Operating platform for fixed-point detection of chip die quality

Abstract

The utility model discloses an operation platform for detecting the quality of a chip die at a fixed point, which is simple to operate and can accurately move a specified area at the edge of a chip to a microscope for checking. The operation platform comprises a chassis, a sliding rail, a bracket, a chip bearing table, a motor, a controller and the microscope, the slide rail is arranged on the chassis, the bracket is arranged in the slide rail, the wafer bearing table is horizontally arranged on the bracket, a bearing of the motor is fixedly connected with the center of the wafer bearing table, the controller is electrically connected with the motor, and a lens of the microscope is arranged right above the slide rail; the controller is used for controlling the motor to drive the wafer bearing table to rotate; when the support moves to a first position in the sliding rail along the sliding rail, the center of the wafer bearing table is located under a lens of the microscope, and when the support moves to a second position in the sliding rail along the sliding rail, a third position on the edge of the wafer bearing table is located under the lens of the microscope.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to an operation platform for fixed-point detection of chip die quality. Background Technology

[0002] During semiconductor chip manufacturing, issues such as process mismatch, equipment differences, and operational malfunctions can lead to regional anomalies. Timely detection and preventative measures are crucial for ensuring product quality. Equipment reliability is paramount for effective and accurate anomaly identification during process monitoring.

[0003] Currently, the detection of regional anomalies in chips mainly relies on manual operation of inspection platforms by staff to perform point-to-point inspections of designated areas. However, manual operation of inspection platforms for point-to-point inspection cannot ensure that the designated areas of the chip are accurately moved under a microscope for examination, especially in the chip's edge areas, which can easily lead to missed anomalies. Utility Model Content

[0004] The purpose of this invention is to overcome the defects in the existing technology and provide an operation platform that is simple to operate and can accurately move a specified area of ​​the chip edge to a microscope for inspection of chip die quality.

[0005] To achieve the above objectives, the technical solution of this utility model is to design an operation platform for fixed-point detection of chip die quality, comprising:

[0006] Chassis, slide rails, support, slide stage, motor, controller, and microscope;

[0007] The slide rail is mounted on the chassis, the bracket is mounted in the slide rail, the slide stage is horizontally mounted on the bracket, the bearing of the motor is fixedly connected to the center of the slide stage, the controller is electrically connected to the motor, and the lens of the microscope is mounted directly above the slide rail.

[0008] The controller is used to control the motor to drive the plate-bearing platform to rotate;

[0009] When the support moves along the slide rail to the first position in the slide rail, the center of the slide stage is directly below the lens of the microscope. When the support moves along the slide rail to the second position in the slide rail, the third position on the edge of the slide stage is directly below the lens of the microscope.

[0010] Furthermore, the slide rail is an L-shaped slide rail, the first position is located at the intersection of the two sides of the L-shaped slide rail, the second position is located at the end of the vertical side of the L-shaped slide rail, and the lens of the microscope is positioned directly above the intersection of the two sides of the L-shaped slide rail.

[0011] Furthermore, the support platform is circular in shape, and the distance from the third position to the center of the support platform is equal to the length of the vertical side of the L-shaped slide rail.

[0012] Furthermore, the support includes a hollow column, and the motor and the controller are disposed within the hollow column.

[0013] Furthermore, the chassis is equipped with a run button, a reset button, and a stop button, which are respectively connected to the controller.

[0014] Each time the run button is pressed, the controller controls the motor to rotate by a preset angle.

[0015] When the reset button is pressed, the controller controls the motor to return to its initial angle;

[0016] When the stop button is pressed, the controller controls the motor to stop rotating.

[0017] Furthermore, the support includes a retractable columnar body.

[0018] The advantages and beneficial effects of this utility model are as follows: it is simple to operate. The fixed positions of the center and edge of the slide stage can be moved to directly below the microscope by the sliding rail limit. Furthermore, the fixed position of the edge of the slide stage can be changed to be below the microscope by the motor driving the slide stage to rotate at a fixed angle. This ensures that the specified areas of the center and edge of the chip placed on the slide stage are accurately located directly below the microscope for inspection, avoiding the problem of abnormal missed detection caused by manual operation that prevents the specified areas of the chip on the slide stage from being accurately moved to directly below the microscope. Attached Figure Description

[0019] Figure 1 This is a side view of the operation platform for fixed-point detection of chip die quality according to this utility model;

[0020] Figure 2 yes Figure 1 Top view.

[0021] In the diagram: 1. Chassis; 2. Slide stage; 3. Slide rail; 4. Support; 5. Microscope; 6. Stop button; 7. Reset button; 8. Run button; 9. Motor; 10. Controller; 21, 22, 23, 24, and 25 are all detection positions. Detailed Implementation

[0022] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings and examples. The following examples are only used to more clearly illustrate the technical solution of this utility model and should not be construed as limiting the scope of protection of this utility model.

[0023] according to Figures 1-2 As shown, this utility model is an operating platform for fixed-point detection of chip die quality, including: a chassis 1, a slide rail 3, a support 4, a substrate 2, a motor 9, a controller 10, and a microscope 5; the slide rail 3 is set on the chassis 1, the support 4 is set in the slide rail 3, the substrate 2 is horizontally set on the support 4, the support 4 can slide in the slide rail 3, the bearing of the motor 9 is fixedly connected to the center of the substrate 2, the controller 10 is electrically connected to the motor 9, and the lens of the microscope 10 is set directly above the slide rail; the controller 10 is used to control the motor 9 to drive the substrate 2 to rotate; when the support 4 moves along the slide rail 3 to the first position in the slide rail, the center of the substrate 2 is directly below the lens of the microscope 5; when the support 4 moves along the slide rail 3 to the second position in the slide rail, the third position on the edge of the substrate 2 is directly below the lens of the microscope 5.

[0024] In order to facilitate the precise movement of the fixed detection area of ​​the center and edge of the chip placed on the substrate to the microscope for detection, the preferred embodiment of this utility model is that the slide rail 3 is an L-shaped slide rail, the first position is located at the intersection of the two sides of the L-shaped slide rail, the second position is located at the end of the vertical side of the L-shaped slide rail, and the lens of the microscope 5 is set directly above the intersection of the two sides of the L-shaped slide rail.

[0025] In order to facilitate the precise movement of the fixed detection area of ​​the center and edge of the chip placed on the substrate to the microscope for detection, the preferred embodiment of this utility model is that the substrate 2 is circular in shape, and the distance from the third position to the center of the substrate 2 is equal to the length of the vertical side of the L-shaped slide rail.

[0026] To make the operating platform more aesthetically pleasing and reduce the risk of damage to the motor and controller, the preferred embodiment of this utility model is that the bracket 4 includes a hollow column, and the motor 9 and controller 10 are disposed in the hollow column.

[0027] In order to facilitate the adjustment of the distance between the slide stage and the microscope and meet the chip detection requirements at different distances, the preferred embodiment of this utility model is that the support 4 includes a retractable columnar body.

[0028] To facilitate operation of the platform for fixed-point testing of chip die quality, a preferred embodiment of this utility model further includes a run button 8, a reset button 7, and a stop button 6 on the chassis 1. The run button 8, reset button 7, and stop button 6 are respectively connected to the controller 10: each time the run button 8 is pressed, the controller 10 controls the motor 9 to rotate by a preset angle; when the reset button 7 is pressed, the controller 10 controls the motor 9 to return to the initial angle; when the stop button 6 is pressed, the controller 10 controls the motor 9 to stop rotating.

[0029] Taking the sequential detection of five points—center (detection position 21), bottom (detection position 22), left (detection position 23), top (detection position 24), and right (detection position 25)—as an example, the operation steps of the fixed-point detection chip die quality operation platform are as follows:

[0030] S1, Loading the film.

[0031] Before use, the wafer stage 2 is located on the far left of the L-shaped slide rail 3. Place the chip on the wafer stage 2.

[0032] S2. Inspect the detection position 21.

[0033] Move the parallel support 4 to the right corner of the L-shaped slide rail 3, that is, the intersection of the horizontal and vertical sides. At this time, the detection position 21 is below the lens of the microscope 5, and the condition of the tube core at the detection position 21 can be viewed through the microscope 5.

[0034] S3. Inspect the detection position 22.

[0035] After completing the inspection of inspection position 21, move the bracket 4 upward to the top of the L-shaped slide rail 3, that is, the end of the vertical side. At this time, inspection position 22 is below the lens of microscope 5. The condition of the tube core at inspection position 22 can be viewed through microscope 5.

[0036] S4. Inspect detection positions 23, 24, and 25.

[0037] After completing the inspection of inspection position 22, press the run button 8 to input a command to control the motor 9 to rotate at a fixed angle. Under the control of the controller 10, the motor 9 rotates counterclockwise according to a preset program, rotating inspection position 23 to below the lens of microscope 5. At this time, the condition of the tube core at inspection position 23 can be viewed through the microscope. Similarly, press the run button again to inspect inspection positions 24 and 25 in sequence.

[0038] S5. After completing the inspection of all detection positions, press the reset button 7. The controller 10 controls the motor 9 to return to the initial angle, and the rotation angle of the plate holder 2 returns to its original position. That is, the detection position 22 is at the intersection of the two sides of the L-shaped slide rail. Move the bracket to the leftmost side (i.e., the end of the horizontal side) of the L-shaped slide rail 3 to unload the plate, completing the entire operation. To prevent collisions, when the stop button is pressed during motor operation, a stop command can be input to the controller 10 to control the motor 9 to stop rotating. The initial angle of the motor (or the initial angle reference point) is the absolute origin when the motor is not powered on or the system is powered on.

[0039] It is not difficult to see that the third position on the edge of the receiving stage 2 corresponds to Figure 2 The detection position is 22. In this new experimental design, the slide rail 3 is preferably an L-shaped slide rail, but an arc-shaped slide rail can also be used. Simply set the radius of the arc-shaped slide rail to the distance from the detection position 22 to the center of the slide stage 2 (i.e., detection position 21). The arc-shaped slide rail is selected as 1 / 4 of the circumference. The microscope lens is set above one end of the arc-shaped slide rail. When the support is in that end position, the center of the slide stage 2 is below the microscope lens. When the support is in the other end position, control the motor to rotate counterclockwise by 45°, and the detection position 22 is below the microscope lens. Then control the motor to rotate counterclockwise by 90° three times in sequence, so that the detection positions 23, 24, and 25 are below the microscope lens respectively.

[0040] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. An operation platform for fixed-point detection of chip die quality, characterized in that, include: Chassis, slide rails, support, slide stage, motor, controller, and microscope; The slide rail is mounted on the chassis, the bracket is mounted in the slide rail, the slide stage is horizontally mounted on the bracket, the bearing of the motor is fixedly connected to the center of the slide stage, the controller is electrically connected to the motor, and the lens of the microscope is mounted directly above the slide rail. The controller is used to control the motor to drive the plate-bearing platform to rotate; When the support moves along the slide rail to the first position in the slide rail, the center of the slide stage is directly below the lens of the microscope. When the support moves along the slide rail to the second position in the slide rail, the third position on the edge of the slide stage is directly below the lens of the microscope.

2. The operation platform for fixed-point detection of chip die quality according to claim 1, characterized in that, The slide rail is an L-shaped slide rail. The first position is located at the intersection of the two sides of the L-shaped slide rail, and the second position is located at the end of the vertical side of the L-shaped slide rail. The lens of the microscope is positioned directly above the intersection of the two sides of the L-shaped slide rail.

3. The operation platform for fixed-point detection of chip die quality according to claim 2, characterized in that, The support platform is circular in shape, and the distance from the third position to the center of the support platform is equal to the length of the vertical side of the L-shaped slide rail.

4. The operation platform for fixed-point detection of chip die quality according to claim 1, characterized in that, The support includes a hollow column, and the motor and the controller are disposed in the hollow column.

5. The operation platform for fixed-point detection of chip die quality according to claim 1, characterized in that, The chassis is equipped with a run button, a reset button, and a stop button, which are respectively connected to the controller. Each time the run button is pressed, the controller controls the motor to rotate by a preset angle. When the reset button is pressed, the controller controls the motor to return to its initial angle; When the stop button is pressed, the controller controls the motor to stop rotating.

6. The operation platform for fixed-point detection of chip die quality according to claim 1, characterized in that, The support includes a retractable column.

Images