Water cooling pipeline structure of polishing disk

Abstract

The polishing disc water cooling pipeline structure comprises a polishing disc, a cooling flow channel is formed in the polishing disc, a water inlet hole and a water outlet hole are formed in the polishing disc, the water inlet hole and the water outlet hole communicate with the two ends of the cooling flow channel correspondingly, a connecting base is installed on the polishing disc, and the connecting base comprises a fixed base and a rotating base; the fixed seat is installed on the polishing equipment, the rotating seat is rotationally arranged on the fixed seat, the polishing disc is installed on the rotating seat, a water inlet and a water outlet are formed in the end, away from the rotating seat, of the fixed seat, a water inlet runner and a water outlet runner are formed in the fixed seat, and a water inlet channel and a water outlet channel are formed in the rotating seat. The height positions of the water inlet channel and the water outlet channel on the rotating seat are different, the water inlet is communicated with the water inlet runner, the water inlet runner is communicated with the water inlet channel, the water inlet channel is communicated with the water inlet hole through a pipeline, the water outlet is communicated with the water outlet runner, the water outlet runner is communicated with the water outlet channel, and the water outlet channel is communicated with the water outlet hole through a pipeline. The water circulation device has the effect of increasing the water circulation speed.

Description

Technical Field

[0001] This application relates to the field of polishing disc water cooling pipeline structure in particular. Background Technology

[0002] In the field of semiconductor materials, wafer production typically requires polishing. The polishing mechanism involves a chemical reaction that forms a complex with the material to be polished, followed by mechanical removal of the complex. This chemical reaction releases heat, causing a temperature rise, which is a key factor affecting the reaction rate. To lower the temperature of the polishing pad, cold water is usually circulated through it for cooling.

[0003] Because the polishing disc needs to rotate during the polishing process, the existing cold water pipes are usually located at the center of the polishing disc. Cold water is introduced into the polishing disc through the cold water pipes to cool it. Then, water outlets are opened on the polishing disc to discharge the water that has been heated after superheating on the polishing disc. The water that has been heated after superheating is usually collected in a water storage tank, filtered, and sent back to the condensation equipment for recycling. The existing coolant circulation structure has a relatively complex circulation process and the water circulation speed is relatively slow. Utility Model Content

[0004] To improve the speed of water circulation, this application provides a water-cooling pipeline structure for a polishing disc.

[0005] The polishing disc water-cooled pipeline structure provided in this application adopts the following technical solution:

[0006] A water-cooled piping structure for a polishing disc includes a polishing disc with a cooling channel inside. The polishing disc has an inlet and an outlet, which are respectively connected to both ends of the cooling channel. A connecting seat is mounted on the polishing disc, comprising a fixed seat and a rotating seat. The fixed seat is mounted on a polishing device, and the rotating seat is rotatably mounted on the fixed seat. The polishing disc is mounted on the rotating seat. An inlet and an outlet are located at the end of the fixed seat away from the rotating seat. An inlet channel and an outlet channel are located inside the fixed seat. An inlet passage and an outlet passage are located on the rotating seat. The inlet and outlet passages are at different heights on the rotating seat. The inlet is connected to the inlet channel, and the inlet channel is connected to the inlet passage. The inlet passage is connected to the inlet hole via a pipe. The outlet is connected to the outlet channel, and the outlet channel is connected to the outlet passage. The outlet passage is connected to the outlet hole via a pipe.

[0007] By adopting the above technical solution, a connecting seat with a rotating function is set in the center of the polishing disc, and two flow channels are opened in the connecting seat, realizing the inlet and outlet of coolant. This eliminates the need for the coolant to be discharged, filtered, and recycled after heat exchange, thereby increasing the speed of water circulation.

[0008] Optionally, an annular water trough is provided at the connection between the water inlet channel and the water outlet channel, and the annular water trough is provided on the fixed base.

[0009] By adopting the above technical solution, the opening of the annular water tank enables the rotating seat to connect the water outlet channel and the water inlet channel when rotating.

[0010] Optionally, the rotating seat has a placement groove, one end of the fixed seat is inserted into the placement groove, and a bearing is sleeved on the other end of the fixed seat inserted into the placement groove. An end cover is detachably installed on the rotating seat, and the end cover is pressed onto the bearing.

[0011] By adopting the above technical solution, a bearing can be installed between the rotating seat and the fixed seat by opening a placement groove, thereby making the rotation of the rotating seat smoother, and the end cover facilitates the installation and replacement of the bearing.

[0012] Optionally, the fixing base includes a housing, a spindle, and a cover. The housing is rotatably mounted on a rotating seat, the spindle is embedded in the housing, the cover is detachably mounted on the housing, and the cover is pressed against the spindle. The inlet and outlet water channels both penetrate the housing, the spindle, and the cover, and an annular water groove is formed on the cover.

[0013] By adopting the above technical solution and using a detachable and replaceable mandrel, different inlet and outlet water channels can be selected under different circumstances, thereby expanding the applicability.

[0014] Optionally, a sealing ring is provided at the connection between the outer shell and the spindle, and at the connection between the spindle and the cover, and the sealing ring is sleeved around the water inlet channel and the water outlet channel.

[0015] By adopting the above technical solution, the sealing ring can reduce the probability of water leakage at the connection between the outer shell and the spindle, as well as at the connection between the spindle and the cover.

[0016] Optionally, the cover is provided with several sealing gaskets on both sides of the annular water trough.

[0017] By adopting the above technical solution, the sealing gasket can reduce the probability of water leakage at the connection between the cover and the rotating seat.

[0018] Optionally, a hanging plate is provided at the end of the fixed seat away from the rotating seat.

[0019] By adopting the above technical solution, the hanging plate is used to connect with the fixed base, thereby facilitating the installation and fixation of the fixed base on the equipment.

[0020] In summary, this application includes at least one of the following beneficial technical effects:

[0021] By setting a rotating connecting seat in the center of the polishing disc and opening two flow channels in the connecting seat, the inlet and outlet of the coolant are realized, so that the coolant does not need to be discharged, filtered and recycled after heat exchange, thereby improving the speed of water circulation.

[0022] The annular water tank allows the rotating seat to connect the water outlet channel and the water inlet channel when it rotates.

[0023] The detachable and replaceable spindle allows for the selection of different inlet and outlet water channels under different conditions, thus expanding the applicability.

[0024] The sealing ring reduces the probability of water leakage at the connection between the outer shell and the spindle, as well as at the connection between the spindle and the cover. The sealing gasket reduces the probability of water leakage at the connection between the cover and the rotating seat. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application.

[0026] Figure 2 This is a schematic diagram of the structure of the connector in an embodiment of this application.

[0027] Explanation of reference numerals in the attached drawings: 1. Polishing disc; 2. Cooling channel; 3. Water inlet; 4. Water outlet; 5. Connecting seat; 51. Fixing seat; 511. Outer shell; 512. Mandrel; 513. Cover; 52. Rotating seat; 6. Water inlet; 7. Water outlet; 8. Water inlet channel; 9. Water outlet channel; 10. Water inlet passage; 11. Water outlet passage; 12. Annular water tank; 13. Placement tank; 14. Bearing; 15. End cap; 16. Sealing ring; 17. Sealing gasket; 18. Hanging plate. Detailed Implementation

[0028] The following is in conjunction with the appendix Figure 1-2 This application will be described in further detail.

[0029] First, it should be noted that in the description of this application, the use of directional terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" indicates the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used solely for descriptive purposes and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the use of numerical quantifiers such as "first," "second," and "third" is for descriptive purposes only and should not be construed as indicating or implying relative importance. Additionally, in this application, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, interference fits, transition fits, or integral connections; they can refer to direct connections or indirect connections through an intermediate medium. Therefore, those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0030] This application discloses a water-cooled pipeline structure for a polishing disc, referring to... Figure 1 and Figure 2 The equipment includes a polishing disc 1, a cooling channel 2 inside the polishing disc 1, a water inlet 3 and a water outlet 4 on the polishing disc 1, which are respectively connected to the two ends of the cooling channel 2. A connecting seat 5 is installed on the polishing disc 1. The connecting seat 5 includes a fixed seat 51 installed on the polishing equipment and a rotating seat 52 rotatably mounted on the fixed seat 51. The polishing disc 1 is installed on the rotating seat 52. A water inlet 6 and a water outlet 7 are opened at the end of the fixed seat 51 away from the rotating seat 52. A water inlet channel 8 and a water outlet channel 9 are opened inside the fixed seat 51. A water inlet channel 10 and a water outlet channel 11 are opened on the rotating seat 52. The water inlet channel 10 and the water outlet channel 11 are at different heights on the rotating seat 52. The water inlet 6 is connected to the water inlet channel 8, and the water inlet channel 8 is connected to the water inlet channel 10. The water inlet channel 10 is connected to the water inlet 3 and the water outlet 7 through a pipe. The water outlet channel 9 is connected to the water outlet channel 11, and the water outlet channel 11 is connected to the water outlet hole 4 through a pipe. The coolant enters the water inlet channel 8 from the water inlet 6 and flows into the water inlet channel 10 through the water inlet channel 8. Then, the coolant is sent to the cooling channel 2 through the pipe connected to the water inlet channel 10 and the water inlet hole 3. The coolant exchanges heat with the polishing disc 1 in the cooling channel 2, thereby reducing the temperature of the polishing disc 1. After the heat exchange is completed, the heated coolant is discharged through the water outlet hole 4 and flows through the pipe to the water outlet channel 11 and into the water outlet channel 9. It is then discharged through the water outlet 7 and flows back to the condensation equipment for condensation. After condensation, it is sent back to the polishing disc 1, thereby realizing water circulation. After the coolant heats up, it does not need to be discharged, filtered and recycled, thereby increasing the water circulation speed and reducing the probability of impurities in the coolant.

[0031] Reference Figure 1 and Figure 2 An annular water trough 12 is provided at the connection between the water inlet channel 8 and the water inlet channel 10, and at the connection between the water outlet channel 9 and the water outlet channel 11. The annular water trough 12 is provided on the fixed base 51. The setting of the annular water trough 12 can ensure that the water inlet channel 8 and the water inlet channel 10, as well as the water outlet channel 9 and the water outlet channel 11 are always in a connected state when the rotating base 52 and the fixed base 51 rotate relative to each other, thereby realizing the continuity of water inlet and outlet and reducing the impact of rotation on water inlet and outlet.

[0032] Reference Figure 1 and Figure 2 The rotating seat 52 has a placement groove 13. One end of the fixed seat 51 is inserted into the placement groove 13. A bearing 14 is fitted onto the other end of the fixed seat 51 inserted into the placement groove 13. An end cover 15 is detachably installed on the rotating seat 52. The end cover 15 is pressed onto the bearing 14. The placement groove 13 allows the bearing 14 to be installed between the rotating seat 52 and the fixed seat 51, making the rotation of the rotating seat 52 smoother. The end cover 15 facilitates the installation and replacement of the bearing 14. A hanging plate 18 is provided at the end of the fixed seat 51 away from the rotating seat 52. The hanging plate 18 is used to connect with the fixed seat 51, thereby facilitating the installation and fixation of the fixed seat 51 on the equipment.

[0033] Reference Figure 1 and Figure 2 The fixed base 51 includes a housing 511 rotatably mounted on the rotating base 52 relative to the rotating base 52, a spindle 512 embedded in the housing 511, and a cover 513 detachably mounted on the housing 511. The cover 513 presses against the spindle 512 and covers the spindle 512. The inlet channel 8 and the outlet channel 9 both penetrate the housing 511, the spindle 512, and the cover 513. An annular water groove 12 is formed on the cover 513. Through the detachable and replaceable spindle 512, different paths of the inlet channel 8 and the outlet channel 9 can be selected under different conditions, thus improving the applicability. The connection between the housing 511 and the spindle 512, and the connection between the spindle 512 and the cover... A sealing ring 16 is provided at each connection point of 513. The sealing ring 16 is sleeved around the water inlet channel 8 and the water outlet channel 9. The sealing ring 16 is made of elastic rubber. The sealing ring 16 can reduce the probability of water leakage at the connection between the outer shell 511 and the spindle 512 and the connection between the spindle 512 and the cover 513. Several sealing gaskets 17 are embedded on both sides of the annular water groove 12 of the cover 513. The sealing gaskets 17 are made of rubber with sealing effect and low friction. The sealing gaskets 17 can reduce the probability of water leakage at the connection between the cover 513 and the rotating seat 52. The low friction can reduce the influence of the sealing gaskets 17 on the mutual rotation of the fixed seat 51 and the rotating seat 52.

[0034] The implementation principle of this application embodiment is as follows: the fixed seat 51 is installed on the polishing equipment by the hanging plate 18, and connecting pipes are installed on the water inlet 6 and the water outlet 7. When the rotating seat 52 rotates with the polishing disc 1, the pipes connected to the fixed seat 51 will not be affected. There is no need for pipe connection between the fixed seat 51 and the rotating seat 52, and the pipes will not be twisted due to the mutual rotation between the rotating seat 52 and the fixed seat 51, thereby facilitating the circulation of coolant in the rotating environment.

[0035] It should be noted that the above embodiments are only used to illustrate this application and are not intended to limit the technical solutions described in this application. Although this specification has described this application in detail with reference to the above embodiments, those skilled in the art should understand that they can still make modifications or equivalent substitutions to this application. All technical solutions and improvements that do not depart from the spirit and scope of this application should be covered within the scope of the claims of this application.

Claims

1. A polishing disc water-cooled pipeline structure, comprising a polishing disc (1), wherein a cooling channel (2) is provided inside the polishing disc (1), and an inlet hole (3) and an outlet hole (4) are provided on the polishing disc (1), wherein the inlet hole (3) and the outlet hole (4) are respectively connected to both ends of the cooling channel (2), characterized in that: A connecting seat (5) is installed on the polishing disc (1). The connecting seat (5) includes a fixed seat (51) and a rotating seat (52). The fixed seat (51) is installed on the polishing equipment. The rotating seat (52) is rotatably mounted on the fixed seat (51). The polishing disc (1) is installed on the rotating seat (52). An inlet (6) and an outlet (7) are provided at the end of the fixed seat (51) away from the rotating seat (52). An inlet channel (8) and an outlet channel (9) are provided inside the fixed seat (51). The rotating seat (52) 52) has an inlet channel (10) and an outlet channel (11). The inlet channel (10) and the outlet channel (11) are at different heights on the rotating seat (52). The inlet (6) is connected to the inlet channel (8), the inlet channel (8) is connected to the inlet channel (10), the inlet channel (10) is connected to the inlet hole (3) through a pipe, the outlet (7) is connected to the outlet channel (9), the outlet channel (9) is connected to the outlet channel (11), and the outlet channel (11) is connected to the outlet hole (4) through a pipe.

2. The polishing disc water-cooling pipeline structure according to claim 1, characterized in that: An annular water trough (12) is provided at the connection between the water inlet channel (8) and the water inlet channel (10) and at the connection between the water outlet channel (9) and the water outlet channel (11). The annular water trough (12) is provided on the fixed base (51).

3. The polishing disc water-cooling pipeline structure according to claim 2, characterized in that: The rotating seat (52) has a placement groove (13) and one end of the fixed seat (51) is inserted into the placement groove (13). The fixed seat (51) is inserted into the placement groove (13) and one end of the fixed seat (51) is fitted with a bearing (14). An end cap (15) is detachably installed on the rotating seat (52) and the end cap (15) is pressed onto the bearing (14).

4. The polishing disc water-cooling pipeline structure according to claim 3, characterized in that: The fixed base (51) includes a shell (511), a spindle (512) and a cover (513). The shell (511) is rotatably mounted on a rotating base (52). The spindle (512) is embedded in the shell (511). The cover (513) is detachably mounted on the shell (511) and pressed against the spindle (512). The water inlet channel (8) and the water outlet channel (9) both penetrate the shell (511), the spindle (512) and the cover (513). An annular water tank (12) is formed on the cover (513).

5. The polishing disc water-cooling pipeline structure according to claim 4, characterized in that: A sealing ring (16) is provided at the connection between the outer shell (511) and the spindle (512) and at the connection between the spindle (512) and the cover (513). The sealing ring (16) is sleeved around the water inlet channel (8) and the water outlet channel (9).

6. The polishing disc water-cooling pipeline structure according to claim 5, characterized in that: The cover (513) has several sealing gaskets (17) embedded on both sides of the annular water tank (12).

7. The polishing disc water-cooling pipeline structure according to claim 1, characterized in that: A hanging plate (18) is provided at the end of the fixed seat (51) away from the rotating seat (52).

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