Fixture and ceramic plate taking and placing fixing table

Abstract

The fixing table comprises a fixing table body, a steel wire rope is installed on the fixing table body, the steel wire rope is used for being connected with a mechanical arm assisting in carrying, a correcting ring is installed on the fixing table body, the fixing table body is sleeved with the correcting ring, and a dismounting and mounting plate is fixedly arranged on the correcting ring; and the mounting plate is detachably mounted on the fixed table through bolts. The grinding device has the effect of conveniently grinding and correcting the grinding disc.

Description

Technical Field

[0001] This application relates to the field of correction fixtures and ceramic tray placement and fixing platforms. Background Technology

[0002] In the field of semiconductor materials, ceramic disks are widely used. For example, the polishing of semiconductor silicon single crystal wafers can be achieved by combining ceramic disks with silicon wafers through a certain process, and then placing the ceramic disk with the silicon wafers attached on a polishing machine to polish the silicon wafers.

[0003] During the polishing process, the polishing pad will wear down. When the wear is uneven, it can easily lead to an uneven surface or irregular wear pattern on the polishing pad, which can affect the subsequent polishing accuracy. In order to ensure the polishing progress, the polishing pad is usually polished and corrected periodically using a correction fixture. When polishing and correcting large polishing pads, large correction fixtures are usually required, but the existing large correction fixtures are inconvenient to use. Utility Model Content

[0004] To facilitate the grinding and correction of the polishing disc, this application provides a correction fixture and a ceramic disc loading and unloading station.

[0005] The technical solution provided in this application, which combines a correction fixture and a ceramic tray placement and fixing platform, adopts the following:

[0006] A fixing platform that can be used for both correcting jigs and picking up and placing ceramic discs includes a fixing platform, on which a steel wire rope is installed for connecting a robotic arm that assists in handling. A correction ring is installed on the fixing platform and is sleeved on the outside of the fixing platform. A mounting plate is fixed on the correction ring and can be detachably installed on the fixing platform by bolts.

[0007] By adopting the above technical solution, the correction ring is installed on the handling equipment for transporting ceramic discs. The handling equipment moves the correction ring to the grinding disc and grinds and corrects the grinding disc, which facilitates the grinding and correction of the grinding disc.

[0008] Optionally, both sides of the correction ring have a frosted surface, and chip removal grooves are provided on both sides of the correction ring.

[0009] By adopting the above technical solution, both sides of the correction ring are frosted surfaces, and both sides of the correction ring can be used for grinding and correction. The chip removal groove can remove the chips that fall off the grinding disc after grinding and correction, reducing the impact of chips on subsequent grinding and correction.

[0010] Optionally, the fixed platform includes a mounting plate, a suction cup, a connecting platform, and a rotating platform. The suction cup is mounted on one side of the mounting plate, the connecting platform is fixed at the center of the mounting plate away from the side where the suction cup is mounted, the rotating platform is rotatably mounted on the connecting platform, and the wire rope is fixed on the rotating platform.

[0011] By adopting the above technical solution, the rotating platform can be set up to allow the mounting plate to rotate relative to the wire rope, thereby facilitating the adjustment of the orientation of the mounting plate and reducing the probability of the wire rope breaking due to torsional force caused by the rotation of the mounting plate.

[0012] Optionally, a wire rope clip is installed on the rotating platform. The wire rope clip has an insertion hole through which the wire rope passes. A locking nut is threaded onto the wire rope clip and extends into the insertion hole to abut against the wire rope.

[0013] By adopting the above technical solution, the wire rope clip and locking nut can facilitate the assembly and disassembly of the wire rope.

[0014] Optionally, a handle is installed on the side of the mounting plate opposite to the suction cup mounting side.

[0015] By adopting the above technical solution, the handle design facilitates the movement and rotation of the mounting plate.

[0016] Optionally, a safety lifting ring is fixed to the side of the mounting plate away from the suction cup mounting side.

[0017] By adopting the above technical solution, the safety lifting ring is used to hang the safety chain, which can reduce the fall of the mounting plate when the wire rope breaks, thereby reducing the probability of the mounting plate being damaged due to the wire rope breakage.

[0018] In summary, this application includes at least one of the following beneficial technical effects:

[0019] By installing the correction ring on the handling equipment for transporting ceramic discs, the correction ring is moved to the grinding disc by the handling equipment and comes into contact with the grinding disc to perform grinding and correction, which facilitates the grinding and correction of the grinding disc;

[0020] Both sides of the correction ring are frosted, and both sides of the correction ring can be used for grinding and correction. The chip removal groove can remove the chips that fall off the grinding disc after grinding and correction, reducing the impact of chips on subsequent grinding and correction.

[0021] The rotating platform allows the mounting plate to rotate relative to the wire rope, which makes it easier to adjust the orientation of the mounting plate and reduces the probability of the wire rope breaking due to torsional force caused by the rotation of the mounting plate.

[0022] The handle design facilitates the movement and rotation of the mounting plate;

[0023] Safety rings are used to attach safety chains, which can reduce the fall of the mounting plate in the event of a broken wire rope, thereby reducing the probability of damage to the mounting plate due to wire rope breakage. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of this application.

[0025] Figure 2 This is a structural diagram of the fixed platform in this application.

[0026] Figure 3 This is a structural cross-sectional view of the connecting platform and the rotating platform in this application.

[0027] Explanation of reference numerals in the attached diagram: 0. Robotic arm; 1. Fixed platform; 11. Mounting plate; 12. Suction cup; 13. Connecting platform; 14. Rotating platform; 2. Wire rope; 3. Correction ring; 4. Disassembly plate; 5. Chip chute; 6. Wire rope clip; 7. Insertion hole; 8. Locking nut; 9. Handle; 10. Safety ring. Detailed Implementation

[0028] The following is in conjunction with the appendix Figure 1-3 This application will be described in further detail.

[0029] First, it should be noted that in the description of this application, the use of directional terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" indicates the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used solely for descriptive purposes and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the use of numerical quantifiers such as "first," "second," and "third" is for descriptive purposes only and should not be construed as indicating or implying relative importance. Additionally, in this application, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, interference fits, transition fits, or integral connections; they can refer to direct connections or indirect connections through an intermediate medium. Therefore, those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0030] This application discloses a fixing platform that combines a correction fixture and a ceramic tray placement and fixing platform, referring to... Figure 1The system includes a circular fixed platform 1, on which a steel wire rope 2 is installed. The steel wire rope 2 is used to connect a robotic arm 0 for auxiliary handling. In this embodiment, the robotic arm 0 is a mechanical structure that is fixed to the ground and can rewind or unwind the steel wire rope 2. A circular correction ring 3 is installed on the fixed platform 1. The correction ring 3 is sleeved on the outside of the fixed platform 1. A disassembly plate 4 is fixed on the correction ring 3. The mounting plate 11 is detachably installed on the fixed platform 1 by bolts. After the correction ring 3 is installed on the fixed platform 1, the correction ring 3 and the fixed platform 1 are arranged coaxially. The steel wire rope 2 is installed on the axis of the fixed platform 1. By installing the correction ring 3 on the handling equipment for handling ceramic discs, the handling equipment moves the correction ring 3 to the grinding disc to grind and correct the grinding disc, which is convenient for grinding and correcting the grinding disc.

[0031] Reference Figure 2 and Figure 3 The mounting platform 1 includes a mounting plate 11, several suction cups 12 mounted on one side of the mounting plate 11, a connecting platform 13 fixed to the center of the side of the mounting plate 11 away from the suction cups 12, and a rotating platform 14 rotatably mounted on the connecting platform 13. A steel wire rope 2 is fixed to the rotating platform 14. In this embodiment, four suction cups 12 are evenly distributed on the mounting plate 11. The suction cups 12 are connected to a pressure regulating device, such as a pressure pump. The pressure regulating device draws or blows air to achieve vacuum adsorption or inflation of the suction cups 12 to escape the vacuum adsorption state. The rotating platform 14 allows the mounting plate 11 to rotate relative to the steel wire rope 2, thus facilitating adjustment of the mounting plate 11. The orientation of the mounting plate 11 reduces the probability of the wire rope 2 breaking due to torsional force caused by the rotation of the mounting plate 11. A wire rope clip 6 is installed on the rotating table 14. The wire rope clip 6 has a socket 7. The wire rope 2 passes through the socket 7. A locking nut 8 is threaded onto the wire rope clip 6. The locking nut 8 extends into the socket 7 and abuts against the wire rope 2. In this embodiment, two sockets 7 are provided. The wire rope 2 passes through one socket 7 and then through the second socket 7. Locking nuts 8 are provided in both sockets 7. The stability of the wire rope 2 installation is improved by the two sockets 7 and the two locking nuts 8, and the probability of the wire rope 2 coming off is reduced.

[0032] Reference Figure 2 and Figure 3 A handle 9 is installed on the side of the mounting plate 11 away from the suction cup 12. The handle 9 facilitates the movement and rotation of the mounting plate 11. A safety ring 10 is fixed on the side of the mounting plate 11 away from the suction cup 12. The safety ring 10 is used to hang a safety chain, which can reduce the fall of the mounting plate 11 when the wire rope 2 breaks, thereby reducing the probability of the mounting plate 11 being damaged due to the breakage of the wire rope 2. In this embodiment, two safety rings 10 are provided, and the two safety rings 10 are respectively set on opposite sides of the wire rope 2, thereby reducing the probability of the mounting plate 11 tilting to one side after the wire rope 2 breaks.

[0033] Reference Figure 2 and Figure 3 Both sides of the correction ring 3 are frosted surfaces, and chip removal grooves 5 are provided on both sides of the correction ring 3. Both sides of the correction ring 3 are frosted surfaces, and both sides of the correction ring 3 can be used for grinding and correction. The chip removal grooves 5 can discharge the chips that fall off the grinding disc after grinding and correction, reducing the impact of chips on subsequent grinding and correction.

[0034] The implementation principle of this application embodiment is as follows: the ceramic disc is adsorbed by the suction cup 12, and then the ceramic disc is driven to the polishing equipment for polishing by the gripping handle 9. After polishing, the ceramic disc is driven to the unloading area by the gripping handle 9. Then, the suction cup 12 is ventilated to unload the polished ceramic disc. When the grinding disc is worn, the dressing ring is pressed against the grinding disc by the gripping handle 9 to grind and correct the grinding disc, so that the surface of the grinding disc is flat again.

[0035] It should be noted that the above embodiments are only used to illustrate this application and are not intended to limit the technical solutions described in this application. Although this specification has described this application in detail with reference to the above embodiments, those skilled in the art should understand that they can still make modifications or equivalent substitutions to this application. All technical solutions and improvements that do not depart from the spirit and scope of this application should be covered within the scope of the claims of this application.

Claims

1. A platform that combines a correction fixture and a ceramic tray placement and fixing station, characterized in that: Includes a fixed platform (1), on which a steel wire rope (2) is installed. The steel wire rope (2) is used to connect a robotic arm (0) for auxiliary handling. A correction ring (3) is installed on the fixed platform (1). The correction ring (3) is sleeved on the outside of the fixed platform (1). A disassembly plate (4) is fixed on the correction ring (3). The mounting plate (11) is detachably installed on the fixed platform (1) by bolts.

2. The fixing platform for both correcting a jig and placing / removing a ceramic tray according to claim 1, characterized in that: Both sides of the correction ring (3) are frosted, and chip removal grooves (5) are provided on both sides of the correction ring (3).

3. The fixing platform for both correcting a jig and placing / removing a ceramic tray according to claim 1, characterized in that: The fixed platform (1) includes a mounting plate (11), a suction cup (12), a connecting platform (13), and a rotating platform (14). The suction cup (12) is installed on one side of the mounting plate (11). The connecting platform (13) is fixed at the center of the side of the mounting plate (11) away from the installation of the suction cup (12). The rotating platform (14) is rotatably mounted on the connecting platform (13). The steel wire rope (2) is fixed on the rotating platform (14).

4. The fixing platform for both correcting a jig and placing / removing a ceramic tray according to claim 3, characterized in that: A wire rope buckle (6) is installed on the rotating platform (14). The wire rope buckle (6) has an insertion hole (7). The wire rope (2) passes through the insertion hole (7). A locking nut (8) is threaded onto the wire rope buckle (6). The locking nut (8) extends into the insertion hole (7) and abuts against the wire rope (2).

5. The fixing platform for both correcting a jig and placing / removing a ceramic tray according to claim 4, characterized in that: The mounting plate (11) has a handle (9) installed on the side opposite to the suction cup (12).

6. A fixing platform for both correcting a jig and placing / removing a ceramic tray according to claim 5, characterized in that: A safety lifting ring (10) is fixed on the side of the mounting plate (11) away from the suction cup (12).

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