Coated support conveying system

Abstract

The utility model discloses a film coating support conveying system. The film coating support conveying system comprises a vacuum cavity, a grabbing assembly, a suspension support, a conveyor and a transfer mechanism. The two ends of the vacuum chamber are open, one end is a bin inlet, the other end is a bin outlet, the suspension support is arranged between the grabbing assembly and the vacuum chamber, and the conveyor and the suspension support are linearly arranged to form an assembly line. The transfer mechanism comprises two transfer trolleys and matched ground rails, and the two transfer trolleys and the matched ground rails are arranged at a bin inlet and a bin outlet of the vacuum cavity respectively. The grabbing assembly comprises a mechanical arm, a clamp tool and a jig plate, the clamp tool comprises a clamping plate, a fixed clamping groove and a sliding clamping groove are formed in the two ends of the clamping plate respectively, a clamping air cylinder is arranged at the bottom of the sliding clamping groove, and two limiting air cylinders are symmetrically arranged in the longitudinal direction of the clamping plate. The two ends of the vacuum chamber are open, and an assembly line type conveying mechanism is adopted outdoors and is matched with a transfer trolley to form a closed transmission chain. The use efficiency and quality of the equipment are greatly improved in the process.

Description

Technical Field

[0001] This utility model relates to the field of sputtering coating technology, and specifically to a coating support conveying system. Background Technology

[0002] In sputtering coating processes, the target material is located in the center of the vacuum chamber, while the workpiece to be coated is placed on a cylindrical support within the chamber. During sputtering, the cylindrical support rotates at high speed to ensure a uniform coating layer. With the rapid development of the vacuum coating industry, customers have increasingly higher demands for coating efficiency. Traditionally, the transport and transfer of coating supports uses a reciprocating inlet (open at one end) and outlet mechanism. This inevitably involves frequent evacuation and venting within the vacuum chamber, resulting in significant time waste. Therefore, a completely new mechanism is needed to replace the traditional, inefficient transport system. Utility Model Content

[0003] To address the aforementioned problems, the purpose of this invention is to provide a high-efficiency coating bracket conveying system to improve production efficiency.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0005] A coating support conveying system includes: a vacuum chamber, a gripping assembly, a suspension bracket, a conveyor, and a transfer mechanism; the vacuum chamber is open at both ends, one end being an inlet and the other end being an outlet; the suspension bracket is arranged between the gripping assembly and the vacuum chamber; the conveyor and the suspension bracket are arranged in a straight line; the transfer mechanism includes a matching transfer vehicle A and a ground rail A, and a transfer vehicle B and a ground rail B; ground rail A is arranged at the inlet end of the vacuum chamber, and ground rail B is arranged at the outlet end of the vacuum chamber.

[0006] Furthermore, there are two suspension brackets, which are respectively arranged on both sides of the conveyor, and a rotating mechanism is provided on the top of the suspension brackets.

[0007] The gripping assembly includes a robotic arm, a fixture, and a jig plate for placing the coated workpiece; the fixture includes a clamping plate with a fixed clamping groove and a sliding clamping groove at both ends, and a clamping cylinder at the bottom of the sliding clamping groove; the clamping plate is connected to the robotic arm.

[0008] The card plate is a U-shaped metal plate, with two limiting cylinders symmetrically arranged in the longitudinal direction of the card plate; the fixture plate is rectangular, with through holes for hanging at both the top and bottom ends.

[0009] Compared with existing technologies, the advantages of this invention are as follows: The vacuum chamber is designed with openings at both ends, with one end serving as the inlet and the other as the outlet. An assembly line-style conveyor mechanism is used outdoors. A movable transfer cart is designed at the inlet to transport the coating support into the chamber, and a similar movable transfer cart is designed at the outlet to retrieve the coating support when it leaves. These carts then connect with the outdoor assembly line, forming a closed transmission chain. This process significantly improves the efficiency and quality of the equipment. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the structure of a coating bracket conveying system according to this utility model;

[0011] Figure 2 This is a schematic diagram of the structure of the suspension bracket and conveyor described in this utility model;

[0012] Figure 3 yes Figure 2 Enlarged view of point A in the middle;

[0013] Figure 4 This is a schematic diagram of the structure of the robotic arm described in this utility model;

[0014] Figure 5 This is a schematic diagram of the fixture described in this utility model;

[0015] Figure 6 This is a front view of the fixture plate described in this utility model. Detailed Implementation

[0016] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings and specific embodiments. Example 1:

[0017] Please refer to Figure 1 This embodiment provides a coating bracket conveying system, including: a vacuum chamber 10, a gripping assembly 20, a suspension bracket 30, a conveyor 40, and a transfer mechanism. The vacuum chamber is open at both ends, with one end being an inlet 11 and the other end being an outlet 12. Both the inlet and outlet are equipped with sealing doors 13. The suspension bracket 30 is arranged between the gripping assembly 20 and the vacuum chamber 10. The conveyor 40 and the suspension bracket are arranged in a straight line to form a production line pattern to improve conveying efficiency. The transfer mechanism includes a matching transfer vehicle A 51 and a ground rail A 52, and a transfer vehicle B 53 and a ground rail B 54. Ground rail A is arranged at the inlet end of the vacuum chamber, and ground rail B is arranged at the outlet end of the vacuum chamber. When the coating bracket enters the chamber, it is fed in by the movement of the transfer vehicle A on the ground rail A. When the coating bracket exits the chamber, the transfer vehicle B picks it up and then connects with the outdoor production line to form a closed transmission chain.

[0018] See Figure 4-6 The gripping assembly includes a robotic arm 21, a fixture 22, and a jig plate 23 for placing the coated workpiece. The fixture includes a clamping plate 220, with a fixed clamping groove 221 and a sliding clamping groove 222 at both ends of the clamping plate, and a clamping cylinder 223 at the bottom of the sliding clamping groove; the clamping plate is connected to the robotic arm.

[0019] See Figure 5 The pallet is a U-shaped metal plate, with two symmetrically arranged limit cylinders 224 along its longitudinal direction. (See attached image) Figure 6 The fixture plate is rectangular, with through holes 230 at both the top and bottom for hanging. Example 2:

[0020] Based on Example 1, to further improve conveying efficiency, two suspension brackets 30 are provided, respectively arranged on both sides of the conveyor 40, and a rotating mechanism 31 is provided on the top of the suspension brackets. The rotating mechanism can drive the coating bracket to rotate, making it easier to hang and remove the fixture plate. See Figure 2-3 As shown, the rotating mechanism 31 uses a motor, and the motor output shaft is set in a conical shape. A turntable 32 that can be raised and lowered is set on the suspension bracket. When the turntable is raised, the output shaft of the motor is inserted into the circular hole at the center of the top of the coating bracket. After being pressed tightly, the output shaft of the motor drives the coating bracket to rotate under the action of friction.

[0021] Due to the large size of the coating support, a roller conveyor is used. Roller structures, driven by motors, are also installed on the transfer vehicle and suspension bracket, ensuring good support and smooth movement. For safety reasons, curved guardrails are installed on the transfer vehicle.

[0022] In the preferred embodiment, a six-axis robot arm is used. When the workpiece is mounted on the fixture plate, the fixture plate is first precisely transported to a fixed station 60. Then, the robot arm accurately moves to the position to grip the fixture plate, and the clamping cylinder actuates, clamping the upper and lower end faces of the fixture plate with the upper and lower slots of the fixture. Then, two positioning cylinders limit the movement to ensure that the relative position of the fixture plate does not shift during the movement, ensuring the accuracy and reliability of the mounting position. The fixture plate is then hung on the coating support using the through holes on the fixture plate. After one side is full, the coating support rotates to expose the empty space. Similarly, after coating is completed, the robot arm, in conjunction with the fixture, removes the workpiece. The removed fixture plate is placed on station 61, and the empty coating support is sent to the next mounting position by the conveyor, forming a closed transmission chain.

Claims

1. A coating support conveying system, characterized in that, include: The system comprises a vacuum chamber, a gripping assembly, a suspension bracket, a conveyor, and a transfer mechanism. The vacuum chamber is open at both ends, with one end being an inlet and the other an outlet. The suspension bracket is positioned between the gripping assembly and the vacuum chamber, and the conveyor and suspension bracket are arranged in a straight line. The transfer mechanism includes a matching transfer vehicle A and a ground rail A, and a transfer vehicle B and a ground rail B. Ground rail A is positioned at the inlet end of the vacuum chamber, and ground rail B is positioned at the outlet end of the vacuum chamber.

2. The coating support conveying system according to claim 1, characterized in that, There are two suspension brackets, which are respectively arranged on both sides of the conveyor, and a rotating mechanism is provided on the top of the suspension brackets.

3. The coating support conveying system according to claim 1, characterized in that, The gripping assembly includes a robotic arm, a fixture, and a jig plate for placing the coated workpiece; the fixture includes a clamping plate with a fixed clamping groove and a sliding clamping groove at both ends, and a clamping cylinder at the bottom of the sliding clamping groove; the clamping plate is connected to the robotic arm.

4. The coating support conveying system according to claim 3, characterized in that, The card plate is a U-shaped metal plate, with two limiting cylinders symmetrically arranged in the longitudinal direction of the card plate; the fixture plate is rectangular, with through holes for hanging at both the top and bottom ends.

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