Pressure-adjustable test module

Abstract

The utility model relates to the field of chip testing, in particular to a pressure-adjustable testing module, and adopts the technical scheme that the pressure-adjustable testing module comprises a testing seat, a plurality of placement tables which are arranged on the testing seat and are used for loading chips, a testing assembly which is arranged on the testing seat and is used for detecting the chips, and a driving device which is used for driving the testing assembly to move up and down, the pressure proportional valve is electrically connected with the controller, the pressure adjusting air cylinder is electrically connected with the pressure proportional valve, and the piston end of the pressure adjusting air cylinder is connected with the testing assembly. According to the invention, the test pressure can be adjusted according to the pressure required by chip detection, and the practicability and adaptability of the test module are improved.

Description

Technical Field

[0001] This application relates to the field of chip testing, and in particular to a pressure-adjustable test module. Background Technology

[0002] Chip manufacturing involves multiple testing steps. Existing test modules include test components and cylinders that move the test components up and down to test chip performance. However, existing test modules cannot adjust the testing pressure in real time according to different chips. This requires staff to place different chips into different test modules for testing, resulting in high testing costs. Furthermore, staff need to constantly change test modules, leading to numerous repetitive disassembly and reprocessing operations. Utility Model Content

[0003] To improve the practicality of the test module, increase testing efficiency, and facilitate testing operations for staff, this application provides a pressure-adjustable test module.

[0004] This application provides a pressure-adjustable testing module, which adopts the following technical solution:

[0005] An adjustable pressure test module includes a test base, several placement stages mounted on the test base for loading chips, a test component mounted on the test base for detecting chips, and a drive device for moving the test component up and down. It also includes a controller, a pressure proportional valve electrically connected to the controller, and a pressure regulating cylinder electrically connected to the pressure proportional valve. The piston end of the pressure regulating cylinder is connected to the test component.

[0006] By adopting the above technical solution, the test socket is used to install the test bench, test components, drive components, and pressure regulating cylinder, improving the stability of each component and making it easier for operators to install the test module on the workbench or equipment. The test components are used to test the chip, the drive device is used to control the test components to test the chip, and the controller is used to control the pressure proportional valve. The pressure proportional valve is used to determine the pressure of the pressure regulating cylinder, making it easy for operators to adjust the pressure applied to the test components by the pressure proportional valve as needed, thereby controlling the pressure applied to the chip by the test components.

[0007] Preferably, the test assembly includes a heating block disposed at the piston end of the pressure regulating cylinder and a plurality of test pressure heads disposed at the bottom of the heating block, and the test seat is provided with a positioning platform for positioning the pressure regulating cylinder.

[0008] By adopting the above technical solution, the positioning stage improves the stability of the pressure regulating cylinder on the test seat, the test head tests the chip, and the heating block provides the test temperature for the chip.

[0009] Preferably, several groups of pressure regulating cylinders are provided, and each group of pressure regulating cylinders corresponds to a group of test pressure heads.

[0010] By adopting the above technical solution, the pressure regulating cylinder and the test head are positioned one-to-one, which improves the control effect of the pressure regulating cylinder on the test head and ensures the test pressure balance among several test heads.

[0011] Preferably, the driving device includes a moving component disposed on the test base for driving the test component to move horizontally, and a pressing component disposed on the moving component for driving the test component to move vertically.

[0012] By adopting the above technical solution, the moving component is used to drive the test component to move horizontally, so that the test component can avoid the chip placement stage, and the pressing component is used to drive the test component to contact the chip, thereby improving the practicality of the test module.

[0013] Preferably, the moving component includes a moving cylinder disposed on the test seat, a control rod disposed on the piston end of the moving cylinder, and a moving seat disposed on the test seat and located above the placement platform.

[0014] By adopting the above technical solution, the moving cylinder is used to drive the control lever to move back and forth, the movement of the control lever drives the moving seat to move back and forth, and the moving cylinder drives the moving seat to move above the placement platform or away from the placement platform.

[0015] Preferably, the test seat is provided with support blocks located at both ends of the movable seat, the support blocks have a slide rail extending along the driving direction of the piston end of the movable cylinder, and the movable seat is provided with a slider located on the slide rail.

[0016] By adopting the above technical solution, the support block improves the stability of the moving seat, provides placement space for the placement platform and test components, and slide rail one and slider one are used for sliding connection between the moving seat and the support block, thereby improving the stability of the moving seat when sliding.

[0017] Preferably, the pressing assembly includes a push cylinder mounted on a movable seat, a control seat mounted on the piston end of the push cylinder, a connecting rod mounted at both ends of the control seat for positioning the test assembly, and a control block mounted on the test assembly. The movable seat is provided with a positioning seat for positioning the connecting rod. The connecting rod is provided with a slide rail II along the driving direction of the push cylinder. The positioning seat is provided with a slider II located on the slide rail II.

[0018] By adopting the above technical solution, the cylinder is used to drive the control seat to reciprocate, the control seat moves and drives the connecting rod to reciprocate, the control block is used to connect the test component and the connecting rod, so that the connecting rod can control the control block to move, the positioning seat improves the stability of the connecting rod on the moving seat, and the slide rail two and the slider two are used to slide the connecting rod and the positioning seat to improve the stability of the connecting rod during the reciprocating movement.

[0019] Preferably, the movable seat is provided with a fixed block, the fixed block is provided with a slide rail three along the height direction, the test component is provided with a slider three located on the slide rail three, and the connecting rod is provided with a control groove for guiding the control block to move downwards on the side wall facing the test component.

[0020] By adopting the above technical solution, the fixing block is used to install the slide rail three, the slide rail three and the slider three are used for the test component to move up and down, and when the connecting rod moves back and forth, it drives the control block to move in the control groove. According to the position of the control block in the control groove, it drives the slider three to move up and down on the slide rail three, thereby controlling the test component to move up and down.

[0021] In summary, this application uses a controller to adjust the pressure of the pressure regulating cylinder at any time by controlling the pressure proportional valve, which makes it convenient for staff to adjust the pressure of the test module according to the test pressure requirements of different types of chips. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of an adjustable pressure testing module according to this application. Figure 1 ;

[0023] Figure 2 This is a cross-sectional view of an adjustable pressure test module according to this application;

[0024] Figure 3 This is a schematic diagram of the structure of an adjustable pressure testing module according to this application. Figure 2 ;

[0025] Figure 4 This is a schematic diagram of the structure of an adjustable pressure testing module according to this application. Figure 3 .

[0026] Explanation of reference numerals in the attached drawings: 1. Test seat; 2. Placement stage; 3. Test assembly; 31. Heating block; 32. Test pressure head; 4. Drive device; 41. Moving assembly; 411. Moving cylinder; 412. Control rod; 413. Moving seat; 42. Pressing assembly; 421. Pushing cylinder; 422. Control seat; 423. Connecting rod; 424. Control block; 5. Pressure regulating cylinder; 6. Positioning stage; 7. Support block; 8. Slide rail one; 9. Slider one; 10. Positioning seat; 11. Slide rail two; 12. Slider two; 13. Fixing block; 14. Slide rail three; 15. Slider three; 16. Control groove. Detailed Implementation

[0027] The following is in conjunction with the appendix Figures 1-4 The present invention will be further described below. The following embodiments are only used to more clearly illustrate the technical solution of this application, and should not be used to limit the protection scope of the present invention.

[0028] In the description of this application, it should be noted that the orientations or positional relationships indicated by terms such as "center", "up", "down", "left", "right", "vertical", "horizontal", "inner", and "outer" are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0029] This application discloses an adjustable pressure testing module. (Refer to...) Figure 1 and Figure 2 The system includes a test base 1, several placement platforms 2 mounted on the test base 1, a test assembly 3, a drive assembly, a controller, a pressure proportional valve electrically connected to the controller, and a pressure regulating cylinder 5 electrically connected to the pressure proportional valve. In specific implementation, the controller controls the pressure proportional valve to supply gas, and the outlet of the pressure proportional valve is connected to the inlet of the pressure regulating cylinder 5, which constitutes a gas path connection. In this embodiment, an electrical connection is used. Furthermore, a pressure sensor is installed between the pressure proportional valve and the pressure regulating cylinder 5. The pressure sensor is installed at the inlet of the air chamber of the pressure regulating cylinder 5 to monitor the actual pressure value of the pressure regulating cylinder 5 in real time. The controller receives the sensor signal, facilitating real-time adjustment of the pressure of the pressure regulating cylinder 5 by the operator.

[0030] Reference Figure 3 and Figure 4 The placement stage 2 is used to mount chips. In this embodiment, the placement stage 2 has several slots for mounting chips, and operators can install multiple sets of placement stages 2 according to the testing scale. The testing component 3 is used to test the chips. To improve the stability of the testing component 3 on the testing base 1, a positioning stage 6 for positioning the pressure regulating cylinder 5 is installed on the testing base 1. The testing component 3 includes a heating block 31 installed on the piston end of the pressure regulating cylinder 5 and several test pressure heads 32 installed on the side of the heating block 31 facing the placement stage 2. The pressure regulating cylinder 5 is installed on the positioning stage 6 to improve the stability of the pressure regulating cylinder 5. Several sets of pressure regulating cylinders 5 are provided, and the positions of the several pressure regulating cylinders 5 correspond one-to-one with the several test pressure heads 32. The positional correspondence is used to ensure the uniformity of the test pressure on the test pressure heads 32 and improve the testing accuracy of the testing module.

[0031] Reference Figure 3 and Figure 4 The driving device 4 is used to drive the test component 3 to test the chip. The driving device 4 includes a moving component 41 mounted on the test base 1 and a pressing component 42 mounted on the moving component 41. The moving component 41 includes a moving cylinder 411 mounted on the test base 1, a control rod 412 fixedly mounted on the piston end of the moving cylinder 411, and a moving seat 413 fixedly mounted on the end of the control rod 412 away from the moving cylinder 411. Support blocks 7 located at both ends of the moving seat 413 are fixedly mounted on the test base 1. The support blocks 7 have a slide rail 8 extending along the driving direction of the piston end of the moving cylinder 411. A slider 9 located on the slide rail 8 is mounted on the moving seat 413. The moving cylinder 411 drives the moving seat 413 to reciprocate along the length direction of the slide rail 8. In this embodiment, the slide rail 8 extends along the width direction of the placement stage 2, which facilitates the moving cylinder 411 to drive the test component 3 closer to or away from the placement stage 2.

[0032] Reference Figure 3 and Figure 4 The pressing component 42 includes a push cylinder 421 fixedly mounted on a movable base 413, a control seat 422 fixedly mounted on the piston end of the push cylinder 421, connecting rods 423 fixedly mounted on both ends of the control seat 422, and a control block 424. The test component 3 is located in the middle of the connecting rods 423. A control groove 16 is formed on the side wall of the connecting rods 423 facing the test component 3. In this embodiment, the control groove 16 is an arc-shaped groove that is inclined downward. The control block 424 is installed on the side of the test component 3 facing the control groove 16 and is located inside the control groove 16. In order to improve the stability of the push cylinder 421 driving the control seat 422 to move, a positioning seat 10 is fixedly mounted on the movable base 413. A slide rail 2 11 is fixedly mounted on the connecting rods 423 along its length direction. The length direction of the slide rail 2 11 is consistent with the piston driving direction of the push cylinder 421. A slider 2 12 located on the slide rail 2 11 is fixedly mounted on the positioning seat 10. To facilitate the vertical movement of the test component 3, a fixed block 13 extending along the height direction of the moving base 413 is fixed on the moving base 413. A slide rail 14 is fixedly installed on the fixed block 13 along the height direction, and a slider 15 is fixedly installed on the side of the test component 3 facing the slide rail 14. When the push cylinder 421 moves and drives the connecting rod 423 away from the placement stage 2, the control block 424 moves from the bottom end of the control slot 16 to the top end. At this time, the test component 3 moves vertically through the slide rail 14 and the slider 15, thereby driving the test head 32 to move upward away from the chip. At the same time, the moving cylinder 411 drives the slider 9 to slide on the slide rail 8, driving the moving base 413 to move, thereby driving the test component 3 away from the chip.

[0033] The implementation principle of the pressure-adjustable test module in this application embodiment is as follows: the operator adjusts the test pressure of the test head 32 in real time through the pressure regulating cylinder 5, thereby improving the practicality of the test module. The movement state of the test module is as follows: first, the moving cylinder 411 moves the moving seat 413 away from the placement platform 2. After the chip is placed, the moving cylinder 411 moves the moving seat 413 toward the chip, thereby moving the test component 3 above the chip. At this time, there is still a distance between the test component 3 and the chip. Then, the pushing cylinder 421 is activated to move the connecting rod 423. The movement of the connecting rod 423 causes the control block 424 to move along the upper end of the control groove 16 to the lower end of the control groove 16. At this time, the slider 3 15 moves up and down on the slide rail 3 14, thereby moving the test component 3 down, and the test head 32 contacts the chip for detection. When it is necessary to adjust the test pressure of the test head 32, the operator can adjust it through the controller, improving the adaptability of the test module.

[0034] The above are all preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A pressure-adjustable test module, comprising a test base (1), a plurality of placement stages (2) disposed on the test base (1) for loading chips, a test assembly (3) disposed on the test base (1) for detecting chips, and a drive device (4) for driving the test assembly (3) to move up and down, characterized in that: It also includes a controller, a pressure proportional valve electrically connected to the controller, and a pressure regulating cylinder (5) electrically connected to the pressure proportional valve, wherein the piston end of the pressure regulating cylinder (5) is connected to the test assembly (3).

2. The pressure-adjustable testing module according to claim 1, characterized in that: The test assembly (3) includes a heating block (31) disposed at the piston end of the pressure regulating cylinder (5) and a plurality of test pressure heads (32) disposed at the bottom of the heating block (31). The test seat (1) is provided with a positioning platform (6) for positioning the pressure regulating cylinder (5).

3. The pressure-adjustable testing module according to claim 2, characterized in that: Several groups of pressure regulating cylinders (5) are provided, and each group of pressure regulating cylinders (5) corresponds to a group of test pressure heads (32).

4. The pressure-adjustable testing module according to claim 1, characterized in that: The driving device (4) includes a moving component (41) disposed on the test base (1) and used to drive the test component (3) to move horizontally, and a pressing component (42) disposed on the moving component (41) and used to drive the test component (3) to move up and down.

5. The pressure-adjustable testing module according to claim 4, characterized in that: The moving assembly (41) includes a moving cylinder (411) disposed on the test seat (1), a control rod (412) disposed on the piston end of the moving cylinder (411), and a moving seat (413) disposed on the test seat (1) and located above the placement platform (2).

6. The pressure-adjustable testing module according to claim 5, characterized in that: The test seat (1) is provided with support blocks (7) located at both ends of the movable seat (413). The support blocks (7) have a slide rail (8) extending along the driving direction of the piston end of the movable cylinder (411). The movable seat (413) is provided with a slider (9) located on the slide rail (8).

7. The pressure-adjustable testing module according to claim 5, characterized in that: The pressing assembly (42) includes a push cylinder (421) disposed on a movable seat (413), a control seat (422) disposed on the piston end of the push cylinder (421), a connecting rod (423) disposed at both ends of the control seat (422) for positioning the test assembly (3), and a control block (424) disposed on the test assembly (3). The movable seat (413) is provided with a positioning seat (10) for positioning the connecting rod (423). The connecting rod (423) is provided with a slide rail (11) along the driving direction of the push cylinder (421). The positioning seat (10) is provided with a slider (12) located on the slide rail (11).

8. The pressure-adjustable testing module according to claim 7, characterized in that: The movable seat (413) is provided with a fixed block (13), the fixed block (13) is provided with a slide rail three (14) along the height direction, the test assembly (3) is provided with a slider three (15) located on the slide rail three (14), and the connecting rod (423) is provided with a control groove (16) on the side wall of the test assembly (3) for guiding the control block (424) to move down.

Images