Device for cleaning silicon wafer box

Abstract

The utility model discloses a device for cleaning a silicon wafer box. The device comprises a complete machine support, a mechanical arm, a film magazine support and a film magazine support separating mechanism, and one end of the complete machine support is provided with a film magazine support positioning clamping groove and the film magazine support separating mechanism; the manipulator is arranged at the other end of the complete machine bracket and is used for dismounting and mounting the box cover; the wafer box support is of a split structure and comprises a wafer box fixing support and a wafer box pressing support located at the top of the wafer box fixing support, and the wafer box fixing support and the wafer box pressing support form a fixing and supporting space of the wafer box and the box cover; the film magazine support separating mechanism is provided with two film magazine pressing support clamping jaws which are arranged on the two sides of a film magazine support respectively and used for disassembling and assembling a film magazine pressing support on a film magazine fixing support. According to the utility model, the working efficiency is improved, the stability of the cleaning equipment is improved, and other risks caused by manual operation are avoided while the pollution caused by manual operation is avoided.

Description

Technical Field

[0001] This utility model relates to a device for cleaning silicon wafer cassettes, belonging to the field of semiconductor manufacturing. Background Technology

[0002] In the semiconductor silicon wafer manufacturing industry, ensuring the cleanliness of the silicon wafer surface requires preventing the introduction of external contaminants while maintaining the cleanliness of the wafer itself. The cleanliness of the wafer cassette, as the carrier throughout the entire silicon wafer processing process, plays a crucial role in the overall cleanliness of the wafers. During silicon wafer processing, the wafer cassette typically needs to be cleaned before use. Generally, during cleaning, the wafer cassette cover is manually separated from the wafer cassette, and then the wafer cassette is placed in a wafer cassette cleaning machine for cleaning. In the wafer cassette cleaning process, the wafer cassette cover is usually manually separated from the wafer cassette, and after cleaning, the wafer cassette and wafer cassette cover are placed directly on shelves to dry. Due to the instability of manual operation, it is usually unavoidable to reintroduce contaminants. In addition, silicon wafer cassettes and silicon wafer cassette cover brackets are usually fixed with non-metallic bolts such as PEEK and PVC. During manual tightening, the tightening force cannot be completely consistent. Insufficient tightening force may cause the silicon wafer cassette or silicon wafer cassette cover to fall off. Excessive tightening force may cause the bolt to break, and the broken wire needs to be removed. This not only affects production capacity, but the tools used to remove the broken wire will also inevitably introduce contamination. Summary of the Invention

[0003] In view of the defects or deficiencies in the current silicon wafer box cleaning process, which involves manually separating the silicon wafer box cover from the silicon wafer box and placing them on the wafer box cleaning rack, and then manually drying the silicon wafer box and the silicon wafer box cover separately, the purpose of this utility model is to provide a device for cleaning silicon wafer boxes, which avoids the pollution caused by manual operation, improves the cleanliness of silicon wafer boxes, and avoids other risks caused by manual operation.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] An apparatus for cleaning silicon wafer cassettes, comprising: a main support frame, a robotic arm, a wafer cassette holder, and a wafer cassette holder separation mechanism, wherein...

[0006] One end of the machine frame is equipped with a disc tray bracket positioning slot and a disc tray bracket separation mechanism; a robotic arm is located at the other end of the machine frame for disassembling and installing the disc tray cover.

[0007] The tablet holder is a split structure, including a tablet holder fixing bracket and a tablet holder clamping bracket located on top of the tablet holder fixing bracket. The tablet holder fixing bracket and the tablet holder clamping bracket form a fixed support space for the tablet holder and the lid.

[0008] The cartridge holder separation mechanism has two cartridge clamping bracket grippers, which are respectively located on both sides of the cartridge holder, for disassembling and installing the cartridge clamping bracket on the cartridge fixing bracket.

[0009] Furthermore, the tablet box clamping bracket is provided with multiple top posts, which apply force to the tablet box and the lid.

[0010] Furthermore, the cassette clamping bracket is provided with multiple top posts corresponding to different sizes of the cassette and the cassette lid.

[0011] Furthermore, the cassette fixing bracket is provided with a cassette positioning block and a lid positioning block, wherein the cassette positioning block cooperates with the corresponding top post to fix the cassette, and the lid positioning block cooperates with the corresponding top post to fix the lid.

[0012] Furthermore, the disc cassette clamping bracket is provided with a fastening pin, which is used to fix the disc cassette clamping bracket and the disc cassette fixing bracket.

[0013] Furthermore, the robotic arm is equipped with a clamping mechanism that matches the hole in the lid.

[0014] Furthermore, the robotic arm is a multi-axis robotic arm that automatically opens the box lid according to actual needs, separates the box lid from the film box and places it on the film box fixing bracket, and removes the box lid from the film box fixing bracket, puts it on the film box and closes the box lid.

[0015] Furthermore, the cassette clamping bracket jaws are provided with a pin opening / closing device for opening or locking the fastening pin of the cassette clamping bracket.

[0016] The advantages of this utility model are:

[0017] According to the device for cleaning silicon wafer cassettes provided by this utility model, after the operator holds the wafer cassette handle and places the entire cassette onto the device, the device can automatically complete a series of operations such as separating the cassette lid from the cassette and reassembling the cassette lid after cleaning. This avoids contamination introduced by manual disassembly and assembly of the wafer cassettes during the cleaning process. At the same time, this device replaces manual labor, not only improving production efficiency but also avoiding risks such as forgetting to tighten the fixing bracket or breaking the fastening pin during manual operation, reducing the failure rate of the wafer cassette cleaning machine and improving the cleanliness of the wafer cassettes while reducing maintenance frequency. This utility model offers significant benefits in improving work efficiency and enhancing the stability of cleaning equipment, avoiding contamination caused by manual operation while also mitigating other risks associated with manual operation. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the device of this utility model.

[0019] Figure 2 This is a schematic diagram of the operation of the device of this utility model.

[0020] Figure 3 This is a schematic diagram showing the state of the box cover and the tablet box after they are separated in the device of this utility model.

[0021] Figure 4 This is a schematic diagram of the structure of the film box support in the device of this utility model.

[0022] Figure 5 This is a schematic diagram of the device of this utility model after the tablet cassette and tablet cassette support have been removed.

[0023] Figure label:

[0024] 1. Machine support frame; 2. Robotic arm; 3. Disc holder support; 4. Disc holder support separation mechanism; 5. Disc holder; 101. Disc holder support positioning slot; 201. Robotic arm gripper; 301. Top column; 302. Fastening pin; 303. Disc holder positioning block; 304. Disc cover positioning block; 305. Disc holder clamping bracket; 306. Disc holder fixing bracket; 401. Disc holder separation mechanism gripper; 501. Disc cover. Detailed Implementation

[0025] The present invention will now be described in further detail with reference to the accompanying drawings. It should be noted that the description of the present invention below is merely an illustration of individual embodiments and is not intended to limit the scope of the invention. Furthermore, it should be emphasized that, for ease of explanation, the accompanying drawings only list the minimum components of the present invention; any extensions thereof are also included within the scope of the present invention.

[0026] like Figures 1-5 As shown, the device for cleaning silicon wafer cassettes of this utility model includes: a machine support 1, a robotic arm 2, a wafer cassette support 3, a wafer cassette support separation mechanism 4, and other components.

[0027] Among them, such as Figure 1As shown, the main frame 1 serves as the foundation of the entire device, providing support for the installation of other components. One end of the main frame 1 is equipped with a disc cassette holder positioning slot 101, which positions the disc cassette holder on the main frame. A robotic arm 2 is mounted on the other end of the main frame. The robotic arm 2 is a multi-axis robotic arm that automatically opens the cassette cover as needed, separating the cover 501 from the disc cassette 5 and placing it on the disc cassette holder 3. Alternatively, the robotic arm 2 can remove the cover 501 from the disc cassette holder 3, place it on the disc cassette, and lock the cover in place. The disc cassette holder 3 is designed as a split structure for easy placement and removal of the disc cassette 5. The disc cassette holder 3 includes a disc cassette fixing bracket 306 and a disc cassette clamping bracket 305 located at the top of the fixing bracket. The fixing bracket 306 and the clamping bracket 305 form a fixed support space for the disc cassette and its cover. The tablet cassette 5 is fixed to the tablet cassette fixing bracket 306 via the tablet cassette clamping bracket 305, forming a whole (tablet cassette bracket 3). It is directly inserted into the cleaning equipment, where the internal mechanism clamps the tablet cassette bracket 3 for cleaning. The tablet cassette clamping bracket 305 is equipped with top posts 301 of different sizes. The top posts 301 apply force to the tablet cassette and its lid, thus fixing the tablet cassette between the clamping bracket 305 and the fixing bracket 306. The clamping bracket 305 is equipped with a fastening pin 302 for fixing it to the fixing bracket 306. The fixing bracket 306 is equipped with a tablet cassette positioning block 303 for positioning and supporting the tablet cassette 5. The fixing bracket 306 is also equipped with a lid positioning block 304 for positioning and supporting the lid 501. The cartridge holder separation mechanism 4 is mounted on the main frame 1 and located on both sides of the cartridge holder 3. The cartridge holder separation mechanism 4 is equipped with cartridge clamping bracket grippers 401, which are used to clamp the cartridge clamping bracket during the lifting / lowering process. The cartridge clamping bracket grippers 401 are equipped with a pin opening / closing device for opening the fastening pins 302 of the cartridge clamping bracket.

[0028] When placing the tablet cassette to be cleaned, the operator places the cassette holder 3 onto the cassette holder positioning slot 101 of the device and issues a cassette separation command. At this time, the cassette separation mechanism jaws 401 on the cassette holder separation mechanism 4 clamp the cassette clamping bracket 305, loosens the fastening pin 302 on the cassette clamping bracket 305, and lifts the cassette clamping bracket 305. The operator then places the tablet cassette 5 at the cassette positioning block 303 on the cassette holder 3. After sensing that the tablet cassette 5 is correctly placed, the machine... Hand 2 opens and removes the lid 501 using the robotic gripper 201, placing it on the lid positioning block 304 of the cassette holder 3; the cassette separation mechanism gripper 401 clamps the cassette pressing bracket 305 and lowers it, the top column 301 fixes the cassette 5 and lid 501 to the cassette holder 3, the cassette separation mechanism gripper 401 locks the fastening pin 302 on the cassette pressing bracket 305 and releases the cassette pressing bracket 305, and the operator can then put the cassette 5 and the cassette holder 3 together into the cassette cleaning equipment.

[0029] When the tablet cassette is removed after cleaning and drying, the operator places the entire assembly of the tablet cassette 5 and the tablet cassette support 3 onto the tablet cassette support positioning slot 101 of the device and issues a command to the device to assemble the tablet cassette. At this time, the tablet cassette separation mechanism gripper 401 on the tablet cassette support separation mechanism 4 clamps the tablet cassette pressing support 305, loosens the fastening pin 302 on the tablet cassette pressing support 305, and lifts the tablet cassette pressing support 305. The robotic arm 2 removes the cassette cover 501 from the cassette cover positioning block 304 of the tablet cassette support 3 through the robotic arm gripper 201, installs it back into the tablet cassette 5, and locks the cassette cover 501. The operator removes the tablet cassette 5, the tablet cassette separation mechanism gripper 401 lowers the tablet cassette pressing support 305, the tablet cassette separation mechanism gripper 401 locks the fastening pin 302 on the tablet cassette pressing support 305, and then loosens the tablet cassette pressing support 305, thereby completing the separation of the tablet cassette 5 from the tablet cassette support 3.

[0030] This invention addresses the risks and shortcomings of manual intervention in the wafer cassette cleaning process in current silicon wafer manufacturing. It provides a device designed to improve the cleanliness of wafer cassette cleaning, minimizing contamination caused by manual opening and closing of the cassettes during cleaning. Furthermore, the device allows the wafer cassettes to be laid out to dry directly with their support after cleaning, further reducing the risk of direct human contact with the cleaned cassettes. This device improves both the cleanliness and production efficiency of wafer cassette cleaning while minimizing damage to the equipment caused by human error, thus reducing maintenance costs.

Claims

1. An apparatus for cleaning silicon wafer cassettes, characterized in that, The device includes: a main frame, a robotic arm, a tablet cassette holder, and a tablet cassette holder separation mechanism. One end of the machine frame is equipped with a disc tray bracket positioning slot and a disc tray bracket separation mechanism; a robotic arm is located at the other end of the machine frame for disassembling and installing the disc tray cover. The tablet holder is a split structure, including a tablet holder fixing bracket and a tablet holder clamping bracket located on top of the tablet holder fixing bracket. The tablet holder fixing bracket and the tablet holder clamping bracket form a fixed support space for the tablet holder and the lid. The cartridge holder separation mechanism has two cartridge clamping bracket grippers, which are respectively located on both sides of the cartridge holder, for disassembling and installing the cartridge clamping bracket on the cartridge fixing bracket.

2. The apparatus for cleaning silicon wafer cassettes according to claim 1, characterized in that, The tablet box clamping bracket is equipped with multiple top posts, which apply force to the tablet box and the lid.

3. The apparatus for cleaning silicon wafer cassettes according to claim 2, characterized in that, The cassette clamping bracket is equipped with multiple top posts corresponding to different sizes of the cassette and cassette lid.

4. The apparatus for cleaning silicon wafer cassettes according to claim 2 or 3, characterized in that, The cassette fixing bracket is provided with a cassette positioning block and a lid positioning block, wherein the cassette positioning block cooperates with the corresponding top post to fix the cassette, and the lid positioning block cooperates with the corresponding top post to fix the lid.

5. The apparatus for cleaning silicon wafer cassettes according to claim 1, characterized in that, The cassette clamping bracket is equipped with a fastening pin, which is used to fix the cassette clamping bracket and the cassette fixing bracket.

6. The apparatus for cleaning silicon wafer cassettes according to claim 5, characterized in that, The cassette clamping bracket is equipped with a pin opening / closing device for opening or locking the fastening pin of the cassette clamping bracket.

7. The apparatus for cleaning silicon wafer cassettes according to claim 1, characterized in that, The robotic arm is equipped with a clamping mechanism that matches the opening of the box lid.

8. The apparatus for cleaning silicon wafer cassettes according to claim 7, characterized in that, The robotic arm is a multi-axis robotic arm that automatically opens the box lid according to actual needs, separates the box lid from the film box and places it on the film box fixing bracket, and removes the box lid from the film box fixing bracket and puts it on the film box to close the box lid.

Images