Motion detection device and chemical vapor deposition equipment

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a motion detection device and chemical vapor deposition equipment, and the motion detection device comprises a rotating unit, a linear motion unit, a first detection unit and a second detection unit, the rotating unit is connected with the linear motion unit and used for converting rotating motion of the rotating unit into linear motion of the linear motion unit; the first detection unit is at least used for detecting the rotating angle of the rotating unit; the second detection unit is used for detecting the linear motion distance of the linear motion unit. Through the improvement of the motion detection device, the detection accuracy of the motion distance of the process part is effectively monitored.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a motion detection device and a chemical vapor deposition equipment. Background Technology

[0002] Drive devices are widely used in semiconductor equipment applications, such as in manufacturing processes like etching, deposition, and photolithography.

[0003] Taking chemical vapor deposition (CVD) equipment as an example, CVD equipment is a device used to generate thin films on the surface of a substrate through chemical reactions. CVD technology introduces a gaseous reactant containing elements that constitute the thin film into a reaction chamber, where a chemical reaction occurs under high temperature and pressure to generate a solid thin film that is deposited on the substrate.

[0004] During the deposition process, a drive unit is typically required to move the process components, such as driving them in a linear motion. The position of these components within the deposition chamber directly affects the process quality. For example, a change in the position of a component can alter the location of the substrate it supports, leading to changes in the substrate's ambient temperature and consequently affecting the process reaction. Furthermore, deviations in the component's position may cause interference with other components.

[0005] In vapor phase chemical deposition (VCD) equipment, the movement distance of process components is typically measured using a grating ruler. When the grating ruler itself introduces measurement errors, the machine cannot effectively detect the anomaly, easily leading to deviations in the movement position of the process components, which in turn affects the process reaction. To avoid this, manual inspection is usually required to check the guide rail operation and for any abnormalities in the drive mechanism.

[0006] Therefore, this utility model provides a motion detection device and a chemical vapor deposition equipment. By improving the motion detection device, the accuracy of the detection distance of process components can be effectively monitored. Utility Model Content

[0007] The purpose of this invention is to provide a motion detection device and a chemical vapor deposition equipment. By improving the motion detection device, the accuracy of the detection distance of process components can be effectively monitored.

[0008] This utility model provides a motion detection device, comprising: a rotation unit, a linear motion unit, a first detection unit, and a second detection unit;

[0009] The rotating unit is connected to the linear motion unit and is used to convert the rotational motion of the rotating unit into the linear motion of the linear motion unit.

[0010] The first detection unit is used to detect at least the rotation angle of the rotation unit;

[0011] The second detection unit is used to detect the linear motion distance of the linear motion unit.

[0012] Optionally, the first detection unit is an encoder;

[0013] The rotation unit includes an active rotating component, and the encoder is at least partially disposed on the active rotating component for detecting the rotation angle of the active rotating component.

[0014] Optionally, the rotating unit further includes a stationary component, and the active rotating component is rotatably disposed on the stationary component.

[0015] Optionally, the rotating unit further includes a driven rotating component, which is in transmission engagement with the driving rotating component. The driven rotating component has a transmission thread, and the linear motion unit is connected to the driven rotating component through the transmission thread.

[0016] Optionally, the linear motion unit includes a first linear motion component and a second linear motion component, wherein the first linear motion component is connected to the driven rotating component via the transmission thread, and the second linear motion component is fixedly connected to the first linear motion component.

[0017] Optionally, the second detection unit includes a magnetic scale and a magnetic grating reading head. The magnetic scale is disposed on the linear motion unit, and the magnetic grating reading head is used to sense the change in the magnetic field of the magnetic scale as it moves with the linear motion unit.

[0018] Optionally, when the rotating unit includes a stationary component, the magnetic grating read head is disposed on the stationary component.

[0019] Optionally, the motion detection device further includes a control unit, which is connected to the first detection unit and the second detection unit.

[0020] Optionally, the motion detection device further includes an alarm unit, which is connected to the control unit.

[0021] This invention also provides a chemical vapor deposition apparatus, which includes the motion detection device described above.

[0022] In summary, the motion detection device includes: a rotation unit, a linear motion unit, a first detection unit, and a second detection unit; the rotation unit is connected to the linear motion unit and is used to convert the rotational motion of the rotation unit into the linear motion of the linear motion unit; the first detection unit is used to detect at least the rotation angle of the rotation unit; and the second detection unit is used to detect the linear motion distance of the linear motion unit.

[0023] With this configuration, the motion detection device described above allows the first detection unit to measure the rotation angle of the rotating unit and convert it into first distance data for the linear motion unit. The second detection unit can directly detect the second distance data for the linear motion unit. By comparing the first and second distance data, it can be determined whether the detected distance data is abnormal. This avoids deviations in the movement position of process components due to distance detection errors, thus preventing impacts on the process response. It also avoids interference with other components caused by positional deviations of process components. Furthermore, it eliminates the need for manual inspection of the guide rail operation and drive for abnormalities, reducing labor costs. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of a motion detection device according to some embodiments of the present invention. Figure 1 ;

[0025] Figure 2 This is a structural block diagram of a motion detection device according to some embodiments of the present invention.

[0026] In the attached diagram:

[0027] 10-Rotation unit;

[0028] 11-Driving rotating component; 12-Stationary component; 13-Driven rotating component; 14-Coupling;

[0029] 20 - Linear motion unit; 21 - First linear motion component; 22 - Second linear motion component;

[0030] 30 - First Detection Unit;

[0031] 40 - Second detection unit; 41 - Magnetic scale; 42 - Magnetic grating reader;

[0032] 50 - Control Unit;

[0033] 60 - Alarm Unit;

[0034] 70 - Display screen. Detailed Implementation

[0035] The motion detection device proposed in this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0036] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the terms “at least two” or “more than” are generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Furthermore, the terms "installed," "connected," and "attached," as used in this utility model, and the term "set" on one element from another, should be interpreted broadly. They generally only indicate a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, meaning one element can be located inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances. Additionally, directional terms such as above, below, up, down, upward, downward, left, and right are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0037] This utility model proposes a motion detection device, comprising: a rotation unit 10, a linear motion unit 20, a first detection unit 30, and a second detection unit 40;

[0038] The rotation unit 10 is connected to the linear motion unit 20 and is used to convert the rotational motion of the rotation unit 10 into the linear motion of the linear motion unit 20.

[0039] The first detection unit 30 is used to detect at least the rotation angle of the rotation unit 10;

[0040] The second detection unit 40 is used to detect the linear motion distance of the linear motion unit 20.

[0041] Please refer to Figure 1As shown, in this embodiment, the rotating unit 10 includes a driving rotating component 11 and a stationary component 12. The driving rotating component 11 is rotatably mounted on the stationary component 12 and can be driven to rotate. In this embodiment, the driving rotating component 11 can be an assembly consisting of the rotor and output shaft of a motor, and the stationary component 12 is an assembly consisting of the stator and housing of a motor. The stator is installed inside the housing, the rotor is installed inside the stator, and the output shaft is driven by the rotor. The transmission unit 10 can use a motor type selected based on its usage requirements, such as a three-phase asynchronous motor or a permanent magnet synchronous motor.

[0042] In other alternative embodiments, the rotating unit 10 may be an internal combustion engine, with its driving rotating component 11 corresponding to the crankshaft and its stationary component 12 corresponding to the cylinder block of the internal combustion engine. Furthermore, the rotating unit 10 may also include connecting rods, a crankshaft, a valve train, and a fuel supply system.

[0043] The aforementioned rotating unit 10 serves as a power source, used to convert rotational motion into linear motion of the linear motion unit 20.

[0044] Please refer to Figure 1 As shown, the rotating unit 10 also includes a driven rotating component 13, which is connected to the driving rotating component 11 via a coupling 14. The coupling 14 can be a rigid coupling, such as a flange coupling, a sleeve coupling, or a clamp coupling. The coupling 14 can be selected based on its usage requirements. The connection method between the coupling 14, the driven rotating component 13, and the driving rotating component 11 is an existing method, which will not be described in detail here.

[0045] The driven rotating member 13 has a transmission thread, and the linear motion unit 20 is connected to the driven rotating member 13 through the transmission thread.

[0046] In this embodiment, the driven rotating component 13 is a lead screw with an external thread, which serves as the transmission thread described above. The linear motion unit 20 has an internal threaded hole, and the driven rotating component 13 is threadedly engaged with the internal threaded hole.

[0047] The driven rotating component 13 uses a threaded transmission method to convert the rotational motion of the rotating unit 10 into the linear motion of the linear motion unit 20. In other alternative embodiments, the driven rotating component 13 can be a multi-link, which, together with the driving rotating component 11 and the linear motion unit 20, can form a crank-slider structure (the linear motion unit 20 is equivalent to the slider in the crank-slider structure). In this case, the rotating unit 10 converts the rotational motion of the rotating unit 10 into the linear motion of the linear motion unit 20 through the multi-link. The specific transmission method of the driven rotating component 13 can be adaptively adjusted based on the actual linear motion requirements.

[0048] Please continue to refer to this. Figure 1 As shown, in this embodiment, the linear motion unit 20 includes a first linear motion component 21 and a second linear motion component 22. The first linear motion component 21 is connected to the driven rotating component 13 through the transmission thread, and the second linear motion component 22 is fixedly connected to the first linear motion component 21.

[0049] In this embodiment, the first linear motion component 21 has an internal threaded hole, which engages with the transmission thread of the driven rotating component 13. That is, when the driven rotating component 13 rotates, it drives the first linear motion component 21 to move linearly along the axial direction of the driven rotating component 13. During the rotation of the driven rotating component 13, to prevent the first linear motion component 21 from rotating, either the first linear motion component 21 or the second linear motion component 22 can achieve a single-degree-of-freedom linear sliding engagement with the track on the machine tool. This allows either the first linear motion component 21 or the second linear motion component 22 to move linearly with a single degree of freedom only along a preset direction.

[0050] The linear motion unit 20 is configured as a split structure consisting of a first linear motion component 21 and a second linear motion component 22. The first linear motion component 21 is directly connected to the driven rotating component 13 via a threaded transmission, while the second linear motion component 22 is used to directly connect to the driven process component. The first linear motion component 21 facilitates standardized design, while the second linear motion component 22 allows for adaptive modification of its structure based on the specific connection requirements of the process component, thus broadening the applicability of the linear motion unit 20. In other alternative embodiments, the linear motion unit 20 can be a one-piece slider structure, and the specific structure of the linear motion unit 20 can be flexibly adjusted based on actual usage requirements.

[0051] In this embodiment, the second linear motion component 22 and the first linear motion component 21 are connected in a detachable manner, for example, by using a flange and bolts. This detachable connection facilitates the replacement or maintenance of both components. In other alternative embodiments, the second linear motion component 22 and the first linear motion component 21 can be connected by welding or other known connection methods.

[0052] In this embodiment, both the second linear motion component 22 and the first linear motion component 21 are block structures. In other alternative embodiments, the specific shapes of the second linear motion component 22 and the first linear motion component 21 can be adjusted based on actual usage requirements. For example, the first linear motion component 21 can adopt a rod-like structure, and the second linear motion component 22 can adopt a disc-like structure.

[0053] Please continue to refer to this. Figure 1As shown, in this embodiment, the first detection unit 30 is an encoder; the encoder is at least partially disposed on the active rotating member 11 and is used to detect the rotation angle of the active rotating member 11.

[0054] In this embodiment, taking an optical encoder as an example, the encoder mainly consists of a light source, a code disk, a detection grating, a photosensitive device, and a conversion circuit. The code disk has radially spaced light-transmitting slits with the same pitch; the interval between two adjacent slits represents one increment cycle. The detection grating has two sets of light-transmitting slits, A and B, corresponding to those on the code disk, used to allow light between the light source and the photosensitive device to pass through or be blocked. The pitch of the light-transmitting slits on the detection grating is the same as that on the code disk, and the two sets of slits are offset by 1 / 4 pitch, which causes a 90° phase difference in the signal output by the photosensitive device. The encoder's code disk is connected to the active rotating component 11. The code disk rotates with the active rotating component 11, while the detection grating remains relatively stationary. Light passes through the slits on the code disk and the detection grating and shines onto the photosensitive device. The photosensitive device then outputs two sets of sinusoidal electrical signals with a 90° phase difference. These electrical signals are processed by a conversion circuit to obtain information about the rotation angle or speed of the active rotating component 11. The aforementioned light source, code disk, detection grating, photosensitive device, and conversion circuit are all existing technologies. Existing encoders integrating these components can be purchased, such as PVM type encoders, which will not be described in detail here.

[0055] When the rotation angle of the driving rotating component 11 is known, the rotation angle of the driven rotating component 13 is also known. At this point, the linear motion distance of the first linear motion component 21 can be calculated based on the rotation angle of the driven rotating component 13 and the pitch of the transmission thread. This linear motion distance can be automatically calculated by an encoder or manually calculated based on the detected angle and pitch. Therefore, the linear motion distance of the linear motion unit 20 can be calculated directly or indirectly through the first detection unit 30.

[0056] In other alternative embodiments, when the active rotating member 11 uses other transmission methods (such as the crank-slider transmission method) to convert rotational motion into linear motion, its rotation angle and linear motion distance have a certain conversion relationship, and the linear motion distance of the linear motion unit 20 can be calculated based on the detected rotation angle and the conversion relationship.

[0057] The above embodiment provides an example of an optical encoder. In other alternative embodiments, the first detection unit 30 may employ a magnetoelectric, inductive, or capacitive encoder, and the specific type of encoder may be selected based on specific usage requirements.

[0058] In this embodiment, the encoder can be coaxially mounted, with its code disk coaxially mounted with the driving rotating component 11. In other alternative embodiments, the encoder can be mounted at the end of the driven rotating component 13, forming a coaxial mounting. In other alternative embodiments, the encoder can also be independently mounted. The encoder mounting method and wiring method are existing technologies and will not be described in detail here.

[0059] In this embodiment, the first detection unit 30 employs an encoder. In other alternative embodiments, the first detection unit 30 may employ other known angle sensors such as resistive, capacitive, magnetoelectric, or photoelectric sensors. The first detection unit 30 may select an existing sensor based on specific usage requirements, such as a WDD-type angle sensor.

[0060] Furthermore, in this embodiment, the second detection unit 40 is a magnetic scale ruler. The second detection unit 40 includes a magnetic scale 41 and a magnetic scale reading head 42. The magnetic scale 41 is disposed on the linear motion unit 20, and the magnetic scale reading head 42 is used to sense the change in magnetic field of the magnetic scale 41 as it moves with the linear motion unit 20.

[0061] The magnetic scale 41 serves as a measurement reference and is typically made of magnetic material with equally spaced magnetic signals magnetized on its surface. The magnetic grating reader 42 is a key component for reading the magnetic signals on the magnetic scale 41 and consists of an iron core, a coil, and a housing.

[0062] In addition, the second detection unit 40 also includes a detection circuit, which processes the electrical signal output by the magnetic head and converts it into a standard signal. The magnetic scale 41 is magnetized with equally spaced magnetic signals (such as sine waves or square waves) according to a certain pattern. When the magnetic grating read head 42 moves relative to the magnetic scale 41, the coil in the magnetic grating read head 42 induces an electrical signal corresponding to the change in the magnetic signal. The detection circuit converts the electrical signal into a standard signal to obtain the displacement of the magnetic scale 41, thereby realizing the detection of the movement distance of the linear motion unit 20. The specific structure and usage of the magnetic scale 41 and the magnetic grating read head 42 are existing technologies and will not be described in detail here.

[0063] The magnetic scale 41 and the magnetic grating reading head 42 are part of the magnetic grating ruler. In this embodiment, the second detection unit 40 can be purchased as an LM type magnetic grating ruler, which comes with the magnetic scale 41, magnetic grating reading head 42 and detection circuit mentioned above.

[0064] To ensure a stable output signal amplitude for the magnetic head, and considering the high magnetic reluctance of air, a large and variable gap is not allowed between the magnetic scale 41 and the magnetic grating reading head 42. Therefore, it is preferable that the magnetic scale 41 and the magnetic grating reading head 42 are in contact. The magnetic grating scale offers high measurement accuracy, reaching the micrometer or even nanometer level. It has strong anti-interference capabilities, is suitable for stable operation in harsh environments such as high temperature and high humidity, and is easy to install without complex calibration, making installation simple and quick.

[0065] In other alternative embodiments, the second detection unit 40 may employ other distance sensors, such as laser sensors or infrared sensors.

[0066] In this embodiment, the magnetic grating reading head 42 is disposed on the stationary component 12. When the rotating unit 10 is a motor, the magnetic grating reading head 42 can be fixedly disposed on the motor housing. The magnetic grating reading head 42 is disposed on the stationary component 12 to ensure that the magnetic grating reading head 42 is relatively stationary, thereby accurately measuring the movement distance of the magnetic scale 41. In other alternative embodiments, the magnetic grating reading head 42 can also be disposed on other relatively stationary components of the machine tool, such as the machine tool housing.

[0067] Furthermore, the motion detection device also includes a control unit 50, which is connected to the first detection unit 30 and the second detection unit 40.

[0068] In this embodiment, the control unit 50 is a programmable logic controller (PLC). A PLC is a digital computing controller with a microprocessor used for automation control, which can load control instructions into memory for storage and execution at any time. A PLC consists of functional units such as a CPU, instruction and data memory, input / output interfaces, power supply, and digital-to-analog converter.

[0069] The control unit 50 can communicate with multiple peripheral devices via a bus subsystem. These peripheral devices may include the first detection unit 30 and the second detection unit 40 described above, a storage system, a user interface input device, a user interface output device, and a network interface.

[0070] A network interface provides an interface to external networks and / or other devices. Network interfaces include one or more interfaces known in the art, such as LAN, WLAN, Bluetooth, other wired and wireless interfaces, etc.

[0071] User interface input devices may also include keyboards, clicking devices such as mice, trackballs, touchpads or graphics tablets, scanners, foot pedals, joysticks, touchscreens embedded in displays, audio input devices such as voice recognition systems, microphones, and other types of input devices. Generally, the term "input device" is intended to encompass a variety of conventional and proprietary devices and methods for inputting information into a controller.

[0072] In this embodiment, the user interface output device is a display screen 70, such as a liquid crystal display (LCD), a light-emitting diode (LED) display, a touch screen display, etc. The display screen 70 can display the first distance data detected by the first detection unit 30 and the second distance data detected by the second detection unit 40. The user interface output device may also include a display subsystem, a printer, a fax machine, or a non-visual display such as an audio output device. The display subsystem may be a flat panel device, or it may provide a non-visual display, such as via an audio output device. Generally, the term "output device" is intended to include various conventional and proprietary devices and methods for outputting information from the control unit 50 to the user.

[0073] The storage system can store the basic program designs and data structures that implement the various functions of this invention. For example, as described herein, databases and modules that implement the functions of the methods of this invention can be stored in the storage system. These software modules are typically executed by a processor. In a distributed environment, software modules can be stored on multiple computer systems and executed by the processors of multiple computer systems. The storage system typically includes a memory subsystem and a file storage system. The memory subsystem typically includes multiple memories, including main random access memory (RAM) for storing instructions and data during program execution and read-only memory (ROM) in which fixed instructions are stored. The file storage subsystem provides permanent (non-volatile) storage for program and data files. The file storage system 60 may include hard disk drives and associated removable media, disc drives (CDs), optical drives, DVDs, solid-state storage, and / or other removable media. One or more of these drives may be located at a remote location on another connected computer at another point coupled to the control unit 50. Modules that implement the functions of this invention may be stored by the file storage system.

[0074] The bus subsystem provides components for enabling the various parts and subsystems of control unit 50 to communicate with each other as intended. The various subsystems and parts of control unit 50 do not need to be in the same physical location, but can be distributed across various locations within a distributed network. The bus subsystem can be a single bus, or multiple buses can be configured based on requirements.

[0075] In this embodiment, the first detection unit 30 and the second detection unit 40 are connected to the control unit 50 via two input terminals of a bus subsystem. The first detection unit 30 inputs the detected first distance data (which can be obtained by converting the detected angle) to the control unit 50, and the second detection unit 40 inputs the detected second distance data to the control unit 50. Based on its digital processing capabilities, the control unit 50 calculates the absolute value of the difference between the first and second distance data. If the absolute value of the difference is less than a threshold, the first and second distance data are considered to be consistent, and the distance detection is correct. If the absolute value of the difference is greater than or equal to the threshold, the first and second distance data are considered to be inconsistent, and the distance detection is abnormal. The first detection unit 30 and the second detection unit 40 can mutually verify the data, and can accurately determine whether the measured distance data is correct.

[0076] In other alternative embodiments, the control unit 50 may be other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc.

[0077] Furthermore, in this embodiment, the motion detection device also includes an alarm unit 60, which is connected to the control unit 50.

[0078] The alarm unit 60 is connected to the control unit 50 as a peripheral device via a bus subsystem. The alarm is used to issue warnings, such as through audio tone, visual signals, tactile feedback or other warnings; for example, the alarm can be an alarm light, which can be used to sound an alarm by flashing the alarm light, or the alarm can be a buzzer, which can be used to sound an alarm, or the alarm can be a warning sign integrated into the display interface.

[0079] If the absolute value of the difference between the first distance data and the second distance data is greater than or equal to the threshold, the first distance data and the second distance data are considered abnormal. At this time, the alarm unit 60 sends an alarm signal to the alarm unit 60 to realize the alarm and remind that the detection data is abnormal.

[0080] This embodiment also provides a chemical vapor deposition (CVD) apparatus, which includes the motion detection device described above. The CVD apparatus also includes a reaction chamber, a gas delivery system, a heating system, a vacuum system, and a control system. A portion of the second linear motion component 22 is located within the reaction chamber to drive the process components within the reaction chamber to perform linear motion. The difference between this CVD apparatus and existing equipment lies in the replacement of the aforementioned motion detection device; other structural elements remain consistent with existing equipment structures and will not be elaborated further here.

[0081] In addition, the motion detection device described above can also be used in other semiconductor devices, such as in etching, deposition and photolithography related equipment.

[0082] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0083] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A motion detection device, characterized in that, include: Rotation unit, linear motion unit, first detection unit, and second detection unit; The rotating unit is connected to the linear motion unit and is used to convert the rotational motion of the rotating unit into the linear motion of the linear motion unit. The first detection unit is used to detect at least the rotation angle of the rotation unit; The second detection unit is used to detect the linear motion distance of the linear motion unit.

2. The motion detection device as described in claim 1, characterized in that, The first detection unit is an encoder; The rotation unit includes an active rotating component, and the encoder is at least partially disposed on the active rotating component for detecting the rotation angle of the active rotating component.

3. The motion detection device as described in claim 2, characterized in that, The rotating unit also includes a stationary component, and the active rotating component is rotatably mounted on the stationary component.

4. The motion detection device as described in claim 2, characterized in that, The rotating unit also includes a driven rotating component, which is in transmission cooperation with the driving rotating component. The driven rotating component has a transmission thread, and the linear motion unit is connected to the driven rotating component through the transmission thread.

5. The motion detection device as described in claim 4, characterized in that, The linear motion unit includes a first linear motion component and a second linear motion component. The first linear motion component is connected to the driven rotating component via the transmission thread, and the second linear motion component is fixedly connected to the first linear motion component.

6. The motion detection device according to any one of claims 1 to 5, characterized in that, The second detection unit includes a magnetic scale and a magnetic grating reading head. The magnetic scale is disposed on the linear motion unit, and the magnetic grating reading head is used to sense the change in the magnetic field of the magnetic scale as it moves with the linear motion unit.

7. The motion detection device as described in claim 6, characterized in that, When the rotating unit includes a stationary component, the magnetic grating read head is disposed on the stationary component.

8. The motion detection device as described in claim 1, characterized in that, The motion detection device also includes a control unit, which is connected to the first detection unit and the second detection unit.

9. The motion detection device as described in claim 8, characterized in that, The motion detection device also includes an alarm unit, which is connected to the control unit.

10. A chemical vapor deposition apparatus, characterized in that, The chemical vapor deposition apparatus includes the motion detection device as described in any one of claims 1 to 9.

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