Multifunctional temperature and humidity control air glove box device

Abstract

The utility model discloses a multifunctional temperature and humidity control air glove box device which comprises a glove box body, a first cold and heat exchange mechanism, a second cold and heat exchange mechanism, a rotary dehumidifier, a first pipeline switch, a second pipeline switch and a third pipeline switch. An air outlet of the glove box main body is communicated with an air inlet, and a first cold and heat exchange mechanism, a rotary dehumidifier and a second cold and heat exchange mechanism are sequentially arranged on a communicated channel in the direction from the air outlet of the glove box main body to the air inlet of the glove box main body; the first to third pipeline switches are used for realizing the change of the pipeline state; according to the scheme, dry air is generated through the rotary dehumidifier, is subjected to secondary cooling and dehumidification through the first cold and heat exchange mechanism and the second cold and heat exchange mechanism and then is input into the glove box body, a continuously-flowing low-temperature dry environment is formed, compared with a traditional nitrogen glove box, the device can efficiently remove organic solvent atmosphere, nitrogen dependence and operation cost are remarkably reduced, and the service life of the glove box is prolonged. The method is suitable for preparing semiconductor devices sensitive to temperature and humidity, such as perovskite solar cells.

Description

A multifunctional temperature and humidity controlled air glove box device Technical Field

[0001] This utility model relates to the technical field of glove boxes, and in particular to a multifunctional temperature and humidity controlled air glove box device. Background Technology

[0002] The fabrication of perovskite solar cells is extremely sensitive to temperature and humidity. Typically, perovskite solar cells achieve higher efficiency in low-temperature, low-humidity environments during winter because the active water molecules in high-temperature, high-humidity environments can disrupt the crystal structure of perovskite. Therefore, most perovskite solar cells are currently fabricated in nitrogen-filled glove boxes. Although traditional nitrogen glove boxes can isolate water and oxygen, the rapid evaporation of antisolvents (such as chlorobenzene and diethyl ether) in the perovskite thin film spin-coating process creates high concentrations of organic vapors within the box. These vapors coordinate with the perovskite material, leading to disordered thin film crystal orientation and severely impacting the efficiency of perovskite devices. A common approach is to use the glove box cleaning function; however, using expensive nitrogen to remove the organic atmosphere is not only ineffective but also costly. Furthermore, with the application of water-soluble transport layer materials (such as tin oxide and nickel oxide), the process environment must simultaneously meet the requirements of low-to-medium humidity stability and rapid removal of organic waste gases, posing a challenge to traditional single-mode humidity control. Summary of the Invention

[0003] The purpose of this invention is to provide a multifunctional temperature and humidity controlled air glove box device to overcome the uncontrollability of temperature and humidity in the environment, reduce dependence on nitrogen glove boxes, and address shortcomings in multi-film application scenarios.

[0004] To address the aforementioned technical problems, this utility model provides a multifunctional temperature and humidity controlled air glove box device, comprising a glove box body, a first heat exchange mechanism, a second heat exchange mechanism, a rotary dehumidifier, a first pipe switch, a second pipe switch, and a third pipe switch. The glove box body is connected to a sample inlet / outlet transition chamber that communicates with its interior. The air outlet and air inlet of the glove box body are connected. Along the channel from the air outlet to the air inlet of the glove box body, the first heat exchange mechanism, the rotary dehumidifier, and the second heat exchange mechanism are sequentially arranged. The first pipe switch is connected to the passage connecting the air outlet of the glove box body and the first heat exchange mechanism. The second pipe switch and the first pipe switch are connected in parallel to the air outlet of the glove box body. The third pipe switch and the first pipe switch are connected in parallel to the first heat exchange mechanism.

[0005] In one embodiment, the first heat exchange mechanism has the same structure as the second heat exchange mechanism.

[0006] In one embodiment, both the first and second heat exchange mechanisms are equipped with condensate drain switches.

[0007] In one embodiment, both the first and second heat exchange mechanisms include a device housing, a liquid cooling pipe, a pipe inlet, a pipe outlet, and a condensate drain switch; the device housing is provided with a spiral-shaped liquid cooling pipe inside; the two ends of the liquid cooling pipe are respectively connected to the pipe inlet and the pipe outlet; the condensate drain switch is connected to the interior of the device housing.

[0008] In one embodiment, the liquid-cooled pipe is fitted with a plurality of spiral fins.

[0009] In one embodiment, the plurality of spiral fins are arranged separately from each other, the spacing between adjacent spiral fins is 5-8 mm, and the height of the plurality of spiral fins is 10-15 mm.

[0010] In one embodiment, the first pipe switch, the second pipe switch, and the third pipe switch have a temperature tolerance range of -20°C to 120°C, and a humidity tolerance range of 0 to 100%RH.

[0011] In one embodiment, the first pipeline switch, the second pipeline switch, and the third pipeline switch are all straight-through metal valves, and the valve bodies of the first pipeline switch, the second pipeline switch, and the third pipeline switch are made of 304 stainless steel.

[0012] In one embodiment, the rotary dehumidifier has a processing air flow rate of 180~220 m³ / h. 3 / h.

[0013] In one embodiment, the glove box body is equipped with a thermometer and hygrometer.

[0014] The beneficial effects of this utility model are as follows:

[0015] This invention utilizes the synergistic effect of a first heat exchange mechanism, a second heat exchange mechanism, and a rotary dehumidifier, combined with a dual-mode airflow system of circulating dehumidification / directional waste discharge, to achieve efficient removal of organic solvent waste gas and flexible control of a low-temperature drying environment. Simultaneously, the first and second heat exchange mechanisms are equipped with condensate drain switches to prevent water accumulation in the pipes from affecting the dehumidification effect. The beneficial effect of this invention is that dry air generated by the rotary dehumidifier is cooled and dehumidified twice by the first and second heat exchange mechanisms before being introduced into the glove box body, forming a continuously flowing low-temperature drying environment (under external humidity ≈ 50%RH, the temperature inside the glove box can be ≤22℃ and the humidity ≤15%RH; under external humidity ≈30%RH, the humidity inside the glove box can be ≤5%RH). Compared to traditional nitrogen glove boxes, this device can efficiently remove organic solvent atmosphere, significantly reducing nitrogen dependence and operating costs, and is suitable for the fabrication of temperature and humidity-sensitive semiconductor devices such as perovskite solar cells. Attached Figure Description

[0016] To more clearly illustrate the technical solution of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 is a structural schematic diagram provided in an embodiment of the present utility model;

[0018] Figure 2 is a schematic diagram of the first and second heat exchange mechanisms in Figure 1.

[0019] Figure 3 is a schematic diagram of the spiral fin structure assembled in Figure 2 for the liquid cooling pipe.

[0020] The attached figures are labeled as follows:

[0021] 10. Glove box body; 11. Thermometer and hygrometer; 12. Sample inlet / outlet transition chamber; 13. Air outlet; 14. Air inlet;

[0022] 21. First heat exchange mechanism; 22. Second heat exchange mechanism; 201. Condensate drain switch; 202. Device casing; 203. Liquid cooling pipe; 204. Pipe inlet; 205. Pipe outlet; 206. Spiral fins;

[0023] 30. Rotary dehumidifier;

[0024] 41. First pipe switch; 42. Second pipe switch; 43. Third pipe switch. Detailed Implementation

[0025] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0026] This utility model provides a multifunctional temperature and humidity controlled air glove box device, the embodiment of which is shown in Figures 1 to 3. It includes a glove box body 10, a first heat exchange mechanism 21, a second heat exchange mechanism 22, a rotary dehumidifier 30, a first pipe switch 41, a second pipe switch 42, and a third pipe switch 43. The glove box body 10 is equipped with a thermometer and hygrometer 11. The glove box body 10 is connected to a sample inlet / outlet transition chamber 12, which is in communication with the interior of the glove box body. The sample inlet / outlet transition chamber 12 is made of steel or acrylic material and features a sealing ring design to prevent interference from the external environment. The glove box body 10 has an air outlet 1... 3 is connected to the air inlet 14. In the direction from the air outlet 13 of the glove box body 10 to the air inlet 14, the connecting channel is sequentially provided with a first heat exchange mechanism 21, a rotary dehumidifier 30, and a second heat exchange mechanism 22; the first pipe switch 41 is connected to the passage connecting the air outlet 13 of the glove box body 10 and the first heat exchange mechanism 21; the second pipe switch 42 and the first pipe switch 41 are connected in parallel to the air outlet 13 of the glove box body 10; the third pipe switch 43 and the first pipe switch 41 are connected in parallel to the first heat exchange mechanism 21.

[0027] In this embodiment, the pipes used for connection can all be double-layer aluminum foil expansion tubes, and the pipe connections are fixed with metal hose clamps and sealed with sealant.

[0028] As shown in Figures 1 to 3, in this embodiment, the first heat exchange mechanism 21 and the second heat exchange mechanism 22 have the same structure. For example, both the first heat exchange mechanism 21 and the second heat exchange mechanism 22 can be equipped with a condensate drain switch 201. In this embodiment, both the first heat exchange mechanism 21 and the second heat exchange mechanism 22 include a device housing 202, a liquid cooling pipe 203, a pipe inlet 204, a pipe outlet 205, and a condensate drain switch 201. The device housing 202 has a spiral liquid cooling pipe 203 inside. 03. The liquid cooling pipe 203 can be made of aluminum tube; the two ends of the liquid cooling pipe 203 are respectively connected to the pipe inlet 204 and the pipe outlet 205; the condensate drain switch 201 is connected to the inside of the device shell 202, and at this time the liquid cooling pipe 203 is covered with multiple spiral fins 206, the multiple spiral fins 206 are arranged separately from each other, the spacing between adjacent spiral fins 206 is 5~8mm, the height of the multiple spiral fins 206 is 10~15mm, and the spiral fins 206 can be thin fins made of stainless steel.

[0029] The device housing 202 can be a PE pipe of suitable size. Therefore, after the liquid cooling pipe 203 is placed in the device housing 202, holes can be made in the device housing 202 to connect and install the pipe inlet 204 and pipe outlet 205 of the liquid cooling pipe 203.

[0030] In addition, the aforementioned condensate drain switch 201 may include a PE water pipe and a metal ball valve. Depending on the ambient humidity, its drainage frequency will also vary. For example, in this embodiment, the drainage frequency is approximately once every 60 minutes.

[0031] As shown in Figure 1, in this embodiment, the temperature tolerance range of the first pipeline switch 41, the second pipeline switch 42, and the third pipeline switch 43 is -20℃ to 120℃, and the humidity tolerance range of the first pipeline switch 41, the second pipeline switch 42, and the third pipeline switch 43 is 0 to 100%RH. Moreover, the first pipeline switch 41, the second pipeline switch 42, and the third pipeline switch 43 are all straight-through metal valves, and the valve body material of the first pipeline switch 41, the second pipeline switch 42, and the third pipeline switch 43 is 304 stainless steel.

[0032] Preferably, in this embodiment, the processing airflow of the rotary dehumidifier 30 is set to 180~220 m³ / h. 3 / h.

[0033] To better understand the application of this utility model, the following description will be based on two specific scenarios:

[0034] Scenario 1: Removal of organic atmosphere

[0035] First, open the first pipe switch 41 and the third pipe switch 43, and close the second pipe switch 42 to shut off the sample entry / exit transition chamber. Then, turn on the rotary dehumidifier 30, with the circulating water chiller providing liquid cooling, and wait for the rotary dehumidifier 30 to reach operating status. Low-temperature, low-humidity air enters the glove box body 10 through the air inlet 14. Observe the reading of the thermometer and hygrometer 11, and adjust the dehumidification power and cooling power as needed to achieve a suitable temperature and humidity range. Using the sample entry / exit transition chamber, place the required sample into the glove box body 10 for perovskite thin film spin coating. The spin coating process uses a one-step anti-solvent method, using 500 μL of diethyl ether as the anti-solvent. The diethyl ether rapidly extracts the solvent in the perovskite precursor solution and evaporates to form a high concentration of organic vapor. With continuous air exchange at a flow rate of 200 m3 / h, the organic atmosphere generated in the experiment is removed by the pathway connected by the second pipe switch 42. Before the next perovskite cell is spin-coated, the atmosphere inside the glove box body 10 is basically removed.

[0036] Scenario 2: Spin coating of aqueous solutions

[0037] First, close the second pipeline switch 42 and the third pipeline switch 43, and open the first pipeline switch 41 to close the sample entry / exit transition chamber. Then, turn on the rotary dehumidifier 30, set the dehumidification power, and use the circulating water chiller to provide liquid cooling. Wait for the rotary dehumidifier 30 to reach its operating state. Low-temperature, low-humidity air enters the glove box body 10 through the air inlet 14. Observe the reading of the thermometer and hygrometer 11, and adjust the cooling power as needed to achieve a suitable temperature and humidity range. Using the sample entry / exit transition chamber, place the required sample into the glove box body 10 for spin-coating of the water-soluble transport layer material tin oxide or nickel oxide for perovskite devices. During the process, the humidity fluctuation of the aqueous solvent operation should be ≤±2%RH.

[0038] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications are also considered to be within the protection scope of this utility model.

Claims

1. A multifunctional temperature and humidity controlled air glove box device, characterized in that, The system includes a glove box body, a first heat exchange mechanism, a second heat exchange mechanism, a rotary dehumidifier, a first pipe switch, a second pipe switch, and a third pipe switch. The glove box body is connected to a sample inlet / outlet transition chamber that communicates with its interior. The air outlet and air inlet of the glove box body are connected. Along the channel from the air outlet to the air inlet of the glove box body, the first heat exchange mechanism, the rotary dehumidifier, and the second heat exchange mechanism are sequentially arranged. The first pipe switch is connected to the passage connecting the air outlet of the glove box body and the first heat exchange mechanism. The second pipe switch and the first pipe switch are connected in parallel to the air outlet of the glove box body. The third pipe switch and the first pipe switch are connected in parallel to the first heat exchange mechanism.

2. The multifunctional temperature and humidity controlled air glove box device according to claim 1, characterized in that, The first heat exchange mechanism has the same structure as the second heat exchange mechanism.

3. The multifunctional temperature and humidity controlled air glove box device according to claim 2, characterized in that, Both the first and second heat exchange mechanisms are equipped with condensate drain switches.

4. The multifunctional temperature and humidity controlled air glove box device according to claim 3, characterized in that, Both the first and second heat exchange mechanisms include a device housing, a liquid cooling pipe, a pipe inlet, a pipe outlet, and a condensate drain switch; the device housing is provided with a spiral-shaped liquid cooling pipe; the two ends of the liquid cooling pipe are respectively connected to the pipe inlet and the pipe outlet; the condensate drain switch is connected to the interior of the device housing.

5. The multifunctional temperature and humidity controlled air glove box device according to claim 4, characterized in that, The liquid cooling pipe is fitted with multiple spiral fins.

6. The multifunctional temperature and humidity controlled air glove box device according to claim 5, characterized in that, The plurality of spiral fins are arranged separately from each other, the distance between adjacent spiral fins is 5-8 mm, and the height of the plurality of spiral fins is 10-15 mm.

7. The multifunctional temperature and humidity controlled air glove box device according to claim 1, characterized in that, The first pipe switch, the second pipe switch, and the third pipe switch have a temperature tolerance range of -20℃ to 120℃, and a humidity tolerance range of 0 to 100%RH.

8. The multifunctional temperature and humidity controlled air glove box device according to claim 7, characterized in that, The first pipeline switch, the second pipeline switch, and the third pipeline switch are all straight-through metal valves, and the valve bodies of the first pipeline switch, the second pipeline switch, and the third pipeline switch are made of 304 stainless steel.

9. The multifunctional temperature and humidity controlled air glove box device according to claim 1, characterized in that, The rotary dehumidifier has a processing airflow rate of 180~220 m³ / h. 3 / h.

10. The multifunctional temperature and humidity controlled air glove box device according to claim 1, characterized in that, The glove box body is equipped with a thermometer and hygrometer.

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