Polycrystalline silicon waste gas treatment system

Abstract

The utility model provides a polycrystalline silicon waste gas treatment system, aiming at solving the technical problem that the existing waste gas treatment device is not timely and inflexible to operate when being used. The outlet of the waste gas buffer tank is connected with a plurality of groups of leaching units; the pressure detection module is arranged on the waste gas buffer tank; the control module is in communication connection with the pressure detection module, the waste gas buffer tank and each group of leaching units; the control module receives the pressure value collected by the pressure detection module, regulates opening and closing of an outlet of the waste gas buffer tank according to the pressure value, and regulates opening or closing of the leaching units according to a preset sequence so as to achieve pressure regulation in the waste gas buffer tank. The pressure of the waste gas buffer tank is monitored, the outlet of the waste gas buffer tank and the leaching units are controlled through the pressure value, all the leaching units are sequentially opened one by one according to the discharge amount to treat waste gas, it is guaranteed that the waste gas buffer tank does not operate at overpressure, and the safety and environmental protection problems generated during waste gas treatment are prevented.

Description

Technical Field

[0001] This utility model relates to the field of chemical waste gas treatment technology, and in particular to a polycrystalline silicon waste gas treatment system. Background Technology

[0002] Polysilicon is a crucial raw material for the solar photovoltaic industry and is also widely used in semiconductor and silicon product manufacturing. With the rapid development of the renewable energy industry, the demand for polysilicon from the solar photovoltaic sector continues to grow. As for the chemical industry, the importance of safety in chemical production cannot be underestimated. Chemical production processes involve hazardous factors such as high temperature and pressure, contact with chemicals, and the release of harmful gases. Accidents often lead to serious personal injury and environmental damage. Waste gas treatment devices are the receiving point for the safe release of waste gas from all parts of the plant. As the final stop for pressure relief, how to receive waste gas from all parts of the plant in the safest and fastest way, and how to efficiently respond to emergencies, has always been a test and challenge for waste gas treatment devices. Therefore, in waste gas treatment in related chemical fields, waste gas treatment is an important part of the plant's environmental protection system. It must not only ensure that the vented exhaust gas is qualified and does not cause environmental pollution, but also ensure safety during pressure relief.

[0003] Currently, when the external pressure increases, i.e. when the waste gas buffer tank is overpressurized, it is usually necessary to manually open the valve to release the pressure. The waste gas then goes to the scrubbing tower, and the opening of the inlet valve is adjusted according to the inlet pressure of the scrubbing tower. After the pressure returns to normal, the valve must be manually closed to stop releasing pressure to the scrubbing tower. This method of releasing gas has the problems of untimely and inflexible manual operation, and remote control personnel cannot guarantee to monitor every unannounced pressure release. In emergency situations, the cumbersome operation may also lead to human error. Especially in sudden emergencies, when the external pressure increases sharply, the operator cannot adjust the valve in time and quickly, which can easily cause the waste gas buffer tank to be continuously pressurized, resulting in equipment and pipeline rupture, waste gas leakage and other unsafe accidents. Summary of the Invention

[0004] In view of the above situation and to overcome the defects of the prior art, the purpose of this utility model is to provide a polycrystalline silicon waste gas treatment system, which solves the technical problem that existing waste gas treatment devices are not timely and flexible in operation when the external pressure relief increases sharply.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A polysilicon waste gas treatment system includes: a waste gas buffer tank, the outlet of which is connected to multiple sets of scrubbing units; a pressure detection module disposed on the waste gas buffer tank for detecting the pressure inside the waste gas buffer tank; and a control module communicatively connected to the pressure detection module, the waste gas buffer tank, and each set of scrubbing units; wherein the control module receives the pressure value collected by the pressure detection module and adjusts the opening and closing of the outlet of the waste gas buffer tank according to the pressure value, and adjusts the scrubbing units to open or close in a preset sequence, so as to achieve pressure regulation inside the waste gas buffer tank.

[0007] This invention controls the opening and closing of the waste gas buffer tank outlet by monitoring the pressure of the waste gas buffer tank, and uses the pressure value to control the scrubbing unit. Each scrubbing unit opens sequentially to treat the waste gas according to the discharge volume. This not only realizes the automatic control of pressure relief and scrubbing tower, but also effectively ensures that the waste gas buffer tank does not operate under overpressure, ensuring the quality of exhaust gas. It effectively prevents safety and environmental problems during waste gas treatment in the polysilicon production industry, and improves the automation level of the system while ensuring the safe and stable operation of the waste gas treatment device.

[0008] Optionally, a control valve is provided at the outlet end of the exhaust gas buffer tank, and an air intake regulating valve is provided at the inlet end of each set of scrubbing units. Both the control valve and the air intake regulating valve are electrically connected to the output end of the control module. The control module regulates the opening and closing of the control valve and the air intake regulating valve according to the pressure value to regulate the exhaust gas buffer tank and the corresponding scrubbing unit.

[0009] Optionally, the inlet of the waste gas buffer tank is connected to an air inlet pipe, and the outlet is connected to a first pipeline via an air outlet pipe. Multiple sets of rinsing units are connected to the first pipeline via air inlet branch pipes.

[0010] Optionally, the inlet of the waste gas buffer tank is connected to an air inlet pipe, and the outlet is connected to a first pipeline and a waste gas treatment unit. The inlets of multiple sets of scrubbing units are respectively connected to the first pipeline through air inlet branch pipes.

[0011] Optionally, the waste gas buffer tank includes a first waste gas buffer tank and a second waste gas buffer tank. Both the first and second waste gas buffer tanks are equipped with a pressure detection module that communicates with the control module. The outlet of the second waste gas buffer tank is connected to a waste gas treatment unit and a first pipeline. The inlets of multiple sets of scrubbing units are respectively connected to the first pipeline via inlet branch pipes. The outlet of the first waste gas buffer tank is connected to the first pipeline via an outlet pipe. Through the first pipeline, the valve connecting the waste gas buffer tank to the scrubbing tower can be opened to release waste gas into the scrubbing tower for washing, effectively ensuring that the pressure before the waste gas compressor is within the required range.

[0012] Optionally, the control valve of the second waste gas buffer tank is installed on the first pipeline.

[0013] Optionally, a second pipeline is also included, one end of which is connected to the inlet of the first waste gas buffer tank, and the other end is connected to the first pipeline between the inlet branch pipe and the second waste gas buffer tank. A first shut-off valve is installed on the second pipeline. By opening the valve on the second pipeline, waste gas can be discharged into another waste gas buffer tank.

[0014] Optionally, multiple sets of rinsing units are provided on both sides of the air outlet pipe connected to the first pipeline, and a second shut-off valve is provided on the first pipeline located on one side of the air outlet pipe.

[0015] Optionally, six sets of rinsing units are used. The end of the vent pipe away from the outlet of the first waste gas buffer tank is connected to the first pipeline between the third and fourth sets of rinsing units. A second shut-off valve is installed on the first pipeline between the vent pipe and the fourth set of rinsing units. The control module adjusts the opening or closing of the first, second, and third sets of rinsing units according to the pressure value in the first waste gas buffer tank in a preset order. The control module adjusts the opening or closing of the fourth, fifth, and sixth sets of rinsing units according to the pressure value in the second waste gas buffer tank in a preset order.

[0016] Optionally, the first shut-off valve and / or the second shut-off valve are electrically connected to the control module.

[0017] Optionally, the exhaust gas treatment unit includes: a compressor, the inlet of which is connected to the outlet of the second exhaust gas buffer tank; a buffer tank, the inlet of which is connected to the outlet of the compressor; and a heat exchange device, the inlet of which is connected to the outlet of the buffer tank.

[0018] Optionally, the rinsing unit includes a rinsing tower, the inlet of which is connected to the first pipeline via an air inlet branch pipe, an air inlet regulating valve is provided on the air inlet branch pipe, and the outlet of the rinsing tower is connected to the inlet of the liquid seal tank.

[0019] Optionally, the preset sequence includes: when the pressure value is greater than a first preset value but less than a second preset value, activating any group of scrubbing units; when the pressure value is still greater than a third preset value after the group of scrubbing units is activated, activating the next group of scrubbing units; when the pressure value is greater than the second preset value, activating all scrubbing units; simultaneously, when the pressure value inside the waste gas buffer tank is greater than the first preset value, the outlet of the waste gas buffer tank is opened; when the pressure value is less than a fourth preset value, the control valve of the waste gas buffer tank is closed, and the scrubbing units in use are simultaneously closed. Since the washing capacity of a group of scrubbing units is limited, this invention can automatically increase the number of scrubbing units in use sequentially according to the discharge volume, utilizing various scrubbing towers to increase the air intake and ensure maximum washing capacity. This ensures that the waste gas buffer tank does not operate under overpressure and also guarantees qualified exhaust, effectively preventing safety and environmental problems during waste gas treatment in the polysilicon production industry.

[0020] Optionally, the first preset value is 50 kPa; the second preset value is 65 kPa; the third preset value is 40 kPa; and the fourth preset value is 37 kPa.

[0021] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0022] This invention controls the opening and closing of the outlet valve of the waste gas buffer tank by monitoring the pressure of the buffer tank, and uses the pressure value to control the scrubbing unit. Each scrubbing unit opens sequentially according to the discharge volume to treat the waste gas. This not only achieves automatic control of pressure relief and the scrubbing tower, but also effectively ensures that the waste gas buffer tank does not operate under overpressure, ensuring qualified exhaust gas. It effectively prevents safety and environmental problems during waste gas treatment in the polysilicon production industry, ensuring the safe and stable operation of the waste gas treatment device while improving the system's automation level. Specifically, during use, when the pressure in the waste gas buffer tank rises, it indicates an increase in the external discharge volume. Since the inlet pressure of the waste gas compressor has high limitations, when the pressure continues to rise, the valve from the waste gas buffer tank to the scrubbing tower can be opened through the first pipeline to discharge the waste gas to the scrubbing tower for washing, and / or the valve on the second pipeline can be opened to discharge the waste gas into another waste gas buffer tank, effectively ensuring that the pressure before the waste gas compressor is within the required range. Since the washing capacity of a set of rinsing units is limited, this utility model can automatically increase the number of rinsing units in sequence according to the discharge volume, and increase the air intake by using various rinsing towers to ensure the maximum washing capacity. This ensures that the waste gas buffer tank does not operate under overpressure and that the exhaust gas is qualified, effectively preventing safety and environmental problems from occurring during waste gas treatment in the polysilicon production industry. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of Example 1.

[0025] Figure 2 This is a schematic diagram of the structure of Example 2.

[0026] Figure 3 This is a schematic diagram of the structure of Example 3.

[0027] Figure 4 This is a schematic diagram of one embodiment of the rinsing unit in this utility model.

[0028] Figure 5 This utility model presents a schematic diagram of the structure of a set of rinsing units.

[0029] Reference numerals in the attached drawings: 1. Exhaust gas buffer tank; 1A. First exhaust gas buffer tank; 1B. Second exhaust gas buffer tank; 11. Control valve; 2A. First set of scrubbing units; 2B. Second set of scrubbing units; 2C. Third set of scrubbing units; 2D. Fourth set of scrubbing units; 2E. Fifth set of scrubbing units; 2F. Sixth set of scrubbing units; 21. Inlet branch pipe; 22. Scrubbing tower; 23. Inlet regulating valve; 24. Liquid seal tank; 3. Inlet pipe; 4. Outlet pipe; 5. First pipeline; 51. Second shut-off valve; 6. Exhaust gas treatment unit; 61. Compressor; 62. Buffer tank; 63. Heat exchanger; 7. Second pipeline; 71. First shut-off valve. Detailed Implementation

[0030] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the embodiments of this utility model application. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0031] In the description of the embodiments of this utility model application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", "end", "side" etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, are only for the convenience of describing the embodiments of this utility model application and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the embodiments of this utility model application.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of this utility model application, "multiple" means two or more, unless otherwise explicitly specified.

[0033] In the embodiments of this utility model application, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model application according to the specific circumstances.

[0034] In the embodiments of this utility model application, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] The following disclosure provides many different implementations or examples for carrying out different structures of the embodiments of this utility model application. To simplify the disclosure of the embodiments of this utility model application, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the embodiments of this utility model application. Furthermore, reference numerals and / or reference letters may be repeated in different examples of the embodiments of this utility model application; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.

[0036] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0037] Example 1

[0038] like Figure 1 As shown in the figure, this utility model application provides a polysilicon waste gas treatment system, including: a waste gas buffer tank 1 and multiple sets of scrubbing units connected to the outlet of the waste gas buffer tank 1. The waste gas buffer tank 1 is equipped with a pressure detection module for detecting the pressure inside the waste gas buffer tank 1, and the output terminal of the pressure detection module is electrically connected to the input terminal of a control module. In use, the control valve of the waste gas buffer tank 1 and the air inlet regulating valve of each set of scrubbing units are electrically connected to the output terminal of the control module. The control module receives the pressure value collected by the pressure detection module and adjusts the control valve of the waste gas buffer tank 1 and the air inlet regulating valves of the multiple sets of scrubbing units according to the pressure value.

[0039] Optionally, the inlet of the waste gas buffer tank 1 is connected to an inlet pipe 3, and the outlet is connected to an outlet pipe 4. The end of the outlet pipe 4 away from the outlet of the waste gas buffer tank 1 is connected to the first pipeline 5. The inlets of multiple sets of washing units are respectively connected to the first pipeline 5 through inlet branch pipes 21, that is, the ends of multiple inlet branch pipes 21 away from the inlet of the washing unit are all connected to the first pipeline 5.

[0040] Optionally, the control valve of the exhaust gas buffer tank 1 can be installed on the exhaust pipe 4.

[0041] In one implementation scenario, during use, a preset program is first implemented in the control module. When the pressure value received by the control module from the pressure detection module is greater than 50 kPa, the control module opens the control valve 11 of the exhaust gas buffer tank 1; when the pressure value received by the control module is less than 37 kPa, the control module closes the control valve 11 of the exhaust gas buffer tank 1. The pressure value for opening or closing the control valve 11 can be freely adjusted according to the actual working conditions.

[0042] When the pressure value is greater than 50 kPa but less than 65 kPa, the control module controls the air intake regulating valve of any group of washing units to open. At this time, the exhaust gas in the exhaust gas buffer tank 1 can enter the washing unit through the pipeline for washing. After the group of washing units is running, if the pressure of the exhaust gas buffer tank 1 is still greater than 40 kPa, the control module controls the air intake regulating valve of the next group of washing units to open.

[0043] When the pressure value is greater than 65 kPa, the control module opens the air intake regulating valves of all rinsing units. When the pressure value is less than 37 kPa, the air intake regulating valve closes synchronously with control valve 11, meaning that the rinsing units in use also exit the washing mode.

[0044] For better illustration, at least three sets of rinsing units are used, namely, the first set of rinsing units 2A, the second set of rinsing units 2B, and the third set of rinsing units 2C. When the pressure value is greater than 50 kPa and less than 65 kPa, the control module controls the air intake regulating valve of the first set of rinsing units 2A to open. At this time, the exhaust gas in the exhaust gas buffer tank 1 can enter the first set of rinsing units 2A through the pipeline for washing. After the rinsing unit is running, if the pressure of the exhaust gas buffer tank 1 is still not lower than 40 kPa, the control module controls the air intake regulating valve of the second set of rinsing units 2B to open. The exhaust gas in the exhaust gas buffer tank 1 is divided into two paths and enters the first set of rinsing units 2A and the second set of rinsing units 2B for washing until the pressure in the exhaust gas buffer tank 1 is lower than 40 kPa. When the pressure inside the exhaust gas buffer tank 1 exceeds 65 kPa, the control module opens all the intake regulating valves of the first set of washing units 2A, the second set of washing units 2B, and the third set of washing units 2C, allowing the exhaust gas to enter the corresponding washing units in three separate streams for washing. When the pressure is less than 37 kPa, the intake regulating valve closes synchronously with the control valve 11, meaning the washing units in operation exit the washing mode.

[0045] Optionally, when the exhaust gas buffer tank 1 opens automatically, the mode of the air inlet regulating valve switches from manual to automatic, and the PID regulation sp value is automatically set to 40 kPa, with the upper limit of the valve position at 42%. The PID regulation sp value of the scrubbing tower air inlet regulating valve can be adjusted according to actual operating conditions.

[0046] In other implementation scenarios, more sets of scrubbing units can be used, such as five sets, six sets, etc. For example, the scrubbing units include a first set of scrubbing units 2A, a second set of scrubbing units 2B, a third set of scrubbing units 2C, a fourth set of scrubbing units 2D, a fifth set of scrubbing units 2E, and a sixth set of scrubbing units 2F. The air intake sequence of the scrubbing units can be ABCDEF. When the pressure value of the exhaust gas buffer tank 1 is too high, the control module regulates the opening of the air intake regulating valves of all scrubbing units. The scrubbing units can be put into operation using the scrubbing tower bottom pump.

[0047] Example 2

[0048] like Figure 2As shown in the figure, this utility model application provides a polycrystalline silicon waste gas treatment system, including: a waste gas buffer tank 1, a waste gas treatment unit 6 connected to the outlet of the waste gas buffer tank 1, and multiple sets of scrubbing units. The waste gas buffer tank 1 is equipped with a pressure detection module for detecting the pressure inside the waste gas buffer tank 1. The output terminal of the pressure detection module is electrically connected to the input terminal of a control module. In use, the control valve of the waste gas buffer tank 1 and the air inlet regulating valve of each set of scrubbing units are electrically connected to the output terminal of the control module. The control module receives the pressure value collected by the pressure detection module and adjusts the control valve of the waste gas buffer tank 1 and the air inlet regulating valves of the multiple sets of scrubbing units according to the pressure value.

[0049] Specifically, the inlet of the waste gas buffer tank 1 is connected to the air inlet pipe 3, and the outlet is connected to the waste gas treatment unit 6 through a pipeline. The outlet of the waste gas buffer tank 1 is also connected to the first pipeline 5. The inlets of multiple sets of rinsing units are respectively connected to the first pipeline 5 through air inlet branch pipes 21. That is, the ends of multiple air inlet branch pipes 21 that are away from the inlet of the rinsing unit are all connected to the first pipeline 5.

[0050] Optionally, the control valve 11 of the exhaust gas buffer tank 1 can be installed on the first pipeline 5.

[0051] In one implementation scenario, during use, a preset program is first implemented in the control module. When the pressure value received by the control module from the pressure detection module is greater than 50 kPa, the control module opens the control valve 11 of the exhaust gas buffer tank 1; when the pressure value received by the control module is less than 37 kPa, the control module closes the control valve 11 of the exhaust gas buffer tank 1. The pressure value for opening or closing the control valve 11 can be freely adjusted according to the actual working conditions.

[0052] When the pressure value is greater than 50 kPa but less than 65 kPa, the control module controls the air intake regulating valve of any group of washing units to open. At this time, the exhaust gas in the exhaust gas buffer tank 1 can enter the washing unit through the pipeline for washing. After the group of washing units is running, if the pressure of the exhaust gas buffer tank 1 is still greater than 40 kPa, the control module controls the air intake regulating valve of the next group of washing units to open.

[0053] When the pressure value is greater than 65 kPa, the control module opens the air intake regulating valves of all rinsing units. When the pressure value is less than 37 kPa, the air intake regulating valve closes synchronously with control valve 11, meaning that the rinsing units in use also exit the washing mode.

[0054] For better illustration, at least three sets of rinsing units are used, namely, the first set of rinsing units 2A, the second set of rinsing units 2B, and the third set of rinsing units 2C. When the pressure value is greater than 50 kPa and less than 65 kPa, the control module controls the air intake regulating valve of the first set of rinsing units 2A to open. At this time, the exhaust gas in the exhaust gas buffer tank 1 can enter the first set of rinsing units 2A through the pipeline for washing. After the rinsing unit is running, if the pressure of the exhaust gas buffer tank 1 is still not lower than 40 kPa, the control module controls the air intake regulating valve of the second set of rinsing units 2B to open. The exhaust gas in the exhaust gas buffer tank 1 is divided into two paths and enters the first set of rinsing units 2A and the second set of rinsing units 2B for washing until the pressure in the exhaust gas buffer tank 1 is lower than 40 kPa. When the pressure inside the exhaust gas buffer tank 1 exceeds 65 kPa, the control module opens all the intake regulating valves of the first set of washing units 2A, the second set of washing units 2B, and the third set of washing units 2C, allowing the exhaust gas to enter the corresponding washing units in three separate streams for washing. When the pressure is less than 37 kPa, the intake regulating valve closes synchronously with the control valve 11, meaning the washing units in operation exit the washing mode.

[0055] Optionally, when the exhaust gas buffer tank 1 opens automatically, the inlet regulating valve mode switches from manual to automatic, and the PID regulation sp value is automatically set to 40 kPa, with the upper limit of the valve position at 42%. The PID regulation sp value of the scrubbing tower inlet regulating valve can be adjusted according to actual operating conditions. By automatically setting the sp value of the scrubbing tower inlet regulating valve, the exhaust gas flow rate into the scrubbing tower is regulated within a safe and controllable range, ensuring rapid pressure relief while ensuring that the vented exhaust gas meets standards and does not cause environmental pollution.

[0056] In other implementation scenarios, more sets of scrubbing units can be used, such as five sets, six sets, etc. For example, the scrubbing units include a first set of scrubbing units 2A, a second set of scrubbing units 2B, a third set of scrubbing units 2C, a fourth set of scrubbing units 2D, a fifth set of scrubbing units 2E, and a sixth set of scrubbing units 2F. The air intake sequence of the scrubbing units can be ABCDEF. When the pressure value of the exhaust gas buffer tank 1 is too high, the control module regulates the opening of the air intake regulating valves of all scrubbing units. The scrubbing units can be put into operation using the scrubbing tower bottom pump.

[0057] In this embodiment, due to the high pressure limit of the compressor in the exhaust gas treatment unit 6, when the pressure in the exhaust gas buffer tank 1 continues to rise, the control valve 11 from the exhaust gas buffer tank 1 to the scrubbing unit is opened to release the exhaust gas to the scrubbing unit for washing. This ensures that the pressure before the exhaust gas compressor is within the required range, prevents the exhaust gas buffer tank from operating under overpressure, and ensures that the exhaust gas from the exhaust gas treatment unit 6 is qualified. Since the washing capacity of each scrubbing tower is limited, the air intake of each scrubbing tower is increased sequentially according to the release volume to ensure maximum washing capacity.

[0058] Example 3

[0059] like Figure 3 As shown in the figure, the present invention provides a polycrystalline silicon waste gas treatment system, including a first waste gas buffer tank 1A, a second waste gas buffer tank 1B, multiple sets of rinsing units, an inlet pipe 3, an outlet pipe 4, a first pipeline 5, and a waste gas treatment unit 6.

[0060] Specifically,

[0061] The inlets of the first waste gas buffer tank 1A and the second waste gas buffer tank 1B are respectively connected to inlet pipes 3. The outlet of the second waste gas buffer tank 1B is connected to the inlet of the waste gas treatment unit 6 via a pipe. One end of the first pipe 5 is connected to the second waste gas buffer tank 1B, and the inlets of multiple sets of scrubbing units are respectively connected to the first pipe 5 via inlet branch pipes 21, that is, the ends of multiple inlet branch pipes 21 away from the inlets of the scrubbing units are all connected to the first pipe 5. The outlet of the first waste gas buffer tank 1A is connected to the first pipe 5 via an outlet pipe 4. A control valve 11 is installed on the first pipe 5 near the second waste gas buffer tank 1B.

[0062] Furthermore, a second pipeline 7 is connected to the first pipeline 5 located between the intake branch pipe 21 and the second exhaust gas buffer tank 1B. The other end of the second pipeline 7 is connected to the inlet of the first exhaust gas buffer tank 1A. A first shut-off valve 71 is installed on the second pipeline 7. Both the first exhaust gas buffer pipe 1A and the second exhaust gas buffer tank 1B are equipped with pressure detection modules electrically connected to the control module, and the control valves of the first exhaust gas buffer pipe 1A and the second exhaust gas buffer tank 1B, as well as the first shut-off valve 71, are all electrically connected to the control module. In use, the control module receives the detection data from the pressure detection modules and adjusts the corresponding valves according to the detection data.

[0063] As one method of use: Dust-laden exhaust gas enters the A / B / C / D / E / F scrubbing unit through the first exhaust gas buffer tank 1A for washing, and the washed gas is discharged after passing through the liquid seal tank. Simultaneously, dust-free exhaust gas can not only be treated and recovered through the exhaust gas treatment unit 6, but can also be connected to the first exhaust gas buffer tank 1A and the scrubbing unit through the first pipeline 5 and the second pipeline 7. In use, the second exhaust gas buffer tank 1B can be connected to the first exhaust gas buffer tank 1A through a pipeline by opening the control valve 11 and the first shut-off valve 71. Alternatively, the second exhaust gas buffer tank 1B can be connected to the scrubbing unit through a pipeline by opening the control valve 11 and closing the first shut-off valve 71.

[0064] As an implementation scenario, at least three sets of rinsing units are used in this scenario. When three sets of rinsing units are used, the three sets of rinsing units are the first set of rinsing units 2A, the second set of rinsing units 2B, and the third set of rinsing units 2C. When the pressure value received by the control module in the first waste gas buffer tank 1A is greater than 50 kPa, the control valve 11 of the first waste gas buffer tank 1A is opened; when it is less than 37 kPa, the control valve is closed. When the pressure in the first waste gas buffer tank 1A is greater than 50 kPa but less than 65 kPa, the air intake regulating valve of the first set of washing units 2A is opened. At this time, the waste gas in the first waste gas buffer tank 1A can enter the first set of washing units 2A through the pipeline for washing. After this set of washing units is running, if the pressure in the waste gas buffer tank 1 is still not lower than 40 kPa, the control module regulates the air intake regulating valve of the second set of washing units 2B to open. The waste gas in the waste gas buffer tank 1 enters the first set of washing units 2A and the second set of washing units 2B in two separate paths for washing, until the pressure in the waste gas buffer tank 1 is lower than 40 kPa. When the pressure in the waste gas buffer tank 1 is greater than 65 kPa, the control module regulates the air intake regulating valves of the first set of washing units 2A, the second set of washing units 2B, and the third set of washing units 2C to open all of them. The waste gas enters the corresponding washing units in three separate paths for washing. When the pressure value is less than 37 kPa, the air intake regulating valve closes synchronously with the control valve 11, meaning the rinsing unit exits the washing mode. In one embodiment, when the pressure value received by the control module in the second waste gas buffer tank 1B is greater than 50 kPa, the control valve 11 of the second waste gas buffer tank 1B is opened, and the first shut-off valve 71 and / or the air intake regulating valve of the rinsing unit are opened simultaneously. When the pressure value is less than 37 kPa, the control valve 11 closes, and the first shut-off valve 71 and / or the air intake regulating valve of the rinsing unit closes synchronously with the control valve 11. The operation of the rinsing units also opens sequentially according to different pressure values.

[0065] In another implementation scenario, the rinsing unit comprises at least six groups. When using six groups of rinsing units, the six groups are arranged sequentially as the first rinsing unit 2A, the second rinsing unit 2B, the third rinsing unit 2C, the fourth rinsing unit 2D, the fifth rinsing unit 2E, and the sixth rinsing unit 2F. In this embodiment, the end of the exhaust pipe of the first exhaust gas buffer tank 1A away from the outlet of the first exhaust gas buffer tank 1A is connected to the first pipeline 5 between the third rinsing unit 2C and the fourth rinsing unit 2D. A second shut-off valve 51 electrically connected to the control module is also provided on the first pipeline 5 between the exhaust pipe 4 and the fourth rinsing unit 2D. In one usage mode, the control module receives the pressure value inside the first waste gas buffer tank 1A and adjusts the control valve of the waste gas buffer tank 1, the first set of washing units 2A, the second set of washing units 2B, and the third set of washing units 2C according to the pressure value. (When the received pressure value inside the waste gas buffer tank 1 is greater than 50 kPa, its control valve is open; when it is less than 37 kPa, its control valve is closed. When 50 kPa < waste gas buffer tank pressure value < 65 kPa, the air intake regulating valve of the first set of washing units 2A is opened. When the air intake regulating valve of the first set of washing units 2A is open and the tank pressure is still not lower than 40 kPa, the air intake regulating valve of the second set of washing units 2B is opened. When the pressure value inside the waste gas buffer tank 1 is greater than 65 kPa, the air intake regulating valves of washing units 2A, 2B, and 2C are all opened. When the pressure value is less than 37 kPa, the washing units in use exit the washing mode.) Simultaneously, the control module receives the pressure value inside the second waste gas buffer tank 1B and adjusts the control valve 11 of the second waste gas buffer tank 1B, the fourth group of rinsing units 2D, the fifth group of rinsing units 2E, and the sixth group of rinsing units 2F according to the pressure value. (When the received pressure value inside the second waste gas buffer tank 1B is greater than 50 kPa, its control valve 11 opens; when it is less than 37 kPa, the control valve closes. When 50 kPa < the pressure value inside the second waste gas buffer tank < 65 kPa, the air intake regulating valve of the fourth group of rinsing units 2D opens. When the air intake regulating valve of the fourth group of rinsing units 2D opens and the tank pressure is still not lower than 40 kPa, the air intake regulating valve of the fifth group of rinsing units 2E opens. When the pressure value inside the second waste gas buffer tank 1B is greater than 65 kPa, the air intake regulating valves of rinsing units 2D, 2E, and 2F are all opened. When the pressure value is less than 37 kPa, the rinsing units in use exit the washing mode.)

[0066] It should be noted that in actual use, the pressure value can be adjusted according to the actual working conditions, and the control module can also adjust the control method of each valve according to actual needs.

[0067] In this embodiment, there are two waste gas buffer tanks. The main difference from embodiment 2 is that the first waste gas buffer tank 1A is connected to the first pipeline 5 through the second pipeline 7, and the outlet end of the first waste gas buffer tank 1A is connected to the first pipeline 5 through the exhaust pipe. In this way, when the dust-laden waste gas passes through the first waste gas buffer tank 1A and enters the washing unit A / B / C / D / E / F for washing, the second waste gas buffer tank 1B is also connected to the first waste gas buffer tank 1A and the washing unit A / B / C / D / E / F through the pipeline.

[0068] Example 4

[0069] like Figure 4 and Figure 5 As shown in the figure, this utility model application provides a scrubbing unit for a polycrystalline silicon waste gas treatment system. In this embodiment, the scrubbing unit includes a scrubbing tower 22. The inlet end of the scrubbing tower 22 is connected to the outlet of the waste gas buffer tank through an air inlet branch pipe 21. An air inlet regulating valve 23 can be installed on the air inlet branch pipe 21. The outlet of the scrubbing tower 22 is connected to the inlet of the liquid seal tank 24.

[0070] Optionally, there may be multiple scrubbing towers 22.

[0071] During use, the exhaust gas enters the corresponding A / B / C / D / E / F scrubbing unit through the exhaust gas buffer tank, and then enters the scrubbing tower (a, b, c) for washing. The washed gas is then discharged through the liquid seal tank 24.

[0072] Example 5

[0073] This embodiment provides a waste gas treatment unit for a polysilicon waste gas treatment system, referencing... Figure 3 As shown in Figure 4, the exhaust gas treatment unit 6 includes a compressor 61, a buffer tank 62, and a heat exchange device 63 connected in sequence.

[0074] As an implementation scenario, based on Example 3, the outlet of the second waste gas buffer tank 1B is connected to the inlet of the compressor 61 through a pipeline, the outlet of the compressor 61 is connected to the inlet of the buffer tank 62 through a pipeline, and the outlet of the buffer tank 62 is connected to the inlet of the heat exchange device 63 through a pipeline.

[0075] Optionally, the heat exchange device 63 includes multiple heat exchangers.

[0076] As one method of use: Clean air passes through the second waste gas buffer tank 1B, and after passing through the compressor 61, it becomes compressed waste gas. This compressed waste gas is then connected to the compressor buffer tank 62, and after passing through heat exchangers (d, e, f) for condensation and recovery of the chlorosilanes, the treated gas is sent to other processes for recycling. Dust-laden waste gas passes through the first waste gas buffer tank 1A and enters the scrubbing units A / B / C / D / E / F. The waste gas undergoes washing in the scrubbing units, and the washed gas is discharged after passing through the liquid seal tank 24. Simultaneously, clean air can not only be treated and recovered through the waste gas treatment unit 6, but can also be connected to the waste gas buffer tank 1 and the scrubbing units through the first pipeline 5 and the second pipeline 7. Due to the high pressure limit requirement of the compressor 61 inlet, when the pressure in the second waste gas buffer tank 1B continues to rise, the control valve 11 from the second waste gas buffer tank 1B to the scrubbing unit is opened to release the waste gas into the scrubbing unit for washing, ensuring that the pressure before the waste gas compressor 61 remains within the required range. Each set of scrubbing towers has a limited washing capacity. Based on the discharge volume, the air intake of each set of scrubbing towers is increased sequentially to ensure maximum washing capacity. This ensures that the exhaust gas buffer tank does not operate under overpressure and also guarantees that the exhaust gas meets the required standards.

[0077] Any aspects not described in detail in this embodiment are techniques known in the art.

[0078] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various variations or substitutions within the technical scope disclosed in this utility model, and these should all be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A polysilicon off-gas treatment system, comprising: include: The exhaust gas buffer tank has its outlet connected to multiple sets of scrubbing units. A pressure detection module is installed on the exhaust gas buffer tank and is used to detect the pressure inside the exhaust gas buffer tank; The control module is communicatively connected to the pressure detection module, the exhaust gas buffer tank, and each set of scrubbing units; The control module receives the pressure value collected by the pressure detection module and adjusts the opening and closing of the outlet of the waste gas buffer tank according to the pressure value, and adjusts the washing unit to open or close in a preset sequence, so as to achieve pressure regulation in the waste gas buffer tank.

2. The polysilicon off-gas treatment system of claim 1, wherein, The exhaust gas buffer tank is equipped with a control valve at its outlet end, and each set of scrubbing units is equipped with an air intake regulating valve at its inlet end. Both the control valve and the air intake regulating valve are electrically connected to the output end of the control module. The control module adjusts the opening and closing of the control valve and the air intake regulating valve according to the pressure value to regulate the exhaust gas buffer tank and the corresponding scrubbing unit.

3. The polysilicon off-gas treatment system of claim 1, wherein, The exhaust gas buffer tank is connected to an inlet pipe at its inlet and to a first pipeline at its outlet via an outlet pipe. Multiple sets of rinsing units are connected to the first pipeline via inlet branch pipes.

4. The polysilicon off-gas treatment system of claim 1, wherein, The inlet of the waste gas buffer tank is connected to an air inlet pipe, and the outlet is connected to a first pipeline and a waste gas treatment unit. The inlets of multiple sets of scrubbing units are respectively connected to the first pipeline through air inlet branch pipes.

5. The polysilicon off-gas treatment system of claim 1, wherein, The exhaust gas buffer tank includes a first exhaust gas buffer tank and a second exhaust gas buffer tank. Both the first and second exhaust gas buffer tanks are equipped with a pressure detection module that is communicatively connected to the control module. The outlet of the second exhaust gas buffer tank is connected to an exhaust gas treatment unit and a first pipeline. The inlets of multiple sets of rinsing units are respectively connected to the first pipeline through air inlet branch pipes. The outlet of the first exhaust gas buffer tank is connected to the first pipeline through an air outlet pipe.

6. The polycrystalline silicon waste gas treatment system according to claim 5, characterized in that: It also includes a second pipeline, one end of which is connected to the inlet of the first exhaust gas buffer tank, and the other end is connected to the first pipeline between the intake branch pipe and the second exhaust gas buffer tank. A first shut-off valve that is in communication with the control module is provided on the second pipeline. And / or, the air outlet pipe connected to the first pipeline has multiple sets of rinsing units on both sides, and a second shut-off valve that is communicatively connected to the control module is provided on the first pipeline located on one side of the air outlet pipe; And / or, the rinsing unit adopts six groups. The end of the vent pipe away from the outlet of the first waste gas buffer tank is connected to the first pipeline between the third group of rinsing units and the fourth group of rinsing units. A second shut-off valve is provided on the first pipeline between the vent pipe and the fourth group of rinsing units. The control module adjusts the first group, the second group, and the third group of rinsing units to open or close in a preset order according to the pressure value in the first waste gas buffer tank. The control module adjusts the fourth group, the fifth group, and the sixth group of rinsing units to open or close in a preset order according to the pressure value in the second waste gas buffer tank.

7. The polysilicon off-gas treatment system of claim 5, wherein, The waste gas treatment unit includes: The compressor has its inlet connected to the outlet of the second waste gas buffer tank; A buffer tank, the inlet of which is connected to the outlet of the compressor; The heat exchange device has its inlet connected to the outlet of the buffer tank.

8. The polysilicon off-gas treatment system of claim 1, wherein, The rinsing unit includes a rinsing tower. The inlet of the rinsing tower is connected to the first pipeline through an air inlet branch pipe. An air inlet regulating valve is installed on the air inlet branch pipe. The outlet of the rinsing tower is connected to the inlet of the liquid seal tank.

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