Gas mixing tank of hot wire equipment

Abstract

The utility model discloses a gas mixing tank of hot wire equipment. The gas mixing tank comprises a gas tank shell, a gas inlet pipe, a gas outlet pipe and a first splitter plate, the gas tank shell comprises a gas tank upper cover plate, a gas tank lower cover plate and a gas tank side plate, and the gas tank upper cover plate, the gas tank lower cover plate and the gas tank side plate define a gas mixing bin; the first splitter plate is arranged in the gas mixing bin, the two ends of the first splitter plate abut against the gas tank upper cover plate and the gas tank lower cover plate correspondingly, and the gas mixing bin is divided into a first gas mixing bin and a second gas mixing bin; the gas inlet pipe is connected to the gas tank shell and is communicated with the first gas mixing bin; a plurality of first through holes are formed in the first splitter plate, and gas in the first gas mixing bin enters the second gas mixing bin through the first through holes; the gas outlet pipe is connected to the gas tank shell and communicated with the second gas mixing bin. According to the gas mixing tank of the hot filament equipment, disclosed by the utility model, full dispersion and uniform mixing of different gases are realized, and the problem of non-uniform mixing of the gases is greatly improved.

Description

Hot wire equipment gas mixing tank Technical Field

[0001] This utility model relates to the field of industrial equipment, and in particular to a gas mixing tank for a hot wire device. Background Technology

[0002] In high-tech fields such as semiconductor chip manufacturing, photovoltaic cell production, and functional thin film preparation, hot-wire chemical vapor deposition (CVD) equipment is widely used due to its efficient and controllable thin film deposition characteristics. During the reaction process, the uniform mixing and stable delivery of the reaction gases directly determine the deposition quality and performance of the thin film, which is a key step in ensuring product yield.

[0003] Currently, most gas mixing tanks used in traditional hot-wire chemical vapor deposition (CVD) equipment have simple T- or Y-shaped structures. This structure has significant drawbacks in the gas mixing process: due to the laminar flow effect within the pipes, different gas components cannot fully contact and mix, leading to uneven mixing. Simultaneously, the laminar flow effect causes uneven gas velocity distribution, resulting in varying residence times for each reactive gas within the mixing tank, further exacerbating the mixing inhomogeneity. When unevenly mixed reactive gases enter the deposition chamber, the distribution of reactive groups on the substrate surface becomes inconsistent, ultimately causing uneven film thickness, imbalanced component ratios, and negatively impacting film performance.

[0004] Therefore, there is an urgent need to develop a new type of gas mixing tank. Summary of the Invention

[0005] In view of this, the present invention provides a gas mixing tank for a hot wire device to solve the problem of uneven gas mixing in the prior art.

[0006] To achieve one or more of the above objectives or other objectives, this utility model provides a gas mixing tank for a hot wire device, including a tank shell, an inlet pipe, an outlet pipe, and a first diverter plate;

[0007] The gas tank shell includes a gas tank upper cover plate, a gas tank lower cover plate, and a gas tank side plate, which together form a gas mixing chamber.

[0008] The first diverter plate is disposed in the gas mixing chamber, and the two ends of the first diverter plate abut against the upper cover plate and the lower cover plate of the gas tank respectively, dividing the gas mixing chamber into a first mixing chamber and a second mixing chamber.

[0009] The air inlet pipe is connected to the gas tank shell and communicates with the first mixing chamber; the first diverter plate is provided with a plurality of first through holes, through which the gas in the first mixing chamber enters the second mixing chamber; the air outlet pipe is connected to the gas tank shell and communicates with the second mixing chamber.

[0010] Furthermore, it also includes a second diverter plate, which is disposed within the second mixing chamber, and the two ends of the second diverter plate abut against the upper cover plate and the lower cover plate of the gas tank, respectively, dividing the second mixing chamber into a first sub-mixing chamber and a second sub-mixing chamber; the first sub-mixing chamber is located between the first mixing chamber and the second sub-mixing chamber, and the second diverter plate is provided with a plurality of second through holes, through which the gas in the first sub-mixing chamber enters the second sub-mixing chamber.

[0011] Furthermore, the gas outlet pipe is located at the center of the upper cover plate or the center of the lower cover plate of the gas tank, and communicates with the second sub-mixing chamber.

[0012] Furthermore, the diameter of the second through hole is smaller than the diameter of the first through hole.

[0013] Furthermore, the side plates of the gas tank are arranged in a cylindrical shape, the first diverter plate is arranged in a cylindrical shape, and the second diverter plate is arranged in a cylindrical shape.

[0014] Furthermore, the first mixing chamber, the first sub-mixing chamber, and the second sub-mixing chamber have equal volumes.

[0015] Furthermore, the air intake pipe is disposed on the side plate of the air tank.

[0016] Furthermore, there are multiple air intake pipes, and each air intake pipe is equipped with an airflow control valve.

[0017] Furthermore, multiple air intake pipes are evenly spaced along the longitudinal direction on the side plate of the air tank.

[0018] Furthermore, an airflow control valve is installed on the air outlet pipe.

[0019] Implementing the embodiments of this utility model will have the following beneficial effects:

[0020] This invention uses a gas tank top cover, a gas tank bottom cover, and a gas tank side plate to form a sealed gas mixing chamber. A first diverter plate divides the chamber into a first mixing chamber and a second mixing chamber. The inlet pipe is connected to the first mixing chamber. Due to the obstruction provided by the diverter plate, the gas undergoes preliminary mixing after entering the first mixing chamber. It then enters the second mixing chamber through several first through holes on the first diverter plate. The gas generates turbulence when passing through the through holes of the first diverter plate, breaking the laminar flow state during the gas flow process. This achieves full dispersion and uniform mixing of different gases, significantly improving the problem of uneven gas mixing. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] in:

[0023] Figure 1 is a front view of the gas mixing tank of a hot filament device in one embodiment;

[0024] Figure 2 is a top view of the gas mixing tank of the hot filament device in one embodiment;

[0025] Figure 3 is a schematic diagram of the AA section of the gas mixing tank of the hot filament device in Figure 1 in one embodiment;

[0026] Figure 4 is a schematic diagram of the AA section of the gas mixing tank of the hot filament device in Figure 1 in one embodiment;

[0027] Figure 5 is a schematic diagram of the BB section in Figure 2 in one embodiment.

[0028] Explanation of the attached drawing numbers:

[0029] 11: Gas tank top cover; 12: Gas tank bottom cover; 13: Gas tank side panel;

[0030] 2: Inlet pipe; 3: Outlet pipe; 4: First splitter plate; 41: First through hole; 5: Second splitter plate; 51: Second through hole. Detailed Implementation

[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein in the specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and accompanying drawings of this invention are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or accompanying drawings of this invention are used to distinguish different objects, not to describe a particular order.

[0032] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of the present invention. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0033] To enable those skilled in the art to better understand the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0034] Referring to Figures 1, 2 and 3, an embodiment of the present invention shows a gas mixing tank for a hot wire device, including a tank shell, an inlet pipe 2, an outlet pipe 3 and a first diverter plate 4;

[0035] The gas tank shell includes a gas tank upper cover plate 11, a gas tank lower cover plate 12, and a gas tank side plate 13. The gas tank upper cover plate 11, the gas tank lower cover plate 12, and the gas tank side plate 13 enclose a gas mixing chamber.

[0036] The first diverter plate 4 is disposed in the gas mixing chamber, and the two ends of the first diverter plate 4 abut against the upper cover plate 11 and the lower cover plate 12 of the gas tank respectively, dividing the gas mixing chamber into a first mixing chamber and a second mixing chamber.

[0037] The air inlet pipe 2 is connected to the gas tank shell and communicates with the first mixing chamber; the first diverter plate 4 is provided with a plurality of first through holes 41, through which the gas in the first mixing chamber enters the second mixing chamber; the air outlet pipe 3 is connected to the gas tank shell and communicates with the second mixing chamber.

[0038] In this embodiment, the upper cover plate 11 and the lower cover plate 12 of the gas tank are metal plates, which are connected to the side plate 13 of the gas tank by bolts, and the three together form a sealed gas mixing chamber. The material of the first diverter plate 4 can be metal, such as stainless steel, and its thickness is designed according to the tank size and pressure requirements, and is exemplarily selected as 5-15mm. The first diverter plate 4 is vertically installed in the gas mixing chamber, and its two ends are welded to the inner surfaces of the upper cover plate and the lower cover plate of the gas tank, respectively, thereby dividing the gas mixing chamber into a first mixing chamber and a second mixing chamber that are independent of each other. The inlet pipe 2 and the outlet pipe 3 are both made of metal materials that are resistant to high pressure and high temperature, such as stainless steel pipes. There are multiple inlet pipes 2, which are welded to the side plate of the gas tank. One end of each inlet pipe 2 is connected to an external gas delivery pipeline (not shown in the figure), and the other end is connected to the first mixing chamber; the outlet pipe 3 is fixed to the gas tank shell by welding and is connected to the second mixing chamber, and is used to transport the mixed gas to the subsequent process equipment (not shown in the figure).

[0039] In this embodiment, the hot filament equipment gas mixing tank allows multiple gases to enter the first mixing chamber through different inlet pipes 2. Due to the obstruction provided by the first diverter plate 4, the gases are initially mixed in the first mixing chamber, and then dispersed into the second mixing chamber through several first through holes 41 evenly distributed on the first diverter plate 4. The mixed gases generate turbulence as they pass through the first through holes 41 of the first diverter plate 4, promoting further mixing between the different gases and significantly improving the problem of uneven gas mixing, resulting in a more uniform gas concentration distribution entering the second mixing chamber.

[0040] In one specific embodiment, referring to FIG4, a second diverter plate 5 is further included. The second diverter plate 5 is disposed in the second mixing chamber, and the two ends of the second diverter plate 5 abut against the upper cover plate 11 and the lower cover plate 12 of the gas tank, respectively, dividing the second mixing chamber into a first sub-mixing chamber and a second sub-mixing chamber. The first sub-mixing chamber is located between the first mixing chamber and the second sub-mixing chamber. A plurality of second through holes 51 are provided on the second diverter plate 5, and the gas in the first sub-mixing chamber enters the second sub-mixing chamber through the second through holes 51.

[0041] This embodiment further adds a second diverter plate 5 within the second mixing chamber. The second diverter plate 5 has a similar structure to the first diverter plate 4, with its two ends abutting against the upper cover plate 11 and the lower cover plate 12 of the gas tank, further dividing the second mixing chamber into a first sub-mixing chamber and a second sub-mixing chamber. The first sub-mixing chamber is located between the first and second sub-mixing chambers, forming a "three-section" mixing structure. The second diverter plate 5 is provided with several second through holes 51. In some preferred embodiments, the second through holes 51 can be offset from the first through holes 41 to enhance the gas turbulence effect.

[0042] After the mixed gas enters the first sub-mixing chamber from the first mixing chamber through the first through-hole 41, it is again blocked by the second diverter plate 5 and must pass through the second through-hole 51 to enter the second sub-mixing chamber. During this process, the mixed gas is mixed multiple times between different chambers, and the disturbance effect of the first through-hole 41 and the second through-hole 51 further improves the mixing effect.

[0043] In one specific embodiment, referring to Figures 1 and 2, the gas outlet pipe 3 is disposed at the center of the upper cover plate 11 of the gas tank or the center of the lower cover plate 12 of the gas tank, and communicates with the second sub-mixing chamber.

[0044] In this embodiment, the gas outlet pipe 3 is installed at the center of the upper cover plate 11 or the lower cover plate 12 of the gas tank, and is connected to the second sub-mixing chamber, so that the gas in the second sub-mixing chamber can be drawn from the gas outlet pipe 3 in a symmetrical and uniform manner, ensuring the uniformity of gas mixing.

[0045] In one specific embodiment, referring to FIG5, the diameter of the second through hole 51 is smaller than the diameter of the first through hole 41.

[0046] In this embodiment, the first through-hole 41 is used to achieve preliminary dispersion and mixing of the gas. A larger pore size reduces the resistance to gas entering the second mixing chamber. Conversely, the smaller pore size of the second through-hole 51 generates stronger turbulence when the gas enters the second sub-mixing chamber, promoting thorough mixing of gas molecules. For example, the pore size of the first through-hole 41 is designed to be 9-15 mm, and the pore size of the second through-hole is 5-8 mm. It is understood that those skilled in the art can set the pore size according to the specific needs of actual gas mixing, and this invention does not impose any special limitations in this regard.

[0047] In one specific embodiment, referring to FIG4, the gas tank side plate 13 is arranged in a cylindrical shape, the first diverter plate 4 is arranged in a cylindrical shape, and the second diverter plate 5 is arranged in a cylindrical shape.

[0048] In this embodiment, the gas tank side plate 13, the first flow divider 4, and the second flow divider 5 form multiple concentric cylindrical mixing chambers. The cylindrical flow divider design makes the gas flow path within the mixing chamber more regular, reducing dead zones in gas flow.

[0049] In one specific embodiment, the first mixing chamber, the first sub-mixing chamber, and the second sub-mixing chamber have equal volumes.

[0050] In this embodiment, with a stable gas flow rate, equal volumes ensure that the residence time of the mixed gas in each mixing chamber is consistent, allowing the gas to be fully mixed in each mixing chamber. For mixing chambers of the same height, the separation positions of the first diverter plate 4 and the second diverter plate 5 within the gas mixing chamber can be adjusted to achieve equal volumes in each mixing chamber.

[0051] In one specific embodiment, referring to Figures 1 and 5, the air inlet pipe 2 is disposed on the side plate of the gas tank. There are multiple air inlet pipes 2, and each air inlet pipe 2 is provided with an airflow control valve (not shown in the figures).

[0052] In this embodiment, the number of air inlet pipes 2 is typically determined based on the type and flow rate of the gases to be mixed, for example, 2-6. The airflow control valve can be a pneumatic or electric regulating valve from the prior art, used for gas flow regulation and rapid opening / closing. Multiple air inlet pipes 2, in conjunction with the airflow control valve, can achieve accurate control of the flow rates of different reactive gases, thereby flexibly adjusting the mixing ratio of each gas.

[0053] In one specific embodiment, referring to Figures 1 and 5, a plurality of air inlet pipes 2 are evenly spaced along the longitudinal direction on the side plate 13 of the gas tank. The even distribution of the plurality of air inlet pipes 2 on the side plate 13 of the gas tank can avoid the phenomenon of excessively high local gas concentration or uneven mixing caused by the concentrated arrangement of the air inlet pipes 2.

[0054] In one specific embodiment, an airflow control valve (not shown in the figure) is provided on the gas outlet pipe 3. The airflow control valve on the gas outlet pipe 3 can adjust the output flow rate of the mixed gas in real time to match the requirements of subsequent process equipment.

[0055] In use, the gas mixing tank of this utility model embodiment connects multiple gases to multiple inlet pipes 2 of the gas mixing tank via external pipelines. The gases enter the first mixing chamber through the inlet pipes 2, where they are initially mixed. They then disperse into the first sub-mixing chamber through the first through-hole 41 on the first diverter plate 4. The gases are further mixed in the first sub-mixing chamber and then enter the second sub-mixing chamber through the second through-hole 51 on the second diverter plate 5. The gases are mixed again in the second sub-mixing chamber and finally flow out from the outlet pipe 3. During the mixing process, the flow direction of the gas changes each time it passes through the diverter plate and through-hole, changing from an initial straight flow to a dispersed, diffused flow, creating turbulence in each mixing chamber and promoting thorough and uniform mixing of the gases.

[0056] Obviously, the embodiments described above are only some embodiments of this utility model, not all embodiments. The accompanying drawings show preferred embodiments of this utility model, but do not limit the patent scope of this utility model. This utility model can be implemented in many different forms; rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this utility model specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the patent protection scope of this utility model.

Claims

1. A gas mixing tank for a hot filament device, characterized in that, The device includes a gas tank shell, an inlet pipe, an outlet pipe, and a first diverter plate. The gas tank shell includes an upper cover plate, a lower cover plate, and side plates, which together form a gas mixing chamber. The first diverter plate is disposed within the gas mixing chamber, with its two ends abutting against the upper and lower cover plates, respectively, dividing the gas mixing chamber into a first mixing chamber and a second mixing chamber. The inlet pipe is connected to the gas tank shell and communicates with the first mixing chamber. The first diverter plate has several first through holes through which gas from the first mixing chamber enters the second mixing chamber. The outlet pipe is connected to the gas tank shell and communicates with the second mixing chamber.

2. The hot filament gas mixing tank as described in claim 1, characterized in that, It also includes a second diverter plate, which is disposed in the second mixing chamber, and the two ends of the second diverter plate abut against the upper cover plate and the lower cover plate of the gas tank, respectively, dividing the second mixing chamber into a first sub-mixing chamber and a second sub-mixing chamber; the first sub-mixing chamber is located between the first mixing chamber and the second sub-mixing chamber, and the second diverter plate is provided with a plurality of second through holes, through which the gas in the first sub-mixing chamber enters the second sub-mixing chamber.

3. The hot filament equipment gas mixing tank as described in claim 2, characterized in that, The gas outlet pipe is located at the center of the upper cover plate or the center of the lower cover plate of the gas tank and communicates with the second sub-mixing chamber.

4. The hot filament equipment gas mixing tank as described in claim 2, characterized in that, The diameter of the second through hole is smaller than the diameter of the first through hole.

5. The hot filament gas mixing tank as described in claim 2, characterized in that, The side plates of the gas tank are arranged in a cylindrical shape, the first diverter plate is arranged in a cylindrical shape, and the second diverter plate is arranged in a cylindrical shape.

6. The hot filament equipment gas mixing tank as described in claim 2, characterized in that, The first mixing chamber, the first sub-mixing chamber, and the second sub-mixing chamber have the same volume.

7. The hot filament equipment gas mixing tank as described in claim 1, characterized in that, The air inlet pipe is located on the side plate of the air tank.

8. The hot filament gas mixing tank as described in claim 1, characterized in that, There are multiple air intake pipes, and each air intake pipe is equipped with an airflow control valve.

9. The hot filament gas mixing tank as described in claim 8, characterized in that, Multiple air inlet pipes are evenly spaced along the longitudinal direction on the side plate of the air tank.

10. The gas mixing tank of the hot filament equipment as described in claim 1, characterized in that, An airflow control valve is installed on the air outlet pipe.

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