High-purity gas purifying and filtering equipment

Abstract

The utility model discloses high-purity gas purifying and filtering equipment which comprises a mounting base, a mounting shell is mounted at the top of the mounting base through a fixing piece, a third rubber gasket is adhered to the bottom of the mounting shell, a filter element piece is mounted in the mounting shell, a connecting pipe is welded to the outer wall of the top of the mounting shell, and an exhaust pipe is welded to the side wall of the mounting shell. According to the utility model, when the filter element is blocked due to impurity adhesion and the air circulation resistance is increased, the air pressure value monitored by the pressure sensor can continuously and abnormally rise, and pressure data can be remotely sent to the control terminal in a wireless transmission manner in the form of digital signals, so that related personnel are timely notified to replace the filter element, and the safety of the filter element is ensured. According to the gas purification device, continuous and stable operation of gas purification is guaranteed, meanwhile, through cooperation of the threaded rod, the support, the roller shaft and the inclined plate, tight attachment or separation of the mounting shell and the mounting base can be achieved only by rotating the threaded rod, and compared with a traditional bolt fixing mode, the replacement rate of the filter element piece is greatly increased.

Description

Technical Field

[0001] This utility model relates to the field of filtration technology, and in particular to a high-purity gas purification and filtration device. Background Technology

[0002] In many industrial production and scientific research fields, such as semiconductor manufacturing, electronics industry, chemical synthesis, and pharmaceutical research and development, high-purity gases are indispensable key raw materials. Their purity directly affects the quality and performance of products. Impurities may cause product defects, performance degradation, or even scrapping. Therefore, it is of great significance to purify and filter high-purity gases to ensure that they reach extremely high purity standards.

[0003] Although some high-purity gas purification and filtration equipment already exists on the market, these devices still have many shortcomings in practical applications. Existing equipment lacks effective means of monitoring the clogging of filter elements. Usually, operators can only detect the problem when the filter elements are severely clogged, causing a significant decrease in gas purification and filtration efficiency, or even affecting the entire production process. At this point, replacing the filter elements will not only cause production interruption, but may also pose a potential threat to the quality of subsequent products due to the large accumulation of impurities.

[0004] Therefore, developing a high-purity gas purification and filtration device that can quickly replace filter elements and monitor filter status in real time has become an urgent problem to be solved in the industry. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a high-purity gas purification and filtration device.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A high-purity gas purification and filtration device includes a mounting base, a mounting shell is mounted on the top of the mounting base by a fixing member, a filter element is installed inside the mounting shell, a connecting pipe is welded to the outer wall of the top of the mounting shell, and an exhaust pipe is welded to the side wall of the mounting shell. An inlet pressure monitoring pipe is connected to the top of the connecting pipe.

[0008] As a further embodiment of this utility model: the fixing component includes a vertical plate and a guide rod. The vertical plate is welded to the outer wall of the top of the mounting base, and the guide rod is movably connected to the inner wall of the through hole opened on the surface of the vertical plate. One end of the guide rod is fixed with a bracket, and rollers are movably connected to the inner walls on both sides of the bracket.

[0009] As a further embodiment of this utility model: the surface of the vertical plate is threaded with a threaded rod, and one end of the threaded rod is movably connected to the side of the bracket through a bearing.

[0010] As a further improvement of this utility model: a pad is welded to the inner wall of the bottom of the mounting shell, and an inclined plate that works with the roller is welded to the top of the pad.

[0011] As a further embodiment of this utility model: the filter element includes a filter element body and rubber gaskets two and four respectively bonded to its top and bottom, and an air inlet is provided at the top of the filter element body.

[0012] As a further embodiment of this utility model: the intake pressure monitoring fitting includes an intake pipe and a pressure sensor, the pressure sensor is installed on the side wall of the intake pipe, and the intake pipe and the connecting pipe are fixed together by bolts and nuts.

[0013] As a further improvement of this utility model, a rubber gasket is provided between the air intake pipe and the connecting pipe.

[0014] As a further improvement of this utility model: a rubber gasket is bonded to the bottom of the mounting shell.

[0015] Compared with the prior art, this utility model provides a high-purity gas purification and filtration device, which has the following beneficial effects:

[0016] 1. Through the cooperation of threaded rod, bracket, roller and inclined plate, the installation shell and the installation seat can be tightly fitted or separated by simply rotating the threaded rod. Compared with the traditional bolt fixing method, it greatly improves the replacement rate of filter element and saves time and labor costs.

[0017] 2. Rubber gasket 2 and rubber gasket 4 are respectively installed at the top and bottom of the filter element. During assembly, rubber gasket 2 fits against the inner wall of the top of the mounting shell, the air inlet connects with the connecting pipe, rubber gasket 4 fits against the top of the mounting base, and rubber gasket 3 is bonded to the bottom of the mounting shell. This effectively improves the sealing between the filter element body and the mounting base and mounting shell, and prevents leakage of high-purity gas during the purification and filtration process.

[0018] 3. The pressure sensor can monitor the gas pressure parameters of high-purity gas in the purification process in real time. When the filter element is blocked by impurities, causing the gas flow resistance to increase, the gas pressure value monitored by the pressure sensor will continue to rise abnormally. The pressure data can be remotely transmitted to the control terminal as a digital signal via wireless transmission, so as to notify relevant personnel to replace the filter element in a timely manner, thus ensuring the continuous and stable operation of gas purification.

[0019] The parts of this device not covered herein are the same as or can be implemented using existing technologies. This utility model has a simple structure and is easy to operate. Attached Figure Description

[0020] Figure 1This is a schematic diagram of the overall structure of a high-purity gas purification and filtration device proposed in this utility model;

[0021] Figure 2 This is a schematic diagram of the support structure for a high-purity gas purification and filtration device proposed in this utility model.

[0022] Figure 3 This is a schematic diagram of the main structure of the support component of a high-purity gas purification and filtration device proposed in this utility model;

[0023] Figure 4 This is a schematic diagram of the overall structure of the filter assembly of a high-purity gas purification and filtration device proposed in this utility model;

[0024] Figure 5 This is an exploded structural diagram of the filter component of a high-purity gas purification and filtration device proposed in this utility model;

[0025] In the diagram: 1. Mounting base; 2. Mounting housing; 3. Inlet pipe; 4. Connecting pipe; 5. Inclined plate; 6. Pad; 7. Exhaust pipe; 8. Pressure sensor; 9. Threaded rod; 10. Bracket; 11. Vertical plate; 12. Guide rod; 13. Roller shaft; 14. Rubber gasket one; 15. Filter element body; 16. Rubber gasket two; 17. Rubber gasket three; 18. Rubber gasket four. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0027] A high-purity gas purification and filtration device, such as Figures 1 to 5 As shown, it includes a mounting base 1, a mounting shell 2 is mounted on the top of the mounting base 1 by a fastener, a rubber gasket 317 is glued to the bottom of the mounting shell 2, and a filter element is installed inside the mounting shell 2. A connecting pipe 4 is welded to the outer wall of the top of the mounting shell 2, and an exhaust pipe 7 is welded to the side wall of the mounting shell 2. An intake pressure monitoring pipe is connected to the top of the connecting pipe 4.

[0028] When high-purity gas needs to be purified and filtered, the filter element is first installed inside the mounting shell 2, with the top of the filter element connected to the connecting pipe 4. Then, the bottom of the mounting shell 2 is connected to the top of the mounting base 1. The mounting shell 2 and the mounting base 1 are then fixed with fasteners to limit the position of the filter element. During filtration, the high-purity gas is delivered to the connecting pipe 4 using the inlet pressure monitoring pipe. The high-purity gas enters the filter element through the connecting pipe 4 and is purified and filtered by the filter element. The filtered high-purity gas is discharged through the exhaust pipe 7 set on the side of the mounting shell 2, thus completing the purification of the high-purity gas.

[0029] As the purification and filtration of high-purity gases continues, impurities will adhere to the filter element. When the impurities accumulate to a certain extent, they will clog the filter element. If the filter element is not replaced in time, it will affect the purification and filtration effect of the high-purity gas. Therefore, the inlet pressure monitoring pipe can monitor the high-purity gas pressure. When the filter element is clogged due to impurities, preventing the high-purity gas from passing through quickly, the high-purity gas volume pressure will increase inside the filter element and inside the connecting pipe 4. The inlet pressure monitoring pipe will detect an increase in gas pressure and provide feedback to remind relevant personnel to replace the filter element.

[0030] The fixing component includes a vertical plate 11 and a guide rod 12. The vertical plate 11 is welded to the top outer wall of the mounting base 1. The guide rod 12 is slidably connected to the inner wall of the through hole opened on the surface of the vertical plate 11. A bracket 10 is fixed to one end of the guide rod 12, and rollers 13 are rotatably connected to the inner walls on both sides of the bracket 10. A threaded rod 9 is threadedly connected to the surface of the vertical plate 11, and one end of the threaded rod 9 is rotatably connected to the side of the bracket 10 through a bearing. A pad 6 is welded to the bottom inner wall of the mounting shell 2, and an inclined plate 5 that cooperates with the roller 13 is welded to the top of the pad 6.

[0031] When it is necessary to fix the mounting base 1 and the mounting shell 2, the mounting shell 2 and the mounting base 1 are aligned, and the inclined plate 5 and the roller shaft 13 are in a relative position. Then, the knob at one end of the threaded rod 9 is used to rotate the threaded rod 9. The bracket 10 and the roller shaft 13 move laterally under the guidance of the guide rod 12. When the roller shaft 13 and the inclined surface of the inclined plate 5 come into contact, as the threaded rod 9 continues to rotate, the inclined surface of the inclined plate 5 causes the roller shaft 13 to indirectly apply pressure to the mounting shell 2, thereby ensuring a tight fit between the mounting shell 2 and the mounting base 1. When it is necessary to replace the filter element, simply rotate the threaded rod 9 in the opposite direction using the knob to disengage the roller shaft 13 and the inclined plate 5, thereby facilitating the separation of the mounting base 1 and the mounting shell 2 and making it easier to replace the filter element. This is equivalent to traditional bolt fixing and can improve the replacement rate of the filter element.

[0032] The filter element includes a filter body 15 and rubber gaskets 16 and 18 respectively bonded to its top and bottom, and an air inlet is provided at the top of the filter body 15.

[0033] When the filter element needs to be assembled, the filter element body 15 is slid along the inside of the mounting shell 2. After the second rubber gasket 16 and the top inner wall of the mounting shell 2 are in contact, the air inlet on the second rubber gasket 16 and the connecting pipe 4 are connected. Then, the mounting shell 2 is placed on the mounting base 1 so that the fourth rubber gasket 18 and the top of the mounting base 1 are in contact. The second rubber gasket 16 and the fourth rubber gasket 18 improve the sealing between the filter element body 15 and the mounting base 1 and the mounting shell 2, so as to avoid leakage during high-purity gas purification and filtration. During high-purity gas purification and filtration, it enters the interior of the filter element body 15 through the connecting pipe 4 and the air inlet, and is discharged from the exhaust pipe 7 after being filtered by the filter element body 15.

[0034] The intake pressure monitoring fitting includes an intake pipe 3 and a pressure sensor 8. The pressure sensor 8 is installed on the side wall of the intake pipe 3, and a rubber gasket 14 is provided between the intake pipe 3 and the connecting pipe 4. The intake pipe 3 and the connecting pipe 4 are fixed together by bolts and nuts.

[0035] Pressure sensor 8 monitors the gas pressure parameters of high-purity gas in the purification process. When the filter element becomes clogged, the gas flow resistance increases, and the gas pressure value monitored by pressure sensor 8 continues to rise abnormally. Pressure sensor 8 can remotely transmit the pressure data to the control terminal as a digital signal via wireless transmission to notify relevant personnel, so that relevant personnel can carry out replacement and ensure the continuous and stable operation of gas purification.

[0036] Working principle: First, the filter element is installed into the mounting shell 2 and its top is aligned with the connecting pipe 4. Then, the roller shaft 13 is driven to move along the inclined plate 5 by rotating the threaded rod 9, so as to achieve a tight fixation between the mounting shell 2 and the mounting base 1. When high-purity gas is input through the inlet pipe 3, the pressure sensor 8 monitors the gas pressure in real time. After the gas is filtered through the filter element body 15, it is discharged from the exhaust pipe 7. When the gas flow is obstructed due to impurities in the filter element, the gas pressure in the inlet pipe 3 rises abnormally. The pressure sensor 8 immediately transmits the pressure data wirelessly to the control terminal and triggers a replacement reminder. At this time, rotating the threaded rod 9 in the opposite direction can quickly separate the mounting shell 2 and the mounting base 1, complete the replacement of the filter element, and ensure the continuous and efficient operation of the equipment.

[0037] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A high-purity gas purification and filtration device, comprising a mounting base (1), characterized in that, The mounting base (1) is fitted with a mounting shell (2) on top by a fastener, and a filter element is installed inside the mounting shell (2). A connecting pipe (4) is welded to the outer wall of the top of the mounting shell (2), and an exhaust pipe (7) is welded to the side wall of the mounting shell (2). An intake pressure monitoring pipe is connected to the top of the connecting pipe (4).

2. The high-purity gas purification and filtration device according to claim 1, characterized in that, The fixing component includes a vertical plate (11) and a guide rod (12). The vertical plate (11) is welded to the top outer wall of the mounting base (1). The guide rod (12) is movably connected to the inner wall of the through hole opened on the surface of the vertical plate (11). One end of the guide rod (12) is fixed with a bracket (10), and rollers (13) are movably connected to the inner walls on both sides of the bracket (10).

3. The high-purity gas purification and filtration device according to claim 2, characterized in that, The vertical plate (11) has a threaded rod (9) threadedly connected to its surface, and one end of the threaded rod (9) is movably connected to the side of the bracket (10) via a bearing.

4. The high-purity gas purification and filtration device according to claim 3, characterized in that, The mounting housing (2) has a pad (6) welded to the bottom inner wall, and the top of the pad (6) has an inclined plate (5) that works with the roller (13).

5. The high-purity gas purification and filtration device according to claim 1, characterized in that, The filter element includes a filter body (15) and rubber gaskets 2 (16) and 4 (18) respectively bonded to its top and bottom, and the filter body (15) has an air inlet at its top.

6. The high-purity gas purification and filtration device according to claim 1, characterized in that, The intake pressure monitoring fitting includes an intake pipe (3) and a pressure sensor (8). The pressure sensor (8) is installed on the side wall of the intake pipe (3), and the intake pipe (3) and the connecting pipe (4) are fixed together by bolts and nuts.

7. The high-purity gas purification and filtration device according to claim 6, characterized in that, A rubber gasket (14) is provided between the air intake pipe (3) and the connecting pipe (4).

8. The high-purity gas purification and filtration device according to claim 1, characterized in that, The bottom of the mounting housing (2) is bonded with a rubber gasket three (17).

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