Temperature control mechanism for high-temperature nitrogen blowing test probe card

Abstract

The utility model belongs to the technical field of temperature control mechanisms for probe cards, and discloses a temperature control mechanism for a high-temperature nitrogen blowing test probe card, which comprises a probe card mechanism, the surface of the probe card mechanism is communicated with a heating mechanism, the surface of the probe card mechanism is provided with a temperature control mechanism, and the temperature control mechanism comprises a hot air channel. The surface of the probe card mechanism is provided with a hot air channel, the hot air channel is communicated with the heating mechanism, the interior of the hot air channel is rotatably connected with a temperature control disc, the surface of the temperature control disc is provided with a movable rod, and the two ends of the movable rod penetrate through the temperature control disc and the probe card mechanism. The temperature control disc is arranged on the surface of the probe card mechanism, extends to the outside of the probe card mechanism and is rotatably connected to the inside of a *-shaped plate arranged on the surface of the probe card mechanism, and filtering discs are symmetrically arranged on the surface of the temperature control disc. The hot air can be controlled in the preheating process of the probe card, so that the preheating temperature of the probe card can be controlled.

Description

A temperature control mechanism for a high-temperature nitrogen blowing test probe card Technical Field

[0001] This utility model belongs to the technical field of temperature control mechanism for probe cards, specifically a temperature control mechanism for a high-temperature nitrogen blowing test probe card. Background Technology

[0002] High-temperature nitrogen purging test is a technique that uses nitrogen gas to purge samples in a high-temperature environment to achieve a specific testing purpose. In high-temperature testing, a probe machine is needed to preheat the probe card for about 30 minutes to reach the ideal state, and then the probe card needle position and height are calibrated.

[0003] Meanwhile, application number CN212674986U, entitled "An Ultra-High Probe Height Pin Card," describes an ultra-high probe height pin card comprising a circuit board, an aluminum block, ceramic, and a probe. The lower end of the circuit board is connected to the aluminum block, and a countersunk screw is provided at the connection between the circuit board and the aluminum block. The lower end of the aluminum block is ceramic, and a ceramic resin adhesive layer is provided at the connection between the aluminum block and the ceramic. A probe is connected to the lower base surface of the ceramic, and resin is provided at the connection between the ceramic and the probe. However, during production, the probe is easily damaged, resulting in a high scrap rate, and current processes cannot meet customers' ultra-high probe height requirements. This paper modifies the original assembly structure of the epoxy probe card, making the structure more robust during assembly with the circuit board and reducing the scrap rate in the production workshop. The probe is an epoxy probe card type, and the use of the aluminum block increases the probe height, meeting the height requirements of more customers and resulting in a better overall effect.

[0004] In the above-mentioned technical solution, when the probe card is preheated during use, the existing preheating device directly heats the probe card and cannot control the hot air blown onto the probe card. This can easily lead to excessive temperature during the preheating process, making it impossible to control the temperature of the probe card during preheating, thus affecting the normal use of the probe card.

[0005] Therefore, a temperature control mechanism for a high-temperature nitrogen blowing test probe card is proposed to address the above problems. Summary of the Invention

[0006] To address the problems mentioned in the background art, this utility model provides a temperature control mechanism for a high-temperature nitrogen blowing test probe card, which has the advantage of being able to control the hot air during the preheating process of the probe card, thereby controlling the preheating temperature of the probe card.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a temperature control mechanism for a high-temperature nitrogen blowing test probe card, comprising a probe card mechanism, wherein a heating mechanism is connected to the surface of the probe card mechanism, and a temperature control mechanism is installed on the surface of the probe card mechanism;

[0008] The temperature control mechanism includes a hot air channel. The probe card mechanism has a hot air channel on its surface. The hot air channel is connected to the heating mechanism. A temperature control plate is rotatably connected inside the hot air channel. A movable rod is installed on the surface of the temperature control plate. Both ends of the movable rod pass through the temperature control plate and the probe card mechanism and extend to the outside of the probe card mechanism. They are rotatably connected to the inside of a star-shaped plate installed on the surface of the probe card mechanism. Filter plates are symmetrically installed on the surface of the temperature control plate. A positioning component is installed on the surface of the probe card mechanism.

[0009] Preferably, a torsion spring is sleeved on the surface of the movable rod, one end of the torsion spring is connected to the cross plate, and the other end of the torsion spring is connected to the probe card mechanism.

[0010] Preferably, the temperature control plate and the filter plate form a "cross structure".

[0011] Preferably, both the temperature control plate and the filter plate are adapted to the hot air channel.

[0012] Preferably, the positioning component includes a positioning disk, and the two ends of the movable rod pass through the two star plates respectively and extend to the outside of the star plates, and are connected to the positioning disk disposed on the outside of the star plates. A positioning rod is slidably connected in a through hole opened on the surface of the positioning disk, and one end of the positioning rod passes through the positioning disk and is inserted into an insertion hole opened on the surface of the star plates.

[0013] Preferably, a return spring is sleeved on the surface of the positioning rod, one end of the return spring is connected to the positioning rod, and the other end of the return spring is connected to the positioning disk.

[0014] Preferably, the surface of the cross-shaped plate is provided with insertion holes that are adapted to two different positions of the positioning rod.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0016] 1. This utility model incorporates a temperature control mechanism. When the preheating temperature of the probe card mechanism is high, the operator rotates the movable rod. The movable rod rotates inside the star-shaped plate, causing the torsion spring to deform. The torsion spring resets the position of the movable rod. The movable rod then drives the temperature control disc to rotate within the hot air channel. The temperature control disc causes the filter disc to change from a horizontal to a vertical position, thus sealing the hot air channel and blocking the hot air from continuing to heat the probe card mechanism. This achieves temperature control of the probe card mechanism.

[0017] 2. This utility model incorporates a positioning component. When the movable rod is rotated, the positioning rod inside the positioning plate is first pulled. At this time, the positioning rod disengages from the insertion hole on the surface of the star-shaped plate. During the pulling of the positioning rod, the return spring is deformed, and the return spring can reset the position of the positioning rod, thus facilitating operation. Then, when the position of the temperature control plate is adjusted by rotating the movable rod, the operator releases the positioning rod. The return spring is no longer under tension, and the positioning rod is then inserted into another set of insertion holes on the surface of the star-shaped plate, thereby achieving the positioning of the temperature control plate. Attached Figure Description

[0018] Figure 1 is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 is an enlarged structural schematic diagram of this utility model;

[0020] Figure 3 is a schematic cross-sectional view of the probe card mechanism of this utility model;

[0021] Figure 4 is a schematic diagram of the structure of the temperature control plate and filter plate of this utility model.

[0022] In the diagram: 1. Probe card mechanism; 12. Heating mechanism; 2. Temperature control mechanism; 21. Hot air channel; 22. Temperature control plate; 23. Movable rod; 24. Filter plate; 25. Cross plate; 26. Torsion spring; 3. Positioning assembly; 31. Positioning plate; 32. Positioning rod; 33. Return spring. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] As shown in Figures 1 to 4, this utility model provides a temperature control mechanism for a high-temperature nitrogen blowing test probe card, including a probe card mechanism 1, a heating mechanism 12 connected to the surface of the probe card mechanism 1, and a temperature control mechanism 2 installed on the surface of the probe card mechanism 1.

[0025] The temperature control mechanism 2 includes a hot air channel 21. The hot air channel 21 is opened on the surface of the probe card mechanism 1. The hot air channel 21 is connected to the heating mechanism 12. The temperature control plate 22 is rotatably connected inside the hot air channel 21. A movable rod 23 is installed on the surface of the temperature control plate 22. Both ends of the movable rod 23 pass through the temperature control plate 22 and the probe card mechanism 1, and extend to the outside of the probe card mechanism 1. It is rotatably connected to the inside of the star-shaped plate 25 installed on the surface of the probe card mechanism 1. Filter plates 24 are symmetrically installed on the surface of the temperature control plate 22. Positioning components 3 are installed on the surface of the probe card mechanism 1.

[0026] Specifically, as shown in Figure 1, a torsion spring 26 is fitted on the surface of the movable rod 23. One end of the torsion spring 26 is connected to the cross plate 25, and the other end of the torsion spring 26 is connected to the probe card mechanism 1. The temperature control plate 22 and the filter plate 24 form a "cross structure". Both the temperature control plate 22 and the filter plate 24 are adapted to the hot air channel 21.

[0027] In this implementation scheme: when the probe card mechanism 1 is preheated, the heating mechanism 12 is first started, so that the hot air generated by the heating mechanism 12 enters the probe card mechanism 1 through the hot air channel 21, thereby preheating the probe card mechanism 1.

[0028] After preheating is complete, when the preheated temperature of the probe card mechanism 1 is high, the operator rotates the movable rod 23. The movable rod 23 rotates inside the star-shaped plate 25. When the movable rod 23 rotates, it causes the torsion spring 26 to deform. The torsion spring 26 can reset the rotation position of the movable rod 23. At this time, the movable rod 23 drives the temperature control plate 22 to rotate in the hot air channel 21. The temperature control plate 22 drives the filter plate 24 to change from a horizontal state to a vertical state. The temperature control plate 22 closes the hot air channel 21, thereby blocking the hot air and preventing the hot air from continuing to heat the probe card mechanism 1, thus achieving temperature control of the probe card mechanism 1.

[0029] Please refer to Figures 1, 2 and 4 for Embodiment 2. The difference between this embodiment and Embodiment 1 is that the positioning component 3 includes a positioning disk 31. The two ends of the movable rod 23 pass through the two star plates 25 respectively and extend to the outside of the star plates 25, and are connected to the positioning disk 31 located outside the star plates 25. A positioning rod 32 is slidably connected in the through hole opened on the surface of the positioning disk 31. One end of the positioning rod 32 passes through the positioning disk 31 and is inserted into the insertion hole opened on the surface of the star plates 25.

[0030] Specifically, as shown in Figures 1-4, a return spring 33 is sleeved on the surface of the positioning rod 32. One end of the return spring 33 is connected to the positioning rod 32, and the other end of the return spring 33 is connected to the positioning plate 31. The surface of the star plate 25 is provided with insertion holes that are adapted to two different positions of the positioning rod 32.

[0031] In this implementation scheme: When the movable rod 23 is rotated, the positioning rod 32 inside the positioning plate 31 is pulled first. At this time, the positioning rod 32 disengages from the insertion hole on the surface of the cross plate 25. During the process of pulling the positioning rod 32, the return spring 33 is deformed. The return spring 33 can reset the position of the positioning rod 32, thereby facilitating the operator's use. Then, when the position of the temperature control plate 22 is adjusted after rotating the movable rod 23, the operator releases the positioning rod 32. The return spring 33 is no longer under tension, and the positioning rod 32 is then inserted into another set of insertion holes on the surface of the cross plate 25, thereby realizing the positioning of the temperature control plate 22.

[0032] It should be noted that the probe card mechanism 1 in this device is a mature existing technology, and its principle is the same as that of the published patent CN212674986U, "An Ultra-High Probe Height Needle Card". For specific operation, please refer to the published patent.

[0033] It should be noted that the heating mechanism 12 in this device is a mature existing technology, which uses common electric wires to generate heat and then heats the device with hot air.

[0034] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0035] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A temperature control mechanism for a high-temperature nitrogen blowing test probe card, comprising a probe card mechanism (1), characterized in that: The probe card mechanism (1) is connected to a heating mechanism (12) on its surface, and a temperature control mechanism (2) is installed on the surface of the probe card mechanism (1). The temperature control mechanism (2) includes a hot air channel (21). The hot air channel (21) is opened on the surface of the probe card mechanism (1). The hot air channel (21) is connected to the heating mechanism (12). A temperature control plate (22) is rotatably connected inside the hot air channel (21). A movable rod (23) is installed on the surface of the temperature control plate (22). Both ends of the movable rod (23) pass through the temperature control plate (22) and the probe card mechanism (1), and extend to the outside of the probe card mechanism (1). It is rotatably connected to the inside of the star-shaped plate (25) installed on the surface of the probe card mechanism (1). A filter plate (24) is symmetrically installed on the surface of the temperature control plate (22). A positioning component (3) is installed on the surface of the probe card mechanism (1).

2. The temperature control mechanism for a high-temperature nitrogen blowing test probe card according to claim 1, characterized in that: The surface of the movable rod (23) is fitted with a torsion spring (26), one end of which is connected to the cross plate (25), and the other end of which is connected to the probe card mechanism (1).

3. The temperature control mechanism for a high-temperature nitrogen blowing test probe card according to claim 2, characterized in that: The temperature control plate (22) and the filter plate (24) form a "cross structure".

4. The temperature control mechanism for a high-temperature nitrogen blowing test probe card according to claim 3, characterized in that: The temperature control plate (22) and the filter plate (24) are both adapted to the hot air channel (21).

5. The temperature control mechanism for a high-temperature nitrogen blowing test probe card according to claim 1, characterized in that: The positioning component (3) includes a positioning disk (31). The two ends of the movable rod (23) pass through the two cross plates (25) respectively and extend to the outside of the cross plates (25), and are connected to the positioning disk (31) located outside the cross plates (25). A positioning rod (32) is slidably connected in the through hole opened on the surface of the positioning disk (31). One end of the positioning rod (32) passes through the positioning disk (31) and is inserted into the insertion hole opened on the surface of the cross plates (25).

6. The temperature control mechanism for a high-temperature nitrogen blowing test probe card according to claim 5, characterized in that: A return spring (33) is sleeved on the surface of the positioning rod (32). One end of the return spring (33) is connected to the positioning rod (32), and the other end of the return spring (33) is connected to the positioning disk (31).

7. The temperature control mechanism for a high-temperature nitrogen blowing test probe card according to claim 6, characterized in that: The surface of the cross plate (25) is provided with two insertion holes that are adapted to the two different positions of the positioning rod (32).

Images