Thermal insulation cylinder for single crystal growth furnace

Abstract

The utility model discloses a thermal insulation cylinder for a single crystal growth furnace, which relates to the technical field of thermal insulation appliances for single crystal growth furnaces and comprises a vacuum outer shell and a support fixedly connected with the lower end of the vacuum outer shell, a circulating inner shell is mounted in the vacuum outer shell, the circulating inner shell and the vacuum outer shell are of a cavity structure, and a thermocouple and an air inlet pipe are mounted on the peripheral side of the vacuum outer shell; a stepping motor is mounted at the upper end of the vacuum shell; according to the utility model, the stepping motor is matched with the coupler and the coating table, so that the functions of driving the coating table to rotate and conveying reflective coating are achieved, the problem that the coating of the traditional heat preservation cylinder is difficult to uniformly coat is solved, and the coating coating efficiency and uniformity are improved; and through cooperation of the scraping plate and the spring, the effects of self-adaptive adjustment of the coating force and uniform coating scraping are achieved, the problems that damaged coating remains on the inner wall of the circulating inner shell and the scraping plate is prone to being damaged are solved, the coating smearing quality is improved, and the service life of the scraping plate is prolonged.

Description

Technical Field

[0001] This utility model relates to the technical field of heat preservation equipment for single crystal growth furnaces, and in particular to a heat preservation cylinder for single crystal growth furnaces. Background Technology

[0002] In the field of single crystal growth furnaces, the insulation cylinder is a core component. Its insulation performance, coating efficiency, and waste gas treatment capacity directly affect the quality of single crystal growth and production safety. With the refinement of single crystal preparation technology, higher requirements are placed on the comprehensive performance of the insulation cylinder.

[0003] Currently, traditional single crystal growth furnace insulation cylinders have significant defects in the coating application process. Most existing devices use manual or static spraying methods to apply reflective coatings to the inner wall of the insulation layer, which makes it difficult to achieve uniform coating coverage. Moreover, after long-term use, the inner wall is prone to residual hardened or damaged old coatings. Traditional rigid scrapers cannot adaptively adjust their force during cleaning and coating, and are prone to wear and even damage to the inner insulation layer due to hard contact, seriously affecting the coating quality and equipment lifespan. In addition, the process delay caused by low coating efficiency further restricts the stability and production efficiency of single crystal growth. Therefore, it is necessary to improve these issues. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a heat-insulating cylinder for a single crystal growth furnace.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a heat preservation cylinder for a single crystal growth furnace, comprising a vacuum outer shell and a support fixed to the lower end of the vacuum outer shell, wherein a circulating inner shell is installed inside the vacuum outer shell, the circulating inner shell and the vacuum outer shell are cavity structures, and thermocouples and an air inlet pipe are installed on the periphery of the vacuum outer shell; and a stepper motor is installed on the upper end of the vacuum outer shell.

[0006] Preferably, the thermocouple penetrates the upper end of the vacuum outer shell and the circulating inner shell, and the end of the thermocouple is suspended in the cavity of the circulating inner shell. The stepper motor drive end is fitted with a customized coupling, and the stepper motor drive end is fitted with a coating platform through the coupling.

[0007] Preferably, the customized coupling has sealed bearings installed at both ends of its inner side, and a paint tube is installed on one side of the coupling. The paint station has a U-shaped cavity structure, and a fan-shaped platform is sleeved on the top of the paint station. The bearing of the fan-shaped platform abuts against the inner wall of the coupling.

[0008] Preferably, there are two sliding grooves on one side of the coating table, and a flexible, high-temperature resistant scraper is hinged in the sliding groove. One end of the scraper abuts against two springs, and the other end of the spring abuts against one side of the sliding groove. Multiple one-way valves are installed at both ends of the inner cavity of the coating table, and multiple heating blocks are installed at equal intervals on the inner side of the coating table.

[0009] Preferably, a mounting platform is fixed to one side of the lower end of the inner casing of the circulation system. A collection platform is installed at the lower end of the mounting platform. The collection platform is concave, and an arc-shaped filter screen is installed at one end of the collection platform. The other end of the filter screen abuts against the lower end of the mounting platform, and a filter shell is installed inside the filter screen.

[0010] Preferably, two activated carbon lines are installed inside the filter housing, and an exhaust pipe is installed at the bottom of the collection platform, with the top of the exhaust pipe located inside the filter housing.

[0011] Compared with existing technologies, the beneficial effects of this utility model are as follows: This utility model, through the cooperation between a stepper motor, coupling, and coating platform, drives the coating platform to rotate and transport reflective coating, solving the problem of uneven coating application in traditional insulation cylinders and improving coating application efficiency and uniformity. Through the cooperation between the scraper and spring, it adaptively adjusts the coating force and evenly scrapes the coating, solving the problems of residual damaged coating on the inner wall of the circulating inner shell and easy scraper damage, thus improving coating application quality and scraper lifespan. Through the cooperation between the thermocouple and heating block, it monitors the temperature in real time and automatically replenishes the temperature, solving the problem of unstable temperature in the single crystal growth furnace and improving insulation accuracy and process stability. Through the cooperation between the filter screen, filter shell, and activated carbon, it performs multi-stage filtration of metal scraps and harmful gases in the growth furnace exhaust gas, solving the problem of incomplete exhaust gas treatment in traditional insulation cylinders and improving exhaust gas purification effect and environmental performance. Through the cooperation between the air inlet pipe and the vacuum shell, it fills in inert gas and forms a double insulation layer, solving the problem of excessive heat loss and improving the thermal insulation performance and energy utilization rate of the insulation cylinder. Attached Figure Description

[0012] The accompanying drawings, which are included to provide a further understanding of the present invention and form part of this application, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings:

[0013] Figure 1 This is a schematic diagram of the overall structure proposed in this utility model;

[0014] Figure 2 This is a half-sectional schematic diagram of the overall structure proposed in this utility model;

[0015] Figure 3The present utility model proposes Figure 2 Enlarged schematic diagram of section A in the middle;

[0016] Figure 4 The present utility model proposes Figure 2 Enlarged schematic diagram of section B;

[0017] Figure 5 This is a partial structural schematic diagram of the present invention;

[0018] Figure 6 The present utility model proposes Figure 5 Enlarged schematic diagram of section C in the middle;

[0019] Figure 7 This is a partial structural schematic diagram of the present invention.

[0020] The components in the diagram are numbered as follows: 1. Vacuum housing; 2. Support; 3. Stepper motor; 4. Thermocouple; 5. Inlet pipe; 6. Paint pipe; 7. Exhaust pipe; 8. Fan-shaped platform; 9. Coupling; 10. Circulation inner shell; 11. Paint platform; 12. Heating block; 13. Mounting platform; 14. Filter screen; 15. Collection platform; 16. Filter shell; 17. Activated carbon; 18. Scraper; 19. Spring. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Example: See Figure 1-7This utility model discloses a heat-insulating cylinder for a single crystal growth furnace, comprising a vacuum outer shell 1 and a support 2 fixed to the lower end of the vacuum outer shell 1. The vacuum outer shell 1 facilitates the installation of internal devices; the support 2 facilitates the support of the vacuum outer shell 1; a circulating inner shell 10 is installed inside the vacuum outer shell 1, facilitating the circulation of excess hot gas; the circulating inner shell 10 and the vacuum outer shell 1 form a cavity structure, and thermocouples 4 and an inlet pipe 5 are installed around the periphery of the vacuum outer shell 1; the thermocouples 4 facilitate the detection of the temperature of the circulating inner shell 10; the inlet pipe 5 facilitates the entry of inert gas to reduce heat loss; and a stepper motor 3 is installed at the upper end of the vacuum outer shell 1, facilitating the provision of driving force to the coating stage 11; the thermocouples 4 penetrate... The upper end of the vacuum outer shell 1 and the circulation inner shell 10, and the end of the thermocouple 4 are suspended in the cavity of the circulation inner shell 10. The drive end of the stepper motor 3 is fitted with a custom coupling 9. The coupling 9 facilitates the driving force of the stepper motor 3 on the paint station 11 and facilitates the pumping of paint into the paint tube 6. The drive end of the stepper motor 3 is fitted with the paint station 11 through the coupling 9. Both ends of the custom coupling 9 are equipped with sealed bearings, and the paint tube 6 is installed on one side of the coupling 9 to facilitate the entry of paint. The paint station 11 has a U-shaped cavity structure, and a fan-shaped platform 8 is fitted on the top of the paint station 11 to facilitate the flow of paint into the paint station 11. The bearing of the fan-shaped platform 8 abuts against the inner wall of the coupling 9.

[0023] In this invention, the coating table 11 has two sliding grooves on one side, and a flexible, high-temperature resistant scraper 18 is hinged within the sliding grooves. The scraper 18 facilitates the even application of coating during the coating process. One end of the scraper 18 abuts against two springs 19, which provide self-driving resistance. The other end of the springs 19 abuts against one side of the sliding grooves. Multiple equidistant one-way valves are installed at both ends of the inner cavity of the coating table 11, and multiple equidistant heating blocks 12 are installed on the inner side of the coating table 11, which provide a temporary heat source for the growth furnace. A mounting platform 13 is fixed to one side of the lower end of the circulating inner shell 10, facilitating the installation of the growth table. A collection platform 15 is installed at the lower end of the mounting platform 13. The collection platform 15 is concave, which facilitates the collection of metal scraps from the growth furnace and waste liquid after coating. An arc-shaped filter screen 14 is installed at one end of the collection platform 15 for initial filtration of the exhaust gas. The other end of the filter screen 14 abuts against the lower end of the mounting platform 13, and a filter shell 16 is installed inside the filter screen 14, which facilitates the installation of activated carbon 17. Two activated carbons 17 are installed inside the filter shell 16, which facilitates the filtration of exhaust gas for discharge. An exhaust pipe 7 is installed at the bottom of the collection platform 15, which facilitates the discharge of exhaust gas. The top of the exhaust pipe 7 is located inside the filter shell 16.

[0024] Working Principle: When using this invention, powering on the device and starting the external paint pipe 6 will pump reflective paint into the coupling 9 via an external pump. Simultaneously, starting the stepper motor 3 will drive the paint platform 11 to rotate. The fan-shaped platform 8 will allow all the paint to flow into the paint platform 11. When the paint in the paint platform 11 reaches the pressure of the built-in one-way pipe, it will be applied to the inner wall of the circulation inner shell 10. As the paint platform 11 rotates, the scraper 18 will evenly scrape the paint onto the inner wall of the circulation inner shell 10. Meanwhile, the spring 19 is designed to prevent damaged paint from remaining on the inner wall of the circulation inner shell 10. When damaged paint is present, the spring 19 will provide adaptive force to the scraper 18 to prevent damage. Excess paint will flow into the collection platform 15 through the mounting platform 13. Inside the recessed platform, after the coating is applied, the stepper motor 3 is turned off and the growth furnace is started. At the same time, the inert gas is pumped in through the air inlet pipe 5. The inert gas will reduce heat loss, and the vacuum shell 1 will also reduce heat loss. During use, the growth furnace will produce metal waste gas and chemically hazardous gases. The coating not only reflects the heat radiation generated by the growth furnace but also protects the inner wall of the circulation inner shell 10. The waste gas generated by the growth furnace will be sent to external equipment through the exhaust pipe 7 after passing through the filter screen 14, filter shell 16 and activated carbon 17. Thermocouple 4 will monitor the internal temperature in real time. When the temperature is lower than the process temperature, the heating block 12 will be activated to keep it warm. After the process is completed, the collection platform 15 will be removed and the recessed platform and filter screen 14 will be cleaned.

[0025] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A heat-insulating cylinder for a single crystal growth furnace, comprising a vacuum shell (1) and a support (2) fixed to the lower end of the vacuum shell (1), characterized in that: The vacuum housing (1) is equipped with a circulating inner shell (10), and the circulating inner shell (10) and the vacuum housing (1) are cavity structures. Thermocouples (4) and air inlet pipes (5) are installed around the vacuum housing (1). A stepper motor (3) is installed at the upper end of the vacuum housing (1).

2. The heat-insulating cylinder for a single crystal growth furnace according to claim 1, characterized in that: The thermocouple (4) penetrates the upper end of the vacuum shell (1) and the circulation inner shell (10), and the end of the thermocouple (4) is suspended in the cavity of the circulation inner shell (10). The driving end of the stepper motor (3) is fitted with a customized coupling (9), and the driving end of the stepper motor (3) is fitted with a paint table (11) through the coupling (9).

3. The heat-insulating cylinder for a single crystal growth furnace according to claim 2, characterized in that: The customized coupling (9) has sealed bearings installed at both ends of its inner side, and a paint tube (6) is installed on one side of the coupling. The paint platform (11) has a U-shaped cavity structure, and a fan-shaped platform (8) is sleeved on the top of the paint platform (11). The bearing of the fan-shaped platform (8) abuts against the inner wall of the coupling (9).

4. The heat-insulating cylinder for a single crystal growth furnace according to claim 3, characterized in that: The coating table (11) has two sliding grooves on one side. A flexible, high-temperature resistant scraper (18) is hinged in the sliding groove. One end of the scraper (18) abuts against two springs (19), and the other end of the springs (19) abuts against one side of the sliding groove. Multiple equidistant one-way valves are installed at both ends of the inner cavity of the coating table (11), and multiple equidistant heating blocks (12) are installed on the inner side of the coating table (11).

5. The heat-insulating cylinder for a single crystal growth furnace according to claim 1, characterized in that: A mounting platform (13) is fixed to one side of the lower end of the circulating inner shell (10). A collection platform (15) is installed at the lower end of the mounting platform (13). The collection platform (15) is concave, and an arc-shaped filter screen (14) is installed at one end of the collection platform (15). The other end of the filter screen (14) abuts against the lower end of the mounting platform (13), and a filter shell (16) is installed inside the filter screen (14).

6. The heat-insulating cylinder for a single crystal growth furnace according to claim 5, characterized in that: Two activated carbons (17) are installed inside the filter shell (16), and an exhaust pipe (7) is installed at the bottom of the collection platform (15). The top of the exhaust pipe (7) is located inside the filter shell (16).

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