Micro-channel spraying type electroplating bath for high-speed copper electroplating

By using a split nozzle structure and a negative pressure pipe system, the problems of easy clogging and uneven spraying in the spraying device are solved, achieving uniform spraying effect and convenient operation, and simplifying the process of removing copper sheets.

CN224212812UActive Publication Date: 2026-05-08JIANGSU SIZHI SEMICON TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
JIANGSU SIZHI SEMICON TECH CO LTD
Filing Date
2025-06-03
Publication Date
2026-05-08

AI Technical Summary

Technical Problem

Existing spraying devices suffer from nozzle clogging, difficulty in adjusting spraying distance, and inconvenient copper sheet removal due to fixed spray plate spacing, resulting in uneven spraying effect and inconvenient operation.

Method used

It adopts a split nozzle structure, combined with a negative pressure pipe and a negative pressure generator. The spray range is controlled by the opening and closing components, and the copper sheet can be easily removed through a motor-driven gear system, realizing the detachable connection of the spray plate.

Benefits of technology

The nozzle is easy to clean, the spray uniformity is improved, the operation is simple, the copper sheet can be removed quickly, and the spraying effect is significantly improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a micro-channel spraying type electroplating bath for high-speed copper electroplating, which comprises a first spraying plate, a second spraying plate and nozzles arranged on the first spraying plate and the second spraying plate, a first fixing rod is arranged on the first spraying plate, a second fixing rod is arranged on the second spraying plate, and the nozzles are arranged on the first spraying plate and the second spraying plate. An opening and closing component is arranged on the first fixing rod; the nozzle is of a split structure and is detachably connected with the spraying plate, the machining difficulty is lowered, and follow-up cleaning is facilitated; the negative-pressure pipe and the negative-pressure generator are arranged, spraying is conducted on one side, and negative-pressure air suction is conducted on the other side, so that spraying uniformity is improved; besides, by arranging the opening and closing component, the spraying range can be effectively controlled, water mist acting on the surface of the copper sheet can be more uniform in cooperation with the nozzle structure, and the copper sheet can be rapidly taken out after spraying is finished.
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Description

Technical Field

[0001] This utility model relates to the field of electroplating equipment technology, specifically to a microchannel spray electroplating tank for high-speed copper electroplating. Background Technology

[0002] Copper plating is an important component of the copper / nickel / chromium system, a protective and decorative coating. The flexible and low-porosity copper plating plays a crucial role in improving the adhesion between plating layers and enhancing corrosion resistance. Copper plating is also used for localized anti-carburization, metallization of printed circuit board holes, and as a surface layer for printing rollers.

[0003] Copper electroplating is used as a base for casting molds, nickel plating, chromium plating, silver plating, and gold plating. It is also used to repair worn parts, prevent localized carburization, and improve conductivity. To obtain a thin, fine, and smooth copper plating layer, steel or other parts with their surfaces cleaned of rust and oil are used as the cathode, and a pure copper plate is used as the anode. The plate is then suspended in an alkaline electroplating solution containing components such as cuprous cyanide, sodium cyanide, and sodium carbonate to perform alkaline (cyanide) copper plating.

[0004] Before electroplating, the copper sheet needs to be sprayed. Existing spraying devices are difficult to clean and repair after the nozzles become clogged, often resulting in the nozzles becoming unusable. In addition, to achieve better spraying results, it is necessary to control the appropriate spraying distance during spraying, which requires adjustment. Furthermore, the fixed spacing of the existing spray plates after spraying makes it inconvenient to remove the copper sheet. Utility Model Content

[0005] The purpose of this invention is to provide a microchannel spray electroplating tank for high-speed copper electroplating, so as to solve the problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: a microchannel spray electroplating tank for high-speed copper electroplating, characterized in that: it includes a first spray plate and a second spray plate, and nozzles disposed on the first spray plate and the second spray plate; both the first spray plate and the second spray plate are provided with a main channel for water flow and a branch channel connected to the main channel; both the first spray plate and the second spray plate are provided with a plurality of nozzle mounting holes connected to the branch channels; both the first spray plate and the second spray plate are provided with a water supply port connected to the main channel on their back sides; a first fixing rod is provided on the first spray plate; a second fixing rod is provided on the second spray plate, and an opening and closing component is provided on the first fixing rod.

[0007] Furthermore, the nozzle includes a nozzle seat and a nozzle head; the nozzle seat includes a pipe with external threads and a connecting seat disposed at the front end of the pipe; a cavity is provided inside the connecting seat; the pipe communicates with the cavity; the nozzle head is detachably installed in the cavity; a spray hole is provided at the front end of the nozzle head; the nozzle head is screwed to the nozzle mounting hole; through holes are provided on both sides of the cavity; a Y-type connector is connected to the water supply port of each spray plate; the Y-type connector is connected to a water supply pipe and a negative pressure pipe; the water supply pipe is connected to a liquid supply tank through a high-pressure pump body; the negative pressure pipe is connected to a negative pressure generator; both the water supply pipe and the negative pressure pipe are equipped with switch valves.

[0008] Furthermore, a positioning groove is provided on the outer side of the nozzle head; a positioning protrusion matching the positioning groove is provided on the inner wall of the cavity; locking protrusions are provided on both sides of the rear end of the nozzle head; and a locking groove is provided on the inner wall of the cavity.

[0009] Furthermore, a liquid recovery tank is also connected to the negative pressure pipe.

[0010] Furthermore, a first limiting rod is fixedly provided on the side of the first fixing rod, and a second limiting rod is fixedly provided on the side of the second fixing rod. The first limiting rod and the second limiting rod are slidably connected, and a groove is also provided on the first fixing rod.

[0011] Furthermore, the opening and closing component includes a lower drive rack fixedly mounted on the second fixed rod, a drive gear meshing with the lower drive rack, an upper drive rack meshing with the lower drive gear, and a motor connected to the drive gear.

[0012] Furthermore, the upper drive rack is fixedly mounted on the first fixed rod, and the lower drive rack engages with the groove.

[0013] The beneficial effects of this utility model are as follows: the nozzle of this utility model has a split structure and is detachably connected to the spray plate, which reduces the processing difficulty and facilitates subsequent cleaning; this utility model is equipped with a negative pressure pipe and a negative pressure generator, which sprays on one side and draws in air under negative pressure on the other side, thereby improving the uniformity of spraying; in addition, this utility model can effectively control the spraying range by setting an opening and closing component, and the nozzle structure can make the water mist acting on the surface of the copper sheet more uniform, and the copper sheet can be quickly removed after spraying. Attached Figure Description

[0014] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0016] Figure 2 This is a schematic diagram of the spray plate structure of this utility model.

[0017] Figure 3 This is a schematic diagram of the nozzle structure of this utility model.

[0018] Figure 4 This is a schematic diagram of the water supply section of this utility model.

[0019] Figure 5 This is a schematic diagram of the opening and closing component of this utility model.

[0020] Figure 6 for Figure 5 An enlarged structural diagram of part A. Detailed Implementation

[0021] The technical solution of this utility model will be clearly and completely described below through specific embodiments. Example 1

[0022] refer to Figures 1 to 3 This invention relates to a microchannel spray electroplating tank for high-speed copper electroplating, comprising a first spray plate 1 and a second spray plate 2, and nozzles 3 disposed on the first spray plate 1 and the second spray plate 2; both the first spray plate 1 and the second spray plate 2 are provided with a main channel 4 for water flow and a branch channel 18 communicating with the main channel 4; both the first spray plate 1 and the second spray plate 2 are provided with a plurality of nozzle mounting holes communicating with the branch channels 18; both the first spray plate 1 and the second spray plate 2 are provided with a water supply port 5 communicating with the main channel 4 on their back sides; a first fixing rod 15 is provided on the first spray plate 1; a second fixing rod 16 is provided on the second spray plate 2, and an opening and closing component 17 is provided on the first fixing rod 15.

[0023] The nozzle includes a nozzle seat 11 and a nozzle head 12; the nozzle seat 11 includes a pipe 111 with external threads and a connecting seat 112 disposed at the front end of the pipe 111; a cavity 113 is disposed inside the connecting seat 112; the pipe 111 communicates with the cavity 113; the nozzle head 12 is detachably installed inside the cavity 113; a spray hole 121 is provided at the front end of the nozzle head 12; the nozzle head 12 is screwed to the nozzle mounting hole; through holes 114 are provided on both sides of the cavity 113; the water supply port 5 of each spray plate is connected to a Y-type connector 6; the Y-type connector 6 is connected to a water supply pipe 7 and a negative pressure pipe 8; the water supply pipe 7 is connected to a liquid supply tank through a high-pressure pump body; the negative pressure pipe 8 is connected to a negative pressure generator; both the water supply pipe 7 and the negative pressure pipe 8 are equipped with switch valves.

[0024] In this embodiment, the nozzle has a split structure. The nozzle seat 11 is screwed to the nozzle mounting hole by threads, so that the entire nozzle can be disassembled. A positioning groove is provided on the outer side of the nozzle head 12. The inner wall of the cavity 113 is provided with a positioning protrusion that matches the positioning groove. The rear ends of the nozzle head 12 are provided with locking protrusions on both sides. The inner wall of the cavity 113 is provided with a locking groove. After the nozzle head 12 is inserted into the nozzle seat 11 through the positioning groove and the positioning protrusion, the locking protrusion and the locking groove engage. When cleaning is required, the nozzle head 12 can be pulled out directly for cleaning, or the nozzle seat 11 can be disassembled for cleaning or replacement as a whole. Example 2

[0025] refer to Figure 5 and Figure 6 The first fixing rod 15 has a first limiting rod 151 fixedly installed on its side, and the second fixing rod 16 has a second limiting rod 161 fixedly installed on its side. The first limiting rod 151 and the second limiting rod 161 are slidably connected. The first fixing rod 15 also has a groove 152.

[0026] The opening and closing component 17 includes a lower drive rack 171 fixedly mounted on the second fixed rod 16, a drive gear 172 meshing with the lower drive rack 171, an upper drive rack 173 meshing with the lower drive gear 172, and a motor 174 connected to the drive gear 172. The motor 174 is placed stably on the mounting frame (not shown in the figure).

[0027] The upper drive rack 173 is fixedly mounted on the first fixed rod 15, and the lower drive rack 171 slides with the groove 152 with a large frictional force between them.

[0028] When spraying is needed, first place the copper sheet between the first spray plate 1 and the second spray plate 2. Then turn on the motor 174 to rotate forward. The motor 174 drives the drive gear 172 to rotate. The rotation of the drive gear 172 will drive the lower drive rack 171 to move towards the groove 152, and drive the upper drive rack 173 to move towards the second spray plate 2. Then turn off the motor 174 to spray the copper sheet. Since the distance between the first spray plate 1, the second spray plate 2 and the copper sheet is similar, the spraying effect is better. After spraying, turn on the motor 174 to rotate in reverse. The motor 174 drives the drive gear 172 to rotate. The rotation of the drive gear 172 will drive the lower drive rack 171 to move away from the groove 152. Then turn off the motor 174 to remove the copper sheet. The operation is simple, quick and easy, saving time and effort. Example 3

[0029] like Figure 4As shown, in this embodiment, the water supply port 5 of each spray plate is connected to a Y-type connector 6; the Y-type connector 6 is connected to a water supply pipe 7 and a negative pressure pipe 8; the water supply pipe 7 is connected to a liquid supply tank (not shown in the figure) through a high-pressure pump body; the negative pressure pipe 8 is connected to a negative pressure generator (not shown in the figure); both the water supply pipe 7 and the negative pressure pipe 8 are equipped with switch valves.

[0030] Preferably, the negative pressure pipe 8 is also connected to the liquid recovery tank 9.

[0031] In this embodiment, both spray plates are connected to a water supply pipe 7 and a negative pressure pipe 8. When one spray plate sprays, the other side draws in air under negative pressure. The negative pressure draws in air to guide the high-pressure jet, making the flow smoother and the spraying more uniform.

[0032] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Those skilled in the art can make various modifications or equivalent substitutions to the present utility model within its substance and protection scope, and such modifications or equivalent substitutions should also be considered to fall within the protection scope of the present utility model's technical solution.

Claims

1. A microchannel spray electroplating bath for high-speed copper electroplating, characterized in that: It includes a first spray plate (1) and a second spray plate (2) and nozzles (3) provided on the first spray plate (1) and the second spray plate (2); the first spray plate (1) and the second spray plate (2) are each provided with a main channel (4) for water flow and a branch channel (18) connected to the main channel (4); the surfaces of the first spray plate (1) and the second spray plate (2) are each provided with a plurality of nozzle mounting holes connected to the branch channel (18); the back of the first spray plate (1) and the second spray plate (2) are each provided with a water supply port (5) connected to the main channel (4); the first spray plate (1) is provided with a first fixing rod (15); the second spray plate (2) is provided with a second fixing rod (16), and the first fixing rod (15) is provided with an opening and closing component (17).

2. The microchannel spray electroplating tank for high-speed copper electroplating according to claim 1, characterized in that: The nozzle includes a nozzle seat (11) and a nozzle head (12); the nozzle seat (11) includes a pipe (111) with external threads and a connecting seat (112) located at the front end of the pipe (111); a cavity (113) is provided inside the connecting seat (112); the pipe (111) is connected to the cavity (113); the nozzle head (12) is detachably installed inside the cavity (113); a spray hole (121) is provided at the front end of the nozzle head (12); the nozzle head (12) is screwed to the nozzle mounting hole; through holes (114) are provided on both sides of the cavity (113); the water supply port (5) of each spray plate is connected to a Y-type connector (6); the Y-type connector (6) is connected to a water supply pipe (7) and a negative pressure pipe (8); the water supply pipe (7) is connected to a liquid supply tank through a high-pressure pump body; the negative pressure pipe (8) is connected to a negative pressure generator; both the water supply pipe (7) and the negative pressure pipe (8) are equipped with a switch valve.

3. A microchannel spray electroplating tank for high-speed copper electroplating according to claim 2, characterized in that: The nozzle head (12) is provided with a positioning groove on the outer side; the cavity (113) is provided with a positioning protrusion that matches the positioning groove on the inner wall; the nozzle head (12) is provided with locking protrusions on both sides of the rear end; and the cavity (113) is provided with a locking groove on the inner wall.

4. A microchannel spray electroplating tank for high-speed copper electroplating according to claim 3, characterized in that: The negative pressure pipe (8) is also connected to a liquid recovery tank (9).

5. A microchannel spray electroplating tank for high-speed copper electroplating according to claim 4, characterized in that: The first fixing rod (15) has a first limiting rod (151) fixedly installed on its side, and the second fixing rod (16) has a second limiting rod (161) fixedly installed on its side. The first limiting rod (151) and the second limiting rod (161) are slidably connected. The first fixing rod (15) also has a groove (152).

6. A microchannel spray electroplating tank for high-speed copper electroplating according to claim 5, characterized in that: The opening and closing component (17) includes a lower drive rack (171) fixedly mounted on the second fixed rod (16), a drive gear (172) meshing with the lower drive rack (171), an upper drive rack (173) meshing with the lower drive gear (172), and a motor (174) connected to the drive gear (172).

7. A microchannel spray electroplating tank for high-speed copper electroplating according to claim 6, characterized in that: The upper drive rack (173) is fixedly mounted on the first fixed rod (15), and the lower drive rack (171) engages with the groove (152).