Device for solving light path calibration reference of UV equipment
By designing an optical path calibration reference device that combines a spectrometer and detector with components such as a rotating plate, cylinder, and gear motor, the problems of inaccurate photometric calibration of the light source and inconvenient cleaning were solved, achieving accurate optical path calibration and automatic cleaning effect.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGSU UNIONWAFER SEMICON CO LTD
- Filing Date
- 2025-05-19
- Publication Date
- 2026-05-05
AI Technical Summary
In existing technologies, the photometric properties of the light source need to be calibrated before optical path calibration, which cannot achieve accuracy and error control. Furthermore, the optical path calibration process is cumbersome and inconvenient for cleaning sample tubes.
A calibration reference device for the optical path of a UV de-radiation device was designed, comprising a spectrometer, a detector, a rotating plate, a cylinder, a gear motor, and a cleaning box. The spectrometer and detector are used to calibrate the photometric intensity of the light source, and a transfer component is used to automatically clean the reagent tube, thereby achieving accuracy and convenience in optical path calibration.
It enables accurate calibration of the light source's photometric intensity, ensuring the accuracy of the optical path calibration, and facilitates automatic cleaning of reagent tubes, simplifying the operation process.
Smart Images

Figure CN224203030U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of UV equipment optical path calibration technology, and specifically to a UV equipment optical path calibration reference device. Background Technology
[0002] Ultraviolet (UV) equipment requires optical path calibration during use. A search revealed existing technology (publication number: CN114900585B), which describes "a secondary folding optical path scanner device and calibration method, belonging to the field of scanner technology. This device includes an optical path folding module, which is positioned between the optical lens and the CMOS sensor. This module controls the optical path, splitting a single optical path into multiple segments. The optical path folding module includes a primary folding mirror, a secondary folding mirror, and a folding support. The primary and secondary folding mirrors are mounted on the folding support and are used to fold back the optical path, adjusting the position and orientation of the light incident on the CMOS sensor. This invention utilizes optical path folding to optimize the layout and achieve miniaturization. It allows for free adjustment of the position and orientation of core components, resulting in greater structural variability and improved overall space utilization of the scanner device."
[0003] While existing technologies achieve optical path calibration, the photometric value of the light source needs to be calibrated before optical path calibration. This introduces uncertainties and errors into subsequent optical path calibration. The optical path calibration device described in the aforementioned patent cannot calibrate the light source. Furthermore, existing technologies generally rely on manual operation, specifically using standard solutions of known concentrations for calibration. Each standard solution is sequentially placed into the sample cell, its absorbance is measured, and the measured absorbance value is compared with the theoretical value to calculate the relative error. However, this process is cumbersome and inconvenient for cleaning the sample tubes after use. Utility Model Content
[0004] To overcome the shortcomings of the existing technology, a UV-dissolving equipment optical path calibration reference device is provided to solve the problems mentioned in the background.
[0005] To achieve the above objectives, a UV device optical path calibration reference device is provided, comprising: a base, a spectrometer mounted on the upper side of the base, an ultraviolet device mounted on the upper side of the spectrometer, and a rotating plate mounted on the outer side of the ultraviolet device; a first cylinder connected to one end of the rotating plate, a first clamping cylinder connected to the lower end of the first cylinder, and a main shaft connected to the other end of the rotating plate; a first gear connected to the outer side of the main shaft, a second gear meshing with the outer side of the first gear, and a third motor connected to the outer side of the second gear; a turntable assembly mounted on the upper side of the base, with a reagent tube placed on the upper end of the turntable assembly; a transfer assembly mounted on the upper side of the base, including a column, with a rotating block rotatably connected inside the column; an arc-shaped block connected to one end of the rotating block, a fixed plate connected to the outer end of the arc-shaped block; a second cylinder and a second clamping cylinder connected to the lower side of the fixed plate; and a cleaning box mounted on the lower side of the fixed plate.
[0006] Furthermore, the turntable assembly includes a rotating disk, and a placement groove is provided at the upper end of the rotating disk, in which the reagent tube is placed. The lower end of the rotating disk is connected to a rotating shaft, which is rotatably connected to the upper end of the base.
[0007] Furthermore, the lower end of the rotating shaft is connected to a first motor, and a protective frame is provided on the outside of the first motor, and a third motor is installed on the outer wall of the protective frame.
[0008] Furthermore, a detector is provided on the upper side of the spectrometer, and the detector corresponds to the light emitting end of the ultraviolet device, and the spectrometer and the turntable assembly are respectively located on both sides of the rotating shaft.
[0009] Furthermore, the column has a rotating groove inside, and a drive shaft is provided inside the rotating groove. One end of the drive shaft is connected to a second motor, and a rotating block is fixed on the outside of the drive shaft and rotatably connected in the rotating groove.
[0010] Furthermore, the outer end of the second clamping cylinder is provided with a clamp, and the second clamping cylinder is slidably connected to the lower side of the fixed plate, and the inner end of the second clamping cylinder is connected to the piston rod end of the second cylinder.
[0011] Furthermore, the cleaning box is equipped with a cleaning pipe inside, and the outer wall of the cleaning pipe is provided with spray holes, and a water pump is connected to the bottom of the cleaning pipe.
[0012] Furthermore, the cleaning box has an internal partition, and a drain pipe is provided on the upper side of the partition and on the outer wall of the cleaning box, and a water pump is located on the lower side of the partition.
[0013] The beneficial effects of this utility model are as follows:
[0014] 1. Using a spectrometer and detector, when calibrating the photometric intensity of an ultraviolet (UV) light source, a reagent tube containing a chemical reagent with a known absorbance is pre-placed on a rotating disk. The first clamping cylinder is then rotated to the top of the reagent tube via a rotating plate, clamping it and rotating it to the detection position on the spectrometer. The UV light emitted by the UV device passes through the reagent tube and is received by the detector. The absorbance of the sample is then calculated using a specific algorithm and compared with the absorbance of a known sample. This allows determination of whether the UV light source photometric intensity meets the standard, ensuring the accuracy and exclusivity of subsequent optical path calibration.
[0015] 2. Utilizing the column, rotating block, arc block, and fixed plate included in the transfer assembly, the used reagent tube is first clamped by the second cylinder and the second clamping cylinder under the drive of the motor, and then rotated downwards. At this time, the reagent tube is placed inside the cleaning box and is on the same plane as the cleaning tube. Water is then supplied to the cleaning tube by a water pump, and the inside of the reagent tube is rinsed through the spray hole, while the outer wall of the reagent tube is rinsed at the same time. The wastewater after rinsing is discharged through the drain pipe, achieving an easy cleaning effect. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present utility model.
[0017] Figure 2 This is an embodiment of the present utility model. Figure 1 Schematic diagram of the structure at point A in the middle.
[0018] Figure 3 This is a partial three-dimensional structural diagram of the turntable assembly according to an embodiment of the present utility model.
[0019] Figure 4 This is a three-dimensional structural diagram of the transfer component according to an embodiment of the present utility model.
[0020] Figure 5 This is a cross-sectional structural diagram of the cleaning box according to an embodiment of the present invention.
[0021] In the diagram: 1. Base; 2. Spectrometer; 3. Ultraviolet equipment; 4. Rotating plate; 5. First cylinder; 6. First clamping cylinder; 7. First motor; 8. Turntable assembly; 81. Rotating shaft; 82. Rotating disk; 83. Placement slot; 84. Reagent tube; 9. Transfer assembly; 91. Column; 911. Rotating slot; 92. Second motor; 93. Rotating block; 94. Arc block; 95. Fixing plate; 96. Second cylinder; 97. Second clamping cylinder; 98. Cleaning box; 981. Cleaning tube; 982. Partition; 983. Water pump; 984. Drain pipe; 10. Main shaft; 101. First gear; 102. Second gear; 103. Third motor. Detailed Implementation
[0022] Reference Figures 1 to 5 As shown, this utility model provides a UV equipment optical path calibration reference device, including: a base 1, a spectrometer 2 mounted on the upper side of the base 1, an ultraviolet (UV) device 3 mounted on the upper side of the spectrometer 2, and a rotating plate 4 mounted on the outer side of the UV device 3. One end of the rotating plate 4 is connected to a first cylinder 5, and the lower end of the first cylinder 5 is connected to a first clamping cylinder 6. The other end of the rotating plate 4 is connected to a main shaft 10, and the outer side of the main shaft 10 is connected to a first gear 101. The outer side of the first gear 101 is meshed with a second gear 102. A third motor 103 is connected to the outside of the gear 102. A turntable assembly 8 is provided on the upper side of the base 1, and a reagent tube 84 is placed on the upper end of the turntable assembly 8. A transfer assembly 9 is provided on the upper side of the base 1, and the transfer assembly 9 includes a column 91. A rotating block 93 is rotatably connected inside the column 91. An arc-shaped block 94 is connected to one end of the rotating block 93, and a fixing plate 95 is connected to the outer end of the arc-shaped block 94. A second cylinder 96 and a second clamping cylinder 97 are connected to the lower side of the fixing plate 95. A cleaning box 98 is provided on the lower side of the fixing plate 95.
[0023] In this embodiment, the base 1, spectrometer 2, ultraviolet device 3, rotating plate 4, turntable assembly 8, and transfer assembly 9 constitute the main structure of the UV-degrading device optical path calibration reference device involved in this application.
[0024] The ultraviolet device 3 has a built-in optical path folding module, including a primary folding mirror and a secondary folding mirror, as well as a folding bracket. The primary and secondary folding mirrors are equipped with fine-tuning handles for adjusting any degree of freedom in the space of the mirror body. The above structure serves to calibrate the ultraviolet light path, which is consistent with the structure and principle of the relevant components involved in the prior art.
[0025] It should be noted that after performing photometric testing of the light source of the ultraviolet device 3 involved in this application, the optical path is then calibrated.
[0026] Specifically, the first gear 101 and the second gear 102 are configured as meshing bevel gears.
[0027] Specifically, there are multiple reagent tubes 84, and each reagent tube 84 contains a different sample, including standard substances with known concentrations and specific absorption peaks, such as nitric acid solution, phenol, and iodine.
[0028] It should be noted that reagent tube 84 is made of smooth and transparent quartz material.
[0029] like Figure 1 and Figure 3In the process, the turntable assembly 8 includes a rotating disk 82, and a placement groove 83 is provided at the upper end of the rotating disk 82. The reagent tube 84 is placed in the placement groove 83, and a rotating shaft 81 is connected to the lower end of the rotating disk 82. The rotating shaft 81 is rotatably connected to the upper end of the base 1. A first motor 7 is connected to the lower end of the rotating shaft 81, and a protective frame is provided on the outside of the first motor 7. A third motor 103 is installed on the outer wall of the protective frame. A detector is provided on the upper side of the spectrometer 2, and the detector corresponds to the light emitting end of the ultraviolet device 3. The spectrometer 2 and the turntable assembly 8 are respectively located on both sides of the rotating shaft 81.
[0030] Specifically, the detector is electrically connected to the spectrometer 2 and is part of the detection unit of the spectrometer 2.
[0031] Specifically, the ultraviolet light passing through reagent tube 84 is detected by a detector.
[0032] like Figure 1 , Figure 4 and Figure 5 In the middle, the column 91 has a rotating groove 911 inside, and a drive shaft is provided inside the rotating groove 911. One end of the drive shaft is connected to a second motor 92. At the same time, the rotating block 93 is fixed on the outside of the drive shaft and is rotatably connected in the rotating groove 911. The outer end of the second clamping cylinder 97 is provided with a clamp, and the second clamping cylinder 97 is slidably connected to the lower side of the fixed plate 95. The inner end of the second clamping cylinder 97 is connected to the piston rod end of the second cylinder 96. The cleaning box 98 has a cleaning pipe 981 inside, and the outer wall of the cleaning pipe 981 has a spray hole. The bottom of the cleaning pipe 981 is connected to a water pump 983. The cleaning box 98 has a partition 982 inside, and a drain pipe 984 is provided on the upper side of the partition 982 and on the outer wall of the cleaning box 98. The water pump 983 is located on the lower side of the partition 982.
[0033] Specifically, a hose is connected to the lower side of the cleaning tube 981. The hose passes through the partition 982 and is connected to the water pump 983. The cleaning tube 981 is connected to the inner wall of the cleaning box 98. When the reagent tube 84 is rotated to a horizontal position, the reagent in the tube flows outward and the tube opening faces the tube head of the cleaning tube 981. The tube head is also provided with a spray hole.
[0034] In use, a spectrometer and detector are employed. During the calibration of the ultraviolet (UV) light source, a reagent tube containing a chemical reagent of known absorbance is pre-placed on a rotating disk. A rotating plate rotates the first clamping cylinder to the top of the reagent tube, clamping it and rotating it to the detection position on the spectrometer. The UV light emitted by the UV device passes through the reagent tube and is received by the detector. The absorbance of the sample is calculated using a specific algorithm and compared with the known absorbance of the sample. This comparison determines whether the UV light source's photometric intensity meets the standard, thus confirming the calibration. To ensure the accuracy and exclusivity of subsequent optical path calibration, the built-in optical path foldback module is used to perform calibration and testing of the optical path. Utilizing the column, rotating block, arc block, and fixing plate included in the transfer assembly, the used reagent tube is first clamped by the second cylinder and the second clamping cylinder under the drive of the motor, and then rotated downwards. At this time, the reagent tube is placed inside the cleaning box and is on the same plane as the cleaning tube. Water is then supplied to the cleaning tube by a water pump, and the inside of the reagent tube is rinsed through the spray nozzle, while the outer wall of the reagent tube is rinsed at the same time. The wastewater after rinsing is discharged through the drain pipe, achieving an easy cleaning effect.
[0035] The optical path calibration reference device for UV de-luminescence equipment of this invention can effectively solve the problems mentioned in the background technology. Based on the existing optical path calibration reference device technology for UV de-luminescence equipment, it can detect the photometric intensity of UV light source, ensure the accuracy of optical path calibration, facilitate the detection of test reagent tubes, and achieve the effect of fully automatic detection.
Claims
1. A UV decoding equipment optical path calibration reference device, comprising: The base (1) is characterized in that: a spectrometer (2) is provided on the upper side of the base (1), and an ultraviolet device (3) is provided on the upper side of the spectrometer (2), and a rotating plate (4) is provided on the outer side of the ultraviolet device (3). One end of the rotating plate (4) is connected to a first cylinder (5), and the lower end of the first cylinder (5) is connected to a first clamping cylinder (6). The other end of the rotating plate (4) is connected to a main shaft (10). A first gear (101) is connected to the outer side of the main shaft (10), and a second gear (102) meshes with the outer side of the first gear (101). A third electric motor is connected to the outer side of the second gear (102). The machine (103) has a turntable assembly (8) on the upper side of the base (1), and a reagent tube (84) is placed on the upper end of the turntable assembly (8). The base (1) has a transfer assembly (9) on the upper side, and the transfer assembly (9) includes a column (91). A rotating block (93) is rotatably connected inside the column (91). One end of the rotating block (93) is connected to an arc block (94), and the outer end of the arc block (94) is connected to a fixing plate (95). A second cylinder (96) and a second clamping cylinder (97) are connected to the lower side of the fixing plate (95). A cleaning box (98) is provided on the lower side of the fixing plate (95).
2. The UV decoding equipment optical path calibration reference device according to claim 1, characterized in that, The turntable assembly (8) includes a rotating disk (82), and a placement groove (83) is provided at the upper end of the rotating disk (82). The reagent tube (84) is placed in the placement groove (83), and a rotating shaft (81) is connected to the lower end of the rotating disk (82). The rotating shaft (81) is rotatably connected to the upper end of the base (1).
3. The UV decoding equipment optical path calibration reference device according to claim 2, characterized in that, The lower end of the rotating shaft (81) is connected to the first motor (7), and a protective frame is provided on the outside of the first motor (7), and the third motor (103) is installed on the outer wall of the protective frame.
4. The UV decoding equipment optical path calibration reference device according to claim 1, characterized in that, The spectrometer (2) is equipped with a detector on its upper side, and the detector corresponds to the light emitting end of the ultraviolet device (3). The spectrometer (2) and the turntable assembly (8) are respectively located on both sides of the rotating shaft (81).
5. The optical path calibration reference device for UV decoding equipment according to claim 1, characterized in that, The column (91) has a rotating groove (911) inside, and a drive shaft is provided inside the rotating groove (911). One end of the drive shaft is connected to a second motor (92). Meanwhile, a rotating block (93) is fixed on the outside of the drive shaft and is rotatably connected in the rotating groove (911).
6. The optical path calibration reference device for UV decoding equipment according to claim 1, characterized in that, The outer end of the second clamping cylinder (97) is provided with a clamp, and the second clamping cylinder (97) is slidably connected to the lower side of the fixing plate (95), and the inner end of the second clamping cylinder (97) is connected to the piston rod end of the second cylinder (96).
7. The optical path calibration reference device for UV decoding equipment according to claim 1, characterized in that, The cleaning box (98) is provided with a cleaning pipe (981) inside, and the outer wall of the cleaning pipe (981) is provided with a spray hole, and a water pump (983) is connected to the bottom of the cleaning pipe (981).
8. The UV decoding equipment optical path calibration reference device according to claim 1, characterized in that, The cleaning box (98) has a partition (982) inside, and a drain pipe (984) is provided on the upper side of the partition (982) and on the outer wall of the cleaning box (98), and a water pump (983) is located on the lower side of the partition (982).
Citation Information
Patent Citations
A secondary return optical path scanner device and calibration method
CN114900585B