Material taking manipulator, multi-axis mechanical arm and machining equipment

By combining the positioning structure and fixing unit of the tray assembly, the problems of high flatness requirements for crystal ingots and insufficient suction caused by vacuum leakage in suction-type robotic arms are solved, realizing stable handling of crystal ingots and improving handling efficiency.

CN224196824UActive Publication Date: 2026-05-05GUANGDONG HANS SEMICONDUCTOR EQUIPMENT TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
GUANGDONG HANS SEMICONDUCTOR EQUIPMENT TECHNOLOGY CO LTD
Filing Date
2025-03-10
Publication Date
2026-05-05

AI Technical Summary

Technical Problem

Existing suction cup robotic arms have high requirements for the flatness of crystal ingots and there is a risk that insufficient suction due to vacuum leakage may cause the crystal ingots to fall and be damaged.

Method used

The positioning structure and fixing unit of the tray assembly are combined. The positioning structure initially constrains the edge of the crystal ingot, while the fixing unit performs vacuum adsorption on the non-edge parts, so as to achieve adsorption of the non-edge parts of the crystal ingot while constraining the position of the edge.

Benefits of technology

It effectively improves the problem of insufficient suction caused by vacuum leakage, enhances the stability and efficiency of the ingot handling process, and reduces the risk of ingot drop damage.

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Abstract

The utility model relates to a material taking mechanical arm, a multi-axis mechanical arm and machining equipment, the material taking mechanical arm is used for restraining the position of a crystal ingot in the workpiece (such as the crystal ingot) carrying process, and the material taking mechanical arm specifically comprises a mounting base; the tray assembly is arranged on the mounting base and comprises a tray body and a fixing unit, the tray body is provided with a positioning structure, and the fixing unit is arranged on the tray body. The material taking manipulator can effectively limit the movement range of the crystal ingot, and compared with an adsorption type limiting mode only depending on a suction cup, the risk that the crystal ingot falls off and is damaged due to insufficient suction force caused by vacuum leakage is effectively improved, so that the stability requirement in the crystal ingot carrying process is met, and then the efficiency in the crystal ingot carrying process is improved.
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Description

Technical Field

[0001] This application relates to the field of clamps, and in particular to a material handling robot, a multi-axis robotic arm, and processing equipment. Background Technology

[0002] With the continuous development of fixture technology and the increasing variety of fixture application scenarios, the requirements for the use of fixtures are becoming more and more stringent. In the process of ingot handling, in order to reduce damage to the ingot during handling, suction cups are often used to hold the ingot in place.

[0003] The suction cup-type robotic arms in related technologies have high requirements for flatness and there is a risk that vacuum leakage will lead to insufficient suction and the crystal ingot falling and being damaged. Utility Model Content

[0004] Therefore, it is necessary to provide a material handling robot, a multi-axis robotic arm, and processing equipment to address the aforementioned technical problems.

[0005] A material handling robot includes:

[0006] Mounting base;

[0007] A tray assembly is disposed on the mounting base. The tray assembly includes a tray body and a fixing unit, wherein the fixing unit is disposed on the tray body.

[0008] In one embodiment, the pallet body is provided with a positioning structure, and the fixing unit is disposed on the bottom wall of the positioning structure.

[0009] In one embodiment, there are multiple positioning structures that are spaced apart on the pallet body to position workpieces of different sizes.

[0010] In one embodiment, the positioning structure includes a first positioning structure for positioning the smallest workpiece among the workpieces of different sizes, and the fixing unit is disposed on the bottom wall of the first positioning structure, and the fixing unit is deformable in the thickness direction of the pallet body.

[0011] In one embodiment, the tray body is fork-shaped.

[0012] In one embodiment, the pallet body includes a first receiving area and a second receiving area, the first receiving area and the second receiving area are disposed on both sides of the pallet body, and both the first receiving area and the second receiving area are provided with positioning structures;

[0013] The fixing unit includes a first adsorption element and a second adsorption element. The first adsorption element is disposed in the first receiving area, and the second adsorption element is disposed in the second receiving area. When there are multiple first adsorption elements and multiple second adsorption elements, the multiple first adsorption elements are distributed at intervals in the first receiving area, and the multiple second adsorption elements are distributed at intervals in the second receiving area.

[0014] In one embodiment, the pallet body further includes a third receiving area, which is located in the middle of the pallet body and is provided with the positioning structure.

[0015] The fixing unit further includes a third adsorption element, which is disposed in the third receiving area. When there are multiple third adsorption elements, the multiple third adsorption elements are distributed at intervals in the third receiving area.

[0016] In one embodiment, the picking robot further includes a vision sensing component disposed on the side of the mounting base away from the tray assembly.

[0017] A multi-axis robotic arm, comprising:

[0018] Such as the material handling robot mentioned above.

[0019] A processing device, comprising:

[0020] Such as the material handling robot mentioned above.

[0021] The technical effects of the embodiments provided in this application are as follows:

[0022] In the aforementioned material handling robot, during the handling of workpieces (such as crystal ingots), the pallet assembly mounted on the mounting base initially constrains the position of the crystal ingot through positioning structures distributed on the pallet body (e.g., keeping the edge of the crystal ingot within the positioning structure for movement). Then, through the adsorption effect of the fixing unit within the pallet assembly located on the pallet body, the position of the crystal ingot is further constrained (e.g., vacuum adsorption of the non-edge parts of the crystal ingot). This allows for simultaneous adsorption of the non-edge parts of the crystal ingot and positional constraint of the edge, effectively limiting the range of motion of the crystal ingot. Compared to a limiting method relying solely on suction cup adsorption, this effectively mitigates the risk of insufficient suction due to vacuum leakage, leading to crystal ingot drop and damage. This meets the stability requirements of the crystal ingot handling process and improves its efficiency. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the material handling robot in one embodiment;

[0025] Figure 2 This is a schematic diagram of the material handling robot in one embodiment;

[0026] Figure 3 This is a schematic diagram of the specific structure of the tray body 210 in one embodiment;

[0027] Figure 4 This is a schematic diagram of the specific structure of the fixing unit 220 in one embodiment;

[0028] Figure 5 This is a schematic diagram of the material handling robot in one embodiment;

[0029] Figure 6 This is a schematic diagram of the structure of the tray assembly 20 in one embodiment. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0031] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0032] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0034] Figure 1 This is a schematic diagram of the material handling robot in one embodiment.

[0035] In this embodiment, the robotic arm is used to constrain the position of the crystal ingot during the handling of the workpiece (such as a crystal ingot), such as... Figure 1 As shown, the material handling robot includes a mounting base 10, a pallet assembly 20, and a vision sensing component 30. The pallet assembly 20 is disposed on the mounting base 10, and the vision sensing component 30 is disposed on the side of the mounting base 10 away from the pallet assembly 20.

[0036] The tray assembly 20 may be a limiting functional component disposed on the side of the mounting base 10 near the crystal ingot to be transported, capable of adsorbing the non-edges of the crystal ingot and constraining the range of movement of the edge of the crystal ingot. The vision sensing component 30 may be a functional component disposed on the side of the mounting base 10 away from the crystal ingot to be transported, capable of detecting the size and appearance of the crystal ingot.

[0037] like Figure 2 As shown, the pallet assembly 20 includes a pallet body 210 and a fixing unit 220. The pallet body 210 is provided with a positioning structure 2100, and the fixing unit 220 is disposed on the pallet body 210.

[0038] The tray body 210 can be a functional structure located below the crystal ingot to be transported and connected to the mounting base 10 on the side closest to the crystal ingot, providing support and bearing capacity for the crystal ingot. The positioning structure 2100 can be a functional structure surrounding the tray body 210, capable of positionally constraining the edge portion of the crystal ingot. The fixing unit 220 can be a functional structure located at a non-edge position of the tray body 210, capable of adsorbing the non-edge portion of the crystal ingot to positionally constrain it. Optionally, the fixing unit 220 can be an adsorption assembly located on the bottom wall of the positioning structure 2100. The positioning structure 2100 can be a contoured positioning groove or a limiting protrusion, etc.

[0039] During the handling of workpieces (such as crystal ingots), the tray assembly 20 set on the mounting base 10 initially constrains the position of the crystal ingot through the positioning structure 2100 distributed on the tray body 210 (such as keeping the edge part of the crystal ingot moving within the positioning structure 2100), and further constrains the position of the crystal ingot through the adsorption effect of the fixing unit 220 set in the tray body 210 (such as vacuum adsorption of the non-edge part of the crystal ingot). Thus, it is possible to adsorb the non-edge part of the crystal ingot while constraining the position of the edge of the crystal ingot. In addition, by setting the fixing unit 220 on the bottom wall of the positioning structure 2100, the bottom surface of the crystal ingot can be adsorbed by the fixing unit 220 located in the positioning structure 2100 and fully contact the positioning structure 2100, resulting in a better positioning effect.

[0040] When there are multiple positioning structures 2100, they are spaced apart on the pallet body 210 to position workpieces of different sizes. Each positioning structure 2100 includes a first positioning structure for positioning the smallest workpiece among the different sizes. A fixing unit 220 is disposed on the bottom wall of the first positioning structure and can deform in the thickness direction of the pallet body 210. Optionally, the first positioning structure may be the one closest to the geometric center of the pallet body 2100 among the multiple positioning structures 2100 and with the smallest groove extension range, capable of positioning the smallest workpiece among multiple workpieces of different sizes.

[0041] During the handling of workpieces (such as crystal ingots), the use of multiple positioning structures 2100 of different sizes allows for initial constraint of multiple workpieces (such as crystal ingots) of different sizes (e.g., keeping the edge of the crystal ingot within the positioning structure 2100 for movement). Furthermore, the use of a fixing unit 220, which is located on the bottom wall of the first positioning structure and can deform in the thickness direction of the tray body 210, allows for further constraint of the positions of multiple workpieces (such as crystal ingots) of different sizes (e.g., vacuum adsorption of the non-edge parts of the crystal ingot). This enables the adsorption of the non-edge parts of multiple workpieces (such as crystal ingots) of different sizes while simultaneously constraining the position of the crystal ingot's edge, effectively improving the applicability of the picking robot and ensuring the high efficiency of the picking process.

[0042] like Figure 3 As shown, the pallet body 210 includes a first receiving area 2110, a second receiving area 2120 and a third receiving area 2130. The first receiving area 2110 and the second receiving area 2120 are located on both sides of the pallet body 210. The first receiving area 2110, the second receiving area 2120 and the third receiving area 2130 are all provided with positioning structures 2100. The third receiving area 2130 is located in the middle of the pallet body 210.

[0043] The pallet body 210 may be fork-shaped. The first receiving area 2110 may be located on one side of the pallet body 210, abutting against one side of the ingot to be transported and providing support for that side. The second receiving area 2120 may be located on the opposite side of the pallet body 210, abutting against the opposite side of the ingot to be transported and providing support for that opposite side. The third receiving area 2130 may be located in the middle of the pallet body 210, abutting against the middle of the ingot to be transported and providing support for that middle part.

[0044] By setting the first receiving area 2110 and the second receiving area 2120 on both sides of the pallet body 210, the pallet body 210 can be designed to be lightweight while ensuring strong support for the ingots to be transported. In conjunction with the third receiving area 2130 set in the middle of the pallet body 210, the support for the ingots to be transported can be further enhanced, ensuring the pallet body 210's adaptability to ingots with larger weights. In addition, the positioning structure 2100 set on the first receiving area 2110, the second receiving area 2120 and the third receiving area 2130 can ensure that the pallet body 210 can adapt to ingots of different sizes and weights while effectively constraining the position of the ingots. This effectively reduces the risk of ingots falling and being damaged due to insufficient suction caused by vacuum leakage, thereby meeting the stability requirements of the ingot transport process and improving the efficiency of the ingot transport process.

[0045] In some other embodiments, the tray body 210 is crescent-shaped, hook-shaped, or plate-shaped.

[0046] like Figures 4 to 6 As shown, the fixing unit 220 includes a first adsorption element 2210, a second adsorption element 2220, and a third adsorption element 2230. The first adsorption element 2210 is disposed in the first receiving area 2110, and the second adsorption element 2220 is disposed in the second receiving area 2120. When there are multiple first adsorption elements 2210 and multiple second adsorption elements 2220, the multiple first adsorption elements 2210 are spaced apart in the first receiving area 2110, and the multiple second adsorption elements 2220 are spaced apart in the second receiving area 2120. The third adsorption element 2230 is disposed in the third receiving area 2130. When there are multiple third adsorption elements 2230, the multiple third adsorption elements 2230 are spaced apart in the third receiving area 2130. Optionally, the first adsorption element 2210, the second adsorption element 2220, and the third adsorption element 2230 can all be suction cups or suction nozzles, etc.

[0047] By setting the first adsorption element 2210, the second adsorption element 2220, and the third adsorption element 2230 in the first receiving area 2110, the second receiving area 2120, and the third receiving area 2130, it is possible to effectively constrain the edge portion of the crystal ingot to be transported while also ensuring the adsorption of the non-edge portion of the crystal ingot, thereby effectively limiting the range of movement of the crystal ingot. In addition, by increasing the number of the first adsorption element 2210, the second adsorption element 2220, and the third adsorption element 2230 and distributing them at intervals, the problem of insufficient constraint on the non-edge portion of the crystal ingot due to insufficient suction force of individual suction cups can be improved, further meeting the stability requirements of the crystal ingot transport process, and thus improving the efficiency of the crystal ingot transport process.

[0048] It should be noted that the visual sensing component 30 can be a CCD (Charge Coupled Device) camera. By using the visual sensing component 30, on the one hand, the size and specifications of the ingot can be confirmed by taking a picture before handling, guiding the picking robot to move along the path set for that specification; on the other hand, the appearance of the ingot to be handled can be inspected. When a defective product is detected, an alarm signal can be sent to the picking robot, reducing the risk of errors and further improving the reliability and efficiency of the ingot handling process.

[0049] This application also provides a multi-axis robotic arm, which includes the material handling robot as described in the above embodiments.

[0050] This application also provides a processing device, which includes a material handling robot as described in the above embodiments.

[0051] The division of the various modules in the above-described material handling robot is only for illustrative purposes. In other embodiments, the material handling robot can be divided into different modules as needed to complete all or part of the functions of the above-described material handling robot.

[0052] The material handling robot, multi-axis robotic arm, and processing equipment provided in the above embodiments, during the ingot handling process, utilize a tray assembly mounted on the mounting base to initially constrain the position of the ingot through positioning structures distributed on the tray body (e.g., keeping the edge portion of the ingot within the positioning structure for movement). Furthermore, the position of the ingot is further constrained through the adsorption effect of the fixing unit located on the tray body (e.g., vacuum adsorption of the non-edge portion of the ingot). This allows for simultaneous adsorption of the non-edge portion of the ingot and positional constraint of the ingot's edge, effectively limiting the ingot's range of motion. Compared to a limiting method relying solely on suction cup adsorption, this effectively mitigates the risk of ingot drop and damage due to insufficient suction caused by vacuum leakage, thus meeting the stability requirements of the ingot handling process and improving its efficiency. This has significant economic and practical value.

[0053] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0054] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A material handling robot, characterized in that, include: Mounting base; A tray assembly is disposed on the mounting base. The tray assembly includes a tray body and a fixing unit, wherein the fixing unit is disposed on the tray body. The tray body is provided with a positioning structure, which can constrain the position of the edge part of the workpiece. The fixing unit is set on the bottom wall of the positioning structure and can adsorb the non-edge part of the workpiece.

2. The material handling robot according to claim 1, characterized in that, The number of positioning structures is multiple, and the positioning structures are distributed at intervals on the pallet body to position workpieces of different sizes.

3. The material handling robot according to claim 2, characterized in that, The positioning structure includes a first positioning structure, which is used to position the smallest workpiece among the workpieces of different sizes. The fixing unit is disposed on the bottom wall of the first positioning structure, and the fixing unit can deform in the thickness direction of the pallet body.

4. The material handling robot according to claim 1, characterized in that, The main body of the tray is fork-shaped.

5. The material handling robot according to claim 1, characterized in that, The pallet body includes a first receiving area and a second receiving area, which are located on both sides of the pallet body. Both the first receiving area and the second receiving area are provided with positioning structures. The fixing unit includes a first adsorption element and a second adsorption element. The first adsorption element is disposed in the first receiving area, and the second adsorption element is disposed in the second receiving area. When there are multiple first adsorption elements and multiple second adsorption elements, the multiple first adsorption elements are distributed at intervals in the first receiving area, and the multiple second adsorption elements are distributed at intervals in the second receiving area.

6. The material handling robot according to claim 5, characterized in that, The pallet body also includes a third receiving area, which is located in the middle of the pallet body and is provided with the positioning structure. The fixing unit further includes a third adsorption element, which is disposed in the third receiving area. When there are multiple third adsorption elements, the multiple third adsorption elements are distributed at intervals in the third receiving area.

7. The material handling robot according to claim 1, characterized in that, The material handling robot also includes a vision sensing component, which is disposed on the side of the mounting base away from the tray assembly.

8. A multi-axis robotic arm, characterized in that, include: The material handling robot as described in any one of claims 1 to 7.

9. A processing device, characterized in that, include: The material handling robot as described in any one of claims 1 to 7.