Miniature vacuum pump

Abstract

The utility model provides a miniature vacuum pump, which comprises a pump body, which is provided with a fluid outlet and at least comprises a cover, the cover is an integrated seamless component and is provided with an exposed fluid inlet, and the inner side end face of the cover is provided with a communication port communicated with the fluid inlet through fluid; the pumping component is installed in the pump body, a pump cavity is formed by the pumping component or / and the pump body, the fluid inlet is in fluid communication with the pump cavity and forms an inflow path, the pump cavity is in fluid communication with the fluid outlet and forms an outflow path, and the communication port is located in the inflow path; one-way valves for limiting one-way movement of fluid are arranged on the inflow path, the pump cavity or / and the outflow path; the driving component is in transmission connection with the pumping component so as to drive the pumping component to move; the check valve is arranged in the pump body and is adjacent to the communicating port, and when the miniature vacuum pump does not work, the check valve closes the communicating port; when the miniature vacuum pump works, the check valve opens the communication port.

Description

Technical Field

[0001] This utility model relates to the field of microfluidic equipment technology, and in particular to a micro vacuum pump. Background Technology

[0002] A miniature vacuum pump is a miniaturized vacuum generating device that can create, maintain, or improve a vacuum environment in a confined space. These pumps are characterized by their small size and compact structure, making them suitable for low-flow, low-vacuum applications, and commonly found in medical, scientific research, and industrial fields.

[0003] Currently, miniature vacuum pumps on the market include at least two types: diaphragm pumps and piston pumps. Diaphragm pumps use the reciprocating motion of an elastic diaphragm to change the pump chamber volume. They are oil-free and have high cleanliness, and are often used in medical equipment. Piston pumps use piston motion to pump air, with higher pumping speeds but slightly higher noise levels, and are suitable for industrial automation.

[0004] However, all types of miniature vacuum pumps on the market currently suffer from the technical problem of a slow decrease in vacuum level in a sealed space after they stop working. Utility Model Content

[0005] In order to solve the above-mentioned technical problems, the purpose of this utility model is to provide a novel miniature vacuum pump.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a miniature vacuum pump, comprising: a pump body, having a fluid outlet and at least a cover, the cover being a seamless integral component and forming an exposed fluid inlet, the inner end face of the cover forming a communication port for fluid communication with the fluid inlet; a pumping component, installed inside the pump body, the pumping component and / or the pump body forming a pump chamber, the fluid inlet fluidly communicating with the pump chamber and forming an inflow path, the pump chamber fluidly communicating with the fluid outlet and forming an outflow path, the communication port being located on the inflow path; a one-way valve restricting unidirectional fluid movement is disposed on the inflow path, the pump chamber and / or the outflow path; a driving component, drivingly connected to the pumping component to drive the pumping component to move; and a check valve, disposed inside the pump body and adjacent to the communication port, wherein when the miniature vacuum pump is not working, the check valve closes the communication port; when the miniature vacuum pump is working, the check valve opens the communication port.

[0007] In the above technical solution, preferably, the check valve is an umbrella valve, which includes an umbrella handle fixedly installed on the cover and a deformable umbrella surface. When the micro vacuum pump is not working, the umbrella surface remains closed to the communication port.

[0008] In the above technical solution, preferably, the check valve includes a valve body adapted to the communication port and a spring fixedly disposed in the pump body, the spring abutting against the valve body and applying a force toward the communication port to the valve body.

[0009] In the above technical solution, preferably, the check valve is composed of a multi-lobed elastic structure that is fixedly installed on the cover and can be closed. When the micro vacuum pump is not working, the multi-lobed elastic structure is closed and maintains the state of closing the communication port.

[0010] In the above technical solution, preferably, a protrusion is formed on the inner end of the cover, the communication port is opened on the side wall of the protrusion, the check valve is an annular diaphragm body, the diaphragm body is installed on the outside of the protrusion and includes a top fixed on the cover and a bottom inclined towards the protrusion relative to the top; when the micro vacuum pump is not working, the bottom contacts the outer wall of the protrusion and maintains the state of closing the communication port.

[0011] In the above technical solution, preferably, the miniature vacuum pump is a diaphragm vacuum pump, which further includes a valve seat, a diaphragm seat, and a motor seat arranged sequentially along the axial direction. The check valve is clamped between the cover and the valve seat, and the pumping component is mounted on the diaphragm seat. More preferably, the cover has a protrusion located within the communication port, and the check valve includes a mounting portion for clamping the cover and the valve seat, a deformable portion located inside the mounting portion, and a vent hole opened on the deformable portion and adapted to the protrusion. The vent hole is located on the inflow path. When the miniature vacuum pump is not working, the vent hole contacts the protrusion, and the check valve remains closed at the communication port.

[0012] In the preferred embodiment described above, and even more preferably, the valve seat is provided with a convex ring and a through hole located inside the convex ring, the through hole being located on the inflow path, and the check valve is installed on the convex ring and forms a buffer cavity with the convex ring.

[0013] In the preferred embodiment described above, it is further preferred that the inner surface of the cover has a convex lip facing the valve seat, the convex lip being located outside the convex ring and pressing against the check valve.

[0014] Research has revealed that when a miniature vacuum pump stops working, external fluid, under the influence of pressure difference, enters the pump body through gaps in the pump body and flows back to the fluid inlet. This causes a technical problem: the vacuum level in the sealed space connected to the fluid inlet slowly decreases after the vacuum pump stops operating. To address this, the miniature vacuum pump provided by this invention includes a cover with a connecting port and a check valve that can close the connecting port. The cover is a seamless, one-piece component; when its connecting port is closed, fluid cannot seep into the interior of the cover from other locations and flow back to the fluid outlet, thus solving the aforementioned technical problem. Attached Figure Description

[0015] Figure 1 The miniature vacuum pump provided in the first embodiment of this utility model;

[0016] Figure 2 Examples of possible check valves provided by this utility model;

[0017] Figure 3 This is a miniature vacuum pump according to the second embodiment of the present invention;

[0018] Figure 4 for Figure 3 A cross-sectional view of the provided miniature vacuum pump;

[0019] Figure 5 for Figure 4 A magnified view of a portion of the image;

[0020] Figure 6 for Figure 3 The three-dimensional cover of the provided miniature vacuum pump Figure 1 ;

[0021] Figure 7 for Figure 6 The provided lid is three-dimensional Figure 2 ;

[0022] Figure 8 for Figure 3 The three-dimensional valve seat of the provided miniature vacuum pump Figure 1 ;

[0023] Figure 9 for Figure 8 The provided valve seat is three-dimensional Figure 2 ;

[0024] Figure 10 for Figure 3 A three-dimensional view of the integrated diaphragm component of the provided miniature vacuum pump;

[0025] Figure 11 for Figure 3 A perspective view of the pumping components of the provided miniature vacuum pump;

[0026] Figure 12 for Figure 3 A three-dimensional view of the diaphragm seat of the provided miniature vacuum pump.

[0027] The image is labeled as follows:

[0028] 100. Miniature vacuum pump; 200. Miniature vacuum pump;

[0029] 1. Pump body; 11. Cover; 111. Fluid inlet; 112. Connecting port; 113. Protrusion; 114. Air inlet; 115. Protrusion; 116. Air outlet groove;

[0030] 12. Fluid outlet;

[0031] 13. Valve seat; 131. First through hole; 132. Exhaust hole; 133. Mounting groove; 134. Raised ring; 135. Buffer chamber; 136. Bowl-shaped groove; 137. Inlet groove;

[0032] 14. Diaphragm seat; 141. Mounting hole; 142. Third through hole; 143. Fourth through hole;

[0033] 15. Motor mount; 151. Transmission chamber;

[0034] 2. Pumping components; 21. Pump chamber; 22. Bell-shaped bladder; 23. Skirt; 24. Second through hole; 25. Inlet check valve;

[0035] 3. Drive components;

[0036] 4. Check valve; 41. Umbrella handle; 42. Umbrella surface; 43. Valve body; 44. Spring; 45. Mounting part; 46. Deformable part; 47. Vent hole;

[0037] 5. Integrated diaphragm assembly; 51. Outlet check valve;

[0038] 6. Transmission components. Detailed Implementation

[0039] To explain in detail the technical content, structural features, achieved objectives and effects of this application, the technical solutions in the embodiments of this application will be described below with reference to the accompanying drawings.

[0040] In this application, spatial relative terms such as “below,” “under,” “below,” “down,” “above,” “above,” “higher,” and “side” (e.g., as in a “sidewall”) are used to describe the relationship between one element and another (other) element as shown in the accompanying drawings. Spatial relative terms are intended to include different orientations of the device in use, operation, and / or manufacture other than those depicted in the drawings. For example, if the device in the drawings is flipped, an element described as “below” or “under” another element or feature would then be positioned “above” said other element or feature. Thus, the exemplary term “below” can include both above and below orientations. Furthermore, the device may be otherwise positioned (e.g., rotated 90 degrees or in other orientations), thus interpreting the spatial relative descriptive terms used herein accordingly.

[0041] In this application, the term "fluid connectivity" used to describe the relative relationship between two fluid spaces (such as cavities, channels, or holes) means that there is a fluid path between the two fluid spaces that allows fluid to flow from one fluid space to the other. The two fluid spaces can be directly connected or connected through several fluid spaces.

[0042] In this application, unless otherwise specified, the term "axial" refers to the direction of the axis of the micro vacuum pump.

[0043] This invention provides a miniature vacuum pump, aiming to solve the technical problem in the prior art where the vacuum level in the connected sealed space slowly decreases after the vacuum pump stops working. To facilitate the explanation of the technical solution provided by this invention, the general structure and related technical issues of the miniature vacuum pump 100 are first introduced below.

[0044] Specifically, see Figure 1 The diagram illustrates a miniature vacuum pump 100 according to a first embodiment of this invention. The miniature vacuum pump 100 includes a pump body 1, a pumping component 2 disposed inside the pump body 1 for pumping fluid, and a driving component 3 for driving the pumping component 2. It should be noted that the check valve and related technical solutions provided by this invention can undoubtedly be applied to diaphragm-type, electromagnetic-type, piston-type, and other miniature vacuum pumps (the main difference between these types of miniature pumps lies in the types of pumping and driving components). Therefore, the specific type of miniature vacuum pump does not limit the scope of protection of this invention.

[0045] The pump body 1 includes at least a cover 11, on which a fluid inlet 111 is formed, allowing fluid to enter the pump body 1 and is exposed to the outside. A pumping component 2 is arranged inside the pump body 1, and a pump chamber 21 is formed inside the pumping component 2 or between the pumping component 2 and the pump body 1. A fluid outlet 12 is formed on the pump body 1, allowing fluid to leave the pump body 1. The fluid inlet 111 is in fluid communication with the pump chamber 21, forming an inflow path (not shown in the figure), and the pump chamber 21 is in fluid communication with the fluid outlet 12, forming an outflow path (not shown in the figure). Typically, the inflow path, outflow path, and / or the pump chamber are equipped with several one-way valves to restrict unidirectional fluid movement. Figure 1 (Not shown), this one-way valve is different from the check valve 4 provided in this utility model (see below).

[0046] The fluid inlet 111 of the miniature vacuum pump 100 is typically sealed to the object being evacuated (such as an airbag) with a closed space. When the miniature vacuum pump 100 is operating, the drive component 3 moves the pumping component 2, causing periodic changes in the fluid pressure within the pump chamber 21. Under these periodic pressure changes, the fluid in the closed space enters the pump chamber 21 via the inflow path, then reaches the fluid outlet 12 via the outflow path and is discharged to the outside.

[0047] After the miniature vacuum pump 100 stops working, the aforementioned sealed space should ideally maintain a certain vacuum level. However, in reality, the pump body 1 of the miniature vacuum pump 100 does not have good sealing performance. There are gaps between the various components of the pump body 1 (such as the cover 11 and valve seat 13 below), at the connection between the pump body 1 and the drive component 3, and at the bolt holes on the pump body 1. Under the influence of the pressure difference between the external environment and the fluid in the sealed space, external fluid will enter the interior of the pump body 1 through the aforementioned gaps and finally enter the sealed space through the fluid inlet 111 of the pump body 1. In addition, there is a certain pressure difference between the fluid inlet 111, the pump chamber 21, and the fluid outlet 12. Under the influence of this pressure difference, the one-way valve of the miniature vacuum pump 100 often fails to close tightly, and fluid flows back from the pump chamber 21 or the fluid outlet 12 to the fluid inlet 111. Therefore, this type of miniature vacuum pump has the technical problem of a slow decrease in the vacuum level of the connected sealed space after it stops working.

[0048] To this end, the present invention also provides a check valve 4 disposed on the pump body 1. A connecting port 112 for fluid communication with the fluid inlet 111 is provided on the inner end face of the cover 11, and the connecting port 112 is located on the inflow path of the pump body 1. The check valve 4 is disposed adjacent to the connecting port 112 and is configured to close the connecting port 112 when the micro vacuum pump 100 is not operating, thereby cutting off the fluid communication between the fluid inlet 111 and the interior of the pump body 1 (including the pump chamber 21); the check valve 4 is also configured to open the connecting port 112 when the micro vacuum pump 100 is operating, thereby allowing the fluid inlet 111 to communicate with the interior of the pump body 1.

[0049] The cover 11 is a seamless, one-piece component, meaning that the cover 11 is an integral component manufactured through one or more processes such as turning, die casting, melting casting, and thermoforming, which is indivisible and has no fitting gaps. Understandably, except for the communication port 112, external fluid cannot seep into the interior of the cover 11 and flow to the fluid outlet 12 through other locations of the cover 11.

[0050] When the micro vacuum pump 100 provided by this utility model stops working, the check valve 4 can close the communication port 112 of the cover 11. Since the cover 11 is a seamless integral component, the fluid from the outside and / or the inside of the pump body 1 cannot flow back to the fluid inlet 111, thereby solving the technical problem that the vacuum level of the connected sealed space will slowly decrease after the traditional micro vacuum pump stops working.

[0051] Figure 2 Examples of several possible check valves 4 provided by this invention are shown. For ease of explanation, the appendix will be provided below. Figure 2 Repeated components are followed by English letters to distinguish them from other examples.

[0052] like Figure 2 As shown in (a), the check valve 4a provided is an umbrella valve, which includes an umbrella handle 41 fixedly mounted on the cover 11 and a deformable umbrella surface 42. When the miniature vacuum pump 100 is not working, the umbrella surface 42 of the check valve 4a maintains the closed connection port 112a under the action of its own elasticity and / or the pressure difference on both sides; when the miniature vacuum pump 100 is working, a fluid pressure difference is generated between the fluid inlet 111 and the pump chamber 21. Under the action of this pressure difference, the fluid overcomes the elasticity of the umbrella surface 42 of the check valve 4a and flows into the pump chamber 21.

[0053] like Figure 2As shown in (b), the check valve 4b includes a valve body 43 adapted to the connection port 112b and a spring 44 fixedly installed inside the pump body 1. The spring 44 abuts against the valve body 43 and applies a force toward the connection port 112b to the valve body 43. When the miniature vacuum pump 100 is not working, the valve body 43 of the check valve 4b remains closed to the connection port 112b under the action of the spring 44. When the miniature vacuum pump 100 is working, a fluid pressure difference is generated between the fluid inlet 111 and the pump chamber 21. Under the action of this pressure difference, the fluid overcomes the elastic force of the spring 44 and flows toward the pump chamber 21.

[0054] like Figure 2 As shown in (c), the check valve 4c provided is composed of a multi-lobed elastic structure that is fixedly installed on the inner end face of the cover 11 and can be closed. When the micro vacuum pump 100 is not working, the check valve 4c closes under its own elastic force and / or the pressure difference on both sides (the closed state is shown in the figure) and maintains the closed connection port 112c. When the micro vacuum pump 100 is working, a fluid pressure difference is generated between the fluid inlet 111 and the pump chamber 21. Under the action of this pressure difference, the fluid overcomes the elastic force of the check valve 4c and flows into the pump chamber 21.

[0055] like Figure 2 As shown in (d), the inner end of the cover 11 has a protrusion 113, and the communication port 112d is opened on the side wall of the protrusion 113. Figure 2 (d) The provided check valve 4d is an annular diaphragm with a bottom opening. The diaphragm includes a top (not shown in the figure) fixedly mounted on the inner end face of the cover 11 and a bottom (not shown in the figure) near the bottom opening and inclined relative to the top towards the protrusion 113. When the micro vacuum pump 100 is not working, the check valve 4d, under the action of its own elastic force and / or the pressure difference on both sides, keeps the bottom pressed against the outer wall of the protrusion 113 and keeps the communication port 112d closed. When the micro vacuum pump 100 is working, a pressure difference is formed between the fluid inlet 111 and the pump chamber 21. Under the action of this pressure difference, the fluid overcomes the elastic force of the check valve 4d and flows into the pump chamber 21.

[0056] See Figure 3-4 The illustration shows a miniature vacuum pump 200, which is a specific application of the miniature vacuum pump 100 in the first embodiment of this invention in a diaphragm miniature pump. To avoid redundancy, structures with the same function will not be described again, and the labeling of the previous embodiment will continue to be used.

[0057] The pump body 1 of the miniature vacuum pump 200 includes a cover 11, a valve seat 13, a diaphragm seat 14 for mounting the pumping component 2, and a motor seat 15 for providing a connection base for the drive component 3, arranged sequentially along the axial direction. The cover 11, valve seat 13, diaphragm seat 14 and motor seat 15 are firmly fixed together by a number of fastening bolts (not shown in the figure).

[0058] Combination Figure 6-7 The cover 11 is provided with an air inlet 114, a fluid inlet 111 is formed on the outer end of the air inlet 114, and a fluid outlet 12 is directly opened on the cover 11. The cover 11 also has a communication port 112 located on the inner end face, a protrusion 115 fixedly disposed in the communication port 112, and a pair of air outlet grooves 116 that are fluidly connected to the fluid outlet 12.

[0059] See Figure 5 and Figure 10 In this embodiment, the check valve 4 is integrated onto a diaphragm assembly 5, which is clamped between the cover 11 and the valve seat 13. The check valve 4 has a mounting portion 45 for clamping the cover 11 and the valve seat 13, a retractable deformable portion 46, and a vent 47 opened on the deformable portion 46. The vent 47 is located in the inflow path of the miniature vacuum pump 200 and is configured to fit the shape of the protrusion 115 on the cover 11. When the miniature vacuum pump 200 stops working, the vent 47 abuts against the protrusion 115 (e.g., when the miniature vacuum pump 200 stops working). Figure 5 Thus, the check valve 4 closes the connection port 112; when the micro vacuum pump 200 is working, a pressure difference is formed between the fluid inlet 111 and the pump chamber 21. Under the action of this pressure difference, the deformable part 46 of the check valve 4 deforms towards the valve seat 13, and the vent 47 moves away from the protrusion 115 on the cover 11. The fluid flows to the pump chamber 21 through the vent 47.

[0060] The diaphragm assembly 5 also includes a pair of outlet check valves 51, each of which is located on the outflow path of the miniature vacuum pump 200 and is axially aligned with a pair of outlet slots 116 of the cover 11.

[0061] Combination Figure 8-9 The valve seat 13 has a first through hole 131 located in the inflow path and a pair of vent holes 132 located in the outflow path. The pair of vent holes 132 are respectively aligned axially with a pair of outlet valves 51 of the diaphragm integral piece 5.

[0062] Furthermore, a mounting groove 133 for the diaphragm assembly 5 is formed on the side end face of the valve seat 13 facing the cover 11, and a protruding ring 134 is located within the mounting groove 133 and protrudes toward the cover 11. The first through hole 131 is located inside the protruding ring 134. The mounting portion 45 of the check valve 4 is clamped between the protruding ring 134 and the inner wall of the communication port 112. Furthermore, a protruding lip 117 is also formed on the inner end face of the cover 11, located outside the communication port 112. The protruding lip 117 extends toward the diaphragm assembly 5 to improve the airtightness of the check valve 4.

[0063] With the above configuration, a buffer chamber 135 is formed between the check valve 4 and the convex ring 134, located inside the convex ring 134. When the miniature vacuum pump 200 is working, the air wave sound wave generated by the periodic tapping of the inlet check valve 25 (see below) propagates along the inflow path towards the fluid inlet 111. The air wave sound wave reaches the buffer chamber 135 through the first through hole 131, and its amplitude is greatly reduced after pressure reduction and multiple emission within the buffer chamber 135. Subsequently, the air wave sound wave enters the connecting port 112 through the vent hole 47 on the check valve 4, where it is pressure reduced again. Thus, the amplitude of the air wave sound wave reaching the fluid inlet 111 can be greatly reduced, thereby achieving the technical effect of noise reduction.

[0064] Continue reading Figure 9 and 11 The pumping component 2 of the miniature vacuum pump 200 is a diaphragm component, which is clamped between the diaphragm seat 15 and the valve seat 13. The pumping component 2 has a plurality of bell-shaped bladders 22, a skirt 23 connecting the bell-shaped bladders 22 into one piece, a second through hole 24 formed on the skirt 23, and a plurality of inlet check valves 25 disposed on the skirt 23. The second through hole 24 is axially aligned with the first through hole 131. The valve seat 13 has a plurality of cup-shaped grooves 136 adapted to each bell-shaped bladder 22 and a plurality of air inlet grooves 137 respectively communicating with each cup-shaped groove 136 on one end face facing the pumping component 2. One end of each air inlet groove 137 is axially aligned with each inlet check valve 25. The exhaust port 132 of the valve seat 13 protrudes from the cup-shaped groove 136. Understandably, the exhaust port 132, the air outlet 116, and the fluid outlet 12 are connected in sequence and form the flow path of the miniature vacuum pump 200. The outlet check valve 51 is located between the exhaust port 132 and the air outlet 116 to limit the unidirectional movement of the fluid.

[0065] Combination Figure 12 The diaphragm seat 14 has mounting holes 141 for placing each bell-shaped bladder 22, third through holes 142 for fluid communication transmission chamber 151 (see below), and several fourth through holes 143 for fluid communication transmission chamber 151. The mounting holes 141, third through holes 142, and each of the fourth through holes 143 axially penetrate the diaphragm seat 14. The third through holes 142 and fourth through holes 143 are axially aligned with the second through hole 24 and the inlet check valve 25, respectively. Understandably, the fluid inlet 111, connecting port 112, vent hole 47, first through hole 131, second through hole 24, third through hole 142, transmission chamber 151, fourth through hole 143, and air inlet groove 137 are sequentially connected and form the inflow path of the miniature vacuum pump 200. The inlet check valve 25 is located between the fourth through hole 143 and the air inlet groove 137 to restrict unidirectional fluid movement.

[0066] Continue reading Figure 3-4The motor housing 15 defines a transmission cavity 151 with an upper opening, and the diaphragm housing 14 closes the upper opening of the transmission cavity 151. The miniature vacuum pump 200 also includes a transmission component 6 disposed within the transmission cavity 151, which is used to realize the transmission connection between the drive component 3 and the pumping component 2.

[0067] The drive component 3 of the miniature vacuum pump 200 is an electric motor, which has a motor housing (not shown in the figure) and an output shaft (not shown in the figure) protruding outward relative to the motor housing. The bottom of the motor base 15 has a shaft hole (not shown in the figure) for the output shaft to pass through and several bolt holes (not shown in the figure) for fastening bolts to pass through. The fastening bolts pass through the bolt holes and are threaded onto the motor housing to fix the drive component 3 to the motor base 15. The output shaft of the drive component 3 passes through the shaft hole and connects to the transmission component 6.

[0068] The above embodiments are only for illustrating the technical concept and features of this application, and are intended to enable those skilled in the art to understand the content of this application and implement it accordingly. They should not be construed as limiting the scope of protection of this application. All equivalent changes or modifications made in accordance with the spirit of this application should be included within the scope of protection of this application.

Claims

1. A miniature vacuum pump, characterized in that, include: The pump body is provided with a fluid outlet and includes at least a cover, the cover being a seamless integral component and forming a fluid inlet exposed to the outside, and the inner end face of the cover forming a communication port for fluid communication with the fluid inlet; A pumping component is installed inside the pump body. The pumping component and / or the pump body form a pump chamber. The fluid inlet is fluidly connected to the pump chamber and forms an inflow path. The pump chamber is fluidly connected to the fluid outlet and forms an outflow path. The connecting port is located on the inflow path. A one-way valve that restricts the unidirectional movement of the fluid is configured on the inflow path, the pump chamber and / or the outflow path. A drive component is connected to the pumping component via a transmission connection to drive the pumping component to move; as well as A check valve is disposed inside the pump body and adjacent to the communication port. When the micro vacuum pump is not working, the check valve closes the communication port; when the micro vacuum pump is working, the check valve opens the communication port.

2. The miniature vacuum pump according to claim 1, characterized in that, The check valve is an umbrella valve, which includes an umbrella handle fixedly installed on the cover and a deformable umbrella surface. When the micro vacuum pump is not working, the umbrella surface remains closed to the communication port.

3. The miniature vacuum pump according to claim 1, characterized in that, The check valve includes a valve body adapted to the communication port and a spring fixedly disposed in the pump body. The spring abuts against the valve body and applies a force toward the communication port to the valve body.

4. The miniature vacuum pump according to claim 1, characterized in that, The check valve is composed of a multi-lobed elastic structure that is fixedly installed on the cover and can be closed. When the micro vacuum pump is not working, the multi-lobed elastic structure is closed and maintains the state of closing the communication port.

5. The miniature vacuum pump according to claim 1, characterized in that, A protrusion is formed on the inner end of the cover, and the communication port is opened on the side wall of the protrusion. The check valve is an annular diaphragm body, which is installed on the outside of the protrusion and includes a top fixed on the cover and a bottom inclined towards the protrusion relative to the top. When the micro vacuum pump is not working, the bottom contacts the outer wall of the protrusion and maintains the state of closing the communication port.

6. The miniature vacuum pump according to claim 1, characterized in that, The miniature vacuum pump is a diaphragm vacuum pump. The miniature vacuum pump also includes a valve seat, a diaphragm seat and a motor seat arranged sequentially along the axial direction. The check valve is clamped between the cover and the valve seat. The pumping component is installed on the diaphragm seat.

7. The miniature vacuum pump according to claim 6, characterized in that, The cover has a protrusion located within the communication port. The check valve includes a mounting portion for clamping the cover and the valve seat, a deformable portion located inside the mounting portion, and a vent hole opened on the deformable portion and adapted to the protrusion. The vent hole is located on the inflow path. When the micro vacuum pump is not working, the vent hole contacts the protrusion and the check valve remains closed to the communication port.

8. The miniature vacuum pump according to claim 7, characterized in that, The valve seat is provided with a convex ring and a through hole located inside the convex ring. The through hole is located on the inflow path. The check valve is installed on the convex ring and forms a buffer cavity with the convex ring.

9. The miniature vacuum pump according to claim 7, characterized in that, The inner surface of the cover has a convex lip facing the valve seat, the convex lip being located outside the convex ring and pressing against the check valve.

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