it to clamp the wafer cassette 9.

[0025] When it is necessary to move the wafer cassette 9, the drive source 4 stops providing torque to the input end 31 of the transmission locking component 3 through the flexible transmission component 1, and the transmission locking component 3 is in a locked state. When the crane moves the wafer cassette 9 carrying the wafers and slows down to turn at the bend, the wafer cassette 9 causes the connecting rod 22 to swing due to the clamping assembly 23. Because of the transmission lock between the output end 32 and the input end 31 of the transmission locking component 3, the transmission locking component 3 cannot transmit the torque of the connecting rod 22 to the flexible transmission component 1. Therefore, the transmission locking component 3 can stably keep the connecting rod 22 in the extended position. Thus, when the crane turns while moving the wafer cassette 9, the clamping assembly 23 at the second end of the connecting rod 22 can also effectively clamp the wafer cassette 9.

[0026] Since the flexible transmission component 1 can move radially relative to the first end 11 and the second end 12 when transmitting torque from its first end 11 to the second end 12, when the trolley is carrying the wafer cassette 9 and decelerating and turning at a curve, the drive source 4 connected to the first end 11 of the flexible transmission component 1 is not likely to transmit the small movement of the force on the drive source 4 to the input end 31 of the transmission locking component 3. When the input end 31 of the transmission locking component 3 is not disturbed, the transmission locking component 3 can be stably locked. The connecting rod 22 connected to the output end 32 of the transmission locking component 3 can be stably extended. Therefore, the clamping assembly 23 connected to the second end of the connecting rod 22 can stably clamp the wafer cassette 9. The flexible transmission component 1 avoids the transmission locking component 3 from being unstable in the locked state due to the disturbance of the drive source 4 to the transmission locking component 3, which in turn causes the connecting rod 22 to be unstable in unfolding and the clamping assembly 23 to be unstable in clamping the wafer cassette 9.

[0027] In some embodiments, the clamping mechanism 2 has two connecting rods 22, and the clamping mechanism 2 also includes a connecting plate 24, the second ends of the two connecting rods 22 are rotatably connected to the connecting plate 24, and the clamping assembly 23 is connected to the connecting plate 24.

[0028] In some implementations, see Appendix Figure 3 As shown, the transmission locking component 3 is a worm gear structure. The worm and worm wheel of the worm gear structure form the input end 31 and the output end 32, respectively, and the worm is connected to the flexible transmission component 1.

[0029] In some embodiments, the rotation axis of the drive source 4 is in the same direction as the transmission axis of the worm gear and orthogonal to the direction in which the clamping assembly 23 abuts against the wafer cassette 9. When the trolley is transporting the wafer cassette 9 carrying the wafers and slows down to turn at a bend, the small movement of the drive source 4 under force is isolated by the flexible transmission component 1, which avoids the worm gear from increasing the gap between itself and the worm wheel due to the disturbance of the drive source 4. This, in turn, prevents the connecting rod 22 from swinging due to the centrifugal force of the heavier wafer cassette 9 and avoids the clamping assembly 23 from being unstable in clamping the wafer cassette 9 due to the swinging of the connecting rod 22.

[0030] In some implementations, see Figure 4 and Figure 5 As shown, the wafer cassette clamping device also includes a worm gear seat 5 and a worm holder 6. The worm holder 6 includes a connecting portion 61 extending along the axis of the worm and support arm portions 62 connected to both ends of the connecting portion 61. Both support arm portions 62 are provided with seat holes 621 to support the ends of the worm. The worm gear seat 5 is connected to the area of ​​the worm holder 6 near the two seat holes 621. The worm gear seat 5 is provided with a connecting area 51 for mounting the worm gear between the two seat holes 621, and the connecting area 51 extends away from the side of the worm holder 6. This structure facilitates the installation of the worm gear seat 5 and the worm holder 6 and ensures the coaxiality of the two seat holes 621.

[0031] In some implementations, see Appendix Figure 6 As shown, the worm has a first shoulder 311 and a second shoulder 312. The two seat holes 621 of the worm seat 6 are the first seat hole 6211 and the second seat hole 6212, respectively. A first bearing 91 is provided between the first shoulder 311 and the first seat hole 6211. A spacer 93 is provided on the side of the second shoulder 312 near the first seat hole 6211. A second bearing 92 is provided on the side of the spacer 92 away from the first shoulder 311. The second bearing 92 abuts against the outer end face of the first seat hole 6211. An end cap 94 is also provided on the outer side of the second bearing 92.

[0032] When installing the worm gear, follow these steps:

[0033] 1. Insert the first bearing 91 into the first seat hole 6211, with the outer ring flange of the first bearing 91 abutting against the right end face of the first seat hole 6211;

[0034] 2. Insert the cold-treated worm gear from the second seat hole 6212 toward the first seat hole 6211, and mate the left shaft section of the worm gear with the inner ring of the first bearing 91. The end face of the inner ring of the first bearing 91 abuts against the first shoulder 311 of the worm gear.

[0035] 3. Install spacer 93 into the right shaft section of the worm, and mate the second bearing 92 with the right shaft section of the worm and the second seat hole 6212. The second bearing 92 abuts against the second shoulder 312 of the worm through spacer 93.

[0036] 4. During the installation and tightening of end cover 94, end cover 94 presses against the outer ring of the second bearing 92 to prevent the worm gear from moving.

[0037] In other possible implementations, the transmission locking element 3 can also be a harmonic reducer, utilizing its...

[0038] Its large reverse starting torque gives it a certain degree of self-locking function.

[0039] In some embodiments, the flexible transmission element 1 is a magnetic coupling. The magnetic coupling includes a first part and a second part that are separately disposed and magnetically driven. The first part and the second part are located at the first end 11 and the second end 12 of the flexible transmission element 1, respectively. The first part is connected to the drive source 4, and the second part is connected to the input end 31. The magnetic coupling includes planar magnetic couplings and coaxial magnetic couplings. By selecting a magnetic coupling as the flexible transmission element 1, disturbances to the transmission locking element 3 can be isolated, and it can slide to avoid motor stalling and excessive clamping force on the wafer cassette 9, which could cause deformation of the wafer cassette 9.

[0040] In some embodiments, the magnetic coupling is a planar magnetic coupling. The first and second parts of the planar magnetic coupling are both disc-shaped and are spaced apart from each other in the thickness direction. Multiple magnets with opposite poles are alternately arranged on the close surfaces of the first and second parts in the circumferential direction. The first and second parts rotate synchronously by means of the magnetic force of the magnets thereon.

[0041] In some embodiments, the plurality of magnets in the first and second portions respectively form a first magnetic region and a second magnetic region, wherein the projected area of ​​one of the first and second magnetic regions in a plane perpendicular to the rotation axis is smaller than the projected area of ​​the other in a plane perpendicular to the rotation axis. Therefore, when the first and second portions move relative to each other radially, the force experienced during radial movement can be reduced, minimizing radial disturbance to the worm gear as much as possible.

[0042] In some embodiments, the drive source 4 is a motor, and the wafer cassette clamping device also includes a motor mounting base 7 (see...). Figure 5 As shown, the motor mounting base 7 has a flange portion 71 and a fixing portion 72 connected to the flange portion 71. The flange portion 71 is connected to the flange face of the motor, and the fixing portion 72 is connected to the base plate 21. Note that the motor mounting base 7 here is not a large base located along the motor axis and at the bottom of the motor, but simply a flange portion 71 and a fixing portion 72, thereby minimizing the weight and volume of the base and thus reducing the weight of the overhead crane. This application directly uses the flange to install the motor. However, due to this installation method, the motor will wobble when the overhead crane turns or accelerates or decelerates, which will inevitably cause disturbance to the transmission components. This application solves this problem by using a flexible transmission component 1, avoiding the negative impact of motor wobble on the clamping of the wafer cassette 9 while meeting the industry demand for lightweight overhead cranes.

[0043] In some embodiments, the clamping assembly includes two sets of clamping arms pivotally connected to the top surface of the connecting plate 24 and an elastic member elastically connecting the clamping arms to the connecting plate 24. The clamping arm includes at least a swing arm rotatably disposed on the top surface of the connecting plate 24 and a pressure roller vertically rotatably disposed at the end of the top surface of the swing arm. The elastic member is fixed at one end to the swing arm and at the other end to the connecting plate 24.

[0044] Example 2:

[0045] See appendix Figure 7 As shown, this embodiment is an overhead crane that can move in the front-to-back direction. It includes a front body 81 and a rear body 82 arranged at intervals. Both the front body 81 and the rear body 82 have clamping devices, which are wafer cassette clamping devices of Embodiment 1.

[0046] When the overhead crane moves the wafer cassette 9, the connecting rods 22 of the two wafer cassette clamping devices move to the extended position so that the two clamping components 23 abut against the front and rear walls of the wafer cassette 9 to clamp it. Conversely, the clamping state of the wafer cassette 9 can be released.

[0047] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it. They cannot be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be covered within the protection scope of this utility model.

Claims

1. A wafer cassette clamping device, characterized in that, include: A flexible transmission component having a first end and a second end, wherein when the flexible transmission component transmits torque from its first end to its second end, its first end and its second end are relatively radially movable. A clamping mechanism includes a base plate, a connecting rod, and a clamping assembly. The base plate is rotatably connected to a first end of the connecting rod, and a second end of the connecting rod is connected to the clamping assembly. The connecting rod can rotate between a retracted position and an extended position. In the extended position, the clamping assembly abuts against the wafer cassette. A transmission locking member has an input end and an output end. The input end is connected to the second end of the flexible transmission member, and the output end is connected to the first end of the connecting rod. The transmission locking member has a transmission state and a locking state. In the transmission state, the transmission locking member transmits the torque of the flexible transmission member to the first end of the connecting rod to switch between the retracted position and the extended position. In the locking state, the transmission locking member disconnects the torque transmitted from the connecting rod to the flexible transmission member to lock the retracted position or the extended position.

2. The wafer cassette clamping device according to claim 1, characterized in that, The flexible transmission component is a magnetic coupling, which includes a first part and a second part that are separately disposed and magnetically driven. The first part and the second part are located at the first end and the second end of the flexible transmission component, respectively. The first part is connected to the drive source, and the second part is connected to the input end.

3. The wafer cassette clamping device according to claim 2, characterized in that, The magnetic coupling is a planar magnetic coupling. The first part and the second part of the planar magnetic coupling are both disc-shaped and are spaced apart from each other in the thickness direction. Multiple magnets with opposite poles are alternately arranged on the surfaces of the first part and the second part along the circumferential direction. The first part and the second part rotate synchronously by means of the magnetic force of the magnets thereon.

4. The wafer cassette clamping device according to claim 3, characterized in that, The plurality of magnets in the first part and the second part respectively form a first magnetic region and a second magnetic region, wherein the projected area of ​​one of the first magnetic region and the second magnetic region in a plane perpendicular to the axis of rotation is smaller than the projected area of ​​the other in a plane perpendicular to the axis of rotation.

5. The wafer cassette clamping device according to any one of claims 1-4, characterized in that, The transmission locking component is a worm gear assembly or a harmonic reducer.

6. The wafer cassette clamping device according to claim 5, characterized in that, The worm and worm wheel of the worm gear assembly form the input end and the output end, respectively.

7. The wafer cassette clamping device according to any one of claims 2-4, characterized in that, The driving source is a motor, and the wafer cassette clamping device further includes a motor mounting base. The motor mounting base has a flange portion and a fixing portion connected to the flange portion. The flange portion is connected to the flange face of the motor, and the fixing portion is connected to the base plate.

8. The wafer cassette clamping device according to claim 5, characterized in that, It also includes a worm gear seat and a worm seat. The worm seat includes a connecting portion extending along the axis of the worm and support arm portions connected to both ends of the connecting portion. Both support arm portions are provided with seat holes for supporting the ends of the worm. The worm gear seat is connected to the area of ​​the worm seat near the two seat holes. The worm gear seat is provided with a connecting area for mounting the worm gear between the two seat holes. The connecting area extends away from the worm seat.

9. The wafer cassette clamping device according to any one of claims 1-4, 6, and 8, characterized in that, It also includes a connecting plate, and there are two connecting rods, the second ends of which are rotatably connected to the connecting plate, and the clamping assembly is connected to the connecting plate.

10. A crane, the crane being movable in a forward and backward direction, characterized in that, The device includes a front body and a rear body arranged at a distance from each other. Both the front body and the rear body have clamping devices. The clamping devices are wafer cassette clamping devices as described in any one of claims 1-9. When the overhead crane transports the wafer cassette, the connecting rods of the two wafer cassette clamping devices move to the extended position so that the two clamping components abut against the front and rear walls of the wafer cassette and clamp it.

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