Turnover equipment for glass substrate

Abstract

The utility model provides a glass substrate turnover device which comprises a moving system and a turnover system, the moving system comprises a moving mechanism and a jacking platform deck installed on the moving mechanism, and the moving mechanism drives the jacking platform deck to move to any position of a turnover position or an avoiding position of the turnover system; the jacking platform deck comprises an ejector pin assembly capable of penetrating through the surface of the jacking platform deck and achieving lifting, and the ejector pin assembly comprises a plurality of ejector pins arranged at intervals; the overturning system comprises a tooth fork assembly capable of overturning by a certain angle along the axis parallel to the surface of the jacking carrying table, and the tooth fork assembly comprises a plurality of adsorption lifting tooth forks which are parallel to the surface of the jacking carrying table and matched with the interval space between the ejector pins. According to the utility model, the transfer and turn-over processes can be conveniently and quickly completed without complicated transfer and turn-over equipment.

Description

Technical Field

[0001] This utility model belongs to the field of glass substrate handling, and specifically relates to a glass substrate flipping device. Background Technology

[0002] The display industry is another important application area for glass substrates, besides semiconductors such as chips. The high transparency and optical uniformity of glass substrates ensure excellent optical performance, their superior flatness guarantees display quality, their mechanical strength and chemical resistance enable them to withstand various environments, and their thermal stability and low coefficient of thermal expansion ensure product stability under high loads. Furthermore, the self-emissive properties of glass substrates make them particularly important in emerging display fields such as Micro LED.

[0003] While the application of glass substrates in the display field brings many advantages, it also has some significant drawbacks. The main disadvantages of glass substrates are as follows:

[0004] Fragility: Compared to organic substrates, glass substrates are less resistant to impact and shock, making them more susceptible to damage or breakage during manufacturing, transportation, and use. This fragility not only increases the risks during production but can also affect the stability and reliability of the packaged chip.

[0005] High processing difficulty: The processing of glass substrates is relatively complex and difficult. Due to their hardness and brittleness, special cutting, grinding, and etching techniques are required, which increases the technical difficulty and cost of the manufacturing process. In addition, for fine patterns and wiring, the processing precision requirements for glass substrates are even higher, further increasing the processing difficulty.

[0006] Higher cost: Compared to organic substrates, glass substrates are generally more expensive to manufacture. This is mainly due to their complex processing, specific material requirements, and higher technical demands. The high cost may limit the application of glass substrates in low-cost or large-scale production.

[0007] Thermal expansion coefficient mismatch: There may be a mismatch in the thermal expansion coefficients between the glass substrate and the chip material. In environments with large temperature variations, this mismatch may lead to problems such as stress concentration, warping, or breakage, thereby affecting the reliability and performance of the chip.

[0008] Poor compatibility with existing processes: Due to the characteristics and processing requirements of glass substrates, they may have compatibility issues with existing chip packaging processes. This may require more R&D resources to develop packaging processes adapted to glass substrates, increasing technical difficulty and cost. To address these issues, AOI inspection of the packaged glass substrates is necessary. However, in actual production processes, optical inspection places high demands on the positioning accuracy, straightness, speed fluctuation, and inspection time of the three-axis motion platform. Moreover, due to the special properties of glass substrates, their transportation and movement need to be more stable and convenient to prevent breakage and damage, especially when flipping inspection is required, as there is no suitable and stable transfer and flipping equipment. Utility Model Content

[0009] In view of all or part of the deficiencies of the prior art described above, the purpose of this utility model is to provide a glass substrate flipping device that can conveniently and quickly complete the transfer and flipping process without the need for complex transfer and flipping equipment.

[0010] To achieve the above-mentioned objectives, this utility model provides the following technical solution:

[0011] This utility model provides a glass substrate flipping device, including a moving system and a flipping system. The moving system includes a moving mechanism and a lifting platform mounted on the moving mechanism. The moving mechanism drives the lifting platform to any position in the flipping or avoidance position of the flipping system. The lifting platform includes a pin assembly that can pass through its surface and achieve lifting and lowering. The pin assembly includes a plurality of pins spaced apart. The flipping system includes a toothed fork assembly that can flip at a certain angle along an axis parallel to the surface of the lifting platform. The toothed fork assembly includes a plurality of suction and lifting toothed forks parallel to the surface of the lifting platform and matching the spacing between the pins. Normally, when a product needs to be flipped, it can only be done by removing it through a material handling mechanism. However, when the product is directly removed from the platform with suction holes, a false vacuum can easily be created between the product and the platform, leading to abnormal material handling. Without flipping the entire platform (directly flipping the platform requires a more sophisticated and costly flipping system), this invention separates the product from the platform by incorporating a pin mechanism, preventing false vacuum and abnormal material handling. By using a liftable pin assembly, the product can be placed on it when it rises, moving the product from the lifting platform to the flipping position of the flipping system. During this movement, the suction and lifting forks at the flipping position are positioned precisely within the gaps between the pins without interference, preventing abnormal material handling and simplifying the flipping and transfer operation. Furthermore, after the flipping system flips the product and places it on the lifting platform, subsequent processes such as second-side inspection can be performed directly, without the need for multiple intermediate transfer mechanisms required by existing flipping systems to deliver the product to the inspection platform. This invention allows for convenient and quick product flipping for subsequent processes, with a small equipment size that improves factory space utilization.

[0012] The flipping system also includes a lifting module and a rotating module mounted on the lifting module for flipping. The flipping angle of the fork assembly is controlled within ±180 degrees. The rotating module includes a rotary servo motor mounted along the extension direction of the suction-lifting fork, and the output end of the rotary servo motor is connected to the fork assembly. The rotating module also includes a blocking component to limit the rotation angle of the fork assembly within a certain range. The lifting module effectively prevents interference between the flipping system and the moving system. Lowering the lifting platform allows the pin assembly of the lifting platform to be inserted between several suction-lifting forks, while raising it allows the product on the lifting platform to be carried and flipped after reaching a certain height to prevent interference. The blocking component acts as a hard limit, restricting the rotation angle within a certain range. This allows the product to be flipped to a specific angle for protection. Furthermore, the flipping angle can be controlled within ±180 degrees to prevent over-flipping and damage to the product when placed on the lifting platform. Compared to existing flipping systems that can only flip 90 degrees and require other moving mechanisms to complete the flipping inspection, this invention uses a toothed fork assembly to flip 180 degrees and works in conjunction with a liftable adsorption platform, allowing for direct inspection after flipping. The structure and operation steps are greatly simplified. The blocking component effectively prevents over-flipping that could damage the product.

[0013] The fork assembly further includes a rotatably connected mounting component and a fork connecting portion. The lifting module is connected to the mounting component. The output end of the rotary servo motor is connected to the middle of the fork connecting portion. One end of the suction-lifting fork is connected to the fork connecting portion. The suction-lifting fork is hollow inside and has several evenly distributed first vacuum suction cups on its surface. The rotary module also includes a fine-tuning component. The blocking component controls the flip angle of the fork assembly from 0 to 190 degrees, and the fine-tuning component controls the rotation angle of the fork assembly at 180 degrees. The fine-tuning component includes a sensor on the fork assembly and several sensing components mounted on the mounting component. The blocking component is mechanical and cannot completely and precisely control the flip angle at 180 degrees; it needs to be adjusted in conjunction with the fine-tuning component to accurately control it at 180 degrees. Connecting the output end of the rotary servo motor to the middle of the fork connecting portion improves the stability of the flip and ensures that the fork remains directly above the flipped position after flipping, allowing it to move to the same position as the lifting platform later, reducing the complexity of the lifting platform's movement control. The evenly distributed first vacuum suction cup can effectively adsorb the product, preventing the product from undergoing significant deformation after the flipping process or falling off during the flipping process.

[0014] The lifting platform's pin assembly includes a first pin group and a second pin group. Both the first and second pin groups have 3-7 pins arranged in a straight line. The first and second pin groups are parallel and opposite to each other, respectively supporting the two sides of the glass substrate. The surface of the lifting platform is treated with black hard anodizing. One side of the lifting platform is equipped with an L-shaped positioning element and a straight-line positioning element. There are 3-7 suction lifting forks. When the lifting platform moves to the flip position of the flipping system, the suction lifting forks and the pins are spaced apart. This invention uses pin groups located on both sides of the product, with each pin group containing at least three pins. Deformation simulation shows that this design keeps the product's sag after lifting within a controllable range. Deformation not only directly affects the flatness of products highly related to display quality, such as the glass substrate, but also, if the sag exceeds the controllable range, it will interfere with the loading and unloading mechanism during the loading and unloading process, leading to product damage. Ejector pins equipped with vacuum suction cups provide more stable support for the product. Under conditions of deformation and maximum stress, using a smaller number of ejector pins, preferably five, can prevent background interference during optical inspection of transparent products such as glass substrates. Proper arrangement of the ejector pins can prevent the product from creating a false vacuum and sticking to the adsorption platform, leading to material breakage during handling or even failure to handle the material. Dark hard anodizing is a metal surface treatment process, particularly suitable for aluminum and its alloys. It forms a dense and hard oxide film on the aluminum alloy surface, significantly enhancing the wear resistance of the part surface. Different shades of dark colors (such as black and dark gray) are obtained; dark surfaces absorb more light and reduce light reflectivity. This invention, by selecting appropriate surface treatments, can effectively eliminate the influence of platform background on optical imaging, while reducing product friction damage during handling and ensuring platform durability. L-shaped and straight-line positioning components are used for positioning the product during manual feeding.

[0015] The lifting platform is further provided with a first registration sensor in the middle. At least two sets of first pin groups are radially arranged on one side of the first registration sensor, and at least two sets of second pin groups are radially arranged on the other side. The distance between adjacent first and second pin groups is 150-200mm, the distance between two adjacent first pin groups or two adjacent second pin groups is 100-150mm, and the distance between two pins within the same first or second pin group is 100-150mm. Each pin includes a second vacuum suction cup at its top and a push rod connected to the second vacuum suction cup. The first registration sensor is used to sense whether the product to be tested is in place. Two sets of first pin groups and two sets of second pin groups are provided. The first and second pin groups closer to the first registration sensor are used to support relatively small products, while the first and second pin groups farther from the first registration sensor are used to support relatively large products. The same glass substrate optical inspection platform can meet the needs of picking up and inspecting products of different sizes. A reasonable layout of distances and dimensions can accommodate different loading and unloading methods, providing appropriate deformation and maximum stress, thereby preventing the product from being damaged by interference from the loading and unloading mechanism and resulting in breakage.

[0016] The lifting platform includes an adsorption platform, which comprises a first adsorption area with a plurality of first adsorption holes and a second adsorption area with a plurality of second adsorption holes. A switching valve connects the first and second adsorption areas. The first adsorption holes are linearly arranged on both sides of each first and second ejector pin assembly. The second adsorption holes are linearly arranged along the circumference of the adsorption platform on the outer side of the first adsorption area, and at least two rows of the second adsorption holes are arranged radially along the adsorption platform. The lifting platform also includes a mounting platform, on which the adsorption platform and the ejector pin assembly are mounted. The mounting platform includes a gas distribution plate communicating with the ejector rod for gas flow during vacuuming. The uniformly arranged small-hole adsorption method allows for the uniform adsorption of products such as transparent glass substrates, solving the problem of Z-axis jumping caused by uneven adsorption in the original suction cup / adsorption tank method. Furthermore, at least two rows of the second adsorption holes are arranged radially along the adsorption platform. The adsorption zoning design allows for automatic or manual switching of adsorption areas for different product specifications.

[0017] The mounting platform further includes a rotary drive assembly, a first drive assembly, and a second drive assembly. Both the first and second drive assemblies include a mounting plate, two guide rails, and a slide module. The guide rails are mounted on the mounting plate, and the slide module is mounted on the guide rails. The first ejector pin assembly is mounted on the slide module of the first drive assembly, and the second ejector pin assembly is mounted on the slide module of the second drive assembly. The rotary drive assembly drives the lifting platform to rotate along the θ axis. The two guide rails make the lifting process more stable and facilitate the ejector pin assembly's adsorption and support of the product. In other solutions, the first and second drive assemblies can be driven by the same power source through a transfer mechanism. Alternatively, only one of the first and second drive assemblies can be used, i.e., only one mounting plate, one guide rail, and one slide module are provided, with the first and second ejector pin assemblies mounted on the same slide module. The rotary drive assembly allows adjustment of the lifting platform's angle, enabling precise product alignment during testing and preventing deviations in product placement angle that could affect subsequent testing.

[0018] The moving mechanism includes a base, a Y-axis module mounted on the base, and an X-axis module mounted on the Y-axis module. The lifting platform is mounted on the X-axis module. The X-axis module includes an X-axis linear motor and an X-axis linear rail. The Y-axis module is a dual-drive mechanism, including two parallel Y-axis linear motors and Y-axis linear rails located on both sides of each Y-axis linear motor. The dual-drive mechanism of the Y-axis module can increase the load while reducing the size of the equipment. The mounting holes of the X-axis and Y-axis linear rails are densely spaced. Adjustment mechanisms are provided on both sides of the X-axis and Y-axis linear rails. The adjustment mechanisms consist of several adjustment units evenly distributed along the extension direction of the X-axis and Y-axis linear rails. Each adjustment unit mainly consists of a push-tightening column and a pressing screw. The head of the pressing screw has a bevel. When the pressing screw is screwed into the corresponding mounting hole on the base, the push-tightening column is pressed by the bevel and pushed towards the side of the X-axis and Y-axis linear rails. The X-axis and Y-axis rails employ a denser hole specification and are equipped with an adjustment mechanism to further ensure the straightness of the stroke, thereby improving equipment accuracy. Due to the material properties of the rails, they may no longer be perfectly straight due to material stress. In this case, the straightness of the rails can be adjusted manually by using the squeezing screws and pushing columns. Compared with other adjustment mechanisms, its structure is very simple, and the evenly distributed or even densely packed adjustment units can precisely adjust to almost every position on the rails, making the adjustment more accurate and improving motion precision. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the specific embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the first angle structure of the glass substrate flipping device provided in Embodiment 1.

[0021] Figure 2 This is a schematic diagram of the mobile system in Embodiment 1.

[0022] Figure 3 yes Figure 11 Enlarged schematic diagram of the adjustment unit in area A.

[0023] Figure 4 This is a schematic diagram of the first angle of the lifting platform structure in Embodiment 1.

[0024] Figure 5 This is a top view of the lifting platform in Embodiment 1.

[0025] Figure 6 This is a schematic diagram of the first angle of the ejector pin portion in Embodiment 1.

[0026] Figure 7 This is a second-angle schematic diagram of the lifting platform structure in Embodiment 1.

[0027] Figure 8 This is a side view of the lifting platform structure in Embodiment 1.

[0028] Figure 9 This is a schematic diagram of the first angle of the ejector pin portion in Embodiment 1.

[0029] Figure 10 yes Figure 1 Enlarged schematic diagram of the detection system in area B.

[0030] Figure 11 This is a schematic diagram of the second angle structure of the glass substrate flipping device provided in Embodiment 1.

[0031] Figure 12 This is a schematic diagram of the flipping system in Example 1.

[0032] Figure 13 yes Figure 12Enlarged schematic diagram of the blocking component in area C. Reference numerals: 1-Base; 2-Detection platform; 201-Sensor; 202-Grating ruler; 3-Air flotation platform; 301-Shock absorption unit; 4-Lifting platform; 40-Adsorption platform; 400-Ejector pin; 401-Second vacuum suction cup; 402-Ejector rod; 403-L-shaped positioning component; 404-Straight positioning component; 41-First ejector pin assembly; 42-Second ejector pin assembly; 405-First registration sensor; 406-First adsorption hole; 407-Second adsorption hole; 408-Switching valve; 43-Mounting platform; 409-Gas distribution plate; 410-Rotary drive assembly; 411-First drive assembly; 412-Second drive assembly; 4110-Mounting plate; 4111-Guide rail; 4112-Slide module; 4113-Connecting plate; 4114-Drive motor; 5-Y-axis Module; 501-Y-axis linear motor; 502-Y-axis rail; 6-X-axis module; 601-X-axis linear motor; 602-X-axis rail; 7-Adjustment unit; 701-Push-tightening column; 702-Extrusion screw; 703-Bevel; 8-AOI main inspection component; 801-Alignment system; 802-Automatic focus tracking system; 9-AOI re-inspection component; 901-2D inspection component; 902-3D inspection component; 10-Lifting mechanism; 11-Toggle fork assembly; 110-Adsorption lifting toggle fork; 111-Second registered sensor; 1101-Mounting component; 1102-Toggle fork connection; 1103-First vacuum suction cup; 12-Lifting module; 13-Rotation module; 130-Rotation servo motor; 133-Fine-tuning component; 1331-Sensing component; 1332-Sensing component. Detailed Implementation

[0033] The technical solutions in specific embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0034] It should be noted that, in order to describe the technical solution more specifically, the steps described in the following embodiments do not strictly correspond one-to-one with the steps described in the utility model content section.

[0035] Example 1

[0036] A glass substrate flipping device, as described above Figure 1The system includes a base 1 and a detection platform 2 mounted on the base 1 (in other embodiments, the detection platform 2 may be omitted, and a simple base may be used instead). It also includes an air-floating platform 3, which has multiple shock-absorbing units 301 located at the corners of the detection platform 2. The detection platform 2 is mounted on the base 1 via the air-floating platform 3. The detection platform 2 is a marble platform. The detection platform 2 is equipped with a detection system, a moving system, and a tilting system (in other embodiments, the detection system may be omitted).

[0037] The moving system includes a moving mechanism and a lifting platform 4 mounted on the moving mechanism. The moving mechanism drives the lifting platform 4 to any position among the detection position of the detection system, the flipping position of the flipping system, or the avoidance position. (Reference) Figure 2 The moving mechanism includes a Y-axis module 5 and an X-axis module 6 mounted on the Y-axis module 5. A lifting platform 4 is mounted on the X-axis module 6. The detection platform 2 is equipped with a sensor 201 for receiving and providing feedback on whether the lifting platform 4 is in position. It also includes a grating ruler 202 and a reading head for providing feedback on the movement position. The X-axis module 6 includes an X-axis linear motor 601 and an X-axis linear guide 602. The Y-axis module 5 is a dual-drive mechanism, including two parallel Y-axis linear motors 501 and Y-axis linear guides 502 located on both sides of each Y-axis linear motor 501. The mounting holes for the X-axis linear guides 602 and Y-axis linear guides 502 are densely spaced. (Reference) Figure 3 An adjustment mechanism is provided on both sides of the X-axis rail 602 and the Y-axis rail 502. The adjustment mechanism consists of several adjustment units 7 evenly distributed along the extension direction of the X-axis rail 602 and the Y-axis rail 502. Each adjustment unit 7 mainly consists of a push-tightening column 701 and a pressing screw 702. The head of the pressing screw 702 is provided with a bevel 703. When the pressing screw 702 is screwed into the corresponding mounting hole on the detection platform 2, the push-tightening column 701 is pressed by the bevel 703 and pushed towards the side of the X-axis rail 602 and the Y-axis rail 502.

[0038] refer to Figures 4 to 6The lifting platform 4 includes a pin assembly that can pass through its surface and achieve lifting and lowering. The pin assembly includes a plurality of pins 400 spaced apart. Each pin 400 includes a second vacuum suction cup 401 at its top and a pin rod 402 connected to the second vacuum suction cup 401. The pin assembly of the lifting platform 4 includes a first pin group 41 and a second pin group 42. Both the first pin group 41 and the second pin group 42 have 3-7 pins 400 arranged in a straight line. In this embodiment, there are 5 pins arranged in a straight line. The first pin group 41 and the second pin group 42 are arranged in parallel opposite directions and are used to support the two side edges of the product to be tested. The product to be tested is a transparent glass substrate. The surface of the lifting platform 4 is treated with black hard anodizing. An L-shaped positioning member 403 and a straight positioning member 404 are provided on one side of the lifting platform 4. The lifting platform 4 is also equipped with a first registration sensor 405 in the middle. Two sets of first ejector pin groups 41 are arranged radially on one side of the first registration sensor 405, and two sets of second ejector pin groups 42 are arranged radially on the other side. The distance between adjacent first ejector pin groups 41 and second ejector pin groups 42 is 150-200mm, the distance between two adjacent first ejector pin groups 41 or two adjacent second ejector pin groups 42 is 100-150mm, and the distance between two ejector pins 400 within the same first ejector pin group 41 or second ejector pin group 42 is 100-150mm.

[0039] refer to Figure 4 The lifting platform 4 includes an adsorption platform 40. The adsorption platform 40 includes a first adsorption area with a plurality of first adsorption holes 406 and a second adsorption area with a plurality of second adsorption holes 407. A switching valve 408 connects the first and second adsorption areas. The first adsorption holes 406 are linearly arranged on both sides of each first ejector pin group 41 and each second ejector pin group 42. The second adsorption holes 407 are linearly arranged along the circumference of the adsorption platform 40 on the outer side of the first adsorption area, and two rows of second adsorption holes 407 are arranged radially along the adsorption platform 40. (Reference) Figures 7 to 9The lifting platform 4 also includes an installation platform 43, on which the adsorption platform 40 and the ejector pin assembly are installed. The installation platform 43 includes a gas distribution plate 409 that communicates with the ejector rod 402 for gas flow during vacuuming. The mounting platform 43 also includes a rotary drive assembly 410, a first drive assembly 411, and a second drive assembly 412. Both the first drive assembly 411 and the second drive assembly 412 include a mounting plate 4110, two guide rails 4111, and a slide module 4112. The guide rails 4111 are mounted on the mounting plate 4110, and the slide module 4112 is mounted on the guide rails 4111. The first ejector pin assembly 41 is mounted on the slide module 4112 of the first drive assembly 411. The slide module 4112 is a Z-axis slide module, which includes a connecting plate 4113 and a drive motor 4114. The drive motor 4114 is mounted on the connecting plate 4113, and the connecting plate 4113 is connected to the guide rails 4111. The air distribution plate 409 is mounted on the connecting plate 4113. The second ejector pin assembly 42 is mounted on the slide module 4112 of the second drive assembly 412; the rotary drive assembly 410 is a rotary shaft, specifically a rotary platform, and the lifting platform 4 is mounted on the rotary platform, which drives the lifting platform 4 to rotate along the θ axis.

[0040] Reference Figure 1 and Figure 10This embodiment also includes a detection system, which may be omitted in other embodiments. The detection system includes at least three AOI main inspection components 8 and at least one AOI re-inspection component 9. In this embodiment, there are three AOI main inspection components 8 and one AOI re-inspection component 9. Each of the three AOI main inspection components 8 and AOI re-inspection component 9 is provided with a separate lifting mechanism 10. The three AOI main inspection components 8 are distributed at equal intervals, and the AOI re-inspection component 9 is located after the last AOI main inspection component 8. The AOI main inspection component 8 includes an alignment system 801 and an automatic focus tracking system 802. The alignment system 801 is used to adjust the position of the adsorption platform 40 along the X-axis, Y-axis, and θ-axis, and the automatic focus tracking system 802 is used to adjust the height of the AOI main inspection component 8. The AOI re-inspection component 9 includes a 2D detection component 901 and a 3D detection component 902. At least three AOI cameras are set up. By using the serpentine movement of the product on the lifting platform, the three AOI cameras can simultaneously inspect three parts of the product (evenly distributed according to the equidistant AOI main inspection component 8). Compared with using one AOI camera to inspect one product, this can save two-thirds of the scanning time and shorten the production cycle. This product is particularly suitable for inspecting thin glass substrates. The product thickness is preferably greater than or equal to 0.2mm. When inspecting thin glass substrates, it is necessary to pay close attention to the deformation of the thin glass substrate. When the thin glass substrate is placed on the ejector pins 400 of the lifting platform 4, it may cause a certain degree of deformation and become uneven. At this time, when using three AOI cameras to inspect different positions of the product, it is necessary to perform focus tracking. The height of the AOI main inspection component 8 and the AOI re-inspection component 9 can be adjusted by the lifting mechanism 10 to achieve accurate subsequent inspection.

[0041] Reference Figure 11 and Figure 12 The flipping system includes a fork assembly 11 capable of flipping at a certain angle along an axis parallel to the surface of the lifting platform 4. The fork assembly 11 includes a plurality of suction-lifting forks 110 parallel to the surface of the lifting platform 4 and spaced with the ejector pins 400. There are 3-7 suction-lifting forks 110; in this embodiment, there are 6. One of the suction-lifting forks 110 is also equipped with a second presence sensor 111. When the lifting platform 4 moves to the flipping position of the flipping system, the suction-lifting forks 110 and ejector pins 400 are spaced apart. The flipping system also includes a lifting module 12 and a rotating module 13 mounted on the lifting module 12 for achieving the flipping. The flipping angle of the fork assembly 11 is controlled within ±180 degrees. (Refer to...) Figure 13The rotating module 13 includes a rotating servo motor 130 mounted along the extension direction of the adsorption lifting fork 110. The output end of the rotating servo motor 130 is connected to the fork assembly 11. The fork assembly 11 also includes a rotatably connected mounting member 1101 and a fork connecting part 1102. The lifting module 12 is connected to the mounting member 1101. The output end of the rotating servo motor 130 is connected to the middle part of the fork connecting part 1102. One end of the adsorption lifting fork 110 is connected to the fork connecting part 1102. The adsorption lifting fork 110 is hollow inside and has a plurality of evenly distributed first vacuum suction cups 1103 on its surface.

[0042] The rotating module 13 also includes a blocking component for limiting the rotation angle of the toothed fork assembly 11 within a certain range. For example, in some embodiments, the blocking component may include a stopper (not shown) provided on the toothed fork assembly 11 and a limiter (not shown) provided on the mounting member 1101 or other locations. The stopper extends radially along the rotary servo motor 130, and the limiter extends axially along the rotary servo motor 130. The two work together to achieve the blocking action. The rotating module 13 also includes a fine-tuning component 133, which includes a sensor 1331 disposed on the toothed fork assembly 11 and several sensor components 1332 mounted on the mounting component 1101. For example, the several sensor components 1332 may include at least two sensor components 1332 arranged sequentially from top to bottom and facing the sensor 1331. When a sensor component 1332 senses the sensor 1331, it considers the toothed fork assembly 11 to be in the correct position. The sensor component 1332 transmits the signal indicating that the toothed fork assembly 11 is in the correct position to the rotary servo motor 130, which controls the rotation stop / start and the rotation angle. The blocking component controls the rotation angle of the toothed fork assembly 11 from 0 degrees to 190 degrees, and the fine-tuning component 133 controls the rotation angle of the toothed fork assembly 11 to 180 degrees.

[0043] The method for optically inspecting a glass substrate using the glass substrate flipping device described above is as follows:

[0044] S101, Upstream feeder fork feeds material to lifting platform 4 (initially manual loading and unloading): Ejector pin 400 rises along the Z-axis, ejector pin 400 draws a vacuum, lowers the upstream feeder fork to the first height (above the ejector pin), breaks the vacuum of the upstream feeder fork, then lowers the upstream feeder fork along the Z-axis to avoid a misalignment, and the upstream feeder fork retracts; vacuum is drawn on the surface of lifting platform 4 (taking the first adsorption area as an example), ejector pin 400 lowers along the Z-axis to the second height (surface of lifting platform 4), the glass substrate (hereinafter referred to as the sheet) falls onto lifting platform 4, the first registered sensor 405 senses the sheet, ejector pin 400 breaks the vacuum, and ejector pin 400 lowers along the Z-axis to the third height (below the lifting platform). The product to be tested is placed on lifting platform 4; this is the sheet exchange process.

[0045] S102, First Side Inspection (A Side): Includes three steps: a) Alignment: Move the lifting platform 4 to the alignment camera mark1 and take pictures. Move the lifting platform 4 to the alignment camera mark2 and take pictures. Adjust the rotation drive component 410 according to the results to drive the lifting platform 4 to rotate along the θ axis to a suitable angle (alignment); b) Centering: Move the lifting platform 4 to the alignment camera mark3 and take pictures. Calculate the center position; c) Inspection: Use the moving mechanism to move the lifting platform 4 to the inspection position of the inspection system. Through the serpentine movement of the lifting platform 4 (line scanning process), the three sets of AOI cameras of the AOI main inspection component 8 can simultaneously perform 2D inspection and measurement on the three parts of the product (evenly divided according to the equal spacing of the AOI main inspection component 8). Then, the AOI re-inspection component 9 is used to perform 2D visual inspection and 3D visual inspection on the product (but after the analysis of the results of the AOI main inspection component 8, it is deemed necessary to perform AOI re-inspection, but it is not mandatory). The first side of the product to be tested is completed.

[0046] S103, Flipping (A Side to B Side): Move the lifting platform 4 to the clearance position, break the vacuum on the surface of the lifting platform 4, and draw in the vacuum with the ejector pin 400. The ejector pin 400 rises slowly along the Z-axis; the adsorption lifting fork 110 descends along the Z-axis to the safe receiving height (higher than the surface of the lifting platform 4, lower than the ejector pin 400), and moves the piece on the lifting platform 4 to the flipping position of the flipping system (fork receiving position). At this time, several adsorption lifting forks 110 are positioned exactly within the intervals between the ejector pins 400 without interference. The adsorption lifting forks 110 rise slowly along the Z-axis to the fork receiving position, and the fork assembly 11, located between the product to be tested and the surface of the lifting platform 4, carries the product to be tested. Product; The ejector pin 400 breaks the vacuum, the suction lifting fork 110 draws in a vacuum, the fork assembly 11 rises at high speed along the Z-axis, the lifting platform 4 moves to the clearance position and lowers the ejector pin 400 below the suction platform 40; the product to be tested is flipped 180 degrees using the fork assembly 11, the lifting platform 4 moves to the flipped position below the fork assembly 11; the suction lifting fork 110 descends at high speed along the Z-axis to the first height, the surface of the lifting platform 4 draws in a vacuum, the suction lifting fork 110 descends at a lower speed along the Z-axis to the second height (the surface of the lifting platform 4), the suction lifting fork 110 breaks the vacuum, and the product to be tested on the fork assembly 11 is placed on the lifting platform 4. This is the first flipping process.

[0047] S104, Second Side Inspection (B Side): Includes three steps: a) Alignment: Move the lifting platform 4 to the alignment camera mark1 and take pictures, then move the lifting platform 4 to the alignment camera mark2 and take pictures. Adjust the rotation drive component 410 according to the results to drive the lifting platform 4 to rotate along the θ axis to a suitable angle (alignment); b) Centering: Move the lifting platform 4 to the alignment camera mark3 and take pictures, and calculate the center position; c) Inspection: Use the moving mechanism to move the lifting platform 4 to the inspection position of the inspection system. Through the serpentine movement of the lifting platform 4 (line scanning process), the three sets of AOI cameras of the AOI main inspection component 8 can be used to simultaneously perform 2D inspection and measurement on the three parts of the product (evenly divided according to the equal spacing of the AOI main inspection component 8). Then, the AOI re-inspection component 9 is used to perform 2D visual inspection and 3D visual inspection on the product (but after the analysis of the results of the AOI main inspection component 8, it is deemed necessary to perform AOI re-inspection, but it is not mandatory). The second side of the product under test was inspected.

[0048] S105, Flipping (B Side to A Side): Move the lifting platform 4 to the clearance position, break the vacuum on the surface of the lifting platform 4, and draw in the vacuum with the ejector pin 400. The ejector pin 400 rises slowly along the Z-axis; the adsorption lifting fork 110 descends along the Z-axis to the safe receiving height (higher than the surface of the lifting platform 4, lower than the ejector pin 400), and moves the piece on the lifting platform 4 to the flipping position of the flipping system (fork receiving position). At this time, several adsorption lifting forks 110 are positioned exactly within the intervals between the ejector pins 400 without interference. The adsorption lifting forks 110 rise slowly along the Z-axis to the fork receiving position, and the fork is positioned between the product to be tested and the surface of the lifting platform 4. The fork assembly 11 carries the product to be tested; the ejector pin 400 breaks the vacuum, adsorbing and lifting the toothed fork 110 to draw in a vacuum, and the toothed fork assembly 11 rises at high speed along the Z-axis, while the lifting platform 4 moves to the clearance position; the toothed fork assembly 11 is used to flip the product to be tested 180 degrees, and the lifting platform 4 moves to the flipped position below the toothed fork assembly 44; the adsorbing and lifting toothed fork 110 descends at high speed along the Z-axis to the first height, and the surface of the lifting platform 4 draws in a vacuum, and the adsorbing and lifting toothed fork 110 descends at a low speed along the Z-axis to the second height (the surface of the lifting platform 4), the adsorbing and lifting toothed fork 110 breaks the vacuum, and the product to be tested on the toothed fork assembly 11 is placed on the lifting platform 4. This is the second flipping process.

[0049] S106. Move the lifting platform 4 to the discharge position (same as the inlet position), break the vacuum on the surface of the lifting platform 4, and the ejector pin 400 draws in the vacuum. Raise the ejector pin 400 along the Z-axis, and extend the upstream toothed fork to the receiving safety position (located above the surface of the lifting platform 4 and below the ejector pin 400). Break the vacuum on the ejector pin 400, and raise the upstream toothed fork at a low speed along the Z-axis to the first height. The upstream toothed fork draws in the vacuum, rises to the safety position, and retracts. Unload the inspected product.

[0050] In this embodiment, product loading and unloading are performed using an upstream fork, meaning it is connected to upstream and downstream material handling equipment for online production. In other embodiments, manual loading and unloading can also be used, resulting in offline production. This invention provides a glass substrate flipping device with high motion precision, short production cycle, and the ability to inspect both sides. The device is compact, improving factory space utilization; it also enables both online and offline inspection, further enhancing equipment utilization.

[0051] Example 2

[0052] A glass substrate flipping device is provided. Compared with Embodiment 1, it does not include the AOI inspection system, but only includes a moving system and a flipping system, and can be used solely for the transfer and flipping of glass substrates. It can also be used in conjunction with other inspection systems. The above description of the embodiments is only for the purpose of helping to understand the method and core idea of ​​this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principle of this utility model, and these improvements and modifications also fall within the scope of protection of the claims of this utility model.

Claims

1. A glass substrate flipping device, characterized in that, The system includes a moving system and a flipping system. The moving system includes a moving mechanism and a lifting platform (4) mounted on the moving mechanism. The moving mechanism moves the lifting platform (4) to any position in the flipping or avoidance position of the flipping system. The lifting platform (4) includes a pin assembly that can pass through its surface and achieve lifting and lowering. The pin assembly includes a plurality of pins (400) spaced apart. The flipping system includes a toothed fork assembly (11) that can flip at a certain angle along an axis parallel to the surface of the lifting platform (4). The toothed fork assembly (11) includes a plurality of suction lifting toothed forks (110) that are parallel to the surface of the lifting platform (4) and match the spacing between the pins (400).

2. The glass substrate flipping device according to claim 1, characterized in that, The flipping system also includes a lifting module (12) and a rotating module (13) mounted on the lifting module (12) for flipping. The flipping angle of the tooth fork assembly (11) is controlled within ±180 degrees. The rotating module (13) includes a rotating servo motor (130) mounted along the extension direction of the adsorption lifting tooth fork (110). The output end of the rotating servo motor (130) is connected to the tooth fork assembly (11).

3. The glass substrate flipping device according to claim 2, characterized in that, The rotating module (13) also includes a blocking component for limiting the rotation angle of the toothed fork assembly (11) within a certain range.

4. The glass substrate flipping device according to claim 3, characterized in that, The fork assembly (11) further includes a rotatably connected mounting part (1101) and a fork connecting part (1102). The lifting module (12) is connected to the mounting part (1101). The output end of the rotary servo motor (130) is connected to the middle part of the fork connecting part (1102). One end of the suction lifting fork (110) is connected to the fork connecting part (1102). The suction lifting fork (110) is hollow inside and has several evenly distributed first true forks on its surface. The vacuum suction cup (1103) is also included in the rotating module (13). The blocking component controls the flip angle of the toothed fork assembly (11) from 0 degrees to 190 degrees. The fine adjustment component (133) controls the rotation angle of the toothed fork assembly (11) at 180 degrees. The fine adjustment component (133) includes a sensor (1331) disposed on the toothed fork assembly (11) and a plurality of sensing components (1332) mounted on the mounting component (1101).

5. The glass substrate flipping device according to claim 1, characterized in that, The lifting platform (4) includes a first pin group (41) and a second pin group (42). The first pin group (41) and the second pin group (42) each have 3-7 pins (400) arranged in a straight line. The first pin group (41) and the second pin group (42) are arranged in parallel opposite directions and are used to support the two sides of the glass substrate respectively. The surface of the lifting platform (4) is treated with black hard anodizing. An L-shaped positioning element (403) and a straight positioning element (404) are provided on one side of the lifting platform (4). There are 3-7 suction lifting tooth forks (110). When the lifting platform (4) moves to the flip position of the flipping system, the suction lifting tooth forks (110) and the pins (400) are spaced apart.

6. The glass substrate flipping device according to claim 5, characterized in that, The lifting platform (4) is also provided with a first registration sensor (405) in the middle. At least two sets of first ejector pin groups (41) are provided radially on one side of the first registration sensor (405), and at least two sets of second ejector pin groups (42) are provided radially on the other side. The distance between adjacent first ejector pin groups (41) and second ejector pin groups (42) is 150-200mm. The distance between two adjacent first ejector pin groups (41) or two adjacent second ejector pin groups (42) is 100-150mm. The distance between two ejector pins (400) in the same first ejector pin group (41) or second ejector pin group (42) is 100-150mm. The ejector pin (400) includes a second vacuum suction cup (401) provided at the top and a push rod (402) connected to the second vacuum suction cup (401).

7. The glass substrate flipping device according to claim 6, characterized in that, The lifting platform (4) includes an adsorption platform (40), which includes a first adsorption area with a plurality of first adsorption holes (406) and a second adsorption area with a plurality of second adsorption holes (407). The first adsorption area and the second adsorption area are connected to a switching valve (408). The first adsorption holes (406) are arranged linearly on both sides of each of the first pin group (41) and the second pin group (42). The second adsorption holes (407) are arranged linearly along the circumference of the adsorption platform (40) on the outside of the first adsorption area, and at least two rows of the second adsorption holes (407) are arranged along the radial direction of the adsorption platform (40).

8. The glass substrate flipping device according to claim 7, characterized in that, The lifting platform (4) further includes an installation platform (43), on which the adsorption platform (40) and the ejector pin assembly are mounted. The installation platform (43) includes a gas distribution plate (409) communicating with the ejector rod (402) for gas flow during vacuuming. The installation platform (43) also includes a rotary drive assembly (410), a first drive assembly (411), and a second drive assembly (412). Both the first drive assembly (411) and the second drive assembly (412) include an installation plate (4110) and two... The guide rail (4111) and the slide module (4112) are mounted on the mounting plate (4110), the slide module (4112) is mounted on the guide rail (4111), the first ejector pin group (41) is mounted on the slide module (4112) of the first drive assembly (411), and the second ejector pin group (42) is mounted on the slide module (4112) of the second drive assembly (412); the rotary drive assembly (410) drives the lifting platform (4) to rotate along the θ axis.

9. The glass substrate flipping device according to claim 1, characterized in that, The moving mechanism includes a base, a Y-axis module (5) mounted on the base, and an X-axis module (6) mounted on the Y-axis module (5). The lifting platform (4) is mounted on the X-axis module (6). The X-axis module (6) includes an X-axis linear motor (601) and an X-axis rail (602). The Y-axis module (5) is a dual-drive mechanism, including two parallel Y-axis linear motors (501) and Y-axis rails (502) located on both sides of each Y-axis linear motor (501).

10. The glass substrate flipping device according to claim 9, characterized in that, The mounting holes of the X-axis rail (602) and the Y-axis rail (502) are reinforced; both sides of the X-axis rail (602) and the Y-axis rail (502) are provided with adjustment mechanisms. The adjustment mechanisms are composed of several adjustment units (7) evenly distributed along the extension direction of the X-axis rail (602) and the Y-axis rail (502). Each adjustment unit (7) mainly consists of a push-tightening column (701) and a pressing screw (702). The head of the pressing screw (702) is provided with a bevel (703). When the pressing screw (702) is screwed into the corresponding mounting hole on the base, the push-tightening column (701) is pressed by the bevel (703) and pushed towards the side of the X-axis rail (602) and the Y-axis rail (502).

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