Probe separation type electrostatic chuck optical fiber sensor

Abstract

The utility model relates to the technical field of temperature monitoring, in particular to a probe separation type electrostatic chuck optical fiber sensor which comprises a probe and a sensor body. The probe is arranged in a first temperature measuring hole of an electrode layer of the electrostatic chuck and comprises a temperature sensing end and a connecting end, the temperature sensing end penetrates into the first temperature measuring hole, and the connecting end is close to an opening of the first temperature measuring hole; the sensor body is arranged in the second temperature measuring hole of the electrostatic chuck base and comprises a front end and a rear end, the connecting end of the probe abuts against the front end of the sensor body, and the rear end of the sensor body extends out of the second temperature measuring hole. The probe is embedded into the first temperature measuring hole of the electrostatic chuck electrode layer, the sensor body is embedded into the second temperature measuring hole of the electrostatic chuck base, and after the electrostatic chuck electrode layer and the electrostatic chuck base are closed, the electrostatic chuck electrode layer and the electrostatic chuck base abut against each other to achieve temperature measurement, and opening and closing actions of the electrostatic chuck are not affected. And the temperature measurement effect is not influenced by the opening and closing action of the electrostatic chuck.

Description

Technical Field

[0001] This utility model relates to the field of temperature monitoring technology, specifically to a probe-separable electrostatic chuck fiber optic sensor. Background Technology

[0002] Wafer etching is a core process in semiconductor manufacturing, and its temperature control accuracy directly determines the etching rate, uniformity, and device performance. During plasma etching, the chemical reactions on the wafer surface are extremely sensitive to temperature; large temperature fluctuations and uneven temperature distribution can negatively impact the final yield. The electrostatic chuck (ESC), as a key component for wafer fixation and thermal management, has dual technical significance in temperature control. First, insufficient ESC temperature uniformity will lead to uneven plasma distribution, causing sidewall tilting or bottom residue in the pattern. Second, in advanced processes, temperature needs to be dynamically adjusted during etching to compensate for the exothermic effects of the reaction. For example, during high aspect ratio etching, the local temperature may rise sharply by more than 50°C; if heat dissipation is not timely, it can lead to photoresist carbonization failure or dielectric layer breakdown. Compared to traditional thermocouples or infrared temperature measurement, fiber optic temperature measurement technology has advantages such as immunity to electromagnetic interference, precise positioning, small probe size, and multi-point monitoring, demonstrating significant advantages in ESC temperature monitoring. However, due to the structural characteristics of electrostatic chucks, the location of sensor installation can sometimes hinder the opening and closing of the electrostatic chuck structure. How to solve this problem is a current research direction. Utility Model Content

[0003] (I) Purpose of the utility model

[0004] The purpose of this invention is to provide a probe-separated electrostatic chuck fiber optic sensor that does not affect the opening and closing of the electrostatic chuck.

[0005] (II) Technical Solution

[0006] To address the aforementioned issues, this utility model provides a probe-separated electrostatic chuck fiber optic sensor, comprising: a probe and a sensor body;

[0007] The probe is disposed in the first temperature measuring hole of the electrostatic chuck electrode layer. The probe includes a temperature sensing end and a connecting end. The temperature sensing end extends into the first temperature measuring hole, and the connecting end is close to the opening of the first temperature measuring hole.

[0008] The sensor body is disposed in the second temperature measuring hole of the electrostatic chuck base. The sensor body includes a front end and a rear end. The connection end of the probe abuts against the front end of the sensor body, and the rear end of the sensor body extends out of the second temperature measuring hole.

[0009] In another aspect of this utility model, preferably, the probe is provided with a probe cavity with one end open and a first end cap inside, the probe cavity is provided with a temperature-sensing material, and the first end cap is provided at the opening of the probe cavity.

[0010] In another aspect of this utility model, preferably, the probe includes a first locking part, and the probe is locked to the first temperature measuring hole through the first locking part.

[0011] In another aspect of this utility model, preferably, the first locking part includes a first thread disposed on the outer peripheral wall of the probe, and a second thread disposed on the inner peripheral wall of the first temperature measuring hole. The first thread and the second thread are adapted to each other, and the probe is locked and connected to the electrostatic chuck electrode layer through the first thread, the second thread and the electrostatic chuck electrode layer.

[0012] In another aspect of this utility model, preferably, the probe includes a pair of bayonets, which are disposed at the connection end.

[0013] In another aspect of this invention, preferably, the probe includes a heat-conducting element and a supporting element;

[0014] The heat-conducting component includes a first limiting part, a cavity part with one end open, and a second end cap. A temperature-sensing substance is disposed inside the cavity part, and the second end cap is disposed at the opening of the cavity part.

[0015] The supporting member has a cavity with openings at both ends. The heat-conducting member is disposed in the cavity of the supporting member. The first limiting part abuts against one end of the supporting member, and the other end of the supporting member abuts against the sensor body.

[0016] In another aspect of this utility model, preferably, the probe further includes an elastic element, and the other end of the abutment is provided with a second limiting part. The elastic element is sleeved on the outer peripheral wall of the abutment, and the two ends of the elastic element abut against the first limiting part and the second limiting part, respectively.

[0017] In another aspect of this utility model, preferably, the sensor body includes a connector, the outer wall of the connector is provided with a third thread, the second temperature measuring hole is provided with a fourth thread, the third thread and the fourth thread are adapted to each other, and the sensor body is locked to the electrostatic chuck base through the third thread and the fourth thread.

[0018] In another aspect of this utility model, preferably, the sensor body further includes a nut, the outer wall of the connecting body is provided with a fifth thread, the inner circumferential wall of the nut is provided with a sixth thread, the fifth thread and the sixth thread are adapted to each other, the outer diameter of the nut is larger than the diameter of the second temperature measuring hole, and the nut locks and limits the connecting body to the electrostatic chuck base through the fifth thread and the sixth thread.

[0019] In another aspect of this utility model, preferably, the sensor body further includes a protective sleeve and an optical fiber; the protective sleeve is disposed in the internal cavity of the connector, and the optical fiber is disposed inside the protective sleeve.

[0020] (III) Beneficial Effects

[0021] The above-mentioned technical solution of this utility model has the following beneficial technical effects:

[0022] This invention embeds the probe into the first temperature measuring hole of the electrostatic chuck electrode layer and the sensor body into the second temperature measuring hole of the electrostatic chuck base. After the electrostatic chuck electrode layer and the electrostatic chuck base are closed, the two come into contact to achieve temperature measurement, without affecting the opening and closing action of the electrostatic chuck, and the temperature measurement effect is not affected by the opening and closing action of the electrostatic chuck. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of one embodiment of the present utility model;

[0024] Figure 2 This is a cross-sectional view of the sensor body according to an embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of the probe structure according to an embodiment of the present invention;

[0026] Figure 4 This is a cross-sectional view of a probe according to an embodiment of the present invention;

[0027] Figure 5 This is a schematic diagram of the probe structure according to another embodiment of the present invention;

[0028] Figure 6 This is a cross-sectional view of the probe according to another embodiment of the present invention;

[0029] Figure 7 This is a cross-sectional view of a sensor in an electrostatic chuck according to an embodiment of the present invention;

[0030] Figure label:

[0031] 1: Probe; 110: First locking part; 120: Bayonet; 130: Supporting part; 131: Second limiting part; 140: Heat-conducting part; 141: First limiting part; 142: Cavity part; 150: Elastic part.

[0032] 2: Sensor body, 210: Connector, 220: Nut, 230: Protective sleeve, 240: Optical fiber. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0034] The accompanying drawings show schematic diagrams of layer structures according to embodiments of the present invention. These drawings are not to scale, and some details have been enlarged for clarity, and some details may have been omitted. The shapes of the various regions and layers shown in the drawings, as well as their relative sizes and positional relationships, are merely exemplary and may deviate from reality due to manufacturing tolerances or technical limitations. Furthermore, those skilled in the art can design regions / layers with different shapes, sizes, and relative positions as needed.

[0035] Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0036] In the description of this utility model, it should be noted that the terms "first", "second" and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0037] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0038] The present invention will now be described in more detail with reference to the accompanying drawings. In the various drawings, the same elements are indicated by similar reference numerals. For clarity, the parts in the drawings are not drawn to scale.

[0039] Example 1

[0040] A probe-separable electrostatic chuck fiber optic sensor. Figure 1 A schematic diagram of the overall structure of one embodiment of the present invention is shown; Figure 2 A cross-sectional view of the sensor body according to an embodiment of the present invention is shown; as follows: Figure 1 and Figure 2 As shown, it includes: probe 1 and sensor body 2;

[0041] The probe 1 is disposed in the first temperature measuring hole of the electrostatic chuck electrode layer. The probe 1 includes a temperature sensing end and a connecting end. The temperature sensing end extends into the first temperature measuring hole, and the connecting end is close to the opening of the first temperature measuring hole. The temperature sensing end extends into the interior of the first temperature measuring hole and directly contacts the area to be measured. In this embodiment, the sensor can be a fluorescent material as a temperature sensing element, which reflects the temperature through changes in light signals. The connecting end is a plane that abuts against the plane at the front end of the sensor body 2.

[0042] The sensor body 2 is disposed within the second temperature measuring hole of the electrostatic chuck base. The sensor body 2 includes a front end and a rear end. The connection end of the probe 1 abuts against the front end of the sensor body 2, and the rear end of the sensor body 2 extends beyond the second temperature measuring hole. The second temperature measuring hole and the first temperature measuring hole are coaxial after the electrostatic chuck base and the electrostatic chuck electrode layer are closed, allowing the connection end of the probe 1 disposed therein to abut against the front end of the sensor body 2, thus achieving temperature measurement without affecting the opening and closing of the electrostatic chuck base and the electrostatic chuck electrode layer. In practical applications of electrostatic chucks, the electrostatic chuck base and the electrode layer need to be opened and closed. If a traditional integrated sensor structure is used, not only is installation difficult, but the sensor is also easily damaged due to collisions and friction during the opening and closing process, thus affecting the accuracy and stability of temperature measurement. This embodiment adopts a separate design, with the two components operating independently yet closely cooperating, ensuring reliable operation of the sensor in complex environments while facilitating installation, maintenance, and replacement.

[0043] Furthermore, in this embodiment, Figure 3 A schematic diagram of the probe structure according to an embodiment of the present invention is shown. Figure 4 A cross-sectional view of the probe according to an embodiment of the present invention is shown; as follows: Figure 3 and Figure 4As shown, the probe 1 has an internal probe cavity with one open end and a first end cap. The probe 1 can be configured as a cylindrical structure. A temperature-sensing material is placed inside the probe cavity; in this embodiment, the temperature-sensing material can be a fluorescent temperature-sensing material. The first end cap is located at the opening of the probe cavity. The first end cap not only serves a sealing function but also effectively prevents external dust, impurities, and other contaminants from entering the probe cavity, avoiding contamination or interference with the temperature-sensing material. The probe 1 includes a first locking part 110, through which the probe 1 is locked to the first temperature measuring hole. The first locking part 110 ensures that the probe 1 can be securely and accurately installed in the first temperature measuring hole of the electrostatic chuck electrode layer. During the actual operation of the electrostatic chuck, it is subjected to various forces, such as vibration and thermal stress caused by temperature changes. If the probe 1 is not securely installed, it can easily loosen or shift under these forces, leading to inaccurate temperature measurements, and may even damage the probe or affect the normal operation of the electrostatic chuck. Furthermore, the first locking part 110 includes a first thread disposed on the outer peripheral wall of the probe 1, and a second thread disposed on the inner peripheral wall of the first temperature measuring hole. The first thread and the second thread are adapted to each other, and the probe 1 is locked and connected to the electrostatic chuck electrode layer through the first thread, the second thread, and the first thread. The tight engagement between the threads provides strong friction and mechanical resistance, effectively preventing the probe from loosening under various working conditions. The threaded connection method also has the advantage of easy disassembly. When the probe needs to be maintained, replaced, or calibrated, it can be easily removed from the first temperature measuring hole by simply using a suitable tool and rotating the probe in the specified direction, greatly improving maintenance efficiency. Furthermore, the probe 1 includes a pair of bayonets 120 disposed at the connecting end. When the probe 1 is installed into the first temperature measuring hole, the bayonets 120 can serve as an auxiliary positioning structure. The operator can use a special tool to insert the tool's jaws into the bayonets 120 and rotate the tool to rotate the probe 1, so that its first thread accurately engages with the second thread of the first temperature measuring hole. When it is necessary to remove probe 1, simply insert the tool's jaws into the slot and rotate the tool in the opposite direction to easily unscrew probe 1 from the first temperature measuring hole, avoiding the situation where it is difficult to remove due to the probe being installed too tightly.

[0044] Furthermore, in another embodiment, Figure 5 A schematic diagram of the probe structure according to another embodiment of the present invention is shown; Figure 6 A cross-sectional view of the probe according to another embodiment of the present invention is shown, as follows: Figure 5 and Figure 6As shown, the probe 1 includes a heat-conducting element 140 and a supporting element 130. The heat-conducting element 140 includes a first limiting part 141, a cavity part 142 with one end open, and a second end cap. A temperature-sensing material is disposed inside the cavity part 142, and the second end cap is disposed at the opening of the cavity part 142. The supporting element 130 has a cavity with both ends open, providing an installation channel for the heat-conducting element 140. The heat-conducting element 140 is disposed inside the cavity of the supporting element 130, realizing the axial positioning of the heat-conducting element 140 within the supporting element 130. By controlling the inner diameter of the cavity of the supporting element 130 and the outer diameter of the heat-conducting element 140, a suitable fitting clearance can be ensured between the two. The first limiting part 141 abuts against one end of the supporting element 130, and the other end of the supporting element 130 abuts against the sensor body 2. The probe 1 also includes an elastic element 150. The other end of the supporting element 130 is provided with a second limiting portion 131. The supporting element 130 is cylindrical with a frustum-shaped second limiting portion 131 at its lower end. The elastic element 150 is sleeved on the outer peripheral wall of the supporting element 130. Both ends of the elastic element 150 abut against the first limiting portion 141 and the second limiting portion 131, respectively. Both ends of the supporting element 130 abut against the heat-conducting element 140 and the sensor body 2, respectively. The lower end surface of the second limiting portion 131 of the supporting element is subjected to force by directly contacting the heat-conducting element 140 or compressing the elastic element 150. When the elastic element 150 expands, it pushes the heat-conducting element 140, causing the upper end surface of the heat-conducting element 140 to directly contact the dielectric layer.

[0045] Furthermore, in this embodiment, as Figure 1 and Figure 2 As shown, the sensor body 2 includes a connector 210. The outer wall of the connector 210 has a third thread, and the second temperature measuring hole has a fourth thread. The third and fourth threads are compatible, and the sensor body 2 is locked to the electrostatic chuck base via these threads. This threaded connection is crucial for a stable connection between the sensor body 2 and the electrostatic chuck base. During installation, by screwing the third thread of the connector 210 into the fourth thread of the second temperature measuring hole, the two threads engage tightly, forming a mechanical connection. This threaded connection facilitates the installation and removal of the sensor body 2.

[0046] The sensor body 2 also includes a nut 220. The outer wall of the connector 210 is provided with a fifth thread, and the inner circumferential wall of the nut 220 is provided with a sixth thread. The fifth and sixth threads are compatible. The outer diameter of the nut 220 is larger than the diameter of the second temperature measuring hole. The nut 220 locks and limits the connector 210 to the electrostatic chuck base through the fifth and sixth threads. The outer wall of the connector 210 is also provided with a fifth thread. The third and fifth threads can be integrally formed or different threads, and a gap can be set between them. By screwing the nut 220 onto the fifth thread of the connector 210, the nut 220 can move axially along the connector 210. When the outer diameter of the nut 220 is larger than the diameter of the second temperature measuring hole, as the nut 220 is tightened, it gradually abuts against the surface of the electrostatic chuck base, thereby applying an axial tensile force to the connector 210 and tightly locking the connector 210 within the second temperature measuring hole. This further increases the connection strength between the sensor body 2 and the electrostatic chuck base, preventing axial movement or loosening of the connector 210 under external force. In actual installation, certain installation errors may exist, such as incomplete thread engagement or coaxiality deviation between the connector 210 and the second temperature measuring hole. The locking and limiting function of the nut 220 can compensate for these errors to a certain extent. By adjusting the tightness of the nut 220, the optimal connection between the sensor body 2 and the electrostatic chuck base can be achieved. During installation, the axial position of the sensor body 2 can be fine-tuned by gradually tightening the nut 220 to ensure good contact with the measured area.

[0047] The sensor body 2 also includes a protective sleeve 230 and an optical fiber 240; the protective sleeve 230 is disposed in the internal cavity of the connector 210, and the optical fiber 240 is disposed inside the protective sleeve 230. The protective sleeve 230, disposed in the internal cavity of the connector 210, provides reliable physical protection for the optical fiber 240.

[0048] In use, the connector 210 is screwed into the second temperature measuring hole of the electrostatic chuck base from the upper gap. The third thread of the connector 210 engages with the fourth thread in the second temperature measuring hole to lock it in place. The optical cable at the rear end of the protective sleeve 230 extends to the bottom of the electrostatic chuck. After the connector 210 is screwed into the appropriate position, the nut is placed on the fifth thread of the connector 210 and screwed in for a second tightening.

[0049] When installing the probe, use a tool to hold the jaws at the bottom of probe 1 and screw it into the first temperature sensing hole of the electrostatic chuck electrode layer, ensuring the fluorescent material below it is flush with the fiber end face. Alternatively, use a tool to hold probe 1 and push it into the first temperature sensing hole of the dielectric layer. The fluorescent material below the probe should also be aligned with the fiber end face.

[0050] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of this utility model and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of this utility model should be included within its protection scope. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.

[0051] The above description does not provide detailed explanations of the technical aspects of each layer's patterning and etching. However, those skilled in the art should understand that various methods existing in the prior art can be used to form layers and regions of the desired shape. Furthermore, to form the same structure, those skilled in the art can also design methods that are not entirely identical to those described above.

[0052] The present invention has been described above with reference to embodiments thereof. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of the present invention, and all such substitutions and modifications should fall within the scope of the present invention.

[0053] Although the embodiments of the present invention have been described in detail, it should be understood that various changes, substitutions and modifications can be made to the embodiments of the present invention without departing from the spirit and scope of the present invention.

[0054] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A probe-detachable electrostatic chuck fiber optic sensor, characterized in that, include: Probe (1) and sensor body (2); The probe (1) is disposed in the first temperature measuring hole of the electrostatic chuck electrode layer. The probe (1) includes a temperature sensing end and a connecting end. The temperature sensing end extends into the first temperature measuring hole, and the connecting end is close to the opening of the first temperature measuring hole. The sensor body (2) is disposed in the second temperature measuring hole of the electrostatic chuck base. The sensor body (2) includes a front end and a rear end. The connection end of the probe (1) abuts against the front end of the sensor body (2), and the rear end of the sensor body (2) extends out of the second temperature measuring hole.

2. The probe-separable electrostatic chuck fiber optic sensor according to claim 1, characterized in that, The probe (1) is provided with a probe cavity with one end open and a first end cap inside. The probe cavity is provided with a temperature-sensing substance, and the first end cap is provided at the opening of the probe cavity.

3. The probe-separated electrostatic chuck fiber optic sensor according to claim 1 or 2, characterized in that, The probe (1) includes a first locking part (110), and the probe (1) is locked to the first temperature measuring hole through the first locking part (110).

4. The probe-separable electrostatic chuck fiber optic sensor according to claim 3, characterized in that, The first locking part (110) includes a first thread disposed on the outer peripheral wall of the probe (1), and a second thread disposed on the inner peripheral wall of the first temperature measuring hole. The first thread and the second thread are adapted to each other, and the probe (1) is locked and connected to the electrostatic chuck electrode layer through the first thread, the second thread and the electrostatic chuck electrode layer.

5. The probe-separated electrostatic chuck fiber optic sensor according to claim 4, characterized in that, The probe (1) includes a pair of bayonets (120) disposed at the connection end.

6. The probe-separable electrostatic chuck fiber optic sensor according to claim 1, characterized in that, The probe (1) includes a heat-conducting element (140) and a supporting element (130); The heat-conducting component (140) includes a first limiting part (141), a cavity part (142) with one end open, and a second end cap. A temperature-sensing substance is disposed inside the cavity part (142), and the second end cap is disposed at the opening of the cavity part (142). The abutment (130) has a cavity with openings at both ends. The heat-conducting component (140) is disposed in the cavity of the abutment (130). The first limiting part (141) abuts against one end of the abutment (130), and the other end of the abutment (130) abuts against the sensor body (2).

7. The probe-separated electrostatic chuck fiber optic sensor according to claim 6, characterized in that, The probe (1) further includes an elastic element (150), and the other end of the abutment (130) is provided with a second limiting part (131). The elastic element (150) is sleeved on the outer peripheral wall of the abutment (130), and the two ends of the elastic element (150) abut against the first limiting part (141) and the second limiting part (131) respectively.

8. The probe-separable electrostatic chuck fiber optic sensor according to claim 7, characterized in that, The sensor body (2) includes a connector (210), the outer wall of the connector (210) is provided with a third thread, the second temperature measuring hole is provided with a fourth thread, the third thread and the fourth thread are adapted to each other, and the sensor body (2) is locked to the electrostatic chuck base through the third thread and the fourth thread.

9. The probe-separable electrostatic chuck fiber optic sensor according to claim 8, characterized in that, The sensor body (2) also includes a nut (220), and the outer wall of the connector (210) is provided with a fifth thread. The inner circumferential wall of the nut (220) is provided with a sixth thread. The fifth thread and the sixth thread are compatible. The outer diameter of the nut (220) is larger than the diameter of the second temperature measuring hole. The nut (220) locks and limits the connector (210) to the electrostatic chuck base through the fifth thread and the sixth thread.

10. The probe-separable electrostatic chuck fiber optic sensor according to claim 7, characterized in that, The sensor body (2) also includes a protective sleeve (230) and an optical fiber (240); the protective sleeve (230) is disposed in the cavity inside the connector (210), and the optical fiber (240) is disposed inside the protective sleeve (230).

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