DC probe installation structure
By incorporating anti-detachment rods and components in the DC probe mounting structure, the problem of inconvenient probe replacement in traditional probe stations is solved, enabling reliable connection and flexible replacement of the probe and probe arm, thus improving testing efficiency and accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI KESHUN TECH CO LTD
- Filing Date
- 2025-05-12
- Publication Date
- 2026-05-05
AI Technical Summary
The fixed connection between the probe and the probe arm in traditional probe stations makes it inconvenient to change probes of different specifications, cannot flexibly adapt to diverse testing needs, and affects testing efficiency.
The DC probe mounting structure is adopted, and the probe and probe arm are reliably connected by the anti-detachment rod and anti-detachment component in the connection assembly. The probe replacement process is simplified by using structural designs such as threaded fit and anti-detachment block.
It improves the flexibility and practicality of the probe mounting structure, simplifies probe replacement operations, and enhances testing efficiency and accuracy.
Smart Images
Figure CN224203274U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of chip testing technology, and in particular to a DC probe mounting structure. Background Technology
[0002] Probe stations are primarily used in the semiconductor, optoelectronic, integrated circuit, and packaging industries for testing, and are widely applied to the precise electrical measurements of complex, high-speed devices. Their main function is to ensure product quality and reliability while shortening development time and reducing process costs.
[0003] Traditional probe stations consist of a frame, probe arms mounted on the frame, and probes. The probes are typically directly and securely connected to the probe arms via machining or welding. However, this method of probe mounting has drawbacks: the fixed connection between the probes and the probe arms makes it inconvenient to change probes of different specifications, hindering flexibility in adapting to diverse testing needs and severely impacting testing efficiency. Therefore, a probe mounting structure that facilitates probe replacement is needed. Utility Model Content
[0004] To facilitate probe replacement, this application provides a DC probe mounting structure.
[0005] The DC probe mounting structure provided in this application adopts the following technical solution:
[0006] A DC probe mounting structure is mounted on a frame and includes a probe arm, a probe, and a connecting assembly. The probe arm is mounted on the frame, and the probe is connected to the probe arm via the connecting assembly. One end of the probe is provided with a connector, and one end of the probe arm has a connecting groove for the connector to be inserted into. The probe arm has a first insertion groove communicating with the connecting groove, and the connector has a second insertion groove communicating with the first insertion groove. The connecting assembly includes an anti-detachment rod and an anti-detachment component. The anti-detachment rod is inserted into the first insertion groove and the second insertion groove, and the anti-detachment component is used to prevent the anti-detachment rod from disengaging from the second insertion groove.
[0007] By adopting the above technical solution, the anti-detachment component effectively prevents the anti-detachment rod from accidentally coming off the first insertion slot, ensuring that the connector can be securely inserted into the connection slot, thereby achieving a reliable connection between the probe and the probe arm. When it is necessary to replace the probe with a different specification, it is only necessary to disconnect the connection between the connector and the connection slot, thus eliminating the connection between the probe and the probe arm. The operation is simple, improving the flexibility and practicality of the probe installation structure.
[0008] Optionally, the anti-detachment component includes a first threaded portion disposed on the outer wall of the anti-detachment rod and a second threaded portion disposed on the inner wall of the second insertion groove, wherein the first threaded portion and the second threaded portion cooperate with each other.
[0009] By adopting the above technical solution, the anti-detachment rod and the second insertion slot are connected by a threaded fit, so that the anti-detachment rod can be fixed by rotation locking after being inserted into the first insertion slot and the second insertion slot, effectively preventing the anti-detachment rod from coming off the second insertion slot due to external force.
[0010] Optionally, the outer wall of the anti-detachment rod is provided with a first rubber layer.
[0011] By adopting the above technical solution, a first rubber layer is provided on the outer wall of the anti-slip bar, which can effectively increase the friction between the worker's hand and the anti-slip bar, thereby preventing the hand from slipping during operation.
[0012] Optionally, the anti-detachment component includes an anti-detachment block disposed on the inner wall of the first insertion groove; one end of the anti-detachment rod is provided with an installation groove for inserting the anti-detachment block, the extension direction of the installation groove is in the same direction as the extension direction of the anti-detachment rod; the inner wall of the installation groove is provided with a limiting groove for inserting the anti-detachment block, the limiting groove being arranged circumferentially around the anti-detachment rod.
[0013] By adopting the above technical solution, during the insertion of the anti-detachment rod into the first insertion slot, the anti-detachment rod can achieve a plug-in engagement with the mounting slot and can advance into the first insertion slot along its own axis. When the anti-detachment rod moves to a position directly opposite the limiting slot, the anti-detachment rod can rotate around its own axis, causing the anti-detachment block to enter the limiting slot. At this time, under the restriction of the limiting slot, the anti-detachment block can effectively prevent the anti-detachment rod from moving unexpectedly along its own axis, thereby significantly reducing the risk of the anti-detachment rod coming off the second insertion slot and improving the stability and reliability of the connection.
[0014] This installation method avoids repeated rotation of the anti-detachment rod, and the simple structure improves assembly and disassembly efficiency.
[0015] Optionally, the outer wall of the anti-detachment block is wrapped with a second rubber layer.
[0016] By adopting the above technical solution, wrapping the outer wall of the anti-detachment block with a second rubber layer can increase the friction between the anti-detachment block and related components, thereby improving the stability of the connection.
[0017] Optionally, the anti-detachment component includes a fixing block and a spring. The outer wall of the anti-detachment rod has a first fixing groove, and the fixing block is movably installed in the first fixing groove. A hemispherical head is provided at the end of the fixing block away from the first fixing groove. A second fixing groove is provided on the inner wall of the first insertion groove for the hemispherical head to be inserted. The elastic force of the spring is used to drive the hemispherical head to be inserted into the second fixing groove in the normal state.
[0018] By adopting the above technical solution, the combination of the fixing block and the spring ensures reliable fixation of the anti-detachment rod within the first insertion slot, while allowing for easy manual release for disassembly. Under the spring force, the hemispherical head is normally inserted into the second fixing slot, effectively preventing the anti-detachment rod from accidentally falling off, thus ensuring the stability of the probe connection.
[0019] When disconnecting the probe from the probe arm, the anti-disengagement rod is pulled so that the outer wall of the hemispherical head abuts against the inner wall of the second fixing groove. The fixing block overcomes the spring force and can slide towards one side of the first fixing groove under the guidance of the hemispherical head, thereby canceling the connection between the anti-disengagement rod and the second insertion groove.
[0020] Optionally, the inner wall of the first insertion slot is provided with a guide block, and the outer wall of the anti-detachment rod is provided with a guide groove for the guide block to be inserted.
[0021] By adopting the above technical solution, the cooperation between the guide block and the guide groove can guide the anti-detachment rod to be accurately inserted into the first insertion groove, ensuring that the first fixing groove and the second fixing groove are aligned during the insertion process, thereby improving the assembly efficiency.
[0022] Optionally, the probe arm is connected to the frame via a movable component, which drives the probe arm to move along the three axes of X, Y, and Z.
[0023] By adopting the above technical solution, the probe arm is connected to the frame via a movable component, which drives the probe arm to move along the three axes of X, Y, and Z. This design makes the probe arm's position adjustment in space more flexible, enabling precise alignment with different test points on the sample, thereby improving testing efficiency and accuracy.
[0024] In summary, this application includes at least one of the following beneficial technical effects:
[0025] The anti-detachment component effectively prevents the anti-detachment rod from accidentally coming off the first insertion slot, ensuring that the connector can be securely inserted into the connection slot, thereby achieving a reliable connection between the probe and the probe arm. When the probe arm needs to be replaced, it is only necessary to disconnect the connector from the connection slot, which is simple to operate and improves the flexibility and practicality of the probe installation structure. Attached Figure Description
[0026] Figure 1 This is a schematic diagram of the structure of Example 1;
[0027] Figure 2 This is a schematic diagram of the installation of the probe and probe arm in Example 1;
[0028] Figure 3 This is a partial cross-sectional view of the probe arm in Example 1;
[0029] Figure 4 This is a partial cross-sectional view of the probe arm in Example 2;
[0030] Figure 5 This is a schematic diagram of the mounting slot in Example 2;
[0031] Figure 6 This is a partial cross-sectional view of the probe arm in Example 3;
[0032] Figure 7 yes Figure 6 A magnified view of a portion at point A.
[0033] Explanation of reference numerals in the attached drawings: 1. Probe arm; 11. Connecting groove; 12. First insertion groove; 13. Second fixing groove; 2. Probe; 21. Connector; 22. Second insertion groove; 3. Connecting assembly; 31. Anti-detachment rod; 311. Mounting groove; 312. Limiting groove; 313. First fixing groove; 314. First rubber layer; 32. Anti-detachment component; 33. First threaded part; 34. Second threaded part; 35. Anti-detachment block; 36. Second rubber layer; 37. Fixing block; 38. Hemispherical head; 39. Spring; 4. Movable assembly; 41. Linear module; 42. First cylinder; 43. Mounting bracket; 44. Bellows; 5. Frame; 51. Worktable. Detailed Implementation
[0034] The following is in conjunction with the appendix Figures 1-7 This application will be described in further detail.
[0035] Example 1:
[0036] This application discloses a DC probe 2 mounting structure.
[0037] Reference Figure 1 and Figure 2 A DC probe 2 mounting structure is mounted on a frame 5, including a probe arm 1, a probe 2, a connecting assembly 3, and a movable assembly 4. The frame 5 is provided with a worktable 51, and the worktable 51 is provided with a working cavity for placing a sample. The movable assembly 4 is mounted on the frame 5 to drive the probe arm to move along the three axes of X, Y, and Z. The connecting assembly 3 is used to detachably connect the probe 2 and the probe arm 1.
[0038] The active component 4 includes a linear module 41, a first cylinder 42, and a second cylinder. The linear module 41 is mounted on the frame 5 and located outside the worktable 51. The sliding direction of the slider of the linear module 41 is set to the Z direction. The slider of the linear module 41 is provided with a mounting bracket 43. The first cylinder 42 is mounted on the mounting bracket 43. The moving direction of the movable plug of the first cylinder 42 is set to the Y direction. The second cylinder is mounted on the movable plug of the first cylinder 42. The moving direction of the movable plug of the second cylinder is set to the X direction. The probe arm 1 is located on the movable plug of the second cylinder.
[0039] By setting the active component 4, the probe 2 can be moved along the three axes of X, Y, and Z, which can change the position of the probe 2 in the working cavity to accurately align with different test points on the sample, thereby improving testing efficiency and accuracy.
[0040] Reference Figure 1 In this embodiment, a bellows 44 is provided between the mounting bracket 43 and the worktable 51. The outer wall of the worktable 51 has a through hole that communicates with the working cavity, and the bellows 44 is connected to the through hole. The probe arm 1 passes through the bellows 44 and extends into the working cavity. The probe 2 is installed at the end of the probe arm 1 away from the second cylinder, and the probe 2 is normally in the working cavity. By providing the bellows 44, the bellows 44 can protect the part of the probe arm 1 exposed to the outside world and reduce the possibility of damage to it.
[0041] Reference Figure 3 The probe 2 is provided in two sets, and one end of the two sets of probe 2 is connected by a connector 21. One end of the probe arm 1 is provided with a connecting groove 11 for the connector 21 to be inserted. The connecting assembly 3 includes an anti-detachment rod 31 and an anti-detachment component 32. The outer wall of the probe arm 1 is provided with a first insertion groove 12 that communicates with the connecting groove 11, and the outer wall of the connector 21 is provided with a second insertion groove 22 that communicates with the first insertion groove 12. The anti-detachment rod 31 is inserted into the first insertion groove 12 and the second insertion groove 22, and the anti-detachment component 32 is used to prevent the anti-detachment rod 31 from disengaging from the second insertion groove 22.
[0042] In this embodiment, the anti-detachment component 32 includes a first threaded portion 33 and a second threaded portion 34 that cooperates with the first threaded portion 33. The first threaded portion 33 is disposed on the outer wall of the anti-detachment rod 31, and the second threaded portion 34 is disposed on the inner wall of the second insertion groove 22.
[0043] The outer wall of the anti-slip bar 31 is provided with a first rubber layer 314, which is made of rubber material. The first rubber layer 314 can increase the friction between the worker's hand and the anti-slip bar 31, so as to facilitate the rotation of the anti-slip bar 31.
[0044] The implementation principle of Embodiment 1 of this application is as follows:
[0045] The anti-detachment rod 31 is connected to the second insertion slot 22 via a threaded connection, allowing the anti-detachment rod 31 to be fixed by rotation after being inserted into the first insertion slot 12 and the second insertion slot 22, effectively preventing the anti-detachment rod 31 from coming off the second insertion slot 22 due to external force. When it is necessary to replace the probe 2 with a different specification, the connection between the connector 21 and the connecting slot 11 can be disconnected by rotating the anti-detachment rod 31, which is simple to operate and improves the flexibility and practicality of the probe 2 installation structure.
[0046] Example 2:
[0047] This application discloses a DC probe 2 mounting structure.
[0048] Reference Figure 4 and Figure 5 The difference between Embodiment 2 and Embodiment 1 is that the anti-detachment component 32 includes an anti-detachment block 35 and a second rubber layer 36. The anti-detachment block 35 is disposed on the inner wall of the first insertion groove 12. The second rubber layer 36 is made of rubber material and is wrapped around the outer wall of the anti-detachment block 35.
[0049] The outer wall of the anti-detachment rod 31 is provided with an installation groove 311 for the anti-detachment block 35 to be inserted. The extension direction of the installation groove 311 is in the same direction as the axis of the anti-detachment rod 31. A limiting groove 312 is provided on the outer wall of the installation groove 311. The limiting groove 312 is arranged around the anti-detachment rod 31 in a circumferential manner, and the limiting groove 312 is located at the end of the installation groove 311 away from the second insertion groove 22.
[0050] The implementation principle of Embodiment 2 of this application is as follows:
[0051] During the process of inserting the anti-detachment rod 31 into the first insertion slot 12, the anti-detachment rod 31 can be inserted into the mounting slot 311 and can be pushed into the first insertion slot 12 along its own axis. When the anti-detachment rod 31 moves to the position directly opposite the limiting slot 312, the anti-detachment rod 31 can rotate around its own axis, so that the anti-detachment block 35 enters the limiting slot 312. The second rubber layer 36 can increase the stability of the anti-detachment block 35 in the limiting slot 312 and reduce the possibility of the anti-detachment rod 31 moving unexpectedly along its own axis.
[0052] This installation method avoids adding too much structure to the connector 21, reducing the manufacturing cost of the connector 21; and it can reduce the need for multiple rotations of the anti-detachment rod 31, thereby improving the efficiency of disassembly and assembly.
[0053] Example 3:
[0054] This application discloses a DC probe 2 mounting structure.
[0055] Reference Figure 6 and Figure 7 The difference between Embodiment 2 and Embodiment 1 is that the anti-detachment component 32 includes a fixing block 37, a hemispherical head 38 and a spring 39. The outer wall of the anti-detachment rod 31 is provided with a first fixing groove 313, and the fixing block 37 is movably installed in the first fixing groove 313. The hemispherical head 38 is integrally formed with the fixing block 37 and is located at the end of the fixing block 37 away from the first fixing groove 313. The inner wall of the first insertion groove 12 is provided with a second fixing groove 13 for the hemispherical head 38 to be inserted.
[0056] The two ends of the spring 39 are connected to the fixing block 37 and the inner wall of the first fixing groove 313 respectively. The elastic force of the spring 39 is used to drive the hemispherical head 38 to be inserted into the second height groove under normal conditions, thereby increasing the stability of the anti-disengagement rod 31 inserted into the first insertion groove 12 and the second insertion groove 22.
[0057] The inner wall of the first insertion slot 12 is provided with a guide block (not shown in the figure), and the outer wall of the anti-detachment rod 31 is provided with a guide groove for the guide block to slide. The guide block and the guide groove are provided so that the first fixing slot 313 and the second fixing slot 13 are aligned, which further improves the installation efficiency.
[0058] The implementation principle of Embodiment 3 of this application is as follows:
[0059] The mating structure of the fixing block 37 and the spring 39 ensures reliable fixation of the anti-detachment rod 31 within the first insertion slot 12, while allowing for easy manual release for disassembly. Under the elastic force of the spring 39, the hemispherical head 38 is normally inserted into the second fixing slot 13, effectively preventing the anti-detachment rod 31 from accidentally falling off, thus ensuring the stability of the probe 2 connection.
[0060] When disconnecting probe 2 from probe arm 1, by pulling the anti-disengagement rod 31, the outer wall of the hemispherical head 38 abuts against the inner wall of the second fixing groove 13, and the fixing block 37 overcomes the elastic force of the spring 39 so that it can slide towards one side of the first fixing groove 313 under the guidance of the hemispherical head 38, thereby canceling the connection between the anti-disengagement rod 31 and the second insertion groove 22.
[0061] The above are preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made to the structure, shape and principle of this application should be covered within the scope of protection of this application.
Claims
1. A DC probe mounting structure, mounted on a frame (5), characterized in that: The device includes a probe arm (1), a probe (2), and a connecting assembly (3). The probe arm (1) is mounted on a frame (5), and the probe (2) is connected to the probe arm (1) via the connecting assembly (3). One end of the probe (2) is provided with a connector (21), and one end of the probe arm (1) is provided with a connecting groove (11) for the connector (21) to be inserted. The probe arm (1) is provided with a first insertion groove (12) that communicates with the connecting groove (11), and the connector (21) is provided with a second insertion groove (22) that communicates with the first insertion groove (12). The connecting assembly (3) includes an anti-detachment rod (31) and an anti-detachment component (32). The anti-detachment rod (31) is inserted into the first insertion groove (12) and the second insertion groove (22), and the anti-detachment component (32) is used to prevent the anti-detachment rod (31) from detaching from the second insertion groove (22).
2. The DC probe mounting structure according to claim 1, characterized in that: The anti-detachment component (32) includes a first threaded portion (33) disposed on the outer wall of the anti-detachment rod (31) and a second threaded portion (34) disposed on the inner wall of the second insertion groove (22), wherein the first threaded portion (33) and the second threaded portion (34) cooperate with each other.
3. The DC probe mounting structure according to claim 1, characterized in that: The outer wall of the anti-detachment rod (31) is provided with a first rubber layer (314).
4. The DC probe mounting structure according to claim 1, characterized in that: The anti-detachment component (32) includes an anti-detachment block (35), which is disposed on the inner wall of the first insertion groove (12); one end of the anti-detachment rod (31) is provided with an installation groove (311) for the anti-detachment block (35) to be inserted, and the extension direction of the installation groove (311) is in the same direction as the extension direction of the anti-detachment rod (31); the inner wall of the installation groove (311) is provided with a limiting groove (312) for the anti-detachment block (35) to be inserted, and the limiting groove (312) is arranged circumferentially around the anti-detachment rod (31).
5. The DC probe mounting structure according to claim 4, characterized in that: The outer wall of the anti-detachment block (35) is wrapped with a second rubber layer (36).
6. The DC probe mounting structure according to claim 1, characterized in that: The anti-detachment component (32) includes a fixing block (37) and a spring (39). The outer wall of the anti-detachment rod (31) is provided with a first fixing groove (313). The fixing block (37) is movably installed in the first fixing groove (313). A hemispherical head (38) is provided at one end of the fixing block (37) away from the first fixing groove (313). The inner wall of the first insertion groove (12) is provided with a second fixing groove (13) for the hemispherical head (38) to be inserted. The elastic force of the spring (39) is used to drive the hemispherical head (38) to be inserted into the second fixing groove (13) in the normal state.
7. The DC probe mounting structure according to claim 1, characterized in that: The inner wall of the first insertion slot (12) is provided with a guide block, and the outer wall of the anti-detachment rod (31) is provided with a guide slot for the guide block to be inserted.
8. The DC probe mounting structure according to claim 1, characterized in that: The probe arm (1) is connected to the frame (5) via a movable component (4), which is used to drive the probe arm (1) to move along the three axes of X, Y and Z.