Sheet thickness measuring device and sheet thickness measuring system

Abstract

The utility model relates to the technical field of photovoltaics and semiconductors, in particular to a sheet thickness measuring device and a sheet thickness measuring system, and aims to solve the problem that the sheet thickness measuring device can cause sheet contact damage or low measurement precision. The sheet thickness measuring device comprises a driving assembly and a measuring assembly. The measuring assembly is configured to measure one or more first distances from the bearing plane to the measuring assembly and one or more second distances from one side of the sheet away from the bearing plane to the measuring assembly, so as to calculate the thickness of the sheet based on the one or more first distances and the one or more second distances. The sheet thickness measuring device does not need to be contacted with the sheet, so that contact damage is avoided. Besides, the sheet thickness measuring device can output the first distance and the second distance, so that the first distance and the second distance can be used for analysis and calculation, the thickness does not need to be determined by using an interference principle or a spectrum principle, the influence of ambient light is small, and the measuring precision of the sheet thickness measuring device is improved.

Description

Sheet thickness measuring device and sheet thickness measuring system Technical Field

[0001] This application relates to the fields of photovoltaic and semiconductor technology, and in particular to a sheet thickness measuring device and a sheet thickness measuring system. Background Technology

[0002] With the booming development of the semiconductor and photovoltaic industries, silicon wafers, as a core basic material in these industries, require crucial quality control. Wafer thickness is one of the key quality indicators. Currently, silicon wafer thickness measurement devices include contact measuring instruments and non-contact measuring equipment. Contact measuring instruments, such as micrometers, require direct contact with the silicon wafer during measurement. Due to the brittle nature of silicon wafers and their extremely high surface requirements, frequent contact can easily lead to scratches and wear, reducing yield. Non-contact measuring equipment, such as interferometric thickness gauges and spectral thickness gauges, avoids the problem of contact damage, but is often affected by ambient light, resulting in large fluctuations in measurement accuracy and significant deviations in measurement results. Summary of the Invention

[0003] In view of this, embodiments of this application provide a sheet thickness measuring device and a sheet thickness measuring system to solve the problems that sheet thickness measuring devices may cause contact damage to the sheet or low measurement accuracy.

[0004] In a first aspect, one embodiment of this application provides a sheet thickness measuring device, comprising: a driving component having a bearing plane configured to bear a sheet, the driving component being configured to drive the sheet to move linearly along a first direction; and a measuring component, the bearing plane being movable along the first direction to be disposed opposite to the measuring component, the measuring component being configured to measure one or more first distances from the bearing plane to the measuring component, and one or more second distances from a side of the sheet away from the bearing plane to the measuring component, to calculate the thickness of the sheet based on one or more first distances and one or more second distances.

[0005] In conjunction with the first aspect, in some implementations of the first aspect, the bearing plane has one or more adsorption holes to enable the bearing plane to adsorb the sheet; wherein the bearing plane is parallel to the horizontal plane and the bearing plane faces downward.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the measuring component includes: a plurality of measuring elements, the plurality of measuring elements being spaced apart along a second direction, the second direction being perpendicular to the first direction, and both the first direction and the second direction being horizontal.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the measuring element includes a laser sensor configured to measure the first distance and the second distance using the principle of laser triangulation.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the sheet thickness measuring device further includes: a support component connected to the measuring component and configured to support the measuring component.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the measuring element has an elongated hole, the length direction of which is vertical; the support assembly includes: a leveling base; a mounting element mounted on the leveling base, the mounting element having multiple mounting holes; and multiple locking elements, each of the locking elements passing through one of the mounting holes and one of the elongated holes of the measuring element to lock the measuring element to the mounting element.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, a plurality of the measuring elements are mounted at both ends of the mounting member in the second direction; wherein the leveling base includes: a fixing member; a first sliding member slidably connected to the fixing member in the vertical direction, the top end of the first sliding member being connected to the mounting member; a second sliding member slidably connected to the fixing member in the vertical direction, the top end of the second sliding member being connected to the mounting member, the second sliding member and the first sliding member being spaced apart in the second direction; a first driving member connected to the first sliding member and configured to drive the first sliding member to move in the vertical direction; and a second driving member connected to the second sliding member and configured to drive the second sliding member to move in the vertical direction.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the sheet thickness measuring device further includes: a light shield having a receiving space, the receiving space being configured to receive the driving assembly and the measuring assembly, the light shield being configured to block light from shining into the receiving space.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the measurement accuracy of the measurement component includes ±0.1 μm.

[0013] Secondly, one embodiment of this application provides a sheet thickness measurement system, comprising: a sheet thickness measuring device mentioned in the first aspect, configured to determine one or more first distances and one or more second distances; and a data processing device, receiving one or more first distances and one or more second distances determined by the sheet thickness measuring device, and calculating the thickness of the sheet based on one or more first distances and one or more second distances.

[0014] The sheet thickness measuring device provided in this application embodiment does not require contact with the sheet, thus avoiding contact damage. Furthermore, the sheet thickness measuring device of this application can output a first distance and a second distance, allowing for analysis and calculation using these distances. This eliminates the need to determine the thickness using interference or spectral principles, minimizes the influence of ambient light, and improves the measurement accuracy of the sheet thickness measuring device. Attached Figure Description

[0015] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0016] Figure 1 shows a schematic diagram of the sheet thickness measuring device provided in an embodiment of this application.

[0017] Figure 2 shows a partial cross-sectional view of a sheet thickness measuring device provided in an embodiment of this application.

[0018] Figure 3 shows a side view of a sheet thickness measuring device provided in an embodiment of this application.

[0019] Figure 4 shows a side view of a sheet thickness measuring device and a sheet provided in an embodiment of this application.

[0020] Figure 5 shows a schematic diagram of the measurement results of a sheet thickness measuring device provided in an embodiment of this application.

[0021] Figure 6 shows a schematic diagram of the sheet thickness measurement system provided in an embodiment of this application.

[0022] Figure label:

[0023] 1. Sheet thickness measurement system; 10. Sheet thickness measurement device; 100. Drive assembly; 101. Bearing plane; 102. Adsorption hole; 200. Measurement assembly; 210. Measuring component; 211. Elongated hole; 212. Transmitter; 213. Receiver; 300. Support assembly; 310. Leveling base; 311. Fixing component; 312. First sliding component; 313. Second sliding component; 314. First drive component; 315. Second drive component; 320. Mounting component; 321. Mounting hole; 330. Locking component; 400. Light shield; 401. Accommodation space; 20. Data processing device; 2. Sheet; X, First direction; Y, Second direction; D1, First distance; D2, Second distance. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] Figure 1 is a schematic diagram of the sheet thickness measuring device provided in an embodiment of this application. Figure 2 is a partial cross-sectional view of the sheet thickness measuring device provided in an embodiment of this application. Figure 3 is a side view of the sheet thickness measuring device provided in an embodiment of this application. Figure 4 is a side view of the sheet thickness measuring device and the sheet provided in an embodiment of this application. Figure 5 is a schematic diagram of the measurement results of the sheet thickness measuring device provided in an embodiment of this application. As shown in Figures 1 to 5, the sheet thickness measuring device 10 includes a driving assembly 100 and a measuring assembly 200.

[0026] As shown in Figure 2, the drive assembly 100 has a bearing plane 101. The bearing plane 101 is configured to bear the sheet 2. The drive assembly 100 is configured to drive the sheet 2 to move linearly along a first direction X. The bearing plane 101 can move along the first direction X to be positioned opposite the measuring assembly 200.

[0027] Exemplarily, the drive assembly 100 includes a drive source and a carrier, and the bearing plane 101 may be the surface of the carrier. The drive source may be a linear module, a robotic arm, etc. The carrier may be mounted on the end of the drive source. Exemplarily, the sheet 2 is a sheet material such as a silicon wafer, a glass substrate, or a crystal wafer.

[0028] For example, the first direction X is horizontal, and the bearing plane 101 can be moved along the first direction X under the drive of the drive source to be positioned opposite the measuring component 200 in the vertical direction.

[0029] The measuring component 200 is configured to measure one or more first distances D1 from the bearing plane 101 to the measuring component 200, and one or more second distances D2 from the side of the sheet 2 away from the bearing plane 101 to the measuring component 200, so as to calculate the thickness of the sheet 2 based on one or more first distances D1 and one or more second distances D2.

[0030] For example, the drive assembly 100 can first move to a position opposite to the measuring assembly 200 without carrying the sheet 2, so that the measuring assembly 200 measures a first distance D1 from the bearing plane 101 to the measuring assembly 200. Then, with the sheet 2 carried, the drive assembly 100 moves to a position opposite to the measuring assembly 200, so that the measuring assembly 200 measures a second distance D2 from the side of the sheet 2 away from the bearing plane 101 to the measuring assembly 200. The thickness of the sheet 2 is the difference between the first distance D1 and the second distance D2.

[0031] The sheet thickness measuring device 10 does not need to contact the sheet 2, avoiding contact damage, ensuring the surface integrity of the sheet 2, and improving product yield. In addition, the sheet thickness measuring device 10 can output a first distance D1 and a second distance D2, so that the first distance D1 and the second distance D2 can be used for analysis and calculation, without the need to use the principle of interference or the principle of spectroscopy to determine the thickness of the sheet 2. It is less affected by ambient light, which improves the measurement accuracy of the sheet thickness measuring device 10.

[0032] For example, during the process of the drive assembly 100 moving to a position opposite to the measuring assembly 200 without carrying the sheet 2, the measuring assembly 200 can measure the first distance D1 from the bearing plane 101 to the measuring assembly 200 multiple times, thereby obtaining multiple first distances D1. During the process of the drive assembly 100 moving to a position opposite to the measuring assembly 200 while carrying the sheet 2, the measuring assembly 200 can measure the second distance D2 from the side of the sheet 2 away from the bearing plane 101 to the measuring assembly 200 multiple times, thereby obtaining multiple second distances D2. Then, the first average value of the multiple first distances D1 and the second average value of the multiple second distances D2 can be calculated respectively. The thickness of the sheet 2 is the difference between the first average value and the second average value, reducing random errors and further improving the measurement accuracy of the sheet thickness measuring device 10.

[0033] Figure 5 shows the measurement results of the sheet thickness measuring device. As shown in Figure 5, during the entire stroke of the drive assembly 100, multiple first distances D1 are fitted into a single line, and multiple second distances D2 are fitted into a single line.

[0034] In some embodiments, the measurement accuracy of the measuring component 200 includes ±0.1 μm, thereby reducing the error of the measured first distance D1 and second distance D2, and further improving the measurement accuracy of the sheet thickness measuring device 10.

[0035] For example, the measuring component 200 includes one or more laser sensors. Laser sensors have advantages such as non-contact measurement, high accuracy, and fast response speed, which can avoid contact damage to the sheet 2 and improve the measurement accuracy of the sheet thickness measuring device 10.

[0036] In some embodiments, the measuring assembly 200 includes a plurality of measuring elements 210. The plurality of measuring elements 210 are spaced apart along a second direction Y. The second direction Y is perpendicular to the first direction X, and both the first direction X and the second direction Y are horizontal directions.

[0037] For example, the measuring element 210 is a laser rangefinder, an ultrasonic rangefinder, etc.

[0038] By setting multiple measuring elements 210, multiple first distances D1 and second distances D2 can be measured when the drive assembly 100 and the measuring elements 210 are relatively stationary, avoiding the influence of motion on accuracy and further improving the measurement accuracy of the sheet thickness measuring device 10.

[0039] In some embodiments, the measuring element 210 includes a laser sensor. The laser sensor is configured to measure a first distance D1 and a second distance D2 using the principle of laser triangulation.

[0040] As exemplarily shown in Figures 3 and 4, the measuring element 210 includes a transmitter 212 and a receiver 213. Laser light is emitted from the transmitter 212 and received by the receiver 213. The propagation path of the laser light is shown by arrows in Figures 3 and 4.

[0041] Laser triangulation is based on the principle of triangle similarity and the laws of light propagation in geometric optics. It calculates the distance between the object being measured and the laser sensor by measuring the geometric relationship between the transmitter 212, the reflection point, and the receiver 213. Specifically, the transmitter 212 emits a laser beam that illuminates the surface of the object being measured (e.g., the supporting plane 101 or sheet 2) at a certain angle, forming a light spot on the surface. The reflected or scattered light from this spot is imaged on the receiver 213. According to the principles of geometric optics, the transmitter 212, the light spot on the surface of the object being measured, and the imaging point of the receiver 213 form a triangle. The first distance D1 and the second distance D2 are then calculated based on the principle of triangle similarity.

[0042] The laser triangulation measurement principle has the advantages of high precision, fast measurement speed and strong anti-interference ability, which can improve the measurement accuracy of the sheet thickness measuring device 10.

[0043] In some embodiments, the bearing plane 101 has one or more adsorption holes 102 to allow the bearing plane 101 to adsorb the sheet 2. The bearing plane 101 is parallel to the horizontal plane and faces downward. In other words, the drive assembly 100 is located above the measuring assembly 200.

[0044] In practical applications, sheet 2 is placed in a boat structure or a basket. The driving component 100 removes sheet 2 by adsorbing its upper surface, i.e., the bearing plane 101 faces downwards, and the unadsorbed surface of sheet 2 faces downwards. The driving component 100 can transport sheet 2 directly above the measuring component 200 by making a straight-line movement, without the need for complex movements such as flipping, thus simplifying the structure of the sheet thickness measuring device 10.

[0045] In some embodiments, the sheet thickness measuring device 10 further includes a support component 300. The support component 300 is connected to the measuring component 200 and is configured to support the measuring component 200, so that the measuring component 200 is stably supported. This improves the stability of the sheet thickness measuring device 10, allowing the sheet thickness measuring device 10 to perform measurements in a stable environment, which is beneficial to improving the measurement accuracy of the sheet thickness measuring device 10.

[0046] For example, the support component 300 is a structure with a support function, such as a bracket or platform.

[0047] In some embodiments, as shown in Figures 1 and 2, the measuring element 210 has an elongated hole 211. The length direction of the elongated hole 211 is vertical.

[0048] The support assembly 300 includes a leveling base 310, a mounting member 320, and a plurality of locking members 330. The mounting member 320 is mounted on the leveling base 310 and has a plurality of mounting holes 321. Each locking member 330 passes through a mounting hole 321 and an elongated hole 211 of a measuring member 210 to lock the measuring member 210 to the mounting member 320.

[0049] By setting the elongated hole 211, it is easy to adjust the installation position of the measuring element 210 in the vertical direction, so that the installation positions of multiple measuring elements 210 in the vertical direction are the same, thereby reducing the error of the measurement results of multiple measuring elements 210.

[0050] In some embodiments, a plurality of measuring elements 210 are mounted at both ends of the mounting member 320 in the second direction Y.

[0051] The leveling base 310 includes a fixing member 311, a first sliding member 312, a second sliding member 313, a first driving member 314, and a second driving member 315. The first sliding member 312 is slidably connected to the fixing member 311 in the vertical direction. The top end of the first sliding member 312 is connected to the mounting member 320. The second sliding member 313 is slidably connected to the fixing member 311 in the vertical direction. The top end of the second sliding member 313 is connected to the mounting member 320. The second sliding member 313 and the first sliding member 312 are spaced apart along a second direction Y. The first driving member 314 is connected to the first sliding member 312 and configured to drive the first sliding member 312 to move in the vertical direction. The second driving member 315 is connected to the second sliding member 313 and configured to drive the second sliding member 313 to move in the vertical direction.

[0052] Exemplarily, the fixing member 311 has a slide rail, and the first sliding member 312 and the second sliding member 313 are sliders. Exemplarily, the fixing member 311 has a slide channel, and the first sliding member 312 and the second sliding member 313 are guide rails. Exemplarily, the first driving member 314 and the second driving member 315 are structures such as cylinders, push rods, and screws that can automatically or manually achieve linear drive. Exemplarily, the first driving member 314 and the second driving member 315 are mounted on the fixing member 311 and connected to the first sliding member 312 and the second sliding member 313 respectively, so as to drive the first sliding member 312 and the second sliding member 313 to move in the vertical direction respectively.

[0053] Since both the first sliding member 312 and the second sliding member 313 move vertically, the levelness of the mounting member 320 can be adjusted. Specifically, a level can be placed on the mounting member 320, and then the vertical positions of the first sliding member 312 and the second sliding member 313 can be adjusted respectively until the level indicates that the mounting member 320 is level. In practical applications, the levelness of the mounting member 320 can be controlled within 0.005mm. By ensuring that the mounting member 320 is level, the multiple measuring members 210 can be positioned identically in the vertical direction, reducing the error in the measurement results of the multiple measuring members 210. In practical applications, the adjustment accuracy of the leveling base 310 can reach the micrometer level.

[0054] In some embodiments, the sheet thickness measuring device 10 further includes a light shield 400. The light shield 400 has a receiving space 401 configured to receive the driving assembly 100 and the measuring assembly 200. The light shield 400 is configured to block light from shining into the receiving space 401, thereby reducing the influence of ambient light on the measuring assembly 200 and further improving the measurement accuracy of the sheet thickness measuring device 10.

[0055] For example, the material of the light shield 400 is an opaque material.

[0056] Figure 6 shows a schematic diagram of a sheet thickness measurement system provided in an embodiment of this application. As shown in Figure 6, the sheet thickness measurement system 1 includes the sheet thickness measurement device 10 and the data processing device 20 in the above embodiment.

[0057] The sheet thickness measuring device 10 is configured to determine one or more first distances D1 and one or more second distances D2. The data processing device 20 receives one or more first distances D1 and one or more second distances D2 determined by the sheet thickness measuring device 10, and calculates the thickness of the sheet 2 based on one or more first distances D1 and one or more second distances D2.

[0058] For example, the data processing device 20 is a high-performance industrial computer, computer, processor, server, or other device with data processing capabilities. The data processing device 20 can have built-in thickness measurement software or programs and communicate with the measurement component 200. It can receive measurement data from the measurement component 200 in real time and quickly calculate indicators such as the thickness and thickness distribution of the sheet 2. The data processing device 20 can automatically calibrate and analyze the thickness data of the sheet 2, generate intuitive results in real time, reduce human error, and improve the reliability and convenience of inspection.

[0059] Since the sheet thickness measurement system 1 includes the sheet thickness measurement device 10 in the above embodiments, the sheet thickness measurement system 1 has all the technical features and technical effects of the sheet thickness measurement device 10, which will not be repeated here.

[0060] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0061] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0062] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0063] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0064] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A sheet thickness measuring device, characterized in that, include: A drive assembly has a bearing plane configured to bear a sheet, and the drive assembly is configured to drive the sheet to move linearly along a first direction; A measuring component, wherein the bearing plane is movable along the first direction to be disposed opposite to the measuring component, the measuring component being configured to measure one or more first distances from the bearing plane to the measuring component, and one or more second distances from the side of the sheet away from the bearing plane to the measuring component, to calculate the thickness of the sheet based on one or more first distances and one or more second distances.

2. The sheet thickness measuring device according to claim 1, characterized in that, The bearing plane has one or more adsorption holes to enable the bearing plane to adsorb the sheet; wherein the bearing plane is parallel to the horizontal plane and faces downward.

3. The sheet thickness measuring device according to claim 1, characterized in that, The measuring component includes: a plurality of measuring elements, which are spaced apart along a second direction, the second direction being perpendicular to the first direction, and both the first direction and the second direction being horizontal.

4. The sheet thickness measuring device according to claim 3, characterized in that, The measuring device includes a laser sensor configured to measure the first distance and the second distance using the principle of laser triangulation.

5. The sheet thickness measuring device according to claim 3, characterized in that, Also includes: A support component, connected to the measuring component, is configured to support the measuring component.

6. The sheet thickness measuring device according to claim 5, characterized in that, The measuring element has an elongated hole, the length of which is vertical; the support assembly includes: a leveling base; a mounting element mounted on the leveling base, the mounting element having multiple mounting holes; and multiple locking elements, each of the locking elements passing through one of the mounting holes and one of the elongated holes of the measuring element to lock the measuring element to the mounting element.

7. The sheet thickness measuring device according to claim 6, characterized in that, Multiple measuring elements are mounted at both ends of the mounting member in the second direction; wherein the leveling base includes: a fixing member; a first sliding member slidably connected to the fixing member in the vertical direction, the top end of the first sliding member being connected to the mounting member; a second sliding member slidably connected to the fixing member in the vertical direction, the top end of the second sliding member being connected to the mounting member, the second sliding member and the first sliding member being spaced apart in the second direction; a first driving member connected to the first sliding member and configured to drive the first sliding member to move in the vertical direction; and a second driving member connected to the second sliding member and configured to drive the second sliding member to move in the vertical direction.

8. The sheet thickness measuring device according to any one of claims 1 to 4, characterized in that, Also includes: A light shield having a receiving space configured to receive the drive assembly and the measuring assembly, the light shield being configured to block light from shining into the receiving space.

9. The sheet thickness measuring device according to any one of claims 1 to 4, characterized in that, The measurement accuracy of the measurement component includes ±0.1 μm.

10. A sheet thickness measurement system, characterized in that, include: The sheet thickness measuring device according to any one of claims 1 to 9 is configured to determine one or more of the first distances and one or more of the second distances; A data processing device receives one or more first distances and one or more second distances determined by the sheet thickness measuring device, and calculates the thickness of the sheet based on one or more first distances and one or more second distances.

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